JP2016085177A - Electronic device, electronic equipment and mobile body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electronic device, electronic equipment and a mobile body, in which deposition of a material (scattered matter) on a vibration arm during adjustment can be decreased.SOLUTION: An electronic device 1 includes a base 21, an IC 3 disposed on the base 21, and a vibration element 4 disposed on the IC 3. The vibration element 4 includes a base part and an adjustment vibration arm connected to the base part, in which at least a part of the adjustment vibration arm is disposed as not overlapping the IC 3 in a plan view. The base 21 is located in a periphery of the IC 3 and includes: a first surface where an internal terminal 241 to be electrically connected to the IC 3 is disposed; and a second surface located to overlap the adjustment vibration arm in a plan view, at a greater separation distance from the vibration element 4 than a separation distance between the first surface and the vibration element, in a thickness direction of the base 21.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an electronic device, an electronic apparatus, and a moving object.

  Conventionally, an electronic device as in Patent Document 1 is known as a vibration element for detecting angular velocity. The electronic device described in Patent Document 1 includes a vibration element in which a pair of drive arms and a pair of detection arms extend from a base, and the vibration element is housed in a package in a state of being fixed on a semiconductor substrate. Has been. The vibration element is provided so that the adjustment vibration arm does not overlap the semiconductor substrate. This prevents the semiconductor substrate from being irradiated with the laser that has passed through the adjustment vibrating arm during balance tuning (unnecessary signal cancellation tuning). Further, a laser protective film made of a metal layer is provided at a position overlapping the adjustment vibration arm of the package. As a result, it is possible to prevent the laser beam that has passed through the adjustment vibrating arm from being directly irradiated onto the package, and to reduce damage to the package.

  However, in the electronic device of Patent Document 1, since the distance between the vibration arm to be adjusted and the package is short, a part of the metal layer or package melted by laser irradiation is scattered and adheres to the vibration arm. easy. For this reason, the efficiency and accuracy of balance tuning (unnecessary signal cancellation tuning) are reduced, the vibration characteristics of the vibrating arm are changed by the attached material, and different electrodes are short-circuited.

JP2013-253895A

  An object of the present invention is to provide an electronic device, an electronic apparatus, and a moving body that can reduce adhesion of a material (scattered matter) to a vibrating arm during adjustment.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1]
The electronic device of this application example includes a base,
A semiconductor device disposed on the base;
A vibration element disposed in the semiconductor device,
The vibrating element includes a vibrating arm connected to the base and having an adjustment unit, and is arranged so that at least a part of the vibrating arm does not overlap the semiconductor device in plan view,
The base is positioned so as to overlap a first surface on which a terminal electrically connected to the semiconductor device is provided, and the vibrating arm in plan view, and the vibration element in the thickness direction of the base And a second surface having a larger separation distance than the first surface.
Thereby, adhesion of the material (scattering matter) to the vibrating arm at the time of adjustment can be reduced.

[Application Example 2]
The electronic device of this application example preferably has a protective layer provided on the second surface.
Thereby, adhesion of the material (scattered matter) to the vibrating arm at the time of adjustment can be reduced more effectively.

[Application Example 3]
In the electronic device of this application example, it is preferable that the light absorption rate of the constituent material of the protective layer is higher than the light absorption rate of the base constituent material.
Thereby, light (laser) can be effectively absorbed by the protective layer, and damage to the base can be reduced.

[Application Example 4]
In the electronic device of this application example, it is preferable that the specific gravity of the constituent material of the protective layer is higher than the specific gravity of the base constituent material.
This makes it difficult for the protective layer to scatter.

[Application Example 5]
In the electronic device according to this application example, it is preferable that the protective layer has conductivity and is electrically connected to a constant potential.
As a result, the protective layer functions as a shield layer, and it is possible to reduce the mixing of noise into the electrodes of the vibration element.

[Application Example 6]
In the electronic device of this application example, it is preferable that the protective layer is provided on the base and insulated from the semiconductor device.
Thereby, the short circuit with the protective layer and other electrode through the scattered material deposited on the base can be prevented.

[Application Example 7]
In the electronic device of this application example, the base includes a first recess opening in one main surface, and a second recess and a third recess opening in the bottom of the first recess,
The semiconductor device is disposed on the bottom surface of the second recess,
The bottom surface of the first recess is the first surface,
The bottom surface of the third recess is preferably the second surface.
This simplifies the base configuration.

[Application Example 8]
In the electronic device according to this application example, it is preferable that the second surface is located between the first surface and the bottom surface of the second recess in the thickness direction of the base.
Accordingly, the second surface can be separated from the vibrating arm while maintaining the mechanical strength of the base.

[Application Example 9]
In the electronic device according to this application example, it is preferable that a separation distance between the adjustment vibrating arm and the second surface is 100 μm or more and 400 μm or less.
Thereby, the separation distance between the vibrating arm and the second surface can be sufficiently ensured while suppressing the increase in thickness of the base.

[Application Example 10]
In the electronic device according to this application example, it is preferable that the vibration element can detect a physical quantity.
Thereby, an electronic device can be used as a physical quantity sensor.

[Application Example 11]
In the electronic device according to this application example, it is preferable that a plurality of the vibration elements are arranged in the semiconductor device.
Thereby, it can be used as a physical quantity sensor having a plurality of detection axes.

[Application Example 12]
An electronic apparatus according to this application example includes the electronic device according to the application example described above.
As a result, a highly reliable electronic device can be obtained.

[Application Example 13]
The moving body of this application example includes the electronic device of the application example described above.
Thereby, a mobile body with high reliability is obtained.

It is a perspective view which shows suitable embodiment of the electronic device of this invention. It is sectional drawing of the electronic device shown in FIG. It is a top view of the electronic device shown in FIG. It is a top view which shows the vibration element which the electronic device shown in FIG. 1 has. It is a top view which shows the vibration element which the electronic device shown in FIG. 1 has. It is a figure explaining unnecessary signal cancellation tuning. It is a partial expanded sectional view which shows the base which the electronic device shown in FIG. 1 has. It is a partial expanded sectional view which shows the base which the electronic device shown in FIG. 1 has. It is sectional drawing which shows the stress relaxation layer which the electronic device shown in FIG. 1 has. It is a partial expanded sectional view of the base which the electronic device concerning a 2nd embodiment of the present invention has. It is a partial expanded sectional view of the base which the electronic device concerning a 2nd embodiment of the present invention has. FIG. 14 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic apparatus including the electronic device of the invention is applied. It is a perspective view which shows the structure of the mobile telephone (PHS is also included) to which the electronic device provided with the electronic device of this invention is applied. It is a perspective view which shows the structure of the digital still camera to which the electronic device provided with the electronic device of this invention is applied. It is a perspective view which shows the structure of the motor vehicle which applied the mobile body provided with the electronic device of this invention.

  Hereinafter, an electronic device, an electronic apparatus, and a moving body of the present invention will be described in detail based on embodiments shown in the accompanying drawings.

<First Embodiment>
FIG. 1 is a perspective view showing a preferred embodiment of the electronic device of the present invention. FIG. 2 is a cross-sectional view of the electronic device shown in FIG. FIG. 3 is a plan view of the electronic device shown in FIG. FIG. 4 is a plan view showing a vibration element included in the electronic device shown in FIG. FIG. 5 is a plan view showing a vibration element included in the electronic device shown in FIG. FIG. 6 is a diagram for explaining unnecessary signal cancellation tuning. FIG. 7 is a partially enlarged cross-sectional view showing a base included in the electronic device shown in FIG. FIG. 8 is a partially enlarged cross-sectional view showing a base included in the electronic device shown in FIG. FIG. 9 is a cross-sectional view showing the stress relaxation layer of the electronic device shown in FIG. In the following, for convenience of explanation, the upper side of FIG. 2 is also referred to as “upper side” and the lower side is also referred to as “lower side”. Further, as shown in FIG. 1, the three axes orthogonal to each other are assumed to be the X axis, the Y axis, and the Z axis, and the thickness direction of the electronic device coincides with the Z axis.

  The electronic device 1 shown in FIG. 1 is a triaxial angular velocity sensor (physical quantity sensor), and independently detects an angular velocity ωx around the X axis, an angular velocity ωy around the Y axis, and an angular velocity ωz around the Z axis. can do. Such an electronic device 1 includes a package 2 in which a housing space S is formed, an IC (semiconductor device) 3 housed in the housing space S, and a stress relaxation layer 7 disposed on the IC 3 3. Two vibration elements 4, 5, 6.

Hereinafter, each of these units will be described in order.
≪Package≫
As shown in FIG. 2, the package 2 is interposed between a box-shaped base 21 having a recess 211 opened on the upper surface, a plate-shaped lid 22 that closes the opening of the recess 211, and the base 21 and the lid 22. And a seam ring 23 for joining them. The IC 3 and the vibration elements 4, 5, 6 are accommodated in the accommodation space S formed by closing the opening of the recess 211 with the lid 22. In addition, the atmosphere of the accommodation space S is not particularly limited, but is in a vacuum state (a reduced pressure state of 10 Pa or less), for example. Thereby, viscous resistance is reduced and the vibration elements 4, 5, and 6 can be driven efficiently.

-Base 21-
The base 21 has a substantially square plan view shape. In addition, it does not specifically limit as a planar view shape of the base 21, For example, a rectangle and circular may be sufficient.

  The concave portion 211 includes a first concave portion 211a that opens to the upper surface of the base 21, a second concave portion 211b that opens to a central portion excluding the edge of the bottom surface 211a ′ of the first concave portion 211a, and a bottom surface 211a of the first concave portion 211a. A third concave portion 211c and a fourth concave portion 211d that are open at the right side. The third recess 211c is provided so as to overlap with the adjustment vibration arms 441 and 442 of the vibration element 4 in plan view, and the fourth recess 211d is provided so as to overlap with the adjustment vibration arms 541 and 542 of the vibration element 5 in plan view. It has been. The third and fourth recesses 211c and 211d are shallower than the second recess 211b, and in the Z-axis direction, these bottom surfaces 211c ′ and 211d ′ are the bottom surface 211a ′ of the first recess 211a and the bottom surface of the second recess 211b. Is located between. By providing such a recess 211, the configuration of the base 21 is simplified.

  In addition, a plurality of notches 212 extending from the upper surface to the lower surface are formed on each side surface of the base 21.

  Such a base 21 can be formed, for example, by sintering a laminate of a plurality of ceramic green sheets such as aluminum oxide, aluminum nitride, silicon carbide, mullite, glass / ceramic. .

  Wiring 24 is arranged on such a base 21. The wiring 24 is disposed on the bottom surface (first surface) 211a ′ of the first recess 211a, and is disposed on the bottom surface of the base 21 and a plurality of internal terminals 241 that are electrically connected to the IC 3 via the bonding wires BW. And a plurality of external terminals 242 electrically connected to the corresponding internal terminals 241. Further, the wiring 24 has an internal wiring 243 formed in the base 21 and a castellation electrode 244 formed in the notch 212, and through these, the internal terminals 241 and the corresponding external terminals 242 are connected. Electrically connected. Such wiring 24 can be composed of, for example, tungsten (W), molybdenum (Mo), manganese (Mg), or the like, and is exposed from the base 21 (for example, the internal terminal 241, the external terminal 242, For the castellation electrode 244), a plated metal layer such as gold (Au) may be further formed on the surface thereof.

-Lid 22-
The lid 22 has a plate shape and is joined to the upper surface of the base 21 through a seam ring 23. The constituent material of the lid 22 is not particularly limited, but for example, an alloy such as Kovar is preferably used. Note that the lid 22 may be electrically connected to a ground wiring included in the wiring 24 via a seam ring 23, for example. Thereby, the lid 22 can function as a shield part that blocks noise from the outside of the package 2.

≪IC≫
IC3 is fixed to the bottom surface of the second recess 211b with silver paste or the like. Further, the IC 3 has a substantially rectangular plan view shape. As shown in FIG. 3, the outer shape of the plan view has a pair of outer edges (sides) 31 and 32 extending in the Y-axis direction and an X-axis direction. And a pair of extending outer edges (sides) 33 and 34.

The IC 3 includes, for example, an interface unit 3 i that communicates with an external host device, a driving element 4 that drives the vibration element 4, detects an angular velocity ωy applied to the vibration element 4, and a vibration element 5. In addition, a drive / detection circuit 3y that detects the angular velocity ωx applied to the vibration element 5 and a drive / detection circuit 3z that drives the vibration element 6 and detects the angular velocity ωz applied to the vibration element 6 are included. . Further, a plurality of connection terminals 39 are arranged on the upper surface of the IC 3, and these connection terminals 39 and the internal terminals 241 are connected via bonding wires BW. Thus, the IC 3 can communicate with the host device via the external terminal 242. The communication method of IC3 is not particularly limited, and for example, SPI (registered trademark) (Serial Peripheral Interface) or I ² C (registered trademark) (Inter-Integrated Circuit) can be used. Further, the IC 3 may have a select function for selecting a communication method, and the communication method may be selected from SPI and I ² C. Thereby, it becomes the highly convenient electronic device 1 corresponding to a plurality of communication methods.

  Here, as shown in FIG. 3, the plurality of connection terminals 39 are divided into three regions set on the upper surface of the IC 3, a first terminal arrangement region SS1, a second terminal arrangement region SS2, and a third terminal arrangement region SS3. Are arranged. The first terminal arrangement region SS1 is arranged along the outer edge (second outer edge) 33 and offset toward the outer edge (third outer edge) 31 side, and the second terminal arrangement region SS2 is arranged at the outer edge (first outer edge). ) 34 and the outer edge 31 side. The third terminal arrangement region SS3 is arranged along the outer edge (fourth outer edge) 32 and the outer edge 34 side. .

  In the first terminal arrangement area SS1, for example, a digital signal terminal for a slave select signal SS for selecting a communication method, a digital signal terminal for a data input signal MOSI, a digital signal terminal for a clock signal SCLK, and a data output signal Digital signal terminals such as MISO digital signal terminals are arranged together. The second terminal arrangement area SS2 and the third terminal arrangement area SS3 include, for example, a ground terminal for the ground GND, a power supply signal terminal for the power supply VDDI of the interface unit 3i, and power supplies for the drive / detection circuits 3x, 3y, and 3z. Analog signal terminals such as a power supply signal terminal for VDD and a test signal terminal for test are arranged together.

  As described above, by arranging the digital signal terminal and the analog signal terminal in different regions, mixing of the digital signal into the analog signal terminal (wiring) can be reduced. Therefore, it becomes the electronic device 1 which can reduce a noise and can perform more exact drive. In particular, in the present embodiment, since the first terminal arrangement region SS1 is arranged as far as possible from the second and third terminal arrangement regions SS2, SS3, the above effects can be more effectively exhibited.

≪Vibration element≫
-Vibration element 4-
The vibration element 4 is a so-called “H-type” gyro element and can detect an angular velocity ωy about the Y axis. As shown in FIG. 4, the vibrating element 4 includes a vibrating piece 40 made of quartz and an electrode (not shown) disposed on the vibrating piece 40. However, the material of the resonator element 40 is not limited to quartz, and for example, a piezoelectric material such as lithium tantalate or lithium niobate can also be used.

  The resonator element 40 has a plate shape having a spread in the xy plane defined by the x-axis (electric axis) and the y-axis (mechanical axis), which are crystal axes of quartz, and having a thickness in the z-axis (optical axis) direction. There is no. The vibrating piece 40 includes a base 41, a pair of drive vibrating arms 421 and 422 extending side by side from the base 41 on the −y axis side, and a pair of detection vibrations extending side by side from the base 41 to the + y axis side. Arms 431 and 432; a pair of adjustment vibrating arms 441 and 442 that extend from the base 41 to the + y-axis side and are located on both sides of the detection vibrating arms 431 and 432; a support 45 that supports the base 41; And a connecting portion 46 that connects the support portion 45.

  Such a vibration element 4 is fixed to the stress relaxation layer 7 in the support portion 45. Further, the vibration element 4 is fixed to the stress relaxation layer 7 using a conductive fixing member 8, and the vibration element 4 and the IC 3 are electrically connected via the fixing member 8 and the stress relaxation layer 7. Connected. The fixing member 8 is not particularly limited, and for example, a metal brazing material, a metal bump, a conductive adhesive, or the like can be used.

  The support portion 45 has a substantially “U” shape and is disposed so as to surround the pair of drive vibrating arms 421 and 422. The connecting portion 46 includes a beam portion 461 that connects an end portion on the −x axis side of the base portion 41 and an end portion on the −x axis side of the support portion 45, and an end portion and a support portion on the + x axis side of the base portion 41. 45 has a beam portion 462 that connects the + x-axis side end portions of 45 and a beam portion 463 that connects the end portions on both sides of the base portion 41 in the x-axis direction and the center portion of the support portion 45. In particular, in the present embodiment, the beam portions 461 and 462 have a shape extending from the base portion 41 in the + y axis direction and turned back in the −y axis direction, and the beam portion 463 meanders in the middle thereof. It has a shape having a curved portion 463a that is curved. Thereby, the connection part 46 can be made soft enough and generation | occurrence | production of an unnecessary vibration (especially vibration of a y-axis translation mode) can be reduced.

The drive vibrating arms 421 and 422 are provided with drive electrodes (not shown). By applying an oscillation drive signal (alternating voltage) from the IC 3 (drive / detection circuit 3y) to the drive electrodes, the drive mode indicated by the arrow A is changed. Excited. When the driving vibration arms 421 and 422 are vibrating in the driving mode, when an angular velocity ω around the detection axis _{J 4} is applied, is excited detection mode indicated by the arrow B, thereby, the detection vibration arms 431 and 432 Vibrates. The detection vibration arms 431 and 432 are provided with detection electrodes (not shown), and detection signals (charges) generated by the vibrations of the detection vibration arms 431 and 432 are extracted from the detection electrodes. Based on the extracted detection signal, the IC 3 (drive / detection circuit 3y) detects the angular velocity ω.

  Although not shown, adjustment vibration arms 441 and 442 are provided with adjustment electrodes (adjustment units) for unnecessary signal cancellation tuning (adjustment). Unnecessary signal cancellation tuning means that, for example, at least part of the unnecessary signal generated in the detection vibrations 431 and 432 due to manufacturing variation or the like is canceled by an adjustment signal having a phase opposite to that of the unnecessary signal. The adjustment is performed by removing a part and changing the charge amount of the adjustment signal generated in the adjustment vibration arms 441 and 442. By this work, unnecessary signals included in the detection signal when the drive vibrating arms 421 and 422 are vibrated in the drive mode in a state where the angular velocity ω is not applied to the vibration element 4 can be reduced. Therefore, the angular velocity ω can be detected with higher accuracy.

-Vibration element 5-
The vibration element 5 is a so-called “H-type” gyro element and can detect an angular velocity ωx around the X axis. Since such a vibration element 5 has the same configuration as that of the vibration element 4 described above except that the orientation of the state of the vibration element 5 arranged on the IC 3 is different, the description thereof is omitted.

-Vibration element 6
The vibration element 6 is a gyro element that can detect an angular velocity ωz around the Z axis. As shown in FIG. 5, the vibrating element 6 includes a vibrating piece 60 made of crystal and an electrode (not shown) disposed on the vibrating piece 60. However, the material of the resonator element 60 is not limited to quartz, and for example, a piezoelectric material such as lithium tantalate or lithium niobate can also be used.

  The resonator element 60 has a plate shape having a spread in the xy plane defined by the x-axis (electrical axis) and the y-axis (mechanical axis) which are crystal axes of the crystal and having a thickness in the z-axis (optical axis) direction. There is no. The vibrating piece 60 includes a base 61, a pair of detection vibrating arms 621 and 622 extending from the base 61 to both sides in the y-axis direction, and a pair of connecting arms 631 and 632 extending from the base 61 to both sides in the x-axis direction. A pair of drive vibration arms 641 and 642 extending from the tip of the connecting arm 631 to both sides in the y-axis direction, and a pair of drive vibration arms 643 and 644 extending from the tip of the connection arm 632 to both sides in the y-axis direction. A pair of support portions 651 and 652 that support the base portion 61, a pair of connection portions 661 and 662 that connect the support portion 651 and the base portion 61, and a pair of connection portions 663 that connect the support portion 652 and the base portion 61. , 664.

  Such a vibration element 6 is fixed to the stress relaxation layer 7 at the support portions 651 and 652. Further, the vibration element 6 is fixed to the stress relaxation layer 7 by using a fixing member 8, and the vibration element 6 and the IC 3 are electrically connected via the fixing member 8 and the stress relaxation layer 7. ing.

The drive vibrating arms 641 to 644 are provided with drive electrodes (not shown), and driving as indicated by an arrow C is performed by applying an oscillation drive signal (alternating voltage) to the drive electrodes from the IC 3 (drive / detection circuit 3z). The mode is excited. When the driving vibration arms 641 to 644 is vibrating in the driving mode, when an angular velocity ω around the detection axis J ₆ is applied, the detection mode as shown by the arrow D is excited, thereby, the detection vibration arms 621 , 622 vibrate. The detection vibrating arms 621 and 622 are provided with detection electrodes (not shown), and detection signals (charges) generated by the vibrations of the detection vibrating arms 621 and 622 are taken out from the detection electrodes. Based on the extracted detection signal, the IC 3 (drive / detection circuit 3z) detects the angular velocity ω.

  The configuration of the vibration elements 4, 5 and 6 has been described above. Next, the arrangement of the vibration elements 4, 5, and 6 on the IC 3 will be described.

First, the arrangement of the vibration element 4 will be described. Vibrating element 4, as shown in FIG. 3, the detection axis J ₄ are arranged to coincide with the Y-axis. Thereby, the angular velocity ωy can be detected by the vibration element 4. Further, the vibration element 4 is disposed at a position (near the corner located at the lower right in the drawing) that is offset toward the outer edge 32 side and the outer edge 34 side of the upper surface of the IC 3. The third terminal arrangement region SS3 is located on the + X axis side of the vibration element 4 (that is, between the vibration element 4 and the outer edge 32), and the −X axis side of the vibration element 4 (that is, the vibration element 4 and the outer edge). The second terminal arrangement region SS2 is located between the second terminal arrangement region SS2 and the second terminal arrangement region 31).

  The vibration element 4 is disposed so that the adjustment vibrating arms 441 and 442 protrude from the outer edge 34 of the IC 3 to the + Y axis side in a plan view and do not overlap with the IC 3 in a plan view. As a result, it is possible to prevent the IC 3 from being damaged during the above-described unnecessary signal cancellation tuning. Specifically, as shown in FIG. 6, unnecessary signal cancellation tuning is performed by irradiating the adjustment electrode 49 as the adjustment unit with the laser LL from above the vibration element 4 and removing a part of the adjustment electrode 49. In this case, the laser LL may pass through the adjustment vibrating arms 441 and 442 and irradiate a portion positioned below the vibrating element 4 in some cases. Therefore, by arranging the adjustment vibrating arms 441 and 442 so as not to overlap with the IC 3, even if the laser LL passes through the adjustment vibrating arms 441 and 442, the transmitted laser LL is not irradiated on the IC 3. Thereby, damage to IC3 can be prevented.

Further, as shown in FIG. 7, a third recess 211 c is located below the adjustment vibrating arms 441 and 442. Therefore, the bottom surface (second surface) of the adjustment vibrating arms 441 and 442 the third recess 211c 211c 'the distance _{D 3} between, the adjustment vibrating arms 441 and 442 bottom (first surface) of the first recess 211a 211a' distance can be longer than D ₁ of the and can be secured sufficiently large distance D _3. As a result, the scattered matter (spray) 49a removed from the adjustment electrode 49 provided on the lower surface of the adjustment vibration arms 441 and 442 is reduced from being rebounded on the bottom surface 211c ′ and reattaching to the adjustment vibration arms 441 and 442. The Further, the laser beam LL passes through the adjustment vibration arms 441 and 442 and is irradiated to the bottom surface 211c ′ positioned below, and the scattered matter 21a (part of the base 21) melted and scattered by the irradiation is adjusted vibration arms 441 and 442. Adhering to is reduced. This improves the efficiency and accuracy of unnecessary signal cancellation tuning. In addition, the vibration characteristics (vibration balance and the like) of the adjustment vibrating arms 441 and 442 are changed by the attached material (scattered matter 49a and 21a), and different electrodes are short-circuited through the attached material. be able to.

Here, the distance _{D 3,} but not limited to, e.g., 100 [mu] m or more, preferably lower than about 400 [mu] m. Thereby, while being able to fully exhibit the said effect, it can prevent that the 3rd recessed part 211c becomes deep too much, and can suppress the enlargement of the electronic device 1 and an intensity | strength fall. In particular, in the present embodiment, since the bottom surface 211c ′ is located between the bottom surface 211a ′ of the first recess 211a and the bottom surface of the second recess 211b in the Z-axis direction, by providing the third recess 211c, A decrease in the mechanical strength of the base 21 is suppressed small. However, the position of the bottom surface 211c ′ is not limited to this. For example, the bottom surface 211c ′ may be flush with the bottom surface of the second recess 211b, or may be lower than the bottom surface of the second recess 211b (−Z-axis side). ).

  The vibration element 4 of the present embodiment is disposed so that the entire area of the adjustment vibration arms 441 and 442 does not overlap with the IC 3 in plan view. However, the arrangement of the vibration element 4 is not limited to this and is adjusted. It suffices that at least the mass adjustment region (region irradiated with the laser LL) of the vibrating arms 441 and 442 is arranged so as not to overlap with the IC 3. In addition, the third recess 211c of the present embodiment is provided so as to overlap the detection vibrating arms 431 and 432 and the adjustment vibrating arms 441 and 442 in plan view, but the configuration of the third recess 211c is at least adjusted. If it arrange | positions so that it may overlap with the mass adjustment area | region (area | region where laser LL is irradiated) of the vibrating arms 441 and 442, it will not specifically limit.

Next, the arrangement of the vibration element 5 will be described. Vibrating element 5, as shown in FIG. 3, the detection axis J ₅ are arranged to coincide with the X axis. Thereby, the angular velocity ωx can be detected by the vibration element 5. Further, the vibration element 5 is disposed at a position (near the corner located at the lower left in the drawing) that is offset toward the outer edge 32 side and the outer edge 33 side of the upper surface of the IC 3. Therefore, the vibration element 5 is located on the −Y axis side (that is, between the vibration element 4 and the outer edge 33) with respect to the vibration element 4. The first terminal arrangement region SS1 is located on the −X axis side of the vibration element 5 (that is, between the vibration element 5 and the outer edge 31). Further, the vibration element 5 is arranged such that the adjustment vibration arms 541 and 542 protrude from the outer edge 32 of the IC 3 to the + X axis side in a plan view. Thereby, similarly to the vibration element 4 described above, it is possible to prevent the IC 3 from being damaged during unnecessary signal cancellation tuning.

Further, as shown in FIG. 8, a fourth recess 211 d is located below the adjustment vibrating arms 541 and 542. Therefore, the distance _{D 4} between the adjustment vibrating arms 541 and 542 and the bottom surface of the fourth recess 211d (second surface) 211d 'can be secured sufficiently large. Thereby, the effect similar to the 3rd recessed part 211c mentioned above can be exhibited. Note that the configuration of the fourth recess 211d is the same as that of the third recess 211c described above, and a description thereof will be omitted.

  The vibration element 5 of the present embodiment is arranged so that the entire area of the adjustment vibration arms 541 and 542 does not overlap with the IC 3 in plan view. However, the arrangement of the vibration element 5 is not limited to this, and adjustment is performed. It suffices that at least the mass adjustment region (region irradiated with the laser LL) of the vibrating arms 541 and 542 is arranged so as not to overlap with the IC 3.

Next, the arrangement of the vibration element 6 will be described. Vibrating element 6, as shown in FIG. 3, the detection axis J ₆ is arranged to coincide with the Z-axis. Thereby, the angular velocity ωz can be detected by the vibration element 6. The vibration element 6 is disposed at a position offset toward the outer edge 31 on the upper surface of the IC 3. Therefore, the vibration element 6 is positioned on the −X axis side (that is, between the vibration elements 4 and 5 and the outer edge 31) with respect to the vibration elements 4 and 5. Further, the first terminal arrangement region SS1 is located on the −Y axis side of the vibration element 6 (that is, between the vibration element 6 and the outer edge 33), and the + Y axis side (that is, between the vibration element 6 and the outer edge 34). ) Is the second terminal arrangement region SS2.

In particular, the vibration element 6 is arranged closer to the second terminal arrangement region SS2 than the first terminal arrangement region SS1. In other words, the vibration element 6 is disposed such that the separation distance D _SS2 from the second terminal arrangement region SS2 is shorter than the separation distance D _SS1 from the first terminal arrangement region SS1. Thereby, the vibration element 6 can be separated as much as possible from the first terminal arrangement region SS1, and mixing of digital signals into the vibration element 6 is reduced. Therefore, it is possible to reduce the mixing of noise into the drive signal and the detection signal, and the electronic device 1 can be driven more accurately.

In addition, the vibration element 6 is disposed so that the arrangement direction of the support portions 651 and 652 (the extending direction of the detection vibration arms 621 and 622) substantially coincides with the Y-axis direction. In the vibration element 6, the length in the direction in which the support portions 651 and 652 are arranged is longer than the length in the direction perpendicular to this (the extending direction of the connecting arms 631 and 632). Therefore, by arranging in this way, the space on the upper surface of the IC 3 can be effectively utilized. Therefore, for example, the distance between the outer edges 31 and 33 can be shortened, and the IC 3 can be downsized. However, the arrangement of the vibration element 6 is not limited to this, and for example, the arrangement direction of the support portions 651 and 652 may be arranged to coincide with the X axis. In this case, since the separation distance _DSS1 can be increased as compared with the present embodiment, the mixing of noise into the vibration element 6 can be more effectively reduced.

  As described above, the vibration elements 4 and 5 are arranged in the Y-axis direction in the region on the outer edge 32 side of the upper surface of the IC 3, and the vibration element 6 is disposed in the region on the outer edge 31 side of the upper surface of the IC 3, These three vibrating elements 4, 5, 6 can be arranged in a relatively small space. For this reason, the IC 3 can be reduced in size, and accordingly, the electronic device 1 can be reduced in size.

≪Stress relaxation layer≫
As shown in FIGS. 1 and 3, the stress relaxation layer 7 is provided on the upper surface of the IC 3. The stress relaxation layer 7 is provided between the IC 3 and the vibration element 4. The stress relaxation layer 7 is provided between the first stress relaxation layer 71 having the vibration element 4 disposed on the upper surface and the IC 3 and the vibration element 5. A second stress relaxation layer 72 in which the vibration element 5 is disposed, and a third stress relaxation layer 73 provided between the IC 3 and the vibration element 6 and having the vibration element 6 disposed on an upper surface thereof. . By providing the first, second, and third stress relaxation layers 71, 72, and 73, the impact received by the package is reduced, and the impact is hardly transmitted to the vibration elements 4, 5, and 6. In addition, the stress generated due to the difference in thermal expansion between the IC 3 and the vibration elements 4, 5, 6 is relieved, and the vibration elements 4, 5, 6 are difficult to deform (bend). Therefore, by providing the first, second, and third stress relaxation layers 71, 72, and 73, the mechanical strength of the electronic device 1 can be increased, and the angular velocities ωx, ωy, and ωz can be detected more accurately. Can do.

  Since the first, second, and third stress relaxation layers 71, 72, and 73 have the same configuration as each other, the first stress relaxation layer 71 will be described below as a representative. The description of the stress relaxation layers 72 and 73 is omitted.

  For example, as shown in FIG. 9, the first stress relaxation layer 71 is formed on the insulating film 711 stacked on the upper surface of the IC 3 (on the passivation film 38), the insulating film 711, and is electrically connected to the IC 3. A wiring layer 712, an insulating film 713 formed over the wiring layer 712 and the insulating film 711, and a wiring layer 714 formed over the insulating film 713 and electrically connected to the wiring layer 712. Yes. The vibration element 4 is fixed to the terminal 714 ′ provided on the wiring layer 714 through the fixing member 8. Thereby, the IC 3 and the vibration element 4 are electrically connected via the wiring layers 732 and 734. Thus, the wiring layers 732 and 734 function as wiring (rearrangement wiring) for electrically connecting the IC 3 and the vibration element 4. Therefore, the terminal 37 for connecting to the vibration element 4 of the IC 3 can be freely arranged without considering the configuration of the vibration element 4 (particularly the position of the terminal).

  The insulating films 711 and 712 are each made of an elastic resin material. The resin material is not particularly limited, and polyimide, silicone-modified polyimide resin, epoxy resin, silicone-modified epoxy resin, acrylic resin, phenol resin, silicone resin, modified polyimide resin, benzocyclobutene, polybenzoxazole, and the like are used. Can do.

  In this embodiment, the stress relaxation layer 7 is divided into first, second, and third stress relaxation layers 71, 72, and 73. However, the first, second, and third stress relaxation layers 71 and 72 are divided. , 73 may be integrally formed.

Second Embodiment
10 and 11 are partially enlarged cross-sectional views of a base included in an electronic device according to the second embodiment of the present invention.

  Hereinafter, the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

  The second embodiment is the same as the first embodiment described above except that a metal film is provided on the bottom surfaces (second surfaces) of the third and fourth recesses.

  In the electronic device 1 of this embodiment, as shown in FIG. 10, a metal film (protective film) 29 is provided on the bottom surface 211c 'of the third recess 211c. The material of the metal film 29 is not particularly limited, but the light absorption rate of the laser LL is preferably higher than the light absorption rate of the laser LL of the constituent material of the base 21. In addition, the material of the metal film 29 preferably has a specific gravity higher than that of the constituent material of the base 21. Such a metal film 29 is not particularly limited as long as the above-described conditions are satisfied. For example, an underlayer of tungsten (W), molybdenum (Mo), manganese (Mg), gold (Au), or the like is used. It can comprise with the metal film which laminated | stacked these plating layers. Such a configuration is also preferable in that the metal film 29 can be formed together with the wiring 24 (internal wiring 243).

  By providing such a metal film 29, it is possible to further reduce the adhesion of the scattered objects 49a and 21a to the adjustment vibrating arms 441 and 442 as described in the first embodiment. More specifically, the laser LL of the constituent material of the metal film 29 is made higher than that of the constituent material of the base 21 to reduce the laser LL transmitted through the metal film 29 and irradiated on the base 21. Therefore, the amount of scattered matter 21a can be reduced accordingly. However, in this case, since the metal film 29 may melt and scattered matter may be generated from the metal film 29, the specific gravity of the constituent material of the metal film 29 is made heavier than the constituent material of the base 21. The scattering of the scattered material from the metal film 29 is reduced. Furthermore, since the metal film 29 is softer than the base 21, the scattered matter 49a is less likely to rebound, and reattachment of the scattered matter 49a to the adjustment vibrating arms 441 and 442 can be reduced.

  The thickness of the metal film 29 is not particularly limited, but can be made thicker than the internal wiring 243, for example. Specifically, it can be about 2 μm or more and 10 μm or less. Thereby, more laser LL can be absorbed by the metal film 29, and the amount of laser LL irradiated to the base 21 can be further suppressed.

  As described above, the metal film 29 is provided on the bottom surface 211c ′ of the third recess 211c. Similarly, as shown in FIG. 11, the metal film 29 is also applied to the bottom surface 211d ′ of the fourth recess 211d. Is provided. Thereby, the effect similar to the above can be exhibited.

  Here, the metal film 29 may be electrically connected to a constant potential. That is, the metal film 29 may be electrically connected to a ground wiring included in the wiring 24, for example. Thereby, the metal film 29 functions as a shield layer, and for example, electrostatic coupling between the detection electrodes on the detection vibrating arms 431 and 432 (531 and 532) and the wiring around the detection electrodes can be reduced. For this reason, the mixing of noise into the detection electrode is reduced, and the angular velocity ωy (ωx) can be detected with higher accuracy.

  Conversely, the metal film 29 may be electrically insulated from the wiring 24 (IC3). That is, the metal film 29 may be in an electrically floating state from the wiring 24. As a result, even if the metal film 29 and one of the wirings included in the wiring 24 are electrically connected to each other due to the volume of the scattered material 49a and the scattering material from the metal film 29 onto the base 21. Problems such as short circuit cannot occur. Therefore, electrical stability can be ensured.

  Also according to the second embodiment, the same effects as those of the first embodiment described above can be exhibited.

[Electronics]
Next, an electronic apparatus to which the electronic device 1 is applied will be described in detail with reference to FIGS.

  FIG. 12 is a perspective view illustrating a configuration of a mobile (or notebook) personal computer to which an electronic apparatus including the electronic device of the present invention is applied.

  In this figure, a personal computer 1100 includes a main body portion 1104 provided with a keyboard 1102 and a display unit 1106 provided with a display portion 1108. The display unit 1106 is rotated with respect to the main body portion 1104 via a hinge structure portion. It is supported movably. Such a personal computer 1100 incorporates an electronic device 1 that functions as angular velocity detection means (gyro sensor). Therefore, the personal computer 1100 can exhibit higher performance and higher reliability.

  FIG. 13 is a perspective view illustrating a configuration of a mobile phone (including PHS) to which an electronic apparatus including the electronic device of the invention is applied.

  In this figure, a cellular phone 1200 includes a plurality of operation buttons 1202, an earpiece 1204, and a mouthpiece 1206, and a display unit 1208 is disposed between the operation buttons 1202 and the earpiece 1204. Such a cellular phone 1200 incorporates an electronic device that functions as angular velocity detection means (gyro sensor). Therefore, the cellular phone 1200 can exhibit higher performance and higher reliability.

  FIG. 14 is a perspective view showing a configuration of a digital still camera to which an electronic apparatus including the electronic device of the present invention is applied. In this figure, connection with an external device is also simply shown.

  The digital still camera 1300 generates an imaging signal (image signal) by photoelectrically converting an optical image of a subject using an imaging element such as a CCD (Charge Coupled Device). A display unit 1310 is provided on the back of a case (body) 1302 in the digital still camera 1300, and is configured to perform display based on an imaging signal from the CCD. The display unit 1310 displays a subject as an electronic image. Functions as a viewfinder. A light receiving unit 1304 including an optical lens (imaging optical system), a CCD, and the like is provided on the front side (the back side in the drawing) of the case 1302. When the photographer confirms the subject image displayed on the display unit 1310 and presses the shutter button 1306, the CCD image pickup signal at that time is transferred and stored in the memory 1308.

  In this digital still camera 1300, a video signal output terminal 1312 and an input / output terminal 1314 for data communication are provided on the side surface of the case 1302. As shown in the figure, a television monitor 1430 is connected to the video signal output terminal 1312 and a personal computer 1440 is connected to the input / output terminal 1314 for data communication as necessary. Further, the imaging signal stored in the memory 1308 is output to the television monitor 1430 or the personal computer 1440 by a predetermined operation.

  Such a digital still camera 1300 incorporates an electronic device 1 that functions as an angular velocity detection means (gyro sensor).

  In addition to the personal computer (mobile personal computer) shown in FIG. 12, the mobile phone shown in FIG. 13, and the digital still camera shown in FIG. Inkjet printers), laptop personal computers, televisions, video cameras, video tape recorders, car navigation devices, pagers, electronic notebooks (including those with communication functions), electronic dictionaries, calculators, electronic game devices, word processors, workstations, televisions Telephone, crime prevention TV monitor, electronic binoculars, POS terminal, medical equipment (for example, electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring devices, instruments Class (eg, vehicle, navigation Aircraft, gauges of a ship), can be applied to a flight simulator or the like.

[Moving object]
Next, a moving body to which the electronic device shown in FIG. 1 is applied will be described in detail with reference to FIG.

  FIG. 15 is a perspective view showing a configuration of an automobile to which a moving object including the electronic device of the present invention is applied.

  The automobile 1500 incorporates an electronic device 1 that functions as angular velocity detection means (gyro sensor), and the attitude of the vehicle body 1501 can be detected by the electronic device 1. The detection signal of the electronic device 1 is supplied to the vehicle body posture control device 1502, and the vehicle body posture control device 1502 detects the posture of the vehicle body 1501 based on the signal and controls the stiffness of the suspension according to the detection result. The brakes of the individual wheels 1503 can be controlled. In addition, such posture control can be used by a biped robot or a radio control helicopter. As described above, the electronic device 1 is incorporated in realizing the attitude control of various moving objects.

  As mentioned above, although the electronic device, the electronic apparatus, and the moving body of the present invention have been described based on the illustrated embodiments, the present invention is not limited to this, and the configuration of each unit is an arbitrary configuration having the same function Can be substituted. In addition, any other component may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

  In the above-described embodiment, the three vibration elements are provided. However, the remaining vibration elements may be omitted as long as at least one of the angular velocities ωx and ωy is provided.

  In the above-described embodiments, the electronic device as the angular velocity sensor has been described. However, the electronic device is not limited to the angular velocity sensor, and may be, for example, an acceleration sensor that can detect acceleration, or an angular velocity. And a composite sensor that can detect acceleration and acceleration. Further, there is no need to detect a physical quantity, and for example, an oscillator may be used.

DESCRIPTION OF SYMBOLS 1 ... Electronic device 2 ... Package 21 ... Base 21a ... Scattered object 211 ... Recessed part 211a ... 1st recessed part 211a '... Bottom 211b ... 2nd recessed part 211c ... 3rd recessed part 211c' ... Bottom 211d …… Fourth recess 211d ′ …… Bottom surface 212 …… Notch 22 …… Lid 23 …… Seam ring 24 …… Wiring 241 …… Internal terminal 242 …… External terminal 243 …… Internal wiring 244 …… Castellation Electrode 29 …… Metal film 3 …… IC
3i …… Interface portion 3x, 3y, 3z …… Drive / detection circuit 31, 32, 33, 34 …… Outer edge 37 …… Terminal 38 …… Passivation film 39 …… Connection terminal 4 …… Vibration element 40 …… Vibration piece 41... Base 421, 422... Drive vibration arm 431, 432... Detection vibration arm 441, 442... Adjustment vibration arm 45 .. Support portion 46 .. Connection portion 461, 462, 463. Curved portion 49 …… Adjustment electrode 49a …… Spattering object 5 …… Vibration element 541, 542 …… Adjustment vibration arm 6 …… Vibration element 621,622… Detection vibration arm 631,632 ... Connection arm 641,642,643 , 644... Drive vibration arm 651, 652... Support portion 661, 662, 663, 664... Connection portion 7 .. Stress relaxation layer 71. 12 ... Wiring layer 713 ... Insulating film 714 ... Wiring layer 714 '... Terminal 72 ... Second stress relaxation layer 73 ... Third stress relaxation layer 8 ... Fixing member 60 ... Vibrating piece 61 ... Base DESCRIPTION OF SYMBOLS 1100 …… Personal computer 1102 …… Keyboard 1104 …… Main unit 1106 …… Display unit 1108 …… Display unit 1200 …… Mobile phone 1202 …… Operation buttons 1204 …… Earpiece 1206 …… Sent mouth 1208 …… Display unit 1300 …… Digital still camera 1302 …… Case 1304 …… Light receiving unit 1306 …… Shutter button 1308 …… Memory 1310 …… Display unit 1312 …… Video signal output terminal 1314 …… Input / output terminal 1430 …… TV monitor 1440 …… Personal computer 1500 ... car 1501 ... Body 1502 ...... vehicle body attitude control unit 1503 ...... wheel BW ...... bonding wire D _SS1, D SS2 _...... distance _{J 4, J 5, J 6} ...... detection axis LL ...... laser S ...... accommodating space SS1 ...... First terminal arrangement area SS2 ... Second terminal arrangement area SS3 ... Third terminal arrangement area ω, ωx, ωy, ωz ... Angular velocity

Claims (13)

Base and
A semiconductor device disposed on the base;
A vibration element disposed in the semiconductor device,
The vibrating element includes a vibrating arm connected to the base and having an adjustment unit, and is arranged so that at least a part of the vibrating arm does not overlap the semiconductor device in plan view,
The base is positioned so as to overlap a first surface on which a terminal electrically connected to the semiconductor device is provided, and the vibrating arm in plan view, and the vibration element in the thickness direction of the base And a second surface having a larger separation distance than the first surface.   The electronic device according to claim 1, further comprising a protective layer provided on the second surface.   The electronic device according to claim 2, wherein the light absorption rate of the constituent material of the protective layer is higher than the light absorption rate of the base constituent material.   The electronic device according to claim 2, wherein a specific gravity of a constituent material of the protective layer is higher than a specific gravity of the base constituent material.   The electronic device according to claim 2, wherein the protective layer has conductivity and is electrically connected to a constant potential.   The electronic device according to claim 2, wherein the protective layer is provided on the base and insulated from the semiconductor device. The base has a first recess opening in one main surface, and a second recess and a third recess opening in the bottom of the first recess,
The semiconductor device is disposed on the bottom surface of the second recess,
The bottom surface of the first recess is the first surface,
The electronic device according to any one of claims 1 to 6, wherein a bottom surface of the third recess is the second surface.   The electronic device according to claim 7, wherein the second surface is located between the first surface and a bottom surface of the second recess in the thickness direction of the base.   The electronic device according to claim 1, wherein a distance between the adjustment vibrating arm and the second surface is 100 μm or more and 400 μm or less.   The electronic device according to claim 1, wherein the vibration element can detect a physical quantity.   The electronic device according to claim 10, wherein a plurality of the vibration elements are arranged in the semiconductor device.   An electronic apparatus comprising the electronic device according to claim 1.   A moving body comprising the electronic device according to claim 1.

Images