JP2016027641A5 - - Google Patents
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- Publication number
- JP2016027641A5 JP2016027641A5 JP2015129639A JP2015129639A JP2016027641A5 JP 2016027641 A5 JP2016027641 A5 JP 2016027641A5 JP 2015129639 A JP2015129639 A JP 2015129639A JP 2015129639 A JP2015129639 A JP 2015129639A JP 2016027641 A5 JP2016027641 A5 JP 2016027641A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- protruding
- row
- longitudinal direction
- members
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims 84
- 239000000758 substrate Substances 0.000 claims 59
- 238000011086 high cleaning Methods 0.000 claims 5
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015129639A JP6366544B2 (ja) | 2014-07-04 | 2015-06-29 | 洗浄装置及びロール洗浄部材 |
| MYPI2016704827A MY176791A (en) | 2014-07-04 | 2015-07-01 | Cleaning device and roll cleaning member |
| CN201580036679.2A CN106663620B (zh) | 2014-07-04 | 2015-07-01 | 清洗装置及滚筒清洗部件 |
| SG11201700026XA SG11201700026XA (en) | 2014-07-04 | 2015-07-01 | Cleaning device and roll cleaning member |
| KR1020177002741A KR102282899B1 (ko) | 2014-07-04 | 2015-07-01 | 세정 장치 및 롤 세정 부재 |
| US15/322,480 US10453708B2 (en) | 2014-07-04 | 2015-07-01 | Cleaning device and roll cleaning member |
| PCT/JP2015/003314 WO2016002219A1 (ja) | 2014-07-04 | 2015-07-01 | 洗浄装置及びロール洗浄部材 |
| TW104121628A TWI686868B (zh) | 2014-07-04 | 2015-07-03 | 洗淨裝置及滾筒洗淨構件 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014138685 | 2014-07-04 | ||
| JP2014138685 | 2014-07-04 | ||
| JP2015129639A JP6366544B2 (ja) | 2014-07-04 | 2015-06-29 | 洗浄装置及びロール洗浄部材 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016027641A JP2016027641A (ja) | 2016-02-18 |
| JP2016027641A5 true JP2016027641A5 (cg-RX-API-DMAC7.html) | 2017-12-21 |
| JP6366544B2 JP6366544B2 (ja) | 2018-08-01 |
Family
ID=55018792
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015129639A Active JP6366544B2 (ja) | 2014-07-04 | 2015-06-29 | 洗浄装置及びロール洗浄部材 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US10453708B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6366544B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR102282899B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN106663620B (cg-RX-API-DMAC7.html) |
| MY (1) | MY176791A (cg-RX-API-DMAC7.html) |
| SG (1) | SG11201700026XA (cg-RX-API-DMAC7.html) |
| TW (1) | TWI686868B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2016002219A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10269555B2 (en) | 2015-09-30 | 2019-04-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Post-CMP cleaning and apparatus |
| JP6990720B2 (ja) * | 2018-01-09 | 2022-01-12 | 東京エレクトロン株式会社 | 洗浄装置、洗浄方法及びコンピュータ記憶媒体 |
| USD923890S1 (en) * | 2018-09-07 | 2021-06-29 | Maradyne Corporation | Mattress surface cleaning agitator |
| CN109007900B (zh) * | 2018-09-20 | 2023-09-12 | 安徽科技学院 | 一种海带无损伤清洗装置及其清洗方法 |
| KR102762173B1 (ko) * | 2019-01-31 | 2025-02-05 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 세정 디바이스들 및 그의 방법들 |
| USD906683S1 (en) * | 2019-03-11 | 2021-01-05 | Ali Ebrahimi Afrouzi | Side brush |
| USD897111S1 (en) * | 2019-03-11 | 2020-09-29 | Ali Ebrahimi Afrouzi | Side brush |
| USD906682S1 (en) * | 2019-03-11 | 2021-01-05 | Ali Ebrahimi Afrouzi | Side brush |
| USD906681S1 (en) * | 2019-03-11 | 2021-01-05 | Ali Ebrahimi Afrouzi | Side brush |
| USD906680S1 (en) * | 2019-03-11 | 2021-01-05 | Ali Ebrahimi Afrouzi | Side brush |
| USD897112S1 (en) * | 2019-03-25 | 2020-09-29 | Ali Ebrahimi Afrouzi | Side brush |
| USD906684S1 (en) * | 2019-03-28 | 2021-01-05 | Ali Ebrahimi Afrouzi | Side brush |
| USD906685S1 (en) * | 2019-04-02 | 2021-01-05 | Ali Ebrahimi Afrouzi | Side brush |
| USD907370S1 (en) * | 2019-04-05 | 2021-01-12 | Ali Ebrahimi Afrouzi | Side brush |
| USD907925S1 (en) * | 2019-04-23 | 2021-01-19 | Ali Ebrahimi Afrouzi | Side brush |
| USD897113S1 (en) * | 2019-04-25 | 2020-09-29 | Ali Ebrahimi Afrouzi | Side brush |
| USD906686S1 (en) * | 2019-04-30 | 2021-01-05 | Ali Ebrahimi Afrouzi | Side brush |
| USD907371S1 (en) * | 2019-05-03 | 2021-01-12 | Ali Ebrahimi Afrouzi | Side brush |
| USD907926S1 (en) * | 2019-06-10 | 2021-01-19 | Ali Ebrahimi Afrouzi | Side brush |
| USD907372S1 (en) * | 2019-06-10 | 2021-01-12 | Ali Ebrahimi Afrouzi | Side brush |
| CN111790682B (zh) * | 2020-06-30 | 2022-06-28 | 鹰潭拓新机电股份有限公司 | 一种模具零件清洗装置 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6502273B1 (en) | 1996-11-08 | 2003-01-07 | Kanebo, Ltd. | Cleaning sponge roller |
| JP3403108B2 (ja) | 1999-02-26 | 2003-05-06 | アイオン株式会社 | 洗浄用スポンジローラ |
| US6299698B1 (en) | 1998-07-10 | 2001-10-09 | Applied Materials, Inc. | Wafer edge scrubber and method |
| JP2000270929A (ja) * | 1999-03-26 | 2000-10-03 | Shibaura Mechatronics Corp | 洗浄用ブラシ |
| JP4965253B2 (ja) * | 2003-08-08 | 2012-07-04 | インテグリス・インコーポレーテッド | 回転可能ベース上に鋳造されるモノリシック多孔性パッドを作製する方法および材料 |
| US20050109371A1 (en) * | 2003-10-27 | 2005-05-26 | Applied Materials, Inc. | Post CMP scrubbing of substrates |
| JP2006075718A (ja) * | 2004-09-09 | 2006-03-23 | Aion Kk | 弾性ローラ |
| JP2008311481A (ja) * | 2007-06-15 | 2008-12-25 | Sony Corp | 基板洗浄方法、基板洗浄装置及び半導体製造方法 |
| JP2009066527A (ja) * | 2007-09-13 | 2009-04-02 | Nec Electronics Corp | 洗浄用ローラおよび洗浄装置 |
| US20100043160A1 (en) * | 2008-08-20 | 2010-02-25 | United Microelectronics Corp. | Wafer cleaning roller |
| KR20130038806A (ko) | 2010-02-22 | 2013-04-18 | 인티그리스, 인코포레이티드 | Ｃｍｐ 후 세정 브러시 |
| JP5535687B2 (ja) | 2010-03-01 | 2014-07-02 | 株式会社荏原製作所 | 基板洗浄方法及び基板洗浄装置 |
| JP2011233646A (ja) * | 2010-04-26 | 2011-11-17 | Sumitomo Metal Mining Co Ltd | 半導体用基板の洗浄方法 |
-
2015
- 2015-06-29 JP JP2015129639A patent/JP6366544B2/ja active Active
- 2015-07-01 SG SG11201700026XA patent/SG11201700026XA/en unknown
- 2015-07-01 KR KR1020177002741A patent/KR102282899B1/ko active Active
- 2015-07-01 WO PCT/JP2015/003314 patent/WO2016002219A1/ja not_active Ceased
- 2015-07-01 CN CN201580036679.2A patent/CN106663620B/zh active Active
- 2015-07-01 US US15/322,480 patent/US10453708B2/en active Active
- 2015-07-01 MY MYPI2016704827A patent/MY176791A/en unknown
- 2015-07-03 TW TW104121628A patent/TWI686868B/zh active