JP2016017768A5 - - Google Patents
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- JP2016017768A5 JP2016017768A5 JP2014138838A JP2014138838A JP2016017768A5 JP 2016017768 A5 JP2016017768 A5 JP 2016017768A5 JP 2014138838 A JP2014138838 A JP 2014138838A JP 2014138838 A JP2014138838 A JP 2014138838A JP 2016017768 A5 JP2016017768 A5 JP 2016017768A5
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- JP
- Japan
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- 238000001514 detection method Methods 0.000 claims description 24
- 230000007547 defect Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014138838A JP2016017768A (ja) | 2014-07-04 | 2014-07-04 | センサー素子、センサーデバイス、電子機器および移動体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014138838A JP2016017768A (ja) | 2014-07-04 | 2014-07-04 | センサー素子、センサーデバイス、電子機器および移動体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016017768A JP2016017768A (ja) | 2016-02-01 |
| JP2016017768A5 true JP2016017768A5 (enExample) | 2017-07-27 |
Family
ID=55233091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014138838A Withdrawn JP2016017768A (ja) | 2014-07-04 | 2014-07-04 | センサー素子、センサーデバイス、電子機器および移動体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2016017768A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6619313B2 (ja) * | 2016-09-21 | 2019-12-11 | 株式会社東芝 | センサ及びセンサパッケージ |
| CN108731659A (zh) * | 2018-05-25 | 2018-11-02 | 中国电子科技集团公司第二十九研究所 | 一种多检测振动单元微惯性导航陀螺仪 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4352975B2 (ja) * | 2003-07-25 | 2009-10-28 | セイコーエプソン株式会社 | 圧電振動片、圧電振動片の支持構造、圧電振動子及び振動型圧電ジャイロスコープ |
| JP2014089049A (ja) * | 2012-10-29 | 2014-05-15 | Tdk Corp | 角速度センサ |
-
2014
- 2014-07-04 JP JP2014138838A patent/JP2016017768A/ja not_active Withdrawn
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