JP2016085151A - Optical measurement device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical characteristic measurement device that occupies a smaller space while maintaining accuracy of optical characteristics measurement of a light emitting element.SOLUTION: An optical measurement device 1 is provided with a second rotation table 3 that rotates to convey light emitting elements W. Pockets 31 for storing the light emitting elements W inside thereof are formed on an upper surface of the second rotation table 3. The upper surface of the second rotation table 3 is covered by an immobile cover 33. The optical measurement device 1 is further provided with: a light radiation hole 35 penetrating the cover 33; a probe 38 that is disposed on a side of a lower surface of the second rotation table 3 and inserted from the lower surface of the second rotation table 3 to be moved to the upper surface; and a light receiving element 39 that is disposed on a side of the upper surface of the second rotation table 3.SELECTED DRAWING: Figure 4

Description

  The present invention relates to an optical measurement apparatus that measures optical characteristics of a light emitting element.

  A light-emitting element such as an LED is judged to be good or bad after undergoing a composite test such as electrical characteristics, appearance inspection, and optical characteristics in a subsequent process of the manufacturing process. Various tests in this subsequent process are often performed in a clean booth equipped with an air supply / exhaust system and ensuring a high degree of air cleanliness. Since the running cost of the air supply / exhaust system that affects the manufacturing cost of the light emitting element is proportional to the volume of the clean booth, it is desirable that the clean booth has a small capacity as much as possible.

  Regarding the optical characteristic test, a light amount measurement system including an integrating sphere is generally used to measure the light amount of a light emitting element such as an LED. The integrating sphere has a spherical inner space, and a diffuse reflection material is applied to the inner wall surface. In the light quantity measurement system, disturbance light such as ambient light in the clean booth is shielded by arranging the light emitting element in the internal space of the integrating sphere. The light quantity measurement system also reflects the light emitted from the light emitting element repeatedly in the integrating sphere, making the inner surface of the integrating sphere uniform illumination, and the proportional relationship between the light quantity of the light emitting element and the light quantity acquired from the inner surface of the integrating sphere. Based on the above, the light quantity of the light emitting element is measured. As a result, the light quantity measurement system can reduce the disturbance light, the incident position dependency of the light emitting element, the incident angle dependency of the light emitting element, and the like, and can perform highly accurate measurement.

  Further, when measuring the amount of light, the electrode surface of the light emitting element and the probe are surely aligned and contacted with a constant load and fixed during the test. For this reason, the light quantity measurement system includes a clamping unit that suppresses the light emitting element. As the clamping means, for example, a mode in which a non-light emitting region existing in an edge portion of the light emitting element among the light emitting surfaces of the light emitting element is suppressed with a lever or the like, or a side surface of the light emitting element is sandwiched with a lever is proposed. .

Utility Model Registration No. 3173730 JP 2012-026868 A

  In recent years, for the purpose of reducing the capacity of a clean booth, the area occupied by each device for electrical characteristics and appearance inspection has been decreasing. However, with respect to an apparatus for measuring optical characteristics, there is a limit to the reduction of the occupied area because a large integrating sphere is required for the light emitting element.

  The present invention has been proposed in order to solve the above-described problems, and provides an optical characteristic measuring apparatus that achieves a small occupied area while maintaining the accuracy of the optical characteristic measurement of a light emitting element. Objective.

  An optical measurement apparatus according to the present invention is an optical measurement apparatus for measuring optical characteristics of a light emitting element, and is formed on a rotary table that conveys the light emitting element by rotation and on the upper surface of the rotary table, and accommodates the light emitting element therein. A pocket that covers the upper surface of the rotary table, a light emission hole that is formed on a movement locus of the pocket and that penetrates the cover, and is positioned corresponding to the light emission hole, and the rotation A probe that is disposed on the lower surface side of the table, is inserted from the lower surface of the rotary table and protrudes into the pocket, and an imaging element that is positioned corresponding to the light emission hole and is disposed on the upper surface side of the rotary table; It is characterized by providing.

  The pocket and the cover may serve as a light shielding unit for the light emitting element.

  The pocket and the cover may be positioning means for supporting the light emitting element in contact with the probe from all sides and from above.

  The rotary table further includes another rotary table that conveys the light emitting element from the supply side to the discharge side, and one or a plurality of processing units that are disposed along the other rotary table and process the light emitting element. The light-emitting element connected to the other rotary table on the path, detached from the other rotary table, may be conveyed by rotation, and the light-emitting element may be returned to the other rotary table.

  As one of the processing means, a heating means for heating the light emitting element, which is positioned around the other rotary table and upstream of the rotary table and heating the light emitting element, and as one of the processing means, the another rotation table Around the table, between the heating means and the rotary table, an electrical characteristic measuring means for inspecting electrical characteristics of the light emitting element heated by the heating means, and before reaching the light emission hole of the rotary table And a cooling section that cools the light emitting elements inside the turntable covered with the cover.

  According to the present invention, the integrating sphere required for measuring the optical characteristics of the light emitting element can be omitted, and the downsizing of the optical measuring device can be achieved. Therefore, the maintenance cost of the clean booth can be reduced.

It is a top view of the optical measuring device concerning this embodiment, the 1st turntable is permeate | transmitted, and the outer extension is shown with the dotted line. It is sectional drawing of the optical measuring device which concerns on this embodiment. It is a top view which shows the state which removed the cover of the 2nd rotation table with which the optical measuring device which concerns on this embodiment is provided. It is side surface sectional drawing of the 2nd turntable with which the optical measuring device concerning this embodiment is provided. It is side surface sectional drawing which shows the state of the light emitting element at the time of the measurement of the optical characteristic by the optical measuring device which concerns on this embodiment. It is a top view of the optical measuring device which concerns on a modification.

(First embodiment)
The optical measuring device 1 shown in FIGS. 1 and 2 performs various processes while transporting the light emitting element W. The light emitting element W has a thin plate-like outer shape, and two opposed flat surfaces are divided into an electrode surface and a light emitting surface, and is, for example, an LED chip. The light emitting surface has a part of the region that emits light and a remaining part that does not emit light. The various processes include at least measurement of optical characteristics of the light emitting element W. The optical characteristics are, for example, optical power, spectrum, chromaticity, luminous intensity and the like.

  In the optical measuring device 1, the first rotary table 2 and the second rotary table 3 that rotate in the circumferential direction while holding the light emitting element W are arranged on the frame 12 in a connected manner on the path. The optical measuring apparatus 1 aligns and conveys the light emitting elements W along the outer peripheries of the first rotary table 2 and the second rotary table 3. The 1st turntable 2 and the 2nd turntable 3 are horizontal boards, and are arranged so that a part may overlap in the perpendicular direction. The light emitting element W is exchanged at this overlapping position.

  Further, the optical measuring apparatus 1 arranges various processing means for processing the light emitting element W around the first rotary table 2 and the second rotary table 3. Around the first turntable 2, a supply unit 4 that supplies the light emitting elements W and a housing unit 10 that houses the light emitting elements W that have been subjected to various processes are disposed. Between the supply unit 4 and the housing unit 10, the heating unit 5 that heats the light emitting element W to simulate a high temperature environment from the upstream in the transport direction, and the electrical characteristic measurement unit that measures the electrical characteristics of the heated light emitting element W 6 and an appearance inspection unit 9 for inspecting the appearance of the light emitting element W such as scratches and dirt are juxtaposed just below the outer periphery of the first rotary table 2.

  The second turntable 3 is connected to the first turntable 2 on the path between the electrical characteristic measurement unit 6 and the appearance inspection unit 9. The second turntable 3 is provided with each facility for measuring optical characteristics. That is, each facility for cooling the heated light emitting element W, fixing the position of the light emitting element W at the time of measurement, blocking disturbance light at the time of measurement, energizing, and receiving light are arranged.

  The optical measuring device 1 supplies the light emitting element W to the first turntable 2 and transports it in the circumferential direction, and the second turntable 2 and the second turntable 3 are overlapped with each other from the first turntable 2 to the second turntable 2. The light emitting element W is transferred to the rotating table 3 and conveyed in the circumferential direction, and the light emitting element W is returned from the second rotating table 3 to the first rotating table 2 and conveyed in the circumferential direction. During the conveyance, the optical measuring device 1 heats the light emitting element W to measure the electrical characteristics under a high temperature environment, cools the light emitting element W, measures the optical characteristics at the optical characteristic measuring position 37, and The appearance is inspected, and finally the light emitting element W is accommodated.

  If it explains in full detail about each part, the mount 12 will be a rectangular parallelepiped base in which the 1st turntable 2, the 2nd turntable 3, and various processing means are installed. The gantry 12 houses a control device such as a computer and a driver, a power source, cables, a vacuum pump, an air pipe, and the like, and controls driving of the first rotary table 2, the second rotary table 3, and various processing means. doing.

  The first turntable 2 is a horizontal plate having suction nozzles 21 on the outer periphery, and has a shape such as a disk or a star that expands radially around one point. The first turntable 2 rotates intermittently by a predetermined angle in the circumferential direction. The power source of the first rotary table 2 is a direct drive motor 22. The first rotary table 2 is installed on the gantry 12 via a direct drive motor 22.

  The suction nozzle 21 is an example of a holding unit that holds and removes the light emitting element W. A plurality of suction nozzles 21 are attached to the outer periphery of the first turntable 2 at equal circumferential positions and at the same distance from the center of the first turntable 2. The suction nozzle 21 is hollow and has one end opened, and the open end is installed downward. The inside of the suction nozzle 21 communicates with a pneumatic circuit of a negative pressure generator such as a vacuum pump or an ejector. The suction nozzle 21 sucks the light emitting element W at the opening end when negative pressure is generated in the pneumatic circuit, and detaches the light emitting element W by breaking the vacuum or releasing the atmosphere.

  The direct drive motor 22 is installed on the upper surface of the gantry 12. The direct drive motor 22 is intermittently rotated by one pitch under the control of a computer and a driver in the gantry 12. The pitch is equal to the arrangement interval of the suction nozzles 21. That is, the suction nozzle 21 follows a common movement locus with the intermittent rotation of the first turntable 2 and stops at a common stop position. Each processing means is installed at a stop position of the suction nozzle 21.

  As shown in FIG. 2, an advance / retreat drive device 23 is installed immediately above the first rotary table 2 at the installation position of the processing means. The advance / retreat drive device 23 lowers the suction nozzle 21 toward the processing means. For example, the suction nozzle 21 is attached to the first rotary table 2 via a cylindrical bearing having an axis in the vertical direction, and can move up and down by sliding inside the bearing. The suction nozzle 21 is constantly urged upward by a compression spring 234. The advancing / retreating drive device 23 includes a rod 233 that extends toward the head of the suction nozzle 21, a rotation motor 231 that applies axial thrust to the rod 233, and a cam mechanism 232, and the suction nozzle 21 is connected to the compression spring 234. Push down against the force.

  Specifically, the advancing / retreating drive device 23 generates a thrust by the rotary motor 231, converts the thrust into a linear thrust along the axis of the suction nozzle 21 by the cam mechanism 232 and the rod 233, and the compression spring 234 by the rod 233. The suction nozzle 21 is pushed so as to resist the urging force. The light emitting element W held by the suction nozzle 21 is placed on the stage of the processing means when the suction nozzle 21 is lowered, and is subjected to processing according to the type of the processing means. When the thrust of the rotary motor 231 is released, the suction nozzle 21 is raised toward the original position by the urging force of the compression spring 234 while holding the light emitting element W.

  The supply unit 4 moves the light emitting element W to the removal position. The supply unit 4 is, for example, an XY stage, a parts feeder, or a wafer holder. The XY stage has a flat tray in which the light emitting elements W are arranged in a two-dimensional array, and moves the tray in a two-dimensional direction in which the plane of the flat plate expands. The parts feeder aligns the inserted individual light emitting elements W on the rail and moves them to the take-out position. The ring holder holds a wafer ring in which the light emitting elements W are bonded in a two-dimensional array, and moves the wafer ring in a two-dimensional direction in which the ring surface expands.

  The supply unit 4 of this embodiment is a ring holder that holds the wafer ring perpendicular to the horizontal plane in which the first turntable 2 extends. A pickup unit 41 of the light emitting element W is interposed between the ring holder and the first rotary table 2. The pickup unit 41 mediates transfer of the light emitting element W of the first rotary table 2 with the ring holder.

  The pickup unit 41 is configured by arranging suction nozzles 411 radially. The suction nozzle 411 is disposed on a common rotation surface perpendicular to both the ring holder and the first turntable 2, and has an opening for sucking the light emitting element W outward in the radial direction of the radiation. The pickup unit 41 takes out the light emitting element W with the suction nozzle 411 facing the ring holder, and rotates the suction nozzle 411 upward so as to face the suction nozzle 21 of the first rotary table 2 so that the light emitting element W Delivered to one rotation table 2.

  The heating unit 5 has a heating table 51. The heating table 51 is a disk made of a thermally conductive metal and rotates in the circumferential direction. A plurality of pockets are provided on the upper surface of the heating table 51. The pocket accommodates a light emitting element to be heated. The pockets are arranged in a line along the circumference of the heating table 51. The arrangement line connecting the arrangement positions of the pockets and the movement locus of the suction nozzle 21 of the first rotary table 2 overlap at one point. The light emitting element W is delivered at this overlapping point.

  The heating unit 5 includes a heater such as a heat transfer coil that converts electric power into heat. The heating table 51 is heated by a heater and transfers heat to the light emitting element W in the pocket. The light-emitting element W accommodated in the pocket is desired to be suitable for the electrical property test through the heating table 51 until it goes around the arrangement line and returns to the original position according to the rotation of the heating table 51. Heated to temperature.

  The electrical characteristic measurement unit 6 has a contact such as a metal plate or a pin arranged corresponding to the electrode of the light emitting element W. The contact is made of, for example, an alloy such as copper or beryllium copper, stainless steel, tungsten, an alloy thereof, or a superalloy. This contactor is in electrical contact with the electrode surface of the light emitting element W conveyed to the electrical characteristic measurement unit 6 by the suction nozzle of the first rotary table. The electrical property measurement unit 6 measures electrical properties such as voltage, current, resistance, or frequency of the light emitting element W by flowing current or applying voltage to the light emitting element W through the contact. Either a single contact method in which application and measurement are performed with a common contact or a Kelvin contact method in which application and measurement are performed with separate contacts may be employed.

  As shown in FIGS. 1 and 3, the second turntable 3 has a disk shape. A plurality of pockets 31 are formed on the upper surface of the second turntable 3. The pockets 31 are arranged in a line along the circumference. The center of the lower surface of the second rotary table 3 is connected to the direct drive motor 32. The second rotary table 3 is intermittently rotated by a predetermined angle in the circumferential direction by the direct drive motor 32.

  The rotation pitch angle of the second turntable 3 is the same as the arrangement pitch angle of the pockets. That is, each pocket 31 stops at the same position. The second turntable 3 is parallel to the first turntable 2 and its height is lower than that of the first turntable 2. The second turntable 3 is arranged so that one of the stop positions of the pocket 31 matches one stop position of the suction nozzle 21 provided in the first turntable 2 and partially overlaps below the first turntable 2. Placed in.

  The light emitting element W is delivered at the delivery position 7 where the stop positions of the pocket 31 and the suction nozzle 21 overlap. At the delivery position 7, an advance / retreat drive device 23 is installed above the first rotary table 2. The light emitting element W is inserted into the pocket 31 at the delivery position 7 or the light emitting element W is delivered when the suction nozzle 21 approaches the second rotary table 3 by the advance / retreat driving device 23 and the suction is released or the suction force is generated at the end of the approach. Pick up from pocket 31 at position 7.

  In the second turntable 3, in addition to the delivery position 7, a cooling section 36 and two optical characteristic measurement positions 37 are set in the movement locus of the pocket 31. The two optical characteristic measurement positions 37 measure the optical characteristics by causing the light emitting element W to emit light. The cooling section 36 is a stay section for cooling the light emitting element W after heating to the normal temperature before reaching the optical characteristic measurement position 37.

  As shown in FIG. 4, at the optical characteristic measurement position 37, a light receiving element 39 such as a CMOS or a CCD is disposed above the second rotary table. The light receiving element 39 is connected to an analysis device inside the gantry 12 by a signal line. The optical measuring device 1 of this embodiment does not include an integrating sphere. A probe 38 is disposed below the second rotary table 3 at the optical characteristic measurement position 37. The probe 38 is a long conductive rod, and is connected to an analysis device inside the gantry 12 by a power line. The analysis equipment is a power source, a driver, and a computer inside the gantry 12, supplies power to the light emitting element W, receives a signal indicating a light reception result from the light receiving element 39, analyzes the signal, and obtains optical characteristics.

  The probe 38 extends from below the second turntable 3 toward the lower surface of the second turntable 3 so as to be orthogonal to the plane of the second turntable 3. Each pocket 31 is formed with an insertion hole 311. The probe 38 moves in the axial direction from below the second turntable 3, is inserted into the insertion hole 311 of the pocket 31 from the lower surface of the second turntable 3, and reaches the light emitting element W inside the pocket 31.

  That is, the probe 38 is fixed to the sleeve body 381. The sleeve body 381 has a cylindrical cam follower 382 extending in parallel with the plane of the second rotary table 3. The cam follower 382 is in contact with the peripheral surface of the cam 383. The cam 383 extends the cam shaft in parallel with the plane of the second turntable 3, and connects the cam shaft and the motor shaft of the motor 384 coaxially. The circumferential surface of the cam 383 is a cam surface, and the cam surface has a narrow diameter section and a wide diameter section.

  As the motor 384 rotates, the cam follower 382 is driven in the wide diameter section of the cam 383 to push up the sleeve body 381 as a whole toward the optical characteristic measurement position 37 side. As a result, the probe 38 moves toward the optical characteristic measurement position 37 and is inserted into the insertion hole 311 formed in the pocket 31 of the second rotary table 3, causing the probe 38 to reach the inside of the pocket 31, and the inside of the pocket 31. It contacts with the electrode surface of the light emitting element W.

  The upper surface of the second rotary table 3 is covered with a cover 33. The cover 33 completely covers at least the pockets 31 arranged in the circumferential direction except for the optical characteristic measurement position 37. The cover 33 is installed without being driven by the second rotary table 3. The cover 33 prevents dust and dust from scattering to the clean booth. In the cooling section 36, the light emitting element W is cooled in an internal space defined by the cover 33 and the pocket 31. Therefore, the cover 33 is desirably made of a metal such as stainless steel having a high heat dissipation effect.

  In the cover 33, an entrance / exit that penetrates the cover in the thickness direction is formed at the delivery position 7. This doorway is provided to exchange the light emitting element W between the first rotary table 2 and the second rotary table 3. Therefore, the entrance / exit is widened with the same or larger size as the outer shape of the light emitting element W.

  The cover 33 is formed with a light emission hole 35 penetrating the cover in the thickness direction at the optical characteristic measurement position 37. The light emitting hole 35 is provided for extracting the emitted light from the light emitting element W to the outside of the cover 33. For this reason, the light emitting hole 35 is expanded in the same size and shape as the light emitting region exposed on the light emitting surface of the light emitting element W. However, the cover 33 also serves as a means for fixing the position of the light emitting element W when measuring the optical characteristics, and the light emission hole 35 is narrower than the entire area of the light emitting element W including the non-light emitting region.

  In such a second turntable 3, when the light emitting element W conveyed by the first turntable 2 is inserted into the pocket 31, the second turntable 3 repeats a plurality of intermittent rotations, Pass the cooling section 36. The cooling section 36 gives the light emitting element W a cooling time in a sealed space surrounded by the pocket 31 and the cover 33. That is, the light emitting element W is absorbed by the cover 33 and cooled toward the normal temperature.

  The second turntable 3 further rotates so that the light emitting element W reaches the optical characteristic measurement position 37. At the optical characteristic measurement position 37, the probe 38 moves toward the lower surface of the second rotary table 3, and the tip is inserted into the through hole 311 to reach the inside of the pocket 31. The probe 38 further pushes up the light emitting element W inside the pocket 31 to bring the non-light emitting region of the light emitting element W into contact with the edge of the light emitting hole 35. At this time, as shown in FIG. 5, the probe 38 and the cover 33 hold the light emitting element W up and down to fix the position, and the pocket 31 fixes the light emitting element W in all directions. That is, the cover 33 functions as a clamping unit for the light emitting element W in addition to the dustproof unit and the cooling unit.

  After the probe 38 contacts the electrode surface of the light emitting element W and the light emitting element W is positioned by the probe 38 and the cover 33, the probe 38 supplies power to the light emitting element W. The light emitting hole 35 allows the light of the light emitting element W to pass toward the light receiving element 39. The light emitting hole 35 exposes only the light emitting region, and the cover 33 and the pocket 31 prevent disturbance light from entering the pocket 31 in which the light emitting element W is accommodated. That is, the cover 33 and the pocket 31 also function as a disturbance light shielding unit. In order to enhance the light shielding effect, the cover 33 may be coated with a paint having a low reflectance on the front side edge of the light emission hole 35.

  The light receiving element 39 outputs a signal indicating the amount of received light to the analysis device inside the gantry 12. The analysis device obtains the optical characteristics of the light emitting element W by signal analysis. After completing the measurement of the optical characteristics, the probe 38 moves downward and leaves the second rotary table 3. By pulling out the probe 38, the contact of the light emitting element W with the cover 33 is released.

  After the position fixing of the light emitting element W is released, the second rotary table 3 repeats intermittent rotation a plurality of times again, and returns the light emitting element W whose optical characteristics have been measured to the delivery position 7. At the delivery position 7, the empty suction nozzle 21 of the first rotary table 2 is waiting upward. That is, the suction nozzle 21 in the standby state does not hold the light emitting element W by inserting the light emitting element W into the pocket 31 moved to the delivery position 7 by one position ahead.

  The empty suction nozzle 21 waiting at the delivery position 7 is lowered by the advancing / retreating drive device 23 and holds the light emitting element W whose optical characteristics have been measured by the generation of suction force. Further, when the downward force applied by the advance / retreat drive device 23 is released, the suction nozzle 21 holding the light emitting element W is raised again. As a result, the light emitting element W whose optical characteristics have been measured is returned to the first turntable 2 again. Since the pocket 31 present at the delivery position 7 is empty, the suction nozzle 21 that reaches the delivery position 7 next inserts the light emitting element W.

  The light emitting element W that has returned to the first rotary table 2 passes through the appearance inspection unit 9. The appearance inspection unit 9 includes a camera having a light receiving element such as a CCD or a CMOS, and images the light emitting element W. The imaging result is image-analyzed as a signal by a computer in the gantry 12, and the presence or absence of a scratch or the like is determined.

  Further, when the first turntable 2 rotates, the light emitting element W that has passed through the appearance inspection unit 9 reaches the housing unit 10. The housing unit 10 is a device that moves the placement location of the light emitting element W to the planned housing position. For example, an XY stage, a ring holder, and a taping unit that sequentially feeds a tape on which a pocket for accommodating the light emitting element W is formed. The accommodation unit 10 of this embodiment is a taping unit.

  As described above, the optical measuring device 1 includes the second rotary table 3 that transports the light emitting element W by rotation. And the pocket 31 which accommodates the light emitting element W inside was formed in the upper surface of this 2nd rotation table 3, and the upper surface of the 2nd rotation table 3 was coat | covered with the immovable cover 33. FIG. Further, a light emission hole 35 penetrating the cover 33, a probe 38 disposed on the lower surface side of the second rotary table 3, inserted and moved from the lower surface of the second rotary table 3 to the upper surface, and the second rotary table 3 A light receiving element 39 disposed on the upper surface side is provided.

  Thereby, the light emitting element W is confined in the internal space of the pocket 31 by the pocket 31 and the cover 33 except that the light emitting region is exposed by the light emitting hole 35, and the internal space is disturbed by the pocket 31 and the cover 33. Intrusion of light is prevented. That is, the pocket 31 and the cover 33 serve as light shielding means. Further, the pocket 31 and the cover 33 serve as positioning means for preventing the positional deviation of the light emitting element W contacting the probe 38 in the four directions and upward.

  Therefore, the optical measuring device 1 of the present embodiment does not require an integrating sphere that functions as a light shielding unit. Further, it is not necessary to separately provide a clamping means for positioning the incident position and incident angle of the light emitting element W. Therefore, in the optical measuring device 1, large parts that have been conventionally required can be eliminated, and downsizing of the optical measuring device 1 can be achieved.

  According to the reduction of the area occupied by the optical measuring device 1, the clean booth can be downsized. For this reason, the cost of the clean booth is reduced, and the manufacturing cost of the light emitting element W can be reduced. In the case where the optical measurement apparatus 1 does not perform other processes such as an appearance inspection, the first rotary table 2 may be omitted and the second rotary table 3 may be used as one machine. In this case, the supply unit 4 and the accommodation unit 10 may be disposed around the second turntable 3.

  However, by providing the first turntable 2 that conveys the light emitting element W from the supply side to the discharge side, and arranging one or a plurality of processing means for processing the light emitting element W along the first turntable 2, electrical characteristics are obtained. A single optical measuring device 1 can achieve a plurality of types of processing such as measurement of the above and inspection of the appearance. Therefore, the equipment for various processing is reduced in size as a whole. If it does so, the cost of the clean maintenance of a clean booth is further reduced, and the manufacturing cost of the light emitting element W can further be reduced.

  In particular, when the heating unit 5 and the electrical property measurement unit 6 are provided in the optical measurement device 1, the section before reaching the optical property measurement position 37 functions as a cooling section sealed with the cover 33 and the pocket 31. In other words, if both the measurement of the electrical characteristics and the measurement of the optical characteristics in a high temperature environment are covered by a single device, the configuration of the optical measurement device 1 can benefit from the need for a special cooling device. Therefore, the occupation area as the whole facility can be further reduced, and the clean maintenance cost of the clean booth and the manufacturing cost of the light emitting element W can be further reduced.

(Modification)
In the optical measuring device 1, in the appearance inspection of the light emitting element W, six surfaces may be inspected in three steps. In the first step, the appearance of the light emitting surface of the light emitting element W is inspected. In the second step and the third step, the electrode surface of the light emitting element W and the four side surfaces of the light emitting element are inspected separately. That is, as shown in FIG. 6, the optical measuring device 1 arranges the imaging units 11 a, 11 b, and 11 c above the second rotary table 3 and at two stop positions of the suction nozzle 21 provided in the first rotary table 2, respectively. To do.

  In the first turntable 2, since the light emitting surface of the light emitting element W is adsorbed by the adsorption nozzle 21, the appearance inspection of the light emitting surface cannot be performed unless the process of reversing the front and back of the light emitting element W is performed. However, in the optical measuring apparatus 1, the second rotary table 3 has the light emitting element W placed on the upper surface and is transported with the light emitting surface facing upward. If a through-hole to be passed is provided and the imaging unit 11a is installed on the through-hole, the light-emitting surface of the light-emitting element W can be inspected without the need to reverse the front and back.

(Other embodiments)
Each embodiment of the present invention has been described above, but various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 1 Optical measuring device 2 1st rotation table 21 Adsorption nozzle 22 Direct drive motor 23 Advance / retreat drive device 231 Rotation motor 232 Cam mechanism 233 Rod 234 Compression spring 3 2nd rotation table 31 Pocket 311 Insertion hole 32 Direct drive motor 33 Cover 35 Light emission Hole 36 Cooling section 37 Optical characteristic measurement position 38 Probe 381 Sleeve body 382 Cam follower 383 Cam 384 Motor 39 Light receiving element 4 Supply unit 41 Pickup unit 411 Suction nozzle 5 Heating unit 51 Heating table 6 Electrical characteristic measurement unit 7 Delivery position 9 Visual inspection Unit 10 housing unit 11a imaging unit 11b imaging unit 11c imaging unit 12 gantry W light emitting element

An optical measurement apparatus according to the present invention is an optical measurement apparatus for measuring optical characteristics of a light emitting element, and is formed on a rotary table that conveys the light emitting element by rotation and on the upper surface of the rotary table, and accommodates the light emitting element therein. A pocket that covers the upper surface of the rotary table, a light emission hole that is formed on a movement locus of the pocket and that penetrates the cover, and is positioned corresponding to the light emission hole, and the rotation A probe that is disposed on the lower surface side of the table, is inserted from the lower surface of the rotary table and protrudes into the pocket, and an imaging element that is positioned corresponding to the light emission hole and is disposed on the upper surface side of the rotary table; , Ru equipped with.

The pocket and the cover are light shielding means for a light emitting element .

Claims (5)

An optical measuring device for measuring optical characteristics of a light emitting element,
A rotary table that conveys the light emitting element by rotation;
A pocket formed on the upper surface of the turntable and containing a light emitting element therein;
An immovable cover covering the upper surface of the rotary table;
A light emitting hole formed on the movement locus of the pocket and penetrating the cover;
A probe located corresponding to the light emitting hole, disposed on the lower surface side of the rotary table, inserted from the lower surface of the rotary table, and protruding into the pocket;
An image sensor that is positioned corresponding to the light emission hole and disposed on the upper surface side of the turntable;
Providing
An optical measuring device characterized by the above. The pocket and the cover are light-shielding means of a light-emitting element;
The optical measuring device according to claim 1. The pocket and the cover are positioning means for supporting the light emitting element in contact with the probe from all sides and from above;
The optical measuring device according to claim 1 or 2. Another rotary table for transporting the light emitting elements from the supply side to the discharge side;
One or a plurality of processing means arranged along the other rotary table and processing the light emitting elements;
Further comprising
The rotary table is connected to the other rotary table in a path, conveys the light emitting element detached from the other rotary table by rotation, and returns the light emitting element to the other rotary table;
The optical measuring device according to claim 1, wherein As one of the processing means, a heating means that heats the light emitting element, located around the other rotary table, upstream of the rotary table and in the rotational direction;
As one of the processing means, an electrical characteristic measuring means for inspecting electrical characteristics of a light emitting element located between the heating means and the rotary table around the other rotary table and heated by the heating means When,
A cooling section that is provided before the light radiation hole of the turntable reaches and cools the light emitting element inside the turntable covered with the cover;
Providing
The optical measuring device according to claim 4.

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