JP2016013146A5 - - Google Patents
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- Publication number
- JP2016013146A5 JP2016013146A5 JP2014135134A JP2014135134A JP2016013146A5 JP 2016013146 A5 JP2016013146 A5 JP 2016013146A5 JP 2014135134 A JP2014135134 A JP 2014135134A JP 2014135134 A JP2014135134 A JP 2014135134A JP 2016013146 A5 JP2016013146 A5 JP 2016013146A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric layer
- ultrasonic
- ultrasonic sensor
- ultrasonic element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014135134A JP6323671B2 (ja) | 2014-06-30 | 2014-06-30 | 超音波センサー及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014135134A JP6323671B2 (ja) | 2014-06-30 | 2014-06-30 | 超音波センサー及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016013146A JP2016013146A (ja) | 2016-01-28 |
| JP2016013146A5 true JP2016013146A5 (cg-RX-API-DMAC7.html) | 2017-07-27 |
| JP6323671B2 JP6323671B2 (ja) | 2018-05-16 |
Family
ID=55229923
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014135134A Active JP6323671B2 (ja) | 2014-06-30 | 2014-06-30 | 超音波センサー及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6323671B2 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6862820B2 (ja) * | 2016-12-26 | 2021-04-21 | セイコーエプソン株式会社 | 超音波デバイス及び超音波装置 |
| JP6874463B2 (ja) * | 2017-03-27 | 2021-05-19 | セイコーエプソン株式会社 | 圧電素子、圧電アクチュエーター、超音波探触子、超音波装置、電子機器、液体噴射ヘッド、及び液体噴射装置 |
| WO2021171819A1 (ja) * | 2020-02-26 | 2021-09-02 | 株式会社村田製作所 | 超音波センサ |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114178A (ja) * | 1984-11-08 | 1986-05-31 | Omron Tateisi Electronics Co | マトリクスアレイ型超音波振動子 |
| JPS646858A (en) * | 1987-06-30 | 1989-01-11 | Yokogawa Medical Syst | Ultrasonic diagnostic device |
| US20050124884A1 (en) * | 2003-12-05 | 2005-06-09 | Mirsaid Bolorforosh | Multidimensional transducer systems and methods for intra patient probes |
| JP2006025805A (ja) * | 2004-07-12 | 2006-02-02 | Fujinon Corp | 超音波検査装置 |
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2014
- 2014-06-30 JP JP2014135134A patent/JP6323671B2/ja active Active