JP2016031805A5 - - Google Patents

Download PDF

Info

Publication number
JP2016031805A5
JP2016031805A5 JP2014152939A JP2014152939A JP2016031805A5 JP 2016031805 A5 JP2016031805 A5 JP 2016031805A5 JP 2014152939 A JP2014152939 A JP 2014152939A JP 2014152939 A JP2014152939 A JP 2014152939A JP 2016031805 A5 JP2016031805 A5 JP 2016031805A5
Authority
JP
Japan
Prior art keywords
pin
sample
jig
gear
rotary jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014152939A
Other languages
English (en)
Japanese (ja)
Other versions
JP6308904B2 (ja
JP2016031805A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014152939A priority Critical patent/JP6308904B2/ja
Priority claimed from JP2014152939A external-priority patent/JP6308904B2/ja
Priority to DE102015213764.3A priority patent/DE102015213764B4/de
Priority to US14/810,673 priority patent/US9773640B2/en
Publication of JP2016031805A publication Critical patent/JP2016031805A/ja
Publication of JP2016031805A5 publication Critical patent/JP2016031805A5/ja
Application granted granted Critical
Publication of JP6308904B2 publication Critical patent/JP6308904B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014152939A 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法 Active JP6308904B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014152939A JP6308904B2 (ja) 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法
DE102015213764.3A DE102015213764B4 (de) 2014-07-28 2015-07-22 Probenhalter, Vorrichtung für einen Strahl geladener Teilchen und Beobachtungsverfahren
US14/810,673 US9773640B2 (en) 2014-07-28 2015-07-28 Sample holder, charged particle beam apparatus, and observation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014152939A JP6308904B2 (ja) 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法

Publications (3)

Publication Number Publication Date
JP2016031805A JP2016031805A (ja) 2016-03-07
JP2016031805A5 true JP2016031805A5 (https=) 2016-11-17
JP6308904B2 JP6308904B2 (ja) 2018-04-11

Family

ID=55065779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014152939A Active JP6308904B2 (ja) 2014-07-28 2014-07-28 試料ホルダ、荷電粒子線装置および観察方法

Country Status (3)

Country Link
US (1) US9773640B2 (https=)
JP (1) JP6308904B2 (https=)
DE (1) DE102015213764B4 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9734985B2 (en) * 2015-07-01 2017-08-15 Kabushiki Kaisha Toshiba Analytical apparatus, sample holder and analytical method
DE102015215323A1 (de) * 2015-08-11 2017-02-16 Georg-August-Universität Göttingen Stiftung Öffentlichen Rechts Technik zur tomografischen Bilderfassung
US11257656B2 (en) * 2020-04-08 2022-02-22 Fei Company Rotating sample holder for random angle sampling in tomography

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69128104T2 (de) 1990-05-18 1998-04-09 Hitachi Ltd Elektronenmikroskop, Probenstellglied für ein Elektronenmikroskop und Verfahren zum Beobachten von mikroskopischen Bildern
US6410925B1 (en) 2000-07-31 2002-06-25 Gatan, Inc. Single tilt rotation cryotransfer holder for electron microscopes
JP2008107226A (ja) * 2006-10-26 2008-05-08 Jeol Ltd 試料作成装置
JP5268324B2 (ja) 2007-10-29 2013-08-21 株式会社日立ハイテクノロジーズ 荷電粒子線顕微装置及び顕微方法
DE102009001587A1 (de) * 2009-01-06 2010-07-08 Carl Zeiss Nts Gmbh Verfahren zur Einstellung eines Betriebsparameters eines Teilchenstrahlgeräts sowie Probenhalter zur Durchführung des Verfahrens
JP5250470B2 (ja) 2009-04-22 2013-07-31 株式会社日立ハイテクノロジーズ 試料ホールダ，該試料ホールダの使用法、及び荷電粒子装置
US8089053B1 (en) * 2009-11-10 2012-01-03 Dudley Finch Dynamically tilting specimen holder for stereo and tomographic imaging in a transmission electron microscope using a combination of micro electro mechanical systems (MEMS) and piezoelectric transducers (PZTs)
JP5403560B2 (ja) * 2010-11-17 2014-01-29 コリア ベイシック サイエンス インスティテュート 透過電子顕微鏡の、３方向以上から試片を観察し分析するための３軸駆動が可能な試片ホルダー
JP5883658B2 (ja) * 2012-01-20 2016-03-15 株式会社日立ハイテクノロジーズ 荷電粒子線顕微鏡、荷電粒子線顕微鏡用試料ホルダ及び荷電粒子線顕微方法

Similar Documents

Publication Publication Date Title
EP2778666A3 (en) X-ray diffraction apparatus and method
ES3036698T3 (en) Control apparatus for machine tool and machine tool with a control apparatus
EP2730730A3 (en) Door handle apparatus
CA2872133C (en) Robotic assister for catheter insertion
EP3636169A3 (en) Interchangeable surgical tool assembly with a surgical end effector that is selectively rotatable about a shaft axis
JP2016031805A5 (https=)
JP2016533484A5 (https=)
JP2015163196A5 (https=)
JP2015085200A5 (https=)
FI20110106A7 (fi) Hammaslääketieteellinen kuvauslaitteisto
RU2017102667A (ru) Манипулятор с ручкой
EP3045267A3 (en) End face grinding method and end face grinding device
WO2014187841A3 (de) Antriebsvorrichtung für ein medizinisches, insbesondere dentales oder chirurgisches, werkzeug
JP2015114422A5 (https=)
SG10201402685TA (en) Robot arm control apparatus, substrate transfer apparatus,substrate processing apparatus, robot arm control method, and program
WO2016087332A8 (en) Device for orienting parts, particularly for gripping by robots, automation means and the like
WO2014140033A3 (de) Vorrichtung zum betreiben einer werkzeugmaschine und werkzeugmaschine
JP2013154421A5 (https=)
JP2017006398A5 (ja) Ｘ線タルボ撮影装置及び保持ユニット
EP2789425A3 (en) An adjustable tool
BR112019000508A2 (pt) recipiente de pó, cartucho de processo e aparelho de formação de imagem
JP6035266B2 (ja) Ｘ線撮影装置
WO2017203026A3 (en) 3d printed robot for holding medical instruments during procedures and its control
CN110383806A (zh) 镜头装置、摄像系统以及移动体
EP2648040A3 (en) Shutter assembly and photographing apparatus including the same