JP2016022593A5 - - Google Patents
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- Publication number
- JP2016022593A5 JP2016022593A5 JP2014146258A JP2014146258A JP2016022593A5 JP 2016022593 A5 JP2016022593 A5 JP 2016022593A5 JP 2014146258 A JP2014146258 A JP 2014146258A JP 2014146258 A JP2014146258 A JP 2014146258A JP 2016022593 A5 JP2016022593 A5 JP 2016022593A5
- Authority
- JP
- Japan
- Prior art keywords
- gas barrier
- group
- barrier layer
- film
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 230000004888 barrier function Effects 0.000 claims 18
- 238000004519 manufacturing process Methods 0.000 claims 7
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 230000000737 periodic effect Effects 0.000 claims 3
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 239000011575 calcium Substances 0.000 claims 2
- 239000011777 magnesium Substances 0.000 claims 2
- 238000000034 method Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 229910052791 calcium Inorganic materials 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
- 229910052732 germanium Inorganic materials 0.000 claims 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 1
- 229910052738 indium Inorganic materials 0.000 claims 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims 1
- 229910052749 magnesium Inorganic materials 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
- 229920001709 polysilazane Polymers 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 229910052710 silicon Inorganic materials 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014146258A JP6295864B2 (ja) | 2014-07-16 | 2014-07-16 | ガスバリア性フィルムおよびその製造方法、ならびにこれを用いた電子デバイス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014146258A JP6295864B2 (ja) | 2014-07-16 | 2014-07-16 | ガスバリア性フィルムおよびその製造方法、ならびにこれを用いた電子デバイス |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016022593A JP2016022593A (ja) | 2016-02-08 |
| JP2016022593A5 true JP2016022593A5 (enrdf_load_stackoverflow) | 2017-04-27 |
| JP6295864B2 JP6295864B2 (ja) | 2018-03-20 |
Family
ID=55269835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014146258A Expired - Fee Related JP6295864B2 (ja) | 2014-07-16 | 2014-07-16 | ガスバリア性フィルムおよびその製造方法、ならびにこれを用いた電子デバイス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6295864B2 (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6983039B2 (ja) | 2016-11-29 | 2021-12-17 | 住友化学株式会社 | ガスバリア性フィルム及びフレキシブル電子デバイス |
| TW202101590A (zh) * | 2019-01-16 | 2021-01-01 | 日商東京威力科創股份有限公司 | 基板處理方法及基板處理系統 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3307471B2 (ja) * | 1993-02-24 | 2002-07-24 | 東燃ゼネラル石油株式会社 | セラミックコーティング用組成物及びコーティング方法 |
| JP3385060B2 (ja) * | 1993-04-20 | 2003-03-10 | 東燃ゼネラル石油株式会社 | 珪素−窒素−酸素−（炭素）−金属系セラミックス被覆膜の形成方法 |
| JP3370408B2 (ja) * | 1993-12-28 | 2003-01-27 | 東燃ゼネラル石油株式会社 | セラミックコーティングの製造方法 |
| US8906492B2 (en) * | 2009-03-17 | 2014-12-09 | LÌNTEC Corporation | Formed article, method for producing the formed article, member for electronic device, and electronic device |
| JP5533585B2 (ja) * | 2010-11-18 | 2014-06-25 | コニカミノルタ株式会社 | ガスバリアフィルムの製造方法、ガスバリアフィルム及び電子機器 |
| JP5857452B2 (ja) * | 2011-06-03 | 2016-02-10 | コニカミノルタ株式会社 | バリアーフィルムの製造方法 |
| WO2013161809A1 (ja) * | 2012-04-26 | 2013-10-31 | コニカミノルタ株式会社 | ガスバリア性フィルム、およびこれを用いる電子デバイス |
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2014
- 2014-07-16 JP JP2014146258A patent/JP6295864B2/ja not_active Expired - Fee Related