TWM445693U - Optoelectronic component inspection equipment - Google Patents

Optoelectronic component inspection equipment Download PDF

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Publication number
TWM445693U
TWM445693U TW101216532U TW101216532U TWM445693U TW M445693 U TWM445693 U TW M445693U TW 101216532 U TW101216532 U TW 101216532U TW 101216532 U TW101216532 U TW 101216532U TW M445693 U TWM445693 U TW M445693U
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Taiwan
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integrating sphere
unit
delivery
shielding
component detecting
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TW101216532U
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Chinese (zh)
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jun-ming Li
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Mpi Corp
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光電零組件檢測設備Photoelectric component testing equipment

本創作係與光電零組件之檢測設備有關,特別是關於一種利用積分球(integrating sphere)罩住受測之光電零組件,以獲得更為準確之檢測結果的光電零組件檢測設備。This creation is related to the detection equipment of optoelectronic components, in particular to an optoelectronic component inspection device that uses an integrating sphere to cover the optoelectronic components under test to obtain more accurate detection results.

諸如發光二極體(light emitting diode,LED)單晶粒封裝或多晶粒封裝模組等光電零組件,在出廠前大都需經過特性檢測,以藉由諸如發光強度、色調等特性對光電零組件進行分類。前述檢測方式通常係利用一探針點測器(prober)與該光電零組件電性接觸而使該光電零組件發光,進而檢測該光電零組件之發光特性,甚至更利用一積分球罩住受測之光電零組件,以藉助積分球而獲得更為準確之檢測結果。Photoelectric components such as single-die packages or multi-die package modules, such as light-emitting diodes (LEDs), are mostly subjected to characteristic detection before leaving the factory to make photoelectric zeros by characteristics such as luminous intensity and hue. Components are classified. The foregoing detection method generally uses a probe probe to electrically contact the photoelectric component to cause the photoelectric component to emit light, thereby detecting the light-emitting characteristics of the photoelectric component, and even more utilizing an integrating sphere cover. The photoelectric components are measured to obtain more accurate detection results by means of the integrating sphere.

現行之光電零組件檢測設備的自動化檢測方式,大多係將待測之光電零組件遞送至積分球之一開口,或者進一步地將該光電零組件自該開口遞送到積分球內部。為了避免積分球外部之光線進入積分球而影響其檢測結果,積分球之開口大多位於其底端,且開口之尺寸與積分球之尺寸的比值必須小於一定值,如此使得尺寸較大之光電零組件,例如以載板上晶片(Chip on Board,COB)形式封裝之LED模組或LED燈條,難以進入一般尺寸之積分球的開口或完全被該開口罩住,而尺寸較大之積分球的價格又非常高昂,因此,對於尺寸較大的光電零組件,現行之檢 測方式大多係先將積分球之上、下半球分開,以人工方式將待測之光電零組件設於積分球中後,再使上、下半球結合,然後再進行檢測,如此之檢測過程難以自動化,因而其檢測效率相當低。The current automatic detection method of the photoelectric component detecting device mostly supplies the photoelectric component to be tested to one opening of the integrating sphere, or further delivers the photoelectric component from the opening to the inside of the integrating sphere. In order to prevent the light outside the integrating sphere from entering the integrating sphere and affecting the detection result, the opening of the integrating sphere is mostly at the bottom end, and the ratio of the size of the opening to the size of the integrating sphere must be less than a certain value, so that the photoelectric zero with a larger size is obtained. Components, such as LED modules or LED strips packaged in the form of Chip on Board (COB), are difficult to enter or fully cover the opening of a general-sized integrating sphere, while larger-sized integrating spheres The price is very high, so for the larger size of the optoelectronic components, the current inspection Most of the measurement methods are to separate the upper and lower hemispheres of the integrating sphere, and manually set the photoelectric components to be tested in the integrating sphere, then combine the upper and lower hemispheres, and then perform the detection, so that the detection process is difficult. Automated, so its detection efficiency is quite low.

換言之,習用之光電零組件檢測設備對於尺寸較大的光電零組件之檢測方式仍有其不便之處,而有待改進。In other words, the conventional photoelectric component detecting device still has inconvenience to the detection method of the large-sized photoelectric component, and needs to be improved.

有鑑於上述缺失,本創作之主要目的在於提供一種光電零組件檢測設備,係能自動化地利用積分球對尺寸較大之光電零組件進行特性檢測者。In view of the above-mentioned shortcomings, the main purpose of the present invention is to provide an optoelectronic component detecting device capable of automatically utilizing an integrating sphere to perform characteristic detection on a large-sized optoelectronic component.

為達成上述目的,本創作所提供之光電零組件檢測設備包含有一具有一開口之積分球,以及一包含有至少一可相對該積分球位移並可自該開口進出該積分球之遞送單元的之遞送裝置,該遞送單元包含有一承載台及一遮蔽件,該承載台具有一用以承載一光電零組件之承載部,該遞送單元能自該積分球之外部位移至一檢測位置,其中該遞送單元位於該檢測位置時,該遞送單元之承載台的承載部係位於該積分球內,且該遞送單元之遮蔽件係遮擋該積分球之開口。To achieve the above object, the optoelectronic component detecting apparatus provided by the present invention comprises an integrating sphere having an opening, and a delivery unit including at least one displacement unit movable relative to the integrating sphere and accessible from the opening. a delivery device, the delivery unit comprising a carrier and a shield having a carrier for carrying an optoelectronic component, the delivery unit being displaceable from an exterior of the integrating sphere to a detection position, wherein the delivery When the unit is in the detecting position, the carrying portion of the carrying platform of the delivery unit is located in the integrating sphere, and the shielding member of the delivery unit blocks the opening of the integrating sphere.

藉此,該積分球之設計可配合尺寸較大之待測光電零組件而設置較大之開口,使得該遞送單元能將待測之光電零組件遞送至該積分球內,並在進行檢測時遮擋該積分球之開口,以避免過多外部光線進入該積分球而影響其檢測結果。換言之,在使用相同尺寸之積分球的前提下,相較 於習用之光電零組件檢測設備,本創作所提供之光電零組件檢測設備的積分球可設置較大之開口並仍可避免過多外部光線進入其中,因而可對尺寸較大之光電零組件進行自動化檢測,而不需藉助人力將待測之光電零組件設置到積分球內,因此,該光電零組件檢測設備之應用範圍廣,並能保有高效率及良好之檢測效果。Thereby, the design of the integrating sphere can be combined with a larger size of the photoelectric component to be tested to provide a larger opening, so that the delivery unit can deliver the photoelectric component to be tested into the integrating sphere, and when detecting The opening of the integrating sphere is blocked to prevent excessive external light from entering the integrating sphere and affecting the detection result. In other words, on the premise of using the integrating sphere of the same size, For the optoelectronic component testing equipment used in the application, the integrating sphere of the photoelectric component detecting device provided by the present invention can set a larger opening and still avoid excessive external light entering, thereby automating the large-sized optoelectronic components. The detection, without the need to manually set the photoelectric components to be tested into the integrating sphere, therefore, the photoelectric component detecting device has a wide application range, and can maintain high efficiency and good detection effect.

較佳地,在前述之光電零組件檢測設備中,該遞送裝置包含有複數該遞送單元,該等遞送單元能同步轉動並輪流地轉動至該檢測位置。藉此,非位於該檢測位置之遞送單元可用以執行其他流程,例如進料、出料、微點亮測試等等,以使該檢測設備之功能更完善且效率更高。Preferably, in the aforementioned optoelectronic component detecting apparatus, the delivery device includes a plurality of the delivery units, and the delivery units are rotatable in synchronization and alternately rotated to the detection position. Thereby, the delivery unit not located at the detection location can be used to perform other processes, such as feeding, discharging, micro-lighting tests, etc., to make the testing device more complete and more efficient.

較佳地,在前述之光電零組件檢測設備中,該遞送裝置之遞送單元係繞一垂直軸向轉動,該積分球之開口係實質上垂直於該垂直軸向地延伸成弧形,且該承載台之承載部及該遮蔽件能通過該積分球之開口。Preferably, in the aforementioned optoelectronic component detecting device, the delivery unit of the delivery device rotates about a vertical axis, and the opening of the integrating sphere extends substantially perpendicular to the vertical axis to form an arc, and The bearing portion of the carrying platform and the shielding member can pass through the opening of the integrating sphere.

較佳地,在前述之光電零組件檢測設備中,該遞送裝置之遞送單元的遮蔽件具有一尺寸略小於該積分球之開口的弧形遮板。Preferably, in the aforementioned optoelectronic component detecting apparatus, the shielding member of the delivery unit of the delivery device has an arcuate shutter having a size slightly smaller than the opening of the integrating sphere.

較佳地,在前述之光電零組件檢測設備中,該遞送裝置包含有一旋轉單元;該遞送裝置之遞送單元中,該承載台具有一設於該旋轉單元之安裝部,該遮蔽件之弧形遮板具有分別自該承載台二側延伸而出之一第一遮擋部及一第二遮擋部,該承載台之承載部係自該安裝部延伸而出並位於該遮蔽件之第一遮擋部與第二遮擋部之間,該第一遮擋 部、該承載部及該第二遮擋部係依序地通過該積分球之開口。Preferably, in the aforementioned optoelectronic component detecting device, the delivering device comprises a rotating unit; in the delivering unit of the delivering device, the carrying platform has a mounting portion disposed on the rotating unit, and the shielding member is curved The shutter has a first shielding portion and a second shielding portion extending from the two sides of the carrying platform, and the carrying portion of the loading platform extends from the mounting portion and is located at the first shielding portion of the shielding member. The first occlusion between the second occlusion and the second occlusion The portion, the carrying portion and the second blocking portion sequentially pass through the opening of the integrating sphere.

較佳地,在前述之光電零組件檢測設備中,該積分球包含有能相互分離之一上殼件及一下殼件,該上殼件與該下殼件相互組合時形成出該開口。Preferably, in the above-mentioned photoelectric component detecting device, the integrating sphere includes an upper shell member and a lower shell member which are separable from each other, and the upper shell member and the lower shell member are combined with each other to form the opening.

較佳地,在前述之光電零組件檢測設備中,更包含有一驅動單元,該驅動單元具有一能沿該垂直軸向移動之移動件,該積分球之上殼件與下殼件其中之一係設置於該移動件,該上殼件與該下殼件能藉由該移動件移動而相互分離及相互組合。Preferably, in the foregoing photoelectric component detecting device, further comprising a driving unit having a moving member movable along the vertical axis, the integrating ball upper one of the shell member and the lower shell member The movable member is disposed on the movable member, and the upper and lower housing members are separated from each other and combined with each other by the moving member.

較佳地,在前述之光電零組件檢測設備中,該驅動單元之移動件具有一承載面,該積分球之上殼件的底部係設於該承載面上並能與該下殼件相接合。Preferably, in the above-mentioned photoelectric component detecting device, the moving member of the driving unit has a bearing surface, and the bottom of the integrating member is attached to the bearing surface and can be engaged with the lower shell member. .

較佳地,該遞送裝置包含有一旋轉單元以及一用以驅動該旋轉單元轉動之驅動器,且該遞送單元係固定於該旋轉單元並對應該積分球之開口;藉此,該遞送單元可受該旋轉單元帶動而可自該積分球之開口進出該積分球。Preferably, the delivery device comprises a rotation unit and a driver for driving the rotation of the rotation unit, and the delivery unit is fixed to the rotation unit and corresponds to an opening of the integrating ball; thereby, the delivery unit can be The rotating unit is driven to enter and exit the integrating sphere from the opening of the integrating sphere.

較佳地,該積分球之開口係呈弧形地延伸於該積分球之側面,而該遞送單元之遮蔽件具有一尺寸小於且形狀互補於該積分球之開口的弧形遮板。Preferably, the opening of the integrating sphere extends arcuately to the side of the integrating sphere, and the shield of the delivery unit has an arcuate shutter of a size smaller than and complementary in shape to the opening of the integrating sphere.

較佳地,該遞送單元之遮蔽件具有一塗設有一反射擴散塗層之內表面,該內表面在該遞送單元位於該檢測位置時係朝向該積分球內部。Preferably, the shield of the delivery unit has an inner surface coated with a reflective diffusion coating that faces the interior of the integrating sphere when the delivery unit is in the detection position.

有關本創作所提供之光電零組件檢測設備的詳細構 造、特點、組裝或使用方式,將於後續的實施方式詳細說明中予以描述。然而,在本創作領域中具有通常知識者應能瞭解,該等詳細說明以及實施本創作所列舉的特定實施例,僅係用於說明本創作,並非用以限制本創作之專利申請範圍。Detailed structure of the photoelectric component testing equipment provided by this creation The making, characteristics, assembly or use will be described in the detailed description of the subsequent embodiments. However, those of ordinary skill in the art should understand that the detailed description and specific embodiments of the present invention are merely used to illustrate the present invention and are not intended to limit the scope of the patent application.

請先參閱第一圖,本創作一較佳實施例所提供之光電零組件檢測設備10包含有詳如第二圖所示之一遞送裝置20,以及詳如第三圖及第四圖所示之一檢測裝置30。Please refer to the first figure. The optoelectronic component detecting device 10 provided in the preferred embodiment of the present invention comprises a delivery device 20 as shown in the second figure, and as shown in the third and fourth figures. One of the detecting devices 30.

請參閱第二圖,該遞送裝置20包含有一基架22、一設置於該基架22之驅動器24(例如伺服馬達)、一設置於該基架22上並能受該驅動器24驅轉之旋轉單元26,以及分別設置於該旋轉單元26之四安裝座262上的四遞送單元28,該等遞送單元28能受該旋轉單元26帶動而繞一垂直軸向(Z軸)轉動。由於利用驅動器24(例如伺服馬達)直接驅轉或透過諸如減速機構、皮帶等元件間接驅轉該旋轉單元26之結構設計,為本申請案所屬技術領域中具有通常知識之人士所熟知之先前技術,且並非本申請案之技術重點所在,因此,其詳細構造容申請人在此不予贅述。Referring to the second figure, the delivery device 20 includes a base frame 22, a driver 24 (such as a servo motor) disposed on the base frame 22, and a rotation disposed on the base frame 22 and capable of being driven by the drive unit 24. The unit 26, and four delivery units 28 respectively disposed on the four mounts 262 of the rotary unit 26, are capable of being rotated by the rotary unit 26 about a vertical axis (Z-axis). The prior art is well known to those of ordinary skill in the art to which the present application pertains, since it is directly driven by a driver 24 (e.g., a servo motor) or indirectly driven through components such as a speed reduction mechanism, belt, and the like. It is not the technical focus of this application. Therefore, the detailed structure of the applicant is not described here.

各該遞送單元28包含有一承載台40及一遮蔽件50。該承載台40係呈長條狀,具有一設於該旋轉單元26之安裝座262上的安裝部42,以及一自該安裝部42垂直於Z軸地延伸而出之承載部44(亦即其延伸方向係平行 於X-Y平面),該承載部44設有一凹槽442,藉以使一光電零組件60(在本實施例中為一LED燈條)能受該凹槽442限位地放置在該承載台40上。實際上,除了利用前述凹槽442來限位固定光電零組件60之外,亦可進一步於該承載台40配置真空吸引機構,利用真空吸附管路搭配設在該承載部44之凹槽442底面之多個真空吸附孔,來輔助固定待測之光電零組件60於該承載台40之承載部44。Each of the delivery units 28 includes a carrier 40 and a shield 50. The loading platform 40 has an elongated shape, has a mounting portion 42 disposed on the mounting seat 262 of the rotating unit 26, and a carrying portion 44 extending from the mounting portion 42 perpendicular to the Z-axis (ie, Its extension direction is parallel In the XY plane, the carrying portion 44 is provided with a recess 442, so that an optoelectronic component 60 (in this embodiment, an LED strip) can be placed on the carrying platform 40 by the recess 442. . In fact, in addition to the use of the recess 442 to limit the fixed optoelectronic component 60, the vacuum suction mechanism may be further disposed on the loading platform 40, and the vacuum adsorption pipeline is used to match the bottom surface of the recess 442 of the bearing portion 44. A plurality of vacuum adsorption holes are provided to assist in fixing the photoelectric component 60 to be tested to the carrier portion 44 of the carrier 40.

該遮蔽件50亦具有一設於該旋轉單元26之安裝座262上的安裝部52,並具有一自該安裝部52垂直於Z軸地延伸而出之一弧形遮板54(亦即其延伸方向係平行於X-Y平面),而且,該弧形遮板54具有分別自該承載台40二側延伸而出之一第一遮擋部541及一第二遮擋部542。該承載台40之承載部44係位於該遮蔽件50之第一、二遮擋部541、542之間,從該承載台40之安裝部42朝承載部44的方向看時,該遮蔽件50之第一、二遮擋部541、542係分別位於該承載台40之左方及右方。The shielding member 50 also has a mounting portion 52 disposed on the mounting seat 262 of the rotating unit 26, and has an arc-shaped shutter 54 extending from the mounting portion 52 perpendicular to the Z-axis (ie, The extending direction is parallel to the XY plane, and the curved shutter 54 has a first blocking portion 541 and a second blocking portion 542 extending from the two sides of the carrying platform 40. The bearing portion 44 of the loading platform 40 is located between the first and second shielding portions 541 and 542 of the shielding member 50. When the mounting portion 42 of the loading platform 40 faces the direction of the carrying portion 44, the shielding member 50 The first and second shielding portions 541 and 542 are respectively located on the left and right sides of the loading platform 40.

請參閱第三圖及第四圖,該檢測裝置30包含有一基架32、一驅動單元34及一積分球36。該驅動單元34包含有一設置於該基架32之線性致動器342(例如油壓驅動器)、一設置於該線性致動器342之一可線性移動之驅動件342a的轉接架344,以及一與該轉接架344固接之移動件346。該積分球36包含有能相互分離之一上殼件362及一下殼件364,該上殼件362及該下殼件364係分 別概呈空心半球體狀,惟該上殼件362之底部周面的一部分具有一凹缺362a,其餘部分具有一徑向地向外延伸之凸垣362b,且該下殼件364之頂部周面亦具有一凹缺364a,該凹缺364a係與該上殼件362之凹缺362a相對應,該上殼件362底部之凸垣362b係固設於該移動件346之一承載面346a上。該移動件346能受該線性致動器342驅動而沿該垂直軸向(Z軸)移動,藉以使該上殼件362與該下殼件364相互分離(如第五圖所示)或相互組合(如第三圖所示)。Referring to the third and fourth figures, the detecting device 30 includes a base frame 32, a driving unit 34 and an integrating sphere 36. The driving unit 34 includes a linear actuator 342 (such as a hydraulic actuator) disposed on the base frame 32, a transfer frame 344 disposed on the linearly movable driving member 342a of the linear actuator 342, and A moving member 346 fixed to the adapter frame 344. The integrating sphere 36 includes an upper shell member 362 and a lower shell member 364 which are separable from each other. The upper shell member 362 and the lower shell member 364 are divided into points. The hollow hemisphere is generally formed, but a portion of the bottom surface of the upper shell member 362 has a recess 362a, and the remaining portion has a radially outwardly extending tenon 362b, and the top periphery of the lower shell member 364 The surface also has a recess 364a corresponding to the recess 362a of the upper shell member 362. The base 362b of the upper shell member 362 is fixed to one of the bearing surfaces 346a of the moving member 346. . The moving member 346 can be driven by the linear actuator 342 to move along the vertical axis (Z-axis), thereby separating the upper casing member 362 from the lower casing member 364 (as shown in FIG. 5) or mutual Combination (as shown in the third figure).

如第五圖所示,當該積分球36之上殼件362與下殼件364相互分離時,使用者能將探針點測器(圖中未示)設置於該積分球36內。如第三圖所示,當該積分球36之上殼件362與下殼件364相互組合時,該上殼件362底部係與該下殼件364頂部相接合,且該二凹缺362a、364a共同形成出一實質上垂直於該垂直軸向(Z軸)地延伸成弧形之開口366,亦即,該開口366係平行於X-Y平面地弧形延伸於該積分球之側面。換言之,該積分球36之開口366的形狀係概與各該遮蔽件50之弧形遮板54的形狀互補,而且,各該弧形遮板54之尺寸係略小於該開口366之尺寸。As shown in the fifth figure, when the upper shell member 362 and the lower shell member 364 are separated from each other, the user can set a probe point detector (not shown) in the integrating sphere 36. As shown in the third figure, when the upper shell member 362 and the lower shell member 364 are combined with each other, the bottom of the upper shell member 362 is engaged with the top of the lower shell member 364, and the two recesses 362a, 364a collectively forms an opening 366 that extends substantially perpendicular to the vertical axis (Z-axis), that is, the opening 366 extends arcuately to the side of the integrating sphere parallel to the XY plane. In other words, the shape of the opening 366 of the integrating sphere 36 is substantially complementary to the shape of the curved shutter 54 of each of the shielding members 50, and the size of each of the curved shutters 54 is slightly smaller than the size of the opening 366.

由於各該承載台40之承載部44及各該遮蔽件50之遮擋部541、542皆能通過該積分球36之開口366,該等遞送單元28受該旋轉單元26帶動而同步轉動時,能輪流地自該積分球36之外部轉動至一如第一圖所示之檢測位 置P1。舉例而言,由上往下看時若該等遞送單元28係朝逆時針方向轉動,則各該遞送單元28之第一遮擋部541、承載部44及第二遮擋部542會依序地通過該積分球36之開口366,並在過程中停留在該檢測位置P1一小段時間。Since the bearing portion 44 of each of the loading platforms 40 and the shielding portions 541, 542 of the shielding members 50 can pass through the opening 366 of the integrating sphere 36, the delivery units 28 can be synchronously rotated by the rotating unit 26, Rotating from the outside of the integrating sphere 36 in turn to a detection position as shown in the first figure Set P1. For example, if the delivery units 28 are rotated in the counterclockwise direction when viewed from the top, the first shielding portion 541, the bearing portion 44 and the second shielding portion 542 of each of the delivery units 28 will pass sequentially. The opening 366 of the integrating sphere 36 and stays at the detecting position P1 for a short period of time during the process.

當其中一該遞送單元28位於該檢測位置P1時,其承載台40之承載部44連同其承載之光電零組件60係位於該積分球36內部之中心位置,同時該遞送單元28之遮蔽件50係遮擋該積分球36之開口366,此時,設置於該積分球36內部探針點測器(圖中未示)可受自動控制而往該光電零組件60進給,並藉由探針點測器之探針點觸光電零組件60之電極接點,使位於該積分球36內之光電零組件60得以發光,藉此,得以利用該積分球36來檢測該光電零組件60之發光特性。必須說明的是,探針點測器之結構與其進給機構,為本申請案所屬技術領域中具有通常知識之人士所熟知之先前技術,且並非本申請案之技術特徵所在,因此申請人在此不再詳加敘述。另外,各該遮蔽件50之各遮擋部541、542的內表面541a、542a可塗設諸如硫酸鋇(barium sulfate)或俗稱鐵氟龍之聚四氟乙烯(polytetrafluoroethylene,PTFE)等材質之反射擴散塗層(實際上,該反射擴散塗層可由任何能形成白色塗層或白色烤漆的材料所製成),藉此,當各該遞送單元28位於該檢測位置P1時,其遮蔽件50之遮擋部541、542的內表面541a、542a係朝向該積分球36內部,且因具有反射擴 散功能而使得待測物所發出的光可均勻地被反射擴散於該積分球內部。When one of the delivery units 28 is located at the detection position P1, the carrier 44 of the carrier 40, along with the photocell 60 it carries, is located at the center of the interior of the integrating sphere 36, while the shield 50 of the delivery unit 28 The opening 366 of the integrating sphere 36 is blocked. At this time, a probe point detector (not shown) disposed inside the integrating sphere 36 can be automatically controlled to be fed to the photoelectric component 60, and the probe is used. The probe of the spot detector touches the electrode contact of the optoelectronic component 60 to cause the optoelectronic component 60 located in the integrating sphere 36 to emit light, whereby the integrating sphere 36 can be utilized to detect the illumination of the optoelectronic component 60. characteristic. It should be noted that the structure of the probe point detector and its feeding mechanism are prior art well known to those having ordinary knowledge in the technical field of the present application, and are not the technical features of the present application, so the applicant is This is not detailed here. In addition, the inner surfaces 541a, 542a of the shielding portions 541, 542 of each of the shielding members 50 may be coated with a reflection diffusion of a material such as barium sulfate or polytetrafluoroethylene (PTFE) commonly known as Teflon. The coating (actually, the reflective diffusion coating can be made of any material capable of forming a white coating or white lacquer) whereby the shielding member 50 is occluded when each of the delivery units 28 is at the detection position P1. The inner surfaces 541a, 542a of the portions 541, 542 are oriented toward the inside of the integrating sphere 36, and have reflection expansion The function of scattering allows the light emitted by the object to be tested to be uniformly reflected and diffused inside the integrating sphere.

除此之外,其他非位於檢測位置P1之遞送單元28亦可用以進行其他程序;舉例而言,第一圖中非位於該檢測位置P1之遞送單元28係分別位於一進料位置P2、一微點亮位置P3及一出料位置P4,待測之光電零組件60被設置到該遞送裝置20時係被一進料裝置(圖中未示)放置到位於該進料位置P2之承載台40上,並會在轉動至該檢測位置P1之前先停留在該微點亮位置P3,以受一微點亮測試機(圖中未示)測試,各該光電零組件60在受該積分球36檢測完畢後會在該出料位置P4被一出料裝置(圖中未示)取離該遞送裝置20,並被遞送至所屬分類類別之儲存容器(圖中未示)中。In addition, other delivery units 28 not located at the detection position P1 can also be used for other procedures; for example, the delivery units 28 not located at the detection position P1 in the first figure are respectively located at a feeding position P2, The micro-lighting position P3 and a discharge position P4, when the photoelectric component 60 to be tested is set to the delivery device 20, is placed by a feeding device (not shown) to the loading platform at the feeding position P2. 40, and will stay at the micro-lighting position P3 before rotating to the detecting position P1 to be tested by a micro-lighting tester (not shown), each of the photoelectric components 60 being subjected to the integrating sphere After the detection is completed, the delivery device 20 is taken off at the discharge position P4 by a discharge device (not shown) and delivered to a storage container (not shown) of the classified category.

在使用相同尺寸之積分球的前提下,相較於習用之光電零組件檢測設備,該光電零組件檢測設備10的積分球36可配合受測之光電零組件60之尺寸而在積分球之側面設置較大之開口366,並藉由各該遮蔽件50在進行檢測時遮擋該開口366,以避免過多外部光線進入該積分球36而影響其檢測結果。因此,本創作所提供之光電零組件檢測設備可對尺寸較大之光電零組件進行自動化檢測,而不需藉助人力將待測之光電零組件設置到積分球內,進而達到高檢測效率,並同時保有良好之檢測效果。開口366設置的位置並不以本案實施例所侷限,例如在第一圖中,開口366設置在積分球36中央部位,設計上亦可以將開口 設置在積分球36的其他區域。On the premise of using the integrating sphere of the same size, the integrating sphere 36 of the optoelectronic component detecting apparatus 10 can match the size of the optoelectronic component 60 to be tested on the side of the integrating sphere compared to the conventional optoelectronic component detecting apparatus. A larger opening 366 is provided, and the opening 366 is blocked by each of the shielding members 50 during detection to prevent excessive external light from entering the integrating sphere 36 and affecting the detection result. Therefore, the photoelectric component detecting device provided by the present invention can automatically detect the large-sized photoelectric components without setting the photoelectric components to be tested into the integrating sphere by manpower, thereby achieving high detection efficiency, and At the same time, it has a good detection effect. The position at which the opening 366 is disposed is not limited by the embodiment of the present invention. For example, in the first figure, the opening 366 is disposed at the center of the integrating sphere 36, and the opening can also be designed. It is disposed in other areas of the integrating sphere 36.

值得一提的是,本創作所提供之光電零組件檢測設備可應用於各種需藉助積分球檢測發光特性之光電零組件,各該承載台之形狀可依據受測物之形狀設計而不以前述實施例所揭示之長條狀為限,且該積分球之開口形狀及各該遮蔽件之形狀在設計上亦可隨不同受測物而更改。在不變更承載台40之長度的條件下,前述該等長條狀之承載台40亦可用以承載尺寸較該光電零組件60小之光電零組件,此時,只要將待測物設置於該凹槽442之特定位置,例如凹槽442之中央,使得該遞送單元28旋擺並停定於於該檢測位置P1時,待測物係位於積分球36內部之中心位置進行檢測即可。換言之,本創作所提供之光電零組件檢測設備之應用範圍相當廣,可應用於各種形狀及尺寸之光電零組件,以對光電零組件進行自動化檢測。其次,本創作所使用之遞送裝置20之遞送單元28的數量,並不以此處揭露之四組為限,其數量可按實際檢測程序而增減,換言之,該遞送裝置20具有至少一組遞送單元28即可。再者,前述實施例中所揭露之積分球36,係採上殼件362與下殼件364可相互分離之設計,此舉有助於在該積分球36內部設置且檢修或更換諸如探針檢測器之類的檢測構件,然而,此積分球採上、下殼件可分離之設計,僅為一種較佳化設計之示例,並非用以達成本創作之創作目的的必要條件。It is worth mentioning that the optoelectronic component testing device provided by the present invention can be applied to various optoelectronic components that need to detect the illuminating characteristics by means of an integrating sphere, and the shape of each carrying platform can be designed according to the shape of the object to be tested instead of the foregoing. The shape of the elongated strip disclosed in the embodiment is limited, and the shape of the opening of the integrating sphere and the shape of each of the shielding members are also designed to be changed with different objects. The long-length carrying platform 40 can also be used to carry the optoelectronic components smaller than the optoelectronic component 60 without changing the length of the carrying platform 40. In this case, the object to be tested is disposed in the The specific position of the recess 442, such as the center of the recess 442, causes the delivery unit 28 to swing and stop at the detection position P1, and the object to be tested is located at the center of the inside of the integrating sphere 36 for detection. In other words, the optoelectronic component testing equipment provided by this creation has a wide range of applications, and can be applied to optoelectronic components of various shapes and sizes to automatically detect optoelectronic components. Secondly, the number of delivery units 28 of the delivery device 20 used in the present application is not limited to the four groups disclosed herein, and the number thereof may be increased or decreased according to actual detection procedures. In other words, the delivery device 20 has at least one group. The delivery unit 28 is sufficient. Furthermore, the integrating sphere 36 disclosed in the foregoing embodiment is designed such that the upper shell member 362 and the lower shell member 364 can be separated from each other, which facilitates setting and repairing or replacing a probe such as a probe inside the integrating sphere 36. A detecting member such as a detector, however, the design in which the integrating sphere is separable from the upper and lower shell members is merely an example of a preferred design and is not a necessary condition for achieving the creative purpose of the creation.

最後,必須再次說明,本創作於前揭實施例中所揭露 的構成元件,僅為舉例說明,並非用來限制本案之範圍,其他等效元件的替代或變化,亦應為本案之申請專利範圍所涵蓋。Finally, it must be stated again that this creation was disclosed in the previous embodiment. The constituent elements are for illustrative purposes only and are not intended to limit the scope of the present invention. Alternatives or variations of other equivalent elements are also covered by the scope of the patent application.

10‧‧‧光電零組件檢測設備10‧‧‧Photoelectric component testing equipment

20‧‧‧遞送裝置20‧‧‧ delivery device

22‧‧‧基架22‧‧‧ pedestal

24‧‧‧驅動器24‧‧‧ Drive

26‧‧‧旋轉單元26‧‧‧Rotating unit

262‧‧‧安裝座262‧‧‧ Mounting

28‧‧‧遞送單元28‧‧‧Delivery unit

30‧‧‧檢測裝置30‧‧‧Detection device

32‧‧‧基架32‧‧‧ pedestal

34‧‧‧驅動單元34‧‧‧ drive unit

342‧‧‧線性致動器342‧‧‧Linear actuator

342a‧‧‧驅動件342a‧‧‧Driver

344‧‧‧轉接架344‧‧‧Transfer rack

346‧‧‧移動件346‧‧‧Mobile parts

346a‧‧‧承載面346a‧‧‧ bearing surface

36‧‧‧積分球36‧‧·score ball

362‧‧‧上殼件362‧‧‧Upper case

362a‧‧‧凹缺362a‧‧‧ vacancies

362b‧‧‧凸垣362b‧‧‧ convex

364‧‧‧下殼件364‧‧‧ Lower case

364a‧‧‧凹缺364a‧‧‧ vacancies

366‧‧‧開口366‧‧‧ openings

40‧‧‧承載台40‧‧‧Loading station

42‧‧‧安裝部42‧‧‧Installation Department

44‧‧‧承載部44‧‧‧Loading Department

442‧‧‧凹槽442‧‧‧ Groove

50‧‧‧遮蔽件50‧‧‧Shields

52‧‧‧安裝部52‧‧‧Installation Department

54‧‧‧弧形遮板54‧‧‧Arc-shaped shutter

541‧‧‧第一遮擋部541‧‧‧First occlusion

541a‧‧‧內表面541a‧‧‧ inner surface

542‧‧‧第二遮擋部542‧‧‧Second occlusion

542a‧‧‧內表面542a‧‧‧ inner surface

60‧‧‧光電零組件60‧‧‧Photoelectric components

P1‧‧‧檢測位置P1‧‧‧Detection location

P2‧‧‧進料位置P2‧‧‧ feeding position

P3‧‧‧微點亮位置P3‧‧‧ micro-lighting position

P4‧‧‧出料位置P4‧‧‧Drawing position

第一圖為本創作一較佳實施例所提供之光電零組件檢測設備與四光電零組件的立體組合圖;第二圖為本創作該較佳實施例所提供之光電零組件檢測設備之一遞送裝置與該等光電零組件的立體組合圖;第三圖及第四圖為本創作該較佳實施例所提供之光電零組件檢測設備之一檢測裝置的立體組合圖;以及第五圖係類同於第一圖,惟顯示本創作該較佳實施例所提供之光電零組件檢測設備之檢測裝置的一積分球係呈上、下殼件相互分離之態樣。The first figure is a three-dimensional combination diagram of the photoelectric component detecting device and the four photoelectric components provided by a preferred embodiment of the present invention; the second figure is one of the photoelectric component detecting devices provided by the preferred embodiment of the present invention. a three-dimensional combination diagram of the delivery device and the photoelectric components of the photoelectric components; the third and fourth figures are a three-dimensional combination diagram of the detection device of the photoelectric component detection device provided by the preferred embodiment; Similar to the first figure, an integrating sphere of the detecting device of the photoelectric component detecting apparatus provided by the preferred embodiment of the present invention is shown in which the upper and lower shell members are separated from each other.

10‧‧‧光電零組件檢測設備10‧‧‧Photoelectric component testing equipment

20‧‧‧遞送裝置20‧‧‧ delivery device

26‧‧‧旋轉單元26‧‧‧Rotating unit

28‧‧‧遞送單元28‧‧‧Delivery unit

30‧‧‧檢測裝置30‧‧‧Detection device

32‧‧‧基架32‧‧‧ pedestal

36‧‧‧積分球36‧‧·score ball

362‧‧‧上殼件362‧‧‧Upper case

364‧‧‧下殼件364‧‧‧ Lower case

366‧‧‧開口366‧‧‧ openings

40‧‧‧承載台40‧‧‧Loading station

42‧‧‧安裝部42‧‧‧Installation Department

44‧‧‧承載部44‧‧‧Loading Department

50‧‧‧遮蔽件50‧‧‧Shields

541‧‧‧第一遮擋部541‧‧‧First occlusion

541a‧‧‧內表面541a‧‧‧ inner surface

542‧‧‧第二遮擋部542‧‧‧Second occlusion

542a‧‧‧內表面542a‧‧‧ inner surface

60‧‧‧光電零組件60‧‧‧Photoelectric components

P1‧‧‧檢測位置P1‧‧‧Detection location

P2‧‧‧進料位置P2‧‧‧ feeding position

P3‧‧‧微點亮位置P3‧‧‧ micro-lighting position

P4‧‧‧出料位置P4‧‧‧Drawing position

Claims (26)

一種光電零組件檢測設備,包含有:一積分球,具有一開口;以及一遞送裝置,包含有至少一可相對該積分球位移並可自該開口進出該積分球之遞送單元,該遞送單元包含有一承載台及一遮蔽件,該承載台具有一用以承載一光電零組件之承載部,該遞送單元能自該積分球之外部位移至一檢測位置,使該遞送單元之承載台的承載部位於該積分球內,且該遞送單元之遮蔽件遮擋該積分球之開口。An optoelectronic component detecting apparatus comprising: an integrating sphere having an opening; and a delivery device comprising at least one delivery unit displaceable relative to the integrating sphere and accessible from the opening, the delivery unit comprising a carrying platform and a shielding member having a carrying portion for carrying an optoelectronic component, the delivery unit being displaceable from the outside of the integrating sphere to a detecting position, and the carrying portion of the carrying unit of the delivering unit Located within the integrating sphere, and the shield of the delivery unit blocks the opening of the integrating sphere. 如申請專利範圍第1項所述之光電零組件檢測設備,其中該遞送裝置包含有複數個該遞送單元,該等遞送單元能同步轉動並輪流地轉動至該檢測位置。The optoelectronic component inspection apparatus of claim 1, wherein the delivery device comprises a plurality of the delivery units, the delivery units being rotatable in unison and rotating to the detection position in turn. 如申請專利範圍第1或2項所述之光電零組件檢測設備,其中該遞送裝置之遞送單元係繞一垂直軸向轉動,該積分球之開口係實質上垂直於該垂直軸向地延伸成弧形,且該承載台之承載部及該遮蔽件能通過該積分球之開口。The photoelectric component detecting apparatus according to claim 1 or 2, wherein the delivery unit of the delivery device rotates about a vertical axis, and the opening of the integrating sphere extends substantially perpendicular to the vertical axis. The arc is shaped, and the bearing portion of the carrying platform and the shielding member can pass through the opening of the integrating sphere. 如申請專利範圍第3項所述之光電零組件檢測設備,其中該遞送裝置之遞送單元的遮蔽件具有一尺寸略小於該積分球之開口的弧形遮板。The optoelectronic component detecting apparatus of claim 3, wherein the shielding member of the delivery unit of the delivery device has an arcuate shutter having a size slightly smaller than an opening of the integrating sphere. 如申請專利範圍第4項所述之光電零組件檢測設備,其中該遞送裝置包含有一旋轉單元;該遞送裝置之遞送單元中,該承載台具有一設於該旋轉單元之安裝部,該遮蔽件之弧形遮板具有分別自該承載台二側延伸而出之一 第一遮擋部及一第二遮擋部,該承載台之承載部係自該安裝部延伸而出並位於該遮蔽件之第一遮擋部與第二遮擋部之間。The photoelectric component detecting device of claim 4, wherein the delivery device comprises a rotating unit; and the delivery unit of the delivery device has a mounting portion disposed on the rotating unit, the shielding member The curved shutter has one of extending from the two sides of the carrying platform The first shielding portion and the second shielding portion extend from the mounting portion and are located between the first shielding portion and the second shielding portion of the shielding member. 如申請專利範圍第5項所述之光電零組件檢測設備,其中該積分球包含有能相互分離之一上殼件及一下殼件,該上殼件與該下殼件相互組合時形成出該開口。The photoelectric component detecting device according to claim 5, wherein the integrating sphere comprises an upper shell member and a lower shell member which are separable from each other, and the upper shell member and the lower shell member are combined with each other to form the Opening. 如申請專利範圍第6項所述之光電零組件檢測設備,更包含有一驅動單元,該驅動單元具有一能沿該垂直軸向移動之移動件,該積分球之上殼件與下殼件其中之一係設置於該移動件,該上殼件與該下殼件能藉由該移動件移動而相互分離及相互組合。The photoelectric component detecting device of claim 6, further comprising a driving unit having a moving member movable along the vertical axis, the integrating ball upper shell member and the lower shell member One of the upper housing members and the lower housing member can be separated from each other and combined with each other by the moving member. 如申請專利範圍第7項所述之光電零組件檢測設備,其中該驅動單元之移動件具有一承載面,該積分球之上殼件的底部係設於該承載面上並能與該下殼件相接合。The photoelectric component detecting device of claim 7, wherein the moving member of the driving unit has a bearing surface, and the bottom of the integrating member is attached to the bearing surface and can be coupled to the lower shell The pieces are joined. 如申請專利範圍第8項所述之光電零組件檢測設備,其中該遞送裝置之遞送單元中,該遮蔽件之第一遮擋部及第二遮擋部分別具有一塗設有一反射擴散塗層之內表面,各該內表面在該遞送單元位於該檢測位置時係朝向該積分球內部。The photoelectric component detecting device of claim 8, wherein the first blocking portion and the second shielding portion of the shielding member have a reflective diffusion coating layer respectively disposed in the delivery unit of the delivery device The surface, each of the inner surfaces, faces the interior of the integrating sphere when the delivery unit is in the detection position. 如申請專利範圍第3項所述之光電零組件檢測設備,其中該遞送裝置包含有一旋轉單元;該遞送裝置之遞送單元中,該承載台具有一設於該旋轉單元之安裝部,該遮蔽件具有分別自該承載台二側延伸而出之一第一遮擋部及一第二遮擋部,該承載台之承載部係自該安裝部延伸而 出並位於該遮蔽件之第一遮擋部與第二遮擋部之間。The photoelectric component detecting apparatus according to claim 3, wherein the delivery device comprises a rotating unit; and the delivery unit of the delivery device has a mounting portion provided on the rotating unit, the shielding member Having a first shielding portion and a second shielding portion extending from two sides of the carrying platform, the bearing portion of the loading platform extending from the mounting portion And located between the first shielding portion and the second shielding portion of the shielding member. 如申請專利範圍第10項所述之光電零組件檢測設備,其中該積分球包含有能相互分離之一上殼件及一下殼件,該上殼件與該下殼件相互組合時形成出該開口。The photoelectric component detecting device according to claim 10, wherein the integrating sphere comprises an upper shell member and a lower shell member which are separable from each other, and the upper shell member and the lower shell member are combined with each other to form the Opening. 如申請專利範圍第11項所述之光電零組件檢測設備,更包含有一驅動單元,該驅動單元具有一能沿該垂直軸向移動之移動件,該積分球之上殼件與下殼件其中之一係設置於該移動件,該上殼件與該下殼件能藉由該移動件移動而相互分離及相互組合。The photoelectric component detecting device of claim 11, further comprising a driving unit having a moving member movable along the vertical axis, the integrating ball upper shell member and the lower shell member One of the upper housing members and the lower housing member can be separated from each other and combined with each other by the moving member. 如申請專利範圍第12項所述之光電零組件檢測設備,其中該驅動單元之移動件具有一承載面,該積分球之上殼件的底部係設於該承載面上並能與該下殼件相接合。The photoelectric component detecting device of claim 12, wherein the moving member of the driving unit has a bearing surface, and the bottom of the integrating member is attached to the bearing surface and can be coupled to the lower shell The pieces are joined. 如申請專利範圍第13項所述之光電零組件檢測設備,其中該遞送裝置之遞送單元中,該遮蔽件之第一遮擋部及第二遮擋部分別具有一塗設有一反射擴散塗層之內表面,各該內表面在該遞送單元位於該檢測位置時係朝向該積分球內部。The photoelectric component detecting device of claim 13, wherein in the delivery unit of the delivery device, the first shielding portion and the second shielding portion of the shielding member respectively have a coating with a reflective diffusion coating The surface, each of the inner surfaces, faces the interior of the integrating sphere when the delivery unit is in the detection position. 如申請專利範圍第3項所述之光電零組件檢測設備,其中該積分球包含有能相互分離之一上殼件及一下殼件,該上殼件與該下殼件相互組合時形成出該開口。The photoelectric component detecting device according to claim 3, wherein the integrating sphere comprises an upper shell member and a lower shell member which are separable from each other, and the upper shell member and the lower shell member are combined with each other to form the Opening. 如申請專利範圍第15項所述之光電零組件檢測設備,更包含有一驅動單元,該驅動單元具有一能沿該垂直軸向移動之移動件,該積分球之上殼件與下殼件其中之 一係設置於該移動件,該上殼件與該下殼件能藉由該移動件移動而相互分離及相互組合。The photoelectric component detecting device of claim 15, further comprising a driving unit having a moving member movable along the vertical axis, wherein the integrating ball is upper and lower It A pair is disposed on the moving member, and the upper case member and the lower case member are separated from each other and combined with each other by the moving member. 如申請專利範圍第16項所述之光電零組件檢測設備,其中該驅動單元之移動件具有一承載面,該積分球之上殼件的底部係設於該承載面上並能與該下殼件相接合。The photoelectric component detecting device of claim 16, wherein the moving member of the driving unit has a bearing surface, and the bottom of the upper shell of the integrating sphere is attached to the bearing surface and can be coupled to the lower shell The pieces are joined. 如申請專利範圍第17項所述之光電零組件檢測設備,其中該遞送裝置之遞送單元的遮蔽件具有一尺寸略小於該積分球之開口的弧形遮板。The optoelectronic component detecting apparatus of claim 17, wherein the shielding unit of the delivery unit of the delivery device has an arcuate shutter having a size slightly smaller than an opening of the integrating sphere. 如申請專利範圍第18項所述之光電零組件檢測設備,其中該遞送裝置之遞送單元中,該遮蔽件之弧形遮板具有一塗設有一反射擴散塗層之內表面,該內表面在該遞送單元位於該檢測位置時係朝向該積分球內部。The photoelectric component detecting device according to claim 18, wherein in the delivery unit of the delivery device, the curved shutter of the shielding member has an inner surface coated with a reflective diffusion coating, the inner surface being The delivery unit is located towards the interior of the integrating sphere when in the detection position. 如申請專利範圍第1項所述之光電零組件檢測設備,其中該遞送裝置包含有一旋轉單元以及一用以驅動該旋轉單元轉動之驅動器,且該遞送單元係固定於該旋轉單元並對應該積分球之開口;藉此,該遞送單元可受該旋轉單元帶動而可自該積分球之開口進出該積分球。The photoelectric component detecting device according to claim 1, wherein the delivery device comprises a rotating unit and a driver for driving the rotating unit to rotate, and the delivery unit is fixed to the rotating unit and should be integrated The opening of the ball; whereby the delivery unit can be driven by the rotating unit to enter and exit the integrating sphere from the opening of the integrating sphere. 如申請專利範圍第20項所述之光電零組件檢測設備,其中該積分球之開口係呈弧形地延伸於該積分球之側面,而該遞送單元之遮蔽件具有一尺寸小於且形狀互補於該積分球之開口的弧形遮板。The photoelectric component detecting device according to claim 20, wherein the opening of the integrating sphere extends in an arc shape on a side of the integrating sphere, and the shielding member of the delivery unit has a size smaller than and a shape complementary to An arcuate shutter of the opening of the integrating sphere. 如申請專利範圍第21項所述之光電零組件檢測設備,其中該遞送單元之承載台具有一設於該旋轉單元之 安裝部,且該遮蔽件之弧形遮板具有分別自該承載台二側延伸而出之一第一遮擋部及一第二遮擋部,而該承載台之承載部係自該安裝部延伸而出並位於該遮蔽件之第一遮擋部與第二遮擋部之間。The photoelectric component detecting device of claim 21, wherein the carrying unit of the delivery unit has a rotating unit a mounting portion, and the arc-shaped shutter of the shielding member has a first shielding portion and a second shielding portion extending from the two sides of the loading platform, and the bearing portion of the loading platform extends from the mounting portion And located between the first shielding portion and the second shielding portion of the shielding member. 如申請專利範圍第22項所述之光電零組件檢測設備,其中該積分球包含有能相互分離之一上殼件及一下殼件,該上殼件與該下殼件相互組合時形成出該開口。The photoelectric component detecting device according to claim 22, wherein the integrating sphere comprises an upper shell member and a lower shell member which are separable from each other, and the upper shell member and the lower shell member are combined with each other to form the Opening. 如申請專利範圍第23項所述之光電零組件檢測設備,更包含有一驅動單元,該驅動單元具有一移動件,該積分球之上殼件與下殼件其中之一係固定於該移動件。The photoelectric component detecting device of claim 23, further comprising a driving unit, the driving unit having a moving component, wherein one of the upper and lower casing members of the integrating sphere is fixed to the moving component . 如申請專利範圍第24項所述之光電零組件檢測設備,其中該遞送裝置之遞送單元中,該遮蔽件之第一遮擋部及第二遮擋部分別具有一塗設有一反射擴散塗層之內表面,各該內表面在該遞送單元位於該檢測位置時係朝向該積分球內部。The photoelectric component detecting device of claim 24, wherein in the delivery unit of the delivery device, the first shielding portion and the second shielding portion of the shielding member respectively have a coating of a reflective diffusion coating The surface, each of the inner surfaces, faces the interior of the integrating sphere when the delivery unit is in the detection position. 如申請專利範圍第1項所述之光電零組件檢測設備,其中該遞送單元之遮蔽件具有一塗設有一反射擴散塗層之內表面,該內表面在該遞送單元位於該檢測位置時係朝向該積分球內部。The photoelectric component detecting device of claim 1, wherein the shielding member of the delivery unit has an inner surface coated with a reflective diffusion coating, the inner surface being oriented when the delivery unit is located at the detecting position The inside of the integrating sphere.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI584052B (en) * 2013-02-25 2017-05-21 泰瑞達公司 System for testing camera modules and method of exposing camera modules to targets
CN108776105A (en) * 2018-08-14 2018-11-09 成都曙光光纤网络有限责任公司 Reflection spectrum detection device and sample composition detection device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI584052B (en) * 2013-02-25 2017-05-21 泰瑞達公司 System for testing camera modules and method of exposing camera modules to targets
CN108776105A (en) * 2018-08-14 2018-11-09 成都曙光光纤网络有限责任公司 Reflection spectrum detection device and sample composition detection device
CN108776105B (en) * 2018-08-14 2024-04-12 成都曙光光纤网络有限责任公司 Reflection spectrum detection device and sample component detection device

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