JP2016064342A5 - - Google Patents
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- Publication number
- JP2016064342A5 JP2016064342A5 JP2014193933A JP2014193933A JP2016064342A5 JP 2016064342 A5 JP2016064342 A5 JP 2016064342A5 JP 2014193933 A JP2014193933 A JP 2014193933A JP 2014193933 A JP2014193933 A JP 2014193933A JP 2016064342 A5 JP2016064342 A5 JP 2016064342A5
- Authority
- JP
- Japan
- Prior art keywords
- ultrafiltration membrane
- membrane module
- ultrapure water
- series
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 claims description 32
- 238000000108 ultra-filtration Methods 0.000 claims description 32
- 239000012498 ultrapure water Substances 0.000 claims description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 15
- 238000001914 filtration Methods 0.000 claims 2
- 239000010419 fine particle Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014193933A JP6469400B2 (ja) | 2014-09-24 | 2014-09-24 | 超純水製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014193933A JP6469400B2 (ja) | 2014-09-24 | 2014-09-24 | 超純水製造装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016064342A JP2016064342A (ja) | 2016-04-28 |
| JP2016064342A5 true JP2016064342A5 (enExample) | 2017-10-26 |
| JP6469400B2 JP6469400B2 (ja) | 2019-02-13 |
Family
ID=55804692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014193933A Active JP6469400B2 (ja) | 2014-09-24 | 2014-09-24 | 超純水製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6469400B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6670206B2 (ja) * | 2016-08-24 | 2020-03-18 | オルガノ株式会社 | 超純水製造装置 |
| JP6921521B2 (ja) * | 2016-12-15 | 2021-08-18 | サッポロビール株式会社 | 不凍液の再生方法、及び不凍液の再生システム |
| KR20200138181A (ko) | 2018-03-27 | 2020-12-09 | 노무라마이크로사이엔스가부시키가이샤 | 초순수 제조 시스템 및 초순수 제조 방법 |
| WO2019188964A1 (ja) | 2018-03-27 | 2019-10-03 | 野村マイクロ・サイエンス株式会社 | 超純水製造システム及び超純水製造方法 |
| KR102818974B1 (ko) | 2018-03-27 | 2025-06-10 | 노무라마이크로사이엔스가부시키가이샤 | 초순수 제조 시스템 및 초순수 제조 시스템의 운전 방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0615271A (ja) * | 1992-06-12 | 1994-01-25 | Suido Kiko Kk | 透過膜による上水道用ろ過装置 |
| JPH1099855A (ja) * | 1996-08-05 | 1998-04-21 | Sony Corp | 限外濾過機能を備える超純水供給プラント、および超純水の供給方法 |
| JP2008237971A (ja) * | 2007-03-26 | 2008-10-09 | Miura Co Ltd | 膜濾過システムの運転方法 |
| SG10201913848TA (en) * | 2011-01-17 | 2020-03-30 | Evoqua Water Tech Llc | Method and system for providing ultrapure water |
| JP6075032B2 (ja) * | 2012-11-26 | 2017-02-08 | 三浦工業株式会社 | 純水製造装置 |
| JP6304259B2 (ja) * | 2013-10-04 | 2018-04-04 | 栗田工業株式会社 | 超純水製造装置 |
-
2014
- 2014-09-24 JP JP2014193933A patent/JP6469400B2/ja active Active
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