JP2013181856A - Vibration piece, vibration device, physical quantity detection device, and electronic apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration piece with improved vibration characteristics that prevents influence generated due to a vibration leakage phenomenon on vibration of a drive vibration arm or a detection vibration arm.SOLUTION: A vibration piece comprises: a vibration body; at least two beams extending from the vibration body; coupling beams to which the beams are individually coupled; and supporting portions that are coupled to the coupling beams and support the vibration body. The beams are formed so as to include first folded-back portions folded back so as to face each other along a first direction and second folded-back portions folded back so as to face each other along a second direction intersecting with the first direction among the vibration body and the supporting portions.

Description

  The present invention relates to a resonator element, a vibration device, a physical quantity detection device, and an electronic apparatus using them.

Conventionally, a so-called “WT type” gyro element is known as a resonator element for detecting angular velocity (see, for example, Patent Document 1 and Patent Document 2).
As an example, the gyro element of Patent Document 1 will be described. The gyro element of Patent Document 1 includes a vibrating body, first and second support portions that are provided on both sides of the vibrating body and support the vibrating body, It has the 1st, 2nd beam which has connected the vibrating body and the 1st support part, and the 3rd and 4th beam which has connected the vibrating body and the 2nd support part. The vibrating body includes a base, first and second detection vibrating arms extending from the base to both sides along the y-axis, and first and second extending from the base to both sides along the x-axis. A connecting arm, first and second drive vibrating arms extending along the y-axis from the tip of the first connecting arm to both sides, and extending along the y-axis from the tip of the second connecting arm to both sides The third and fourth drive vibrating arms are configured.

  Such a gyro element of Patent Document 1 is mounted on a mounting substrate via a conductive adhesive. Specifically, the six connection terminals (fixed portions) provided on the first and second support portions and the mounting substrate are joined with a conductive adhesive, whereby the gyro element is fixed to the mounting substrate. In addition, the gyro element and the mounting substrate are electrically connected.

JP 2006-201011 A JP 2010-256332 A

  In the gyro element as described above, the vibrating body is supported by the first and second support portions provided with the vibrating body interposed therebetween via respective beams. When the vibrating body is supported in such a both-sided state, the movement of the vibrating body in the support direction (the direction along the y-axis) is limited. In other words, stress relaxation due to the vibration body moving in the direction along the y-axis is less likely to occur. As a result, the vibration of each drive vibration arm or detection vibration arm propagates to each beam extending from the vibration body, and further propagates to the first and second support portions. There was a risk of causing the “more phenomenon”. When this vibration leakage phenomenon occurs, when the connection terminal (fixed part) is fixed to the mounting substrate, the vibration propagated by the vibration leakage phenomenon is hindered and affects the vibration of the drive vibration arm or the detection vibration arm. It will be. As a result, there has been a problem that the vibration characteristics of the gyro element are deteriorated, in particular, the temperature drift is increased.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] A resonator element according to this application example includes a vibrating body, at least two beams extending from the vibrating body, a connecting beam to which each of the beams is connected, and a connection with the connecting beam. A support portion supporting the vibrating body, and the beam is folded between the vibrating body and the support portion so as to be along a first direction; and And a second folded portion folded back along a second direction intersecting the first direction.

According to the resonator element of this application example, the vibrating body is supported by the support unit by the at least two beams and the connecting beam in which the two beams are connected. The two beams have a first folded portion folded back so as to face along the first direction and a second folded portion folded back so as to face along the second direction intersecting the first direction. Is provided.
As described above, since the two folded portions facing each other in the two intersecting directions are provided in each beam, each beam has elasticity in the respective directions, and further, the first folded portion Q1 and the second folded portion are provided. The folded portion Q2 acts in a complex manner and has elasticity in all directions. In addition, since the beam is connected to the support portion via a connecting beam in which the beams are connected, the degree of freedom of deformation of the beam increases and the stress relaxation action of the beam is improved. Therefore, since the propagation of vibrations such as vibration from the vibrating body is absorbed by each beam and the connecting portion, the deterioration of vibration characteristics caused by the vibration propagated by the vibration leakage phenomenon, particularly temperature drift, is suppressed. It becomes possible.

  Application Example 2 In the resonator element according to the application example described above, the vibrating body includes a base, a first detection vibration arm and a second detection vibration arm that extend from the base to both sides along a third direction. A first connecting arm and a second connecting arm extending from the base to both sides along a fourth direction orthogonal to the third direction, and extending from the first connecting arm to both sides along the third direction. A first drive vibration arm and a second drive vibration arm that are extended; and a third drive vibration arm and a fourth drive vibration arm that extend from the second connection arm to both sides along the third direction. The support portion includes a first support portion and a second support portion that are disposed to face each other along the third direction with the vibrator interposed therebetween, and extend in the fourth direction, A first beam extending from a base and passing between the first detection vibrating arm and the first drive vibrating arm; A second beam extending from the base and passing between the first detection vibration arm and the third drive vibration arm, and extending from the base and between the second detection vibration arm and the second drive vibration arm. And a fourth beam extending from the base and passing between the second detection vibrating arm and the fourth drive vibrating arm, and the connecting beam includes the first beam and the fourth beam. A first connecting beam connected to the second beam, and a second connecting beam connected to the third beam and the fourth beam, and the first connecting beam and the second connecting beam. The vibrator is connected to each of the first support portion and the second support portion that are arranged to face each other.

According to the resonator element described in this application example, the first folded portion folded back so as to face each of the first beam to the fourth beam along the first direction and the first beam intersecting the first direction. A second folded portion that is folded back so as to face each other in two directions is provided. A first connection beam in which the first beam and the second beam are connected; and a second connection beam in which the third beam and the fourth beam are connected, the first connection beam and the second connection beam. The vibrating body is connected to each of the first support portion and the second support portion arranged to face each other by the beam.
Accordingly, it is possible to relieve stress generated from the vibrating body to the beam, and it is possible to reduce the propagation of vibration to the fixed portion due to the vibration leakage phenomenon propagating to the beam. Therefore, it is possible to detect the angular velocity with reduced temperature drift.

  Application Example 3 In the resonator element according to the application example described above, the first beam and the second beam are located at a position facing the first detection vibrating arm along the third direction, and the first connection. The third beam and the fourth beam are connected to the second connecting beam at a position facing the second detection vibrating arm along the third direction. To do.

  According to this application example, the vibration piece can be supported by the support portion with a symmetrical structure in a balanced manner, so that the vibration characteristics can be stabilized.

  Application Example 4 The vibration device according to this application example is characterized in that the resonator element according to any one of the application examples is mounted on a substrate.

  According to this application example, since the above-described vibrating piece is used, it is possible to provide a vibrating device with stable characteristics, particularly a highly reliable vibrating device with reduced temperature drift.

  Application Example 5 The physical quantity detection device according to this application example is predetermined based on the vibration piece according to any of the application examples described above, a drive circuit that drives the vibration piece, and a detection signal from the vibration piece. And a detection circuit for detecting the physical quantity.

  According to this application example, since the above-described resonator element is used, it is possible to provide a physical quantity detection device with stable characteristics, in particular, a highly reliable physical quantity detection device with reduced temperature drift.

  Application Example 6 An electronic apparatus according to this application example includes the resonator element according to any one of the application examples.

  According to this application example, since the above-described vibration piece is used, it is possible to provide an electronic device with stable characteristics, in particular, an electronic device with high reliability by reducing temperature drift or the like.

The embodiment of the vibration device which concerns on this invention is shown, (a) is a top view, (b) is a front sectional view. The top view of the gyro element as a vibration piece with which a vibration device is provided. The top view of the gyro element as a vibration piece with which a vibration device is provided. The partial top view explaining the structure of the beam of a gyro element. The top view explaining the drive of a gyro element. It is a figure explaining the effect of the gyro element with which a vibration device is provided, (a) is a schematic plan view which shows the deformation state of a gyro element, (b) is a graph which shows the incidence rate of vibration more. The top view which shows the modification of the beam of the gyro element with which a vibration device is provided. (A), (b) is a partial top view which shows the modification of the folding | turning part of a beam. Schematic which shows the structure of a physical quantity detection apparatus.

Hereinafter, a resonator element and a vibration device of the present invention will be described in detail based on embodiments shown in the accompanying drawings.
<Embodiment>
First, an embodiment of a vibration device to which the resonator element according to the invention is applied will be described.

1A and 1B are diagrams showing an embodiment of a vibration device according to the present invention, in which FIG. 1A is a plan view and FIG. 1B is a front sectional view. 2 and 3 are plan views of the gyro element included in the vibration device shown in FIG. FIG. 4 is a partial plan view illustrating the configuration of the beam of the gyro element. FIG. 5 is a plan view for explaining driving of the gyro element.
In the following, as shown in FIG. 1, three axes orthogonal to each other are defined as an x-axis, a y-axis, and a z-axis, and the z-axis coincides with the thickness direction of the vibration device. A direction parallel to the x-axis is referred to as “x-axis direction (second direction, fourth direction)”, and a direction parallel to the y-axis is referred to as “y-axis direction (first direction, third direction)”. A direction parallel to the z-axis is referred to as a “z-axis direction”.

  A vibrating device 1 shown in FIG. 1 includes a gyro element (vibrating element) 2 as a vibrating piece and a package 9 that houses the gyro element 2. Hereinafter, the gyro element 2 and the package 9 will be sequentially described in detail.

(Gyro element)
FIG. 2 is a top view of the gyro element as viewed from above (the lid 92 side), and FIG. 3 is a bottom view (transmission diagram) of the gyro element as viewed from above. In FIGS. 2 and 3, the electrodes and the terminals are hatched for convenience of explanation. 2 and 3, the same hatched electrodes and terminals are electrically connected.

The gyro element 2 is an “out-of-plane detection type” sensor that detects an angular velocity around the z-axis, and is provided on the vibrating piece 3 and the surface of the vibrating piece 3 as shown in FIGS. 2 and 3. It consists of a plurality of electrodes, wiring and terminals.
The resonator element 3 can be made of a piezoelectric material such as quartz, lithium tantalate, or lithium niobate. Among these, it is preferable that the vibratory piece 3 is made of quartz. Thereby, the resonator element 3 that can exhibit excellent vibration characteristics (frequency characteristics) is obtained.
The resonator element 3 includes a so-called double T-shaped vibrating body 4 and a first support portion 51 and a second support portion 52 as support portions that support the vibrating body 4. The vibrating body 4 includes a first beam 61 as a beam, a second beam 62, a first connection beam 65 as a connection beam to which the first beam 61 and the second beam 62 are connected, and a third beam as a beam. The first support portion 51 and the second support portion 52 are connected to each other by 63 and the fourth beam 64 and the second connection beam 66 as a connection beam in which the third beam 63 and the fourth beam 64 are connected.

  The vibrating body 4 has an extension in the xy plane and has a thickness in the z-axis direction. Such a vibrating body 4 includes a base 41 located at the center, a first detection vibrating arm 421 and a second detection vibrating arm 422 extending from the base 41 to both sides along the y-axis direction, and an x from the base 41. A first connecting arm 431 and a second connecting arm 432 extending on both sides along the axial direction, and a first drive vibrating arm extending on both sides along the y-axis direction from the tip of the first connecting arm 431 441, a second drive vibration arm 442, and a third drive vibration arm 443 and a fourth drive vibration arm 444 extending from the tip of the second connection arm 432 to both sides along the y-axis direction. . The distal ends of the first and second detection vibrating arms 421 and 422 and the first, second, third, and fourth driving vibrating arms 441, 442, 443, and 444 are substantially larger in width than the base end side, respectively. A square weight (hammer head) is provided. By providing such a weight part, the detection sensitivity of the angular velocity of the gyro element 2 is improved. Hereinafter, this weight part is also referred to as a “tip part”.

The first and second drive vibrating arms 441 and 442 may extend from the middle of the extending direction of the first connecting arm 431. Similarly, the third and fourth drive vibrating arms 443 and 444 You may extend from the middle of the extension direction of the 2 connection arms 432.
Further, the first and second support portions 51 and 52 respectively extend along the x-axis direction, and the vibrating body 4 is located between the first and second support portions 51 and 52. . In other words, the first and second support portions 51 and 52 are disposed so as to face each other along the y-axis direction with the vibrating body 4 interposed therebetween. The first support 51 is connected to the base 41 via the first beam 61 and the second beam 62, and the second support 52 is connected to the base 41 via the third beam 63 and the fourth beam 64. It is connected with.

The first beam 61 passes between the first detection vibrating arm 421 and the first drive vibrating arm 441, and is then bent toward the first detection vibrating arm 421. The second beam 62 is bent to the first detection vibrating arm 421. After passing between 421 and the third drive vibrating arm 443, it is bent toward the first detection vibrating arm 421. Then, the bent first beam 61 and second beam 62 are connected by the first connecting beam 65 between the first detection vibrating arm 421 and the first support portion 51, and the first connecting beam 65 is the first beam. The support portion 51 is connected.
Similarly, the third beam 63 passes between the second detection vibrating arm 422 and the second drive vibrating arm 442 and is then bent toward the second detection vibrating arm 422. The fourth beam 64 is After passing between the detection vibration arm 422 and the fourth drive vibration arm 444, the detection vibration arm 422 is bent toward the second detection vibration arm 422.
Then, the bent third beam 63 and the fourth beam 64 are connected by the second connecting beam 66 between the second detection vibrating arm 422 and the second support portion 52, and the second connecting beam 66 is the second beam. The support portion 52 is connected. In this way, the base 41 is connected to the first support part 51 and the second support part 52.

  The beams 61, 62, 63, and 64 are folded back along the y-axis direction (first direction) and the folded-back portion along the x-axis direction (second direction). And a second folded portion Q2 of the portion facing each other. Here, the detail of a structure of each beam 61, 62, 63, 64 is demonstrated using FIG. Since the beams 61, 62, 63, and 64 have the same configuration although extending in different directions, the configuration of the beam 62 shown in FIG. 4 will be described as a representative.

The beam 62 includes a beam portion 62a extending from the base portion 41 along the y-axis direction (negative direction), a beam portion 62b bent and extended from the beam portion 62a along the x-axis direction, The first folded portion Q <b> 1 includes a beam portion 62 c that is bent and extended from the portion 62 b along the y-axis direction (positive direction). In other words, the first folded portion Q1 has a configuration in which the beam portion 62a and the beam portion 62c of the beam 62 are folded across the beam portion 62b and face each other along the y axis.
Furthermore, the beam 62 is bent along the x-axis direction (negative direction) from the beam portion 62c and extended along the y-axis direction (negative direction) from the beam portion 62d. And a second folded portion Q2 configured by a beam portion 62e extended from the beam portion 62e and bent along the x-axis direction (positive direction). . In other words, the second folded portion Q2 has a configuration in which the beam portion 62d and the beam portion 62f of the beam 62 are folded back across the beam portion 62e and face each other along the x-axis.

  Thus, by having the 1st folding | turning part Q1 along the y-axis direction and the 2nd folding | turning part Q2 along the x-axis direction orthogonal to the y-axis direction, it is the same in the y-axis direction and the x-axis direction. The first folded portion Q1 and the second folded portion Q2 act in a composite manner and have elasticity in all directions. In addition, the beam is connected to the support portion via the first connection beam 65 in which the first beam 61 and the second beam 62 are connected and the second connection beam 66 in which the third beam 63 and the fourth beam 64 are connected. By being connected, the degree of freedom of deformation of the beam is increased, and the stress relaxation effect of the beam is improved. Therefore, it has the function of absorbing the propagation of vibration such as external impact or vibration from the base 41 by the beams 61, 62, 63, 64 and the first and second connecting beams 65, 66. The resulting detection noise can be reduced or suppressed.

  In the above description, the first direction that is the direction in which the beams 61, 62, 63, and 64 are provided and the third direction that is the direction in which the first and second detection vibrating arms 421 and 422 are provided. In the example, the second direction and the fourth direction are the same direction and the directions are orthogonal to each other. However, the present invention is not limited to this. For example, the first direction and the third direction may be different. Further, the first direction and the second direction are not limited to being orthogonal, and may be directions intersecting at a predetermined angle.

  The configuration of the resonator element 3 has been described above. As shown in FIGS. 2 and 3, the vibrating element 3 includes a detection signal electrode 710, a detection signal wiring 712, a detection signal terminal 714, a detection ground electrode 720, a detection ground wiring 722, a detection ground terminal 724, a drive A signal electrode 730, a drive signal wiring 732, a drive signal terminal 734, a drive ground electrode 740, a drive ground wiring 742, and a drive ground terminal 744 are provided.

  For convenience, in FIGS. 2 and 3, the detection signal electrode 710, the detection signal wiring 712, and the detection signal terminal 714 are indicated by a lower right oblique line, the detection ground electrode 720, the detection ground wiring 722, and the detection ground terminal 724 are indicated by a cross oblique line, The drive signal electrode 730, the drive signal wiring 732, and the drive signal terminal 734 are indicated by a lower left oblique line, and the drive ground electrode 740, the drive ground wiring 742, and the drive ground terminal 744 are indicated by a cross vertical / horizontal line. 2 and 3, the electrodes, wirings, and terminals provided on the side surface of the resonator element 3 are indicated by bold lines.

  As each electrode 710, 720, 730, 740, each wiring 712, 722, 732, 742 and each terminal 714, 724, 734, 744, for example, a base layer made of chromium and an electrode layer made of gold And can be laminated. As a result, the electrodes 710, 720, 730, 740 with good adhesion, the wires 712, 722, 732, 742, and the terminals 714, 724, 734, 744 can be formed.

  Each electrode 710, 720, 730, 740 is electrically isolated from each other. Similarly, the wirings 712, 722, 732, 742 are electrically isolated from each other, and the terminals 714, 724, 734, 744 are also electrically isolated from each other. Hereinafter, each of these electrodes, each wiring, and each terminal will be described sequentially. Hereinafter, for convenience of explanation, the surface shown in FIG. 2 is referred to as “upper surface”, the surface illustrated in FIG. 3 is referred to as “lower surface”, and the surface connecting the upper surface and the lower surface is referred to as “side surface”.

(1) Detection Signal Electrode, Detection Signal Wiring, and Detection Signal Terminal The detection signal electrode 710 is provided on the upper and lower surfaces of the first and second detection vibrating arms 421 and 422. However, in the present embodiment, the detection signal electrode 710 is not provided at the tip portions of the first and second detection vibrating arms 421 and 422. The detection signal electrode 710 is disposed symmetrically with respect to the xz plane. The detection signal electrode 710 is an electrode for detecting distortion of the piezoelectric material generated by the vibration when the detection vibration of the first and second detection vibrating arms 421 and 422 is excited.

  The detection signal wiring 712 is provided on the first and third beams 61 and 63. More specifically, the detection signal wiring 712 is provided on the upper surfaces of the first and third beams 61 and 63. Further, the detection signal wiring 712 includes a side surface of the joint portion between the first beam 61 and the first support portion 51, a side surface of the joint portion between the third beam 63 and the second support portion 52, and an upper surface and a lower surface of the base portion 41. Also provided. Such detection signal wirings 712 are arranged symmetrically with respect to the xy plane.

  The detection signal terminal 714 is provided on the first and second support portions 51 and 52. More specifically, the detection signal terminal 714 is provided on the upper and lower surfaces and the side surfaces of the first and second support portions 51 and 52. The detection signal terminals 714 provided on the upper surface, the lower surface, and the side surface of the first support portion 51 are electrically connected to each other. In addition, the detection signal terminals 714 provided on the upper surface, the lower surface, and the side surface of the second support portion 52 are electrically connected to each other.

  The detection signal terminal 714 provided in the first support portion 51 is disposed on the negative direction side of the y-axis with respect to the distal end portion of the first drive vibrating arm 441 provided with the drive ground electrode 740. In other words, the detection signal terminal 714 provided in the first support portion 51 and the drive ground electrode 740 provided at the distal end portion of the first drive vibrating arm 441 face each other in the y-axis direction. Further, the detection signal terminal 714 provided in the second support portion 52 is disposed on the positive direction side of the y-axis with respect to the distal end portion of the second drive vibrating arm 442 provided with the drive ground electrode 740. . That is, the detection signal terminal 714 provided in the second support portion 52 and the drive ground electrode 740 provided at the tip of the second drive vibrating arm 442 are opposed to each other in the y-axis direction. Such detection signal terminals 714 are arranged symmetrically with respect to the xz plane.

  A detection signal terminal (first detection signal terminal) 714 provided on the first support portion 51 is provided on the first detection vibrating arm 421 via a detection signal wiring 712 provided on the first beam 61. The detection signal electrode (first detection signal electrode) 710 is electrically connected. Specifically, the detection signal terminal 714 provided on the first support portion 51 is connected to the detection signal wiring 712 provided on the upper surface of the first beam 61, and the detection signal wiring 712 is connected to the first beam 61. To the detection signal electrode 710 provided on the upper and lower surfaces of the first detection vibrating arm 421 through the side surface of the joint portion between the first beam 61 and the base 41 and the upper and lower surfaces of the base 41. Has been. Accordingly, the first detection signal generated by the vibration of the first detection vibrating arm 421 can be transmitted from the detection signal electrode 710 to the detection signal terminal 714 provided in the first support portion 51.

  A detection signal terminal (second detection signal terminal) 714 provided on the second support portion 52 is provided on the second detection vibrating arm 422 via a detection signal wiring 712 provided on the third beam 63. The detection signal electrode (second detection signal electrode) 710 is electrically connected. Specifically, the detection signal terminal 714 provided in the second support portion 52 is connected to the detection signal wiring 712 provided on the upper surface of the third beam 63, and the detection signal wiring 712 is connected to the third beam 63. To the detection signal electrode 710 provided on the upper and lower surfaces of the second detection vibrating arm 422 through the side surface of the joint portion between the third beam 63 and the base 41 and the upper and lower surfaces of the base 41. Has been. Accordingly, the second detection signal generated by the vibration of the second detection vibrating arm 422 can be transmitted from the detection signal electrode 710 to the detection signal terminal 714 provided in the second support portion 52.

(2) Detection ground electrode, detection ground wiring, and detection ground terminal The detection ground electrode 720 is provided at the tip of the first and second detection vibrating arms 421 and 422. Specifically, the detection ground electrode 720 is provided on the upper and lower surfaces of the tip portions of the first and second detection vibrating arms 421 and 422. Further, the detection ground electrode 720 is provided on the side surfaces of the first and second detection vibrating arms 421 and 422. The detection ground electrodes 720 provided on the upper surface, the lower surface, and the side surface of the first detection vibrating arm 421 are electrically connected to each other. The detection ground electrodes 720 provided on the upper surface, the lower surface, and the side surface of the second detection vibrating arm 422 are electrically connected to each other. Such detection ground electrodes 720 are arranged symmetrically with respect to the xz plane. The detection ground electrode 720 has a potential serving as a ground with respect to the detection signal electrode 710.

The detection ground wiring 722 is provided on the first and third beams 61 and 63. Specifically, the detection ground wiring 722 is provided on the lower and side surfaces of the first and third beams 61 and 63. Further, the detection ground wiring 722 is provided on the upper surface and the lower surface of the base 41. The detection ground wiring 722 is arranged symmetrically with respect to the xz plane.
The detection ground terminal 724 is provided on the first and second support portions 51 and 52. Specifically, the detection ground terminal 724 is provided on the upper and lower surfaces and further on the side surfaces of the first and second support portions 51 and 52. The detection ground terminals 724 provided on the upper surface, the lower surface, and the side surface of the first support portion 51 are electrically connected to each other. Further, the detection ground terminals 724 provided on the upper surface, the lower surface, and the side surface of the second support portion 52 are electrically connected to each other.

  The detection ground terminal 724 provided on the first support portion 51 is disposed on the negative direction side of the y-axis with respect to the distal end portion of the first detection vibrating arm 421 provided with the detection ground electrode 720. . That is, the detection ground terminal 724 provided on the first support portion 51 and the detection ground electrode 720 provided on the tip portion of the first detection vibrating arm 421 face each other in the y-axis direction. In addition, the detection ground terminal 724 provided on the second support portion 52 is disposed on the positive direction side of the y-axis with respect to the distal end portion of the second detection vibrating arm 422 provided with the detection ground electrode 720. ing. That is, the detection ground terminal 724 provided on the second support portion 52 and the detection ground electrode 720 provided on the tip portion of the second detection vibrating arm 422 face each other in the y-axis direction. Such detection ground terminals 724 are arranged symmetrically with respect to the xz plane.

  A detection ground terminal (first detection ground terminal) 724 provided on the first support portion 51 is provided on the first detection vibrating arm 421 via a detection ground wiring 722 provided on the first beam 61. The detection ground electrode (first detection ground electrode) 720 is electrically connected. Specifically, the detection ground terminal 724 provided on the first support portion 51 is connected to the detection ground wiring 722 provided on the lower surface and the side surface of the first beam 61, and the detection ground wiring 722 is connected to the first ground wire 722. The beam 61 is connected to the detection ground electrode 720 provided on the upper surface and the lower surface of the first detection vibrating arm 421 from the lower surface and the side surface of the beam 61 through the upper surface and the lower surface of the base 41.

  A detection ground terminal (second detection ground terminal) 724 provided on the second support portion 52 is provided on the second detection vibration arm 422 via a detection ground wiring 722 provided on the third beam 63. The detection ground electrode (second detection ground electrode) 720 is electrically connected. Specifically, the detection ground terminal 724 provided on the second support portion 52 is connected to the detection ground wiring 722 provided on the lower surface and the side surface of the third beam 63, and the detection ground wiring 722 is connected to the third grounding wire 722. The beam 63 is connected to the detection ground electrode 720 provided on the upper surface and the lower surface of the second detection vibrating arm 422 from the lower surface and the side surface of the beam 63 through the upper surface and the lower surface of the base 41.

  As described above, the detection signal electrode 710, the detection signal wiring 712, the detection signal terminal 714, the detection ground electrode 720, the detection ground wiring 722, and the detection ground terminal 724 are arranged. As a result, the detection vibration generated in the first detection vibrating arm 421 appears as a charge between the detection signal electrode 710 and the detection ground electrode 720 provided in the first detection vibrating arm 421, and appears on the first support portion 51. It can be taken out as a signal from the provided detection signal terminal 714 and detection ground terminal 724. Further, the detected vibration generated in the second detection vibrating arm 422 appears as a charge between the detection signal electrode 710 and the detection ground electrode 720 provided in the second detection vibrating arm 422 and is provided in the second support portion 52. The detection signal terminal 714 and the detection ground terminal 724 are extracted as signals.

(3) Drive signal electrode, drive signal wiring and drive signal terminal The drive signal electrode 730 is provided on the first and second drive vibrating arms 441 and 442. However, in the present embodiment, the drive signal electrode 730 is not provided at the distal ends of the first and second drive vibrating arms 441 and 442. Specifically, the drive signal electrode 730 is provided on the upper and lower surfaces of the first and second drive vibrating arms 441 and 442.

  Further, the drive signal electrode 730 is also provided on the side surfaces of the third and fourth drive vibrating arms 443 and 444 and on the upper and lower surfaces of the tip portions of the third and fourth drive vibrating arms 443 and 444. The drive signal electrodes 730 provided on the upper surface, the lower surface, and the side surface of the third drive vibrating arm 443 are electrically connected to each other. Further, the drive signal electrodes 730 provided on the upper surface, the lower surface, and the side surface of the fourth drive vibrating arm 444 are electrically connected to each other. Such drive signal electrodes 730 are arranged symmetrically with respect to the xz plane. The drive signal electrode 730 is an electrode for exciting the drive vibration of the first, second, third, and fourth drive vibration arms 441, 442, 443, and 444.

The drive signal wiring 732 is provided on the second and fourth beams 62 and 64. Specifically, the drive signal wiring 732 is provided on the upper surfaces of the second and fourth beams 62 and 64. Further, the drive signal wiring 732 is provided on the upper surface of the base 41, the upper surface of the first connection arm 431, and the side surfaces of the first and second connection arms 431 and 432. Such drive signal wirings 732 are arranged symmetrically with respect to the xz plane.
The drive signal terminal 734 is provided on the second support portion 52. Specifically, the drive signal terminal 734 is provided on the upper and lower surfaces and further on the side surfaces of the second support portion 52. The drive signal terminals 734 provided on the upper surface, the lower surface, and the side surface of the second support portion 52 are electrically connected to each other.

The drive signal terminal 734 provided in the second support portion 52 is disposed on the positive direction side of the y axis with respect to the distal end portion of the fourth drive vibration arm 444 provided with the drive signal electrode 730. . That is, the drive signal terminal 734 provided in the second support portion 52 and the drive signal electrode 730 provided at the tip portion of the fourth drive vibrating arm 444 are opposed to each other in the y-axis direction.
The drive signal terminal 734 provided in the second support 52 is connected to the first, second, and second via the side electrode 732a of the second connection beam 66 and the drive signal wiring 732 provided in the fourth beam 64. 3 and the fourth drive vibration arms 441, 442, 443, and 444, and electrically connected to the drive signal electrode 730 provided on the drive signal electrode 730. Specifically, the drive signal terminal 734 is connected to the drive signal wiring 732 provided on the upper surface of the fourth beam 64, and the drive signal wiring 732 extends from the upper surface of the fourth beam 64 to the upper surface of the base 41, and The drive signal electrode 730 provided on the upper surfaces of the first and second drive vibration arms 441 and 442 passes through the upper surface of the first connecting arm 431. Furthermore, the drive signal wiring 732 passes from the upper surface of the first connection arm 431 through the side surface of the first connection arm 431, and the drive signal electrode 730 is provided on the lower surfaces of the first and second drive vibration arms 441 and 442. It is connected to the. Further, the drive signal wiring 732 passes from the upper surface of the base 41 through the upper surface and side surfaces of the second connecting arm 432, and is provided on the upper and lower surfaces of the third and fourth drive vibrating arms 443 and 444. A signal electrode 730 can be connected. Accordingly, a drive signal for driving and vibrating the first, second, third, and fourth drive vibrating arms 441, 442, 443, 44 can be transmitted from the drive signal terminal 734 to the drive signal electrode 730.

(4) Drive Ground Electrode, Drive Ground Wiring, and Drive Ground Terminal The drive ground electrode 740 is provided at the tip of the first and second drive vibrating arms 441 and 442. Specifically, the drive ground electrode 740 is provided on the upper and lower surfaces of the tip portions of the first and second drive vibrating arms 441 and 442. Further, the drive ground electrode 740 is also provided on the side surfaces of the first and second drive vibrating arms 441 and 442. The drive ground electrodes 740 provided on the upper surface, the lower surface, and the side surface of the first drive vibrating arm 441 are electrically connected to each other. In addition, the drive ground electrodes 740 provided on the upper surface, the lower surface, and the side surface of the second drive vibrating arm 442 are electrically connected to each other.

  Further, the driving ground electrode 740 can be provided on the upper and lower surfaces of the third and fourth driving vibrating arms 443 and 444. However, in the present embodiment, the drive ground electrode 740 is not provided at the distal ends of the third and fourth drive vibrating arms 443 and 444. Such a drive ground electrode 740 is disposed symmetrically with respect to the xz plane. The drive ground electrode 740 has a potential that serves as a ground with respect to the drive signal electrode 730.

  The drive ground wiring 742 is provided on the second and fourth beams 62 and 64. Specifically, the drive ground wiring 742 is provided on the lower surface and side surfaces of the second and fourth beams 62 and 64. Furthermore, the drive ground wiring 742 is provided on the lower surface of the base 41, the side surface of the first connection arm 431, the lower surface of the second connection arm 432, and the side surface of the second connection arm 432. Such drive ground wiring 742 is arranged symmetrically with respect to the xz plane.

The drive ground terminal 744 is provided on the first support portion 51. Specifically, the drive ground terminal 744 is provided on the upper surface, the lower surface, and the side surface of the first support portion 51. The drive ground terminals 744 provided on the upper surface, the lower surface, and the side surface of the first support portion 51 are electrically connected to each other.
The drive ground terminal 744 provided in the first support portion 51 is disposed on the negative direction side of the y-axis with respect to the distal end portion of the third drive vibration arm 443 provided with the drive signal electrode 730. . That is, the drive ground terminal 744 provided on the first support portion 51 and the drive signal electrode 730 provided on the tip portion of the third drive vibrating arm 443 face each other in the y-axis direction.

  Further, the drive ground terminal 744 provided in the first support portion 51 is connected to the first and second via the side ground electrode 742 a of the first connection beam 65 and the drive ground wiring 742 provided in the second beam 62. The third and fourth drive vibrating arms 441, 442, 443, and 444 are electrically connected to the drive ground electrode 740 provided on the third and fourth drive vibrating arms 441, 442, 443, and 444. Specifically, the drive ground terminal 744 is connected to the drive ground wiring 742 provided on the lower surface and side surface of the second beam 62, and the drive ground wiring 742 is connected to the base 41 from the lower surface and side surface of the second beam 62. And the drive ground electrode 740 provided on the upper and lower surfaces of the first and second drive vibrating arms 441 and 442 through the side surface of the first connecting arm 431. Further, the drive ground wiring 742 passes from the lower surface of the base 41 through the lower surface and side surfaces of the second connecting arm 432, and the drive ground electrodes are provided on the upper and lower surfaces of the third and fourth drive vibrating arms 443 and 444. 740.

  As described above, the drive signal electrode 730, the drive signal wiring 732, the drive signal terminal 734, the drive ground electrode 740, the drive ground wiring 742, and the drive ground terminal 744 are arranged. Thus, by applying a drive signal between the drive signal terminal 734 provided in the second support part 52 and the drive ground terminal 744 provided in the first support part 51, the first and second An electric field is generated between the drive signal electrode 730 and the drive ground electrode 740 provided on the third and fourth drive vibration arms 441, 442, 443, 444, and each of these drive vibration arms 441, 442, 443, 444 can be driven to vibrate.

  In this example, the first support portion 51 as one support portion has been described with a configuration in which three terminals of the detection signal terminal 714, the detection ground terminal 724, and the drive ground terminal 744 are provided. As long as there are two or more, there may be any number. Similarly to the above, the number of terminals in the second support portion 52 is not limited as long as it is two or more.

(5) Joint part between beam and support part In the first support part 51 as the support part, the detection signal terminal 714, the detection ground terminal 724, and the drive ground terminal 744 are in the x-axis direction (the direction intersecting the beam extending direction ) And spaced apart. Specifically, a detection ground terminal 724 is provided at the center of the first support 51 extending along the x-axis direction, and a detection signal terminal 714 is provided at one end of the first support 51. A driving ground terminal 744 is provided at the other end of the first support portion 51. The first connecting beam 65 is connected to the first support portion 51 at a position facing the detection ground terminal 724, in other words, a position facing the first detection vibrating arm 421 along the y-axis direction.

  Similarly, the detection signal terminal 714, the detection ground terminal 724, and the drive signal terminal 734 are arranged in the second support portion 52 as the support portion along the x-axis direction (direction intersecting with the extending direction of the beam) and separated from each other. Is provided. Specifically, a detection ground terminal 724 is provided at the center of the second support portion 52 extending along the x-axis direction, and a detection signal terminal 714 is provided at one end of the second support portion 52. The drive signal terminal 734 is provided at the other end of the second support portion 52. The second connecting beam 66 is connected to the second support portion 52 at a position facing the detection ground terminal 724, in other words, a position facing the second detection vibrating arm 422 along the y-axis direction.

  The gyro element 2 having such a configuration detects the angular velocity ω around the z-axis as follows. When an electric field is generated between the drive signal electrode 730 and the drive ground electrode 740 in a state where the angular velocity ω is not applied, the gyro element 2 has the drive vibration arms 441, 442, 443, 444 performs bending vibration in the direction indicated by arrow A. At this time, the first and second drive vibrating arms 441 and 442 and the third and fourth drive vibrating arms 443 and 444 perform plane-symmetric vibration with respect to the yz plane passing through the center point G (center of gravity G). Therefore, the base 41, the first and second connecting arms 431 and 432, and the first and second detection vibrating arms 421 and 422 hardly vibrate.

  When an angular velocity ω around the z-axis is applied to the gyro element 2 in the state where this driving vibration is performed, vibration as shown in FIG. 5B is generated. That is, Coriolis force in the direction of arrow B acts on the drive vibrating arms 441, 442, 443, and 444 and the connecting arms 431 and 432, and the detected vibration in the direction of arrow C is excited in response to the vibration in the direction of arrow B. . Then, the detection signal electrode 710 and the detection ground electrode 720 detect the distortion of the detection vibrating arms 421 and 422 caused by this vibration, and the angular velocity ω is obtained.

(package)
The package 9 stores the gyro element 2. In addition to the gyro element 2, an IC chip that drives the gyro element 2 and the like may be stored in the package 9. Such a package 9 has a substantially rectangular shape in plan view (xy plan view).

  The package 9 has a base 91 having a recess opened on the upper surface, and a lid (lid) 92 joined to the base so as to close the opening of the recess. The base 91 has a plate-like bottom plate 911 and a frame-like side wall 912 provided on the peripheral edge of the upper surface of the bottom plate 911. Such a package 9 has a storage space inside thereof, and the gyro element 2 is stored and installed in the storage space S in an airtight manner.

  The gyro element 2 has conductive properties such as solder, silver paste, and conductive adhesive (adhesive in which conductive fillers such as metal particles are dispersed in a resin material) at the first and second support portions 51 and 52. It is fixed to the upper surface of the bottom plate 911 via a fixing member 8. Since the first and second support portions 51 and 52 are located at both ends of the gyro element 2 in the y-axis direction, the vibrating body 4 of the gyro element 2 can be held at both ends by fixing such portions to the bottom plate 911. The gyro element 2 is supported and can be stably fixed to the bottom plate 911. Therefore, unnecessary vibration (vibration other than vibration to be detected) of the gyro element 2 is suppressed, and detection accuracy of the angular velocity ω by the gyro element 2 is improved.

  The conductive fixing member 8 corresponds to two detection signal terminals 714, two detection ground terminals 724, a drive signal terminal 734, and a drive ground terminal 744 provided in the first and second support portions 51 and 52 ( 6) in contact with each other and spaced apart from each other. Further, six connection pads 10 corresponding to the two detection signal terminals 714, the two detection ground terminals 724, the drive signal terminal 734, and the drive ground terminal 744 are provided on the upper surface of the bottom plate 911, and a conductive fixing member is provided. These connection pads 10 and any one of the corresponding terminals are electrically connected via 8.

With such a configuration, the conductive fixing member 8 can be used as a fixing member for fixing the gyro element 2 to the bottom plate 911, and as a connection member for electrical connection with the gyro element 2. Since it can be used, the structure of the vibration device 1 can be simplified.
In addition, the conductive fixing member 8 forms a gap (gap) between the gyro element 2 and the bottom plate 911, and is also used as a gap material for preventing these contacts. Thereby, destruction / breakage of the gyro element 2 due to contact with the bottom plate 911 can be prevented, and the vibration device 1 can detect accurate angular velocity and exhibit excellent reliability.
Each connection pad 10 is drawn out of the package 9 through a conductor post (not shown), or when an IC chip or the like is stored in the package 9, it is electrically connected to the IC chip. To do.

  The constituent material of the base 91 is not particularly limited, but various ceramics such as aluminum oxide can be used. The constituent material of the lid 92 is not particularly limited, but may be a member whose linear expansion coefficient approximates that of the constituent material of the base 91. For example, when the constituent material of the base 91 is ceramic as described above, an alloy such as Kovar is preferable. The joining of the base 91 and the lid 92 is not particularly limited, and for example, the base 91 and the lid 92 may be joined via an adhesive or may be joined by seam welding or the like.

The effect of the vibration device described in this embodiment will be described with reference to FIG. 6A and 6B are diagrams for explaining the effect of the gyro element included in the vibration device. FIG. 6A is a schematic plan view showing a deformed state of the gyro element, and FIG. 6B is a graph showing the occurrence rate of vibration leakage.
The vibrating device 1 described in the present embodiment is a first folded portion of a portion of the gyro element 2 that is used that is folded back and faces the beams 61, 62, 63, and 64 along the y-axis direction (first direction). A portion Q1 and a second folded portion Q2 that is folded back along the x-axis direction (second direction) and face each other are provided. Thus, having the first folded portion Q1 and the second folded portion Q2 along each of the x-axis direction orthogonal to the y-axis direction has elasticity in the same manner in the y-axis direction and the x-axis direction. ing. In addition, the first folded portion Q1 and the second folded portion Q2 have combined elasticity, and have elasticity in all directions as indicated by arrows in FIG.
In addition, the beam is connected to the support portion via the first connection beam 65 in which the first beam 61 and the second beam 62 are connected and the second connection beam 66 in which the third beam 63 and the fourth beam 64 are connected. By being connected, the degree of freedom of deformation of the beam is increased, and the stress relaxation effect of the beam is further improved.
Therefore, the vibration device 1 described in the present embodiment is configured to transmit vibrations such as vibration from the base portion 41 due to the above-described elasticity, the degree of freedom of deformation, and the like. Since it has the effect | action which overlaps and absorbs with the 2nd connection beams 65 and 66, the detection noise resulting from this can be reduced or suppressed.

FIG. 6B shows the occurrence rate of vibration leakage of the gyro element 2 of the present embodiment. It can be seen that the occurrence of vibration leakage is clearly reduced as compared with the two comparative examples. By suppressing the vibration leakage, it is possible to prevent the vibration characteristics of the gyro element 2 from being deteriorated. Further, by suppressing the vibration leakage phenomenon, it is possible to reduce the temperature drift.
Further, even when an external impact is applied, the beams 61, 62, 63, 64 and the first and second connecting beams 65, 66 have an action of absorbing the impact, so that the detection noise is reduced as described above. It can be reduced or suppressed.
In the comparative example 1 shown in FIG. 6B, the first folded portion Q1 of the portion that is folded back along the y-axis direction (first direction) and faces each of the beams 61, 62, 63, 64 described above. Although it is formed, the second folded portion Q2 is not provided at a portion that is folded back and faced along the x-axis direction (second direction). In other words, each of the beams 61, 62, 63, and 64 is configured to be folded in only one direction.
Further, in Comparative Example 2 shown in FIG. 6B, each of the beams 61, 62, 63, and 64 is provided with a first folded portion Q1 and a second folded portion Q2. Are not provided, and the first connection beam to which the beams are connected and the second connection beam 66 to which the beams 63 and 64 are connected are not provided. In other words, the beams 61 and 62 are each connected to the first support portion 51, and the beams 63 and 64 are each connected to the second support portion 52.

<Modification>
Next, modified examples of the beam folding portions Q1 and Q2 in the above-described embodiment will be described with reference to FIGS. FIG. 7 is a plan view showing a modification of the beam of the gyro element. FIGS. 8A and 8B are partial plan views showing modifications of the folded portion of the beam.

  A beam modification 1 will be described with reference to FIG. In addition, about the structure similar to the above-mentioned embodiment, description is abbreviate | omitted by attaching | subjecting a same sign etc., and the shape of the beam different from embodiment is demonstrated.

  The resonator element 3 a includes a so-called double T-shaped vibrating body 4 and a first support portion 51 and a second support portion 52 as support portions that support the vibrating body 4. The vibrating body 4 includes a first beam 61 as a beam, a second beam 62, a first connection beam 65 as a connection beam to which the first beam 61 and the second beam 62 are connected, and a third beam as a beam. The first support portion 51 and the second support portion 52 are connected to each other by 63 and the fourth beam 64 and the second connection beam 66 as a connection beam in which the third beam 63 and the fourth beam 64 are connected. The vibrating body 4 has an extension in the xy plane and has a thickness in the z-axis direction.

  The beams 61, 62, 63, 64 extended from the base 41 are respectively folded back along the x-axis direction (second direction) and face each other at the first turn-up portion Q1 and the y-axis direction (first And a second folded portion Q2 of the portion that is folded back along the direction. Here, the detail of a structure of each beam 61, 62, 63, 64 is demonstrated. The beams 61, 62, 63, and 64 are different in the extending direction, but have the same configuration. Therefore, the configuration of the beam 62 will be described as a representative.

  The beam 62 extends from the base portion 41 along the x-axis direction (negative direction), and then is folded back along the x-axis direction (positive direction) to form the first folded portion Q1, and then y The second folded portion Q2 is formed by extending in the axial direction (positive direction), then bending in the x-axis direction (positive direction), and then folding back in the y-axis direction (negative direction). The beam 62 is further extended, then bent and extended in the x-axis direction (positive direction), and is connected to the first support portion 51 by a first connection beam 65 connected to the beam 61.

  Also in this modification, having the first folded portion Q1 and the second folded portion Q2 along the x-axis direction orthogonal to the y-axis direction has elasticity in the same manner in the y-axis direction and the x-axis direction. Further, the first folded portion Q1 and the second folded portion Q2 act in a composite manner and have elasticity in all directions. Therefore, since each beam 61, 62, 63, 64 absorbs the propagation of vibration such as an external impact or vibration from the base 41, detection noise caused by this can be reduced or suppressed. .

  In addition, as shown to Fig.8 (a), (b), the 1st folding | turning part Q1 and the 2nd folding | turning part Q2 are formed using the shape which combined semicircle arc shape R1, R2, R3. Also good.

  In the above description, the first direction, which is the direction in which the beams 61, 62, 63, 64 are provided, and the third direction, in which the first and second detection vibrating arms 421, 422 and the like are provided. In the example, the second direction and the fourth direction are the same direction and the directions are orthogonal to each other. However, the present invention is not limited to this. For example, the first direction and the third direction may be different. Further, the first direction and the second direction are not limited to being orthogonal, and may be directions intersecting at a predetermined angle.

  In the above description, the gyro element 2 has been described as an example of the resonator element. However, the present invention is not limited to this and can be applied to the following resonator element. The other resonator element can be applied to a physical quantity measuring element such as an acceleration measuring element, a pressure detecting element, or a temperature detecting element.

<Physical quantity detection device>
The vibration device 1 as described above can be applied to a physical quantity detection device such as an angular velocity detection device, an acceleration detection device, or a pressure measurement device.
Next, the physical quantity detection device according to the present embodiment will be described with reference to the drawings. FIG. 9 is a schematic diagram illustrating a configuration of the physical quantity detection device.

  A physical quantity detection device 1400 shown in FIG. 9 includes the resonator element according to the invention. In the present embodiment, an example in which the resonator element 3 is used as the resonator element according to the invention will be described. Hereinafter, in the physical quantity detection device 1400 according to this embodiment, members having the same functions as the constituent members of the resonator element 3 according to this embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As illustrated in FIG. 9, the physical quantity detection device 1400 includes a resonator element 3, a drive circuit 1410, and a detection circuit 1420. The driver circuit 1410 and the detection circuit 1420 can be incorporated in an IC chip (not shown in FIG. 9).

  The drive circuit 1410 functions as a drive circuit in the present invention, and can include an I / V conversion circuit (current-voltage conversion circuit) 1411, an AC amplification circuit 1412, and an amplitude adjustment circuit 1413. The drive circuit 1410 is a circuit that supplies a drive signal to the drive signal electrode 730 formed on the vibrating piece 3. Hereinafter, the drive circuit 1410 will be described in detail.

  When the vibration piece 3 vibrates, an alternating current based on the piezoelectric effect is output from the drive signal electrode 730 formed on the vibration piece 3 and input to the I / V conversion circuit 1411 via the drive signal terminal 734. The I / V conversion circuit 1411 converts the input AC current into an AC voltage signal having the same frequency as the vibration frequency of the resonator element 3 and outputs the AC voltage signal.

  The AC voltage signal output from the I / V conversion circuit 1411 is input to the AC amplifier circuit 1412. The AC amplifier circuit 1412 amplifies and outputs the input AC voltage signal.

  The AC voltage signal output from the AC amplifier circuit 1412 is input to the amplitude adjustment circuit 1413. The amplitude adjustment circuit 1413 controls the gain so that the amplitude of the input AC voltage signal is held at a constant value, and the AC voltage signal after gain control is supplied via the drive signal terminal 734 formed on the resonator element 3. Output to the drive signal electrode 730. The resonator element 3 vibrates by an AC voltage signal (drive signal) input to the drive signal electrode 730.

  The detection circuit 1420 functions as a detection circuit in the present invention, and includes charge amplifier circuits 1421, 1422, a differential amplifier circuit 1423, an AC amplifier circuit 1424, a synchronous detection circuit 1425, a smoothing circuit 1426, and a variable amplifier circuit 1427. And a filter circuit 1428. The detection circuit 1420 includes a first detection signal generated on the detection signal electrode 710 formed on the first detection vibrating arm 421 of the vibrating piece 3 and a second detection generated on the detection signal electrode 710 formed on the second detection vibrating arm 422. This circuit differentially amplifies the signal to generate a differential amplified signal, and detects a predetermined physical quantity based on the differential amplified signal. Hereinafter, the detection circuit 1420 will be described in detail.

  In the charge amplifier circuits 1421 and 1422, detection signals (alternating currents) of opposite phases detected by the detection signal electrodes 710 formed on the detection vibrating arms 421 and 422 of the vibrating piece 3 are passed through the detection signal terminal 714. Entered. For example, the first detection signal detected by the detection signal electrode 710 formed on the first detection vibrating arm 421 is input to the charge amplifier circuit 1421, and the charge detection circuit 1422 is formed on the second detection vibrating arm 422. The second detection signal detected by the detected signal electrode 710 is input. Then, the charge amplifier circuits 1421 and 1422 convert the input detection signal (alternating current) into an alternating voltage signal centered on the reference voltage Vref.

  The differential amplifier circuit 1423 differentially amplifies the output signal of the charge amplifier circuit 1421 and the output signal of the charge amplifier circuit 1422 to generate a differential amplified signal. The output signal (differential amplified signal) of the differential amplifier circuit 1423 is further amplified by the AC amplifier circuit 1424.

  The synchronous detection circuit 1425 functions as a detection circuit in the present invention, and extracts an angular velocity component by synchronously detecting the output signal of the AC amplifier circuit 1424 based on the AC voltage signal output from the AC amplifier circuit 1412 of the drive circuit 1410. To do.

  The angular velocity component signal extracted by the synchronous detection circuit 1425 is smoothed into a DC voltage signal by the smoothing circuit 1426 and input to the variable amplification circuit 1427.

  The variable amplifier circuit 1427 amplifies (or attenuates) the output signal (DC voltage signal) of the smoothing circuit 1426 at a set amplification factor (or attenuation factor) to change the angular velocity sensitivity. The signal amplified (or attenuated) by the variable amplifier circuit 1427 is input to the filter circuit 1428.

  The filter circuit 1428 removes a high-frequency noise component from the output signal of the variable amplifier circuit 1427 (more precisely, attenuates to a predetermined level or less), and generates a detection signal having a polarity and a voltage level corresponding to the direction and magnitude of the angular velocity. To do. This detection signal is output to the outside from an external output terminal (not shown).

  According to the physical quantity detection device 1400, as described above, the detection circuit 1420 includes the first detection signal generated in the detection signal electrode 710 formed in the first detection vibrating arm 421 and the detection formed in the second detection vibrating arm 422. The second detection signal generated at the signal electrode 710 is differentially amplified to generate a differential amplification signal, and a predetermined physical quantity can be detected based on the differential amplification signal. In addition, when the impact in the Y-axis direction is applied from the outside, the resonator element 3 electrostatically couples the detection signal and the drive signal on the positive direction side of the Y-axis and the negative direction side of the Y-axis. Can be kept (almost) uniform. That is, the amount of change in electrostatic coupling between the first detection signal and the drive signal and the amount of change in electrostatic coupling between the second detection signal and the drive signal can be equalized. The influence of can be canceled. Therefore, it is possible to provide a physical quantity detection device 1400 that can stably detect a detection signal even when an impact in the Y-axis direction is applied from the outside.

<Electronic equipment>
Moreover, the vibrating piece 3 as described above can be incorporated into various electronic devices. The electronic device of the present invention in which the resonator element 3 is incorporated is not particularly limited, but a personal computer (for example, a mobile personal computer), a mobile terminal such as a mobile phone, a digital still camera, an ink jet type ejection device (for example, an ink jet) Printer), laptop personal computer, tablet personal computer, TV, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game device, for games Controllers, word processors, workstations, videophones, security TV monitors, electronic binoculars, POS terminals, medical devices (eg electronic thermometers, blood pressure monitors, blood glucose meters, electrocardiogram measuring devices, ultrasound diagnostics) Equipment, electronic endoscope), fish finder, various measuring instruments, instruments (for example, vehicles, aircraft, ship instruments), flight simulator, head mounted display, motion tracing, motion tracking, motion controller, PDR (walking) And the like).

  As mentioned above, although the vibrator | oscillator and vibration device of this invention were demonstrated based on embodiment and modification of illustration, this invention is not limited to these, The structure of each part is arbitrary structures which have the same function Can be substituted. Moreover, other arbitrary structures and processes may be added. Moreover, the vibration device of the present invention may be a combination of any two or more configurations (features) of the above-described embodiments and modifications.

  DESCRIPTION OF SYMBOLS 1 ... Vibrating device, 2 ... Gyro element, 3 ... Vibrating piece, 4 ... Vibrating body, 8 ... Conductive fixing member (silver paste), 9 ... Package, 10 ... Connection pad, 41 ... Base, 51 ... 1st support part 52 ... 2nd support part, 61 ... 1st beam, 62 ... 2nd beam, 63 ... 3rd beam, 64 ... 4th beam, 65 ... 1st connection beam, 66 ... 2nd connection beam, 91 ... base, 92 ... Lid, 421 ... First detection vibration arm, 422 ... Second detection vibration arm, 431 ... First connection arm, 432 ... Second connection arm, 441 ... First drive vibration arm, 442 ... Second drive vibration arm, 443 ... third drive vibrating arm, 444 ... fourth drive vibrating arm, 710 ... detection signal electrode, 712 ... detection signal wiring, 714 ... detection signal terminal as a fixed portion, 720 ... detection ground electrode, 722 ... detection ground wiring, 724... Detection ground terminal as a fixed portion, 730... Drive signal electrode, 73 ... driving signal lines, 734 ... drive signal terminal as a fixed portion, 740 ... driving ground electrode, 742 ... driving ground wiring, 744 ... drive signal terminal as a fixed portion, 911 ... bottom plate, 912 ... sidewall.

Claims (6)

A vibrating body,
At least two beams extending from the vibrator;
A connecting beam to which each of the beams is connected;
A support portion connected to the connection beam and supporting the vibrating body,
The beam is
Between the vibrating body and the support part,
A first folded portion folded back along the first direction;
A resonator element comprising: a second folded portion folded back along a second direction intersecting with the first direction. The vibrating body includes a base, a first detection vibrating arm and a second detection vibrating arm extending from the base to both sides along a third direction, and a fourth orthogonal to the third direction from the base to both sides. A first connecting arm and a second connecting arm extending along the direction; a first driving vibrating arm and a second driving vibrating arm extending along the third direction from the first connecting arm to both sides; A third drive vibration arm and a fourth drive vibration arm extending from the second connection arm to both sides along the third direction,
The support portion includes a first support portion and a second support portion that are arranged to face each other along the third direction with the vibrator interposed therebetween, and extend in the fourth direction,
The beam extends from the base and passes between the first detection vibration arm and the first drive vibration arm, and extends from the base, the first detection vibration arm and the third drive. A second beam passing between the vibrating arm and the base; a third beam passing between the second detection vibrating arm and the second drive vibrating arm; and extending from the base; A fourth beam passing between the detection vibrating arm and the fourth drive vibrating arm,
The connection beam includes a first connection beam in which the first beam and the second beam are connected, and a second connection beam in which the third beam and the fourth beam are connected,
2. The vibrator according to claim 1, wherein the vibrating body is connected to each of the first support portion and the second support portion arranged to face each other by the first connection beam and the second connection beam. Vibrating piece. The first beam and the second beam are coupled to the first coupling beam at a position facing the first detection vibrating arm along the third direction;
The said 3rd beam and the said 4th beam are connected with the said 2nd connection beam in the position which opposes the said 2nd detection vibration arm along the said 3rd direction, The said 2nd connection beam is characterized by the above-mentioned. The vibrating piece described.   4. A vibrating device, wherein the vibrating piece according to claim 1 is mounted on a substrate. The resonator element according to claim 2 or 3,
A drive circuit for driving the resonator element;
And a detection circuit that detects a predetermined physical quantity based on a detection signal from the vibration piece.   An electronic device comprising the resonator element according to any one of claims 1 to 3.

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