JP2016027611A5 - - Google Patents
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- Publication number
- JP2016027611A5 JP2016027611A5 JP2015057019A JP2015057019A JP2016027611A5 JP 2016027611 A5 JP2016027611 A5 JP 2016027611A5 JP 2015057019 A JP2015057019 A JP 2015057019A JP 2015057019 A JP2015057019 A JP 2015057019A JP 2016027611 A5 JP2016027611 A5 JP 2016027611A5
- Authority
- JP
- Japan
- Prior art keywords
- heating
- baffle
- baffles
- temperature
- vaporization system
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 124
- 230000008016 vaporization Effects 0.000 claims description 65
- 238000009834 vaporization Methods 0.000 claims description 62
- 238000000034 method Methods 0.000 claims description 38
- 239000012705 liquid precursor Substances 0.000 claims description 26
- 239000012159 carrier gas Substances 0.000 claims description 18
- 239000002243 precursor Substances 0.000 claims description 14
- 239000012530 fluid Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000006260 foam Substances 0.000 claims description 4
- 238000005187 foaming Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 claims 1
- 235000012773 waffles Nutrition 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 description 8
- 238000004590 computer program Methods 0.000 description 3
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14/227,503 US9964332B2 (en) | 2014-03-27 | 2014-03-27 | Systems and methods for bulk vaporization of precursor |
| US14/227,503 | 2014-03-27 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016027611A JP2016027611A (ja) | 2016-02-18 |
| JP2016027611A5 true JP2016027611A5 (https=) | 2018-04-26 |
| JP6602030B2 JP6602030B2 (ja) | 2019-11-06 |
Family
ID=54162128
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015057019A Active JP6602030B2 (ja) | 2014-03-27 | 2015-03-20 | 前駆体のバルク気化のためのシステムおよび方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9964332B2 (https=) |
| JP (1) | JP6602030B2 (https=) |
| KR (2) | KR102395768B1 (https=) |
| CN (2) | CN109898071B (https=) |
| TW (1) | TWI667365B (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102629005B1 (ko) * | 2016-03-29 | 2024-01-25 | 주식회사 선익시스템 | 다수 종류의 증착물질의 혼합비율을 보완하여 줄 수 있는 복합증발장치 |
| US10480070B2 (en) * | 2016-05-12 | 2019-11-19 | Versum Materials Us, Llc | Delivery container with flow distributor |
| CN109029635A (zh) * | 2017-06-12 | 2018-12-18 | 北京北方华创微电子装备有限公司 | 一种固态源的检测装置及其检测方法 |
| US10822699B2 (en) * | 2017-12-29 | 2020-11-03 | Varian Semiconductor Equipment Associates, Inc. | Techniques for controlling precursors in chemical deposition processes |
| US11624113B2 (en) * | 2019-09-13 | 2023-04-11 | Asm Ip Holding B.V. | Heating zone separation for reactant evaporation system |
| KR102272808B1 (ko) * | 2019-11-22 | 2021-07-02 | 세종대학교산학협력단 | 평탄화 장치 및 이를 포함하는 기판 처리 장치, 기판 처리 방법 |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2405494A (en) * | 1944-03-29 | 1946-08-06 | Cedar Corp N O | Air treating apparatus |
| US3404210A (en) * | 1967-06-23 | 1968-10-01 | American Air Filter Co | Melting furnace |
| JPS5239652A (en) * | 1975-09-22 | 1977-03-28 | Microbial Chem Res Found | Process for isolating kanamycin b derivatives with high purity |
| SE460450B (sv) * | 1988-03-30 | 1989-10-09 | Electrolux Ab | Temperaturreglerad kokplatta |
| US5133284A (en) * | 1990-07-16 | 1992-07-28 | National Semiconductor Corp. | Gas-based backside protection during substrate processing |
| JP3391829B2 (ja) * | 1991-12-26 | 2003-03-31 | キヤノン株式会社 | 液体状の原料を用いる化学気相堆積法及び装置 |
| US5451258A (en) * | 1994-05-11 | 1995-09-19 | Materials Research Corporation | Apparatus and method for improved delivery of vaporized reactant gases to a reaction chamber |
| KR100311672B1 (ko) * | 1994-05-11 | 2001-12-15 | 히가시 데츠로 | 반응가스송출장치및방법 |
| US5480678A (en) * | 1994-11-16 | 1996-01-02 | The B. F. Goodrich Company | Apparatus for use with CVI/CVD processes |
| ATE374263T1 (de) * | 1999-03-29 | 2007-10-15 | Antec Solar Energy Ag | Vorrichtung und verfahren zur beschichtung von substraten durch aufdampfen mittels eines pvd- verfahrens |
| KR100302609B1 (ko) * | 1999-05-10 | 2001-09-13 | 김영환 | 온도가변 가스 분사 장치 |
| US6718126B2 (en) * | 2001-09-14 | 2004-04-06 | Applied Materials, Inc. | Apparatus and method for vaporizing solid precursor for CVD or atomic layer deposition |
| TW200300701A (en) * | 2001-11-30 | 2003-06-16 | Asml Us Inc | High flow rate bubbler system and method |
| US6946033B2 (en) * | 2002-09-16 | 2005-09-20 | Applied Materials Inc. | Heated gas distribution plate for a processing chamber |
| US8708320B2 (en) * | 2006-12-15 | 2014-04-29 | Air Products And Chemicals, Inc. | Splashguard and inlet diffuser for high vacuum, high flow bubbler vessel |
| US8518484B2 (en) | 2007-01-29 | 2013-08-27 | Praxair Technology, Inc. | Bubbler apparatus and delivery method |
| JP4306764B2 (ja) * | 2007-06-04 | 2009-08-05 | トヨタ自動車株式会社 | 車間距離制御装置 |
| DE102010033153B4 (de) * | 2010-08-03 | 2020-06-18 | Otto Männer Innovation GmbH | Spritzgießdüse |
| KR20120131947A (ko) * | 2011-05-27 | 2012-12-05 | 엘지디스플레이 주식회사 | 증발원 및 이를 이용한 증착장치 |
| JP2013044043A (ja) * | 2011-08-26 | 2013-03-04 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
2014
- 2014-03-27 US US14/227,503 patent/US9964332B2/en active Active
-
2015
- 2015-03-20 JP JP2015057019A patent/JP6602030B2/ja active Active
- 2015-03-26 CN CN201910129364.2A patent/CN109898071B/zh active Active
- 2015-03-26 CN CN201510136272.9A patent/CN104947078B/zh active Active
- 2015-03-26 TW TW104109678A patent/TWI667365B/zh active
- 2015-03-26 KR KR1020150042504A patent/KR102395768B1/ko active Active
-
2022
- 2022-05-03 KR KR1020220054780A patent/KR102563448B1/ko active Active
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