JP2016017882A5 - - Google Patents
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- Publication number
- JP2016017882A5 JP2016017882A5 JP2014141569A JP2014141569A JP2016017882A5 JP 2016017882 A5 JP2016017882 A5 JP 2016017882A5 JP 2014141569 A JP2014141569 A JP 2014141569A JP 2014141569 A JP2014141569 A JP 2014141569A JP 2016017882 A5 JP2016017882 A5 JP 2016017882A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- layer
- film thickness
- metal layer
- electrode pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims description 32
- 238000005259 measurement Methods 0.000 claims description 11
- 239000000523 sample Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 6
- 230000015572 biosynthetic process Effects 0.000 claims description 5
- 238000000691 measurement method Methods 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 6
- 238000011088 calibration curve Methods 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 238000009413 insulation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014141569A JP6276658B2 (ja) | 2014-07-09 | 2014-07-09 | 膜厚測定機能付き基板及び絶縁層の膜厚測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014141569A JP6276658B2 (ja) | 2014-07-09 | 2014-07-09 | 膜厚測定機能付き基板及び絶縁層の膜厚測定方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016017882A JP2016017882A (ja) | 2016-02-01 |
| JP2016017882A5 true JP2016017882A5 (OSRAM) | 2017-04-20 |
| JP6276658B2 JP6276658B2 (ja) | 2018-02-07 |
Family
ID=55233189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014141569A Active JP6276658B2 (ja) | 2014-07-09 | 2014-07-09 | 膜厚測定機能付き基板及び絶縁層の膜厚測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6276658B2 (OSRAM) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019066453A (ja) * | 2017-09-29 | 2019-04-25 | ミネベアミツミ株式会社 | ひずみゲージ |
| JP6793103B2 (ja) | 2017-09-29 | 2020-12-02 | ミネベアミツミ株式会社 | ひずみゲージ |
| JP2019066454A (ja) | 2017-09-29 | 2019-04-25 | ミネベアミツミ株式会社 | ひずみゲージ、センサモジュール |
| JP2019066312A (ja) | 2017-09-29 | 2019-04-25 | ミネベアミツミ株式会社 | ひずみゲージ |
| JP2019082424A (ja) | 2017-10-31 | 2019-05-30 | ミネベアミツミ株式会社 | ひずみゲージ |
| JP2019113411A (ja) | 2017-12-22 | 2019-07-11 | ミネベアミツミ株式会社 | ひずみゲージ、センサモジュール |
| JP2019184344A (ja) | 2018-04-05 | 2019-10-24 | ミネベアミツミ株式会社 | ひずみゲージ及びその製造方法 |
| WO2020085247A1 (ja) | 2018-10-23 | 2020-04-30 | ミネベアミツミ株式会社 | アクセルペダル、ステアリング、６軸センサ、エンジン、バンパー等 |
| JP7263220B2 (ja) * | 2019-11-29 | 2023-04-24 | 新光電気工業株式会社 | シランカップリング被膜の膜厚推定方法 |
| JP2021162303A (ja) | 2020-03-30 | 2021-10-11 | ミネベアミツミ株式会社 | ひずみゲージ |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007107976A (ja) * | 2005-10-13 | 2007-04-26 | Canon Inc | 紙種判別装置 |
| RU2457472C2 (ru) * | 2006-11-21 | 2012-07-27 | Джи-И Хелткер Био-Сайенсиз Корп. | Сборка и использование rfid-датчиков в контейнерах |
-
2014
- 2014-07-09 JP JP2014141569A patent/JP6276658B2/ja active Active
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