JP2016003394A - 管腔内ポリマー堆積装置及び方法 - Google Patents
管腔内ポリマー堆積装置及び方法 Download PDFInfo
- Publication number
- JP2016003394A JP2016003394A JP2015118778A JP2015118778A JP2016003394A JP 2016003394 A JP2016003394 A JP 2016003394A JP 2015118778 A JP2015118778 A JP 2015118778A JP 2015118778 A JP2015118778 A JP 2015118778A JP 2016003394 A JP2016003394 A JP 2016003394A
- Authority
- JP
- Japan
- Prior art keywords
- article
- passage
- conductive conduit
- plasma
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5093—Coaxial electrodes
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L29/00—Materials for catheters, medical tubing, cannulae, or endoscopes or for coating catheters
- A61L29/04—Macromolecular materials
- A61L29/06—Macromolecular materials obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L31/00—Materials for other surgical articles, e.g. stents, stent-grafts, shunts, surgical drapes, guide wires, materials for adhesion prevention, occluding devices, surgical gloves, tissue fixation devices
- A61L31/08—Materials for coatings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2400/00—Materials characterised by their function or physical properties
- A61L2400/02—Treatment of implants to prevent calcification or mineralisation in vivo
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2400/00—Materials characterised by their function or physical properties
- A61L2400/10—Materials for lubricating medical devices
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
- A61L2400/00—Materials characterised by their function or physical properties
- A61L2400/18—Modification of implant surfaces in order to improve biocompatibility, cell growth, fixation of biomolecules, e.g. plasma treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/08—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain an anti-friction or anti-adhesive surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D7/00—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
- B05D7/22—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes
- B05D7/222—Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials to internal surfaces, e.g. of tubes of pipes
Abstract
Description
前記物品の前記通路の内側に処理ガスからプラズマを発生させることと、
前記プラズマによって前記内面上に前記コーティングを堆積することと、
を含む。
処理チャンバーと、
高周波発生器と、
前記物品を収めるように構成されている通路を有する導電性導管と、
を備える。該導電性導管は、前記処理チャンバーの内側に配置され、該導電性導管は、前記高周波発生器と結合され、前記物品が該導電性導管の前記通路に収まっている場合、電力を受け取って前記物品内の前記通路の内側にプラズマを発生させる。
本発明の実施形態に従ってシリコーンチューブ材を処理した。対照として、シリコーンチューブ材の一サンプルを未処理状態のままとした。チューブを長手方向に半分に切り分け、チューブ材試料を作成した。摩擦低減膜を施すことにより一方を処理し、他方を未処理とした。
Claims (18)
- 物品内の通路を包囲する内面にコーティングを施す方法であって、該方法は、
前記物品の前記通路の内側に処理ガスからプラズマを発生させることと、
前記プラズマによって前記内面上に前記コーティングを堆積することと、
を含む、方法。 - 前記方法は、導電性導管の通路の内側に前記物品を配置することを更に含み、前記プラズマは、前記物品内の前記通路が該プラズマと前記導電性導管の前記通路との間にある状態で、前記導電性導管の内側に更に発生される、請求項1に記載の方法。
- 前記導電性導管の前記通路の内側に前記物品を配置することは、
前記物品を、前記導電性導管の前記通路に該導電性導管の第1の端において挿入することと、
前記物品を、前記導電性導管の前記通路を通して該導電性導管の第2の端に向かって移動させる力を印加することと、
を更に含む、請求項2に記載の方法。 - 前記導電性導管の内面と、前記物品の外面との間のギャップが、該ギャップにおいてプラズマ放電を阻止するように選択される、請求項2に記載の方法。
- 前記物品の前記通路の内側に前記プラズマを発生させることは、前記通路内の不活性ガスの分圧と前駆体モノマーの分圧とを含む全圧において、前記処理ガスを前記物品の前記通路に供給することを含む、請求項1に記載の方法。
- 前記前駆体モノマーは、テトラメチルシクロテトラシロキサンと、ヘキサメチルジシロキサンと、1,1,3,3−テトラメチルジシロキサン(tDMSO)とからなる群から選択される、請求項5に記載の方法。
- 前記導電性導管は、電源に結合され、前記物品の前記通路の内側に前記プラズマを発生させることは、或るパルス周波数及び或るデューティサイクルに従って、前記電源から前記導電性導管に高周波電力を供給することを含む、請求項5に記載の方法。
- 前記パルス周波数及び前記デューティサイクルは、該デューティサイクルの電力供給しない部分中に、前記物品の対置する端からの内方向ガス流により、前記処理ガスを前記物品の前記通路内に補充することができるように、前記物品の直径及び長さに基づき選択される、請求項7に記載の方法。
- 前記不活性ガスの前記分圧は、前記全圧を上昇させて、前記物品の前記通路の内側での前記プラズマの放電を持続させるように選択される、請求項5に記載の方法。
- 前記前駆体モノマーの前記分圧は、前記物品の第1の端と第2の端との間に均一な厚さで前記コーティングを堆積させるのに好適な堆積条件をもたらすように選択される、請求項5に記載の方法。
- 前記不活性ガスの前記分圧は、前記全圧を上昇させて、前記物品の前記通路の内側での前記プラズマの放電を持続させるように選択される、請求項10に記載の方法。
- 前記導電性導管の前記通路と、前記物品の前記通路とを、処理チャンバーの内側の前記処理ガスの流れ方向に対して平行に向き付けることを更に含む、請求項5に記載の方法。
- 物品が、導電体によって構成されているとともに電源と結合され、前記物品の前記通路の内側に前記プラズマを発生させることは、或るパルス周波数及び或るデューティサイクルに従って、前記電源から前記物品に高周波電力を印加することを含む、請求項1に記載の方法。
- 前記パルス周波数及び前記デューティサイクルは、前記物品の直径及び長さに基づき選択される、請求項13に記載の方法。
- 前記物品の前記通路の内側に前記プラズマを発生させることは、前記通路内の不活性ガスの分圧と前駆体モノマーの分圧とを含む全圧において、前記処理ガスを前記物品内の前記通路に供給することを含む、請求項13に記載の方法。
- 物品内の通路の内面にコーティングを施す装置であって、該装置は、
処理チャンバーと、
高周波発生器と、
前記物品を収めるように構成されている通路を有する導電性導管であって、該導電性導管は、前記処理チャンバーの内側に配置され、該導電性導管は、前記高周波発生器と結合され、前記物品が該導電性導管の前記通路に収まっている場合、電力を受け取って前記物品内の前記通路の内側にプラズマを発生させる、導電性導管と、
を備える、装置。 - 前記処理チャンバーに処理ガスを供給するように構成されている処理ガス源と、
前記処理ガス源と結合される制御装置であって、該制御装置は、前記物品の前記通路内の不活性ガスの分圧と前駆体モノマーの分圧とを含む全圧において、前記処理ガスを前記処理チャンバーに供給するように前記処理ガス源を動作させるよう構成されている、制御装置と、
を更に備える、請求項16に記載の装置。 - 前記物品の外面と、前記導電性導管の前記通路を包囲する内面とは、該物品の該外面と、該導電性導管の該通路を包囲する該内面との間のギャップを最小限に抑えるように構成されている、請求項16に記載の装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/304,199 | 2014-06-13 | ||
US14/304,199 US9382623B2 (en) | 2014-06-13 | 2014-06-13 | Apparatus and method for intraluminal polymer deposition |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016003394A true JP2016003394A (ja) | 2016-01-12 |
JP6567885B2 JP6567885B2 (ja) | 2019-08-28 |
Family
ID=54835667
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015118778A Expired - Fee Related JP6567885B2 (ja) | 2014-06-13 | 2015-06-12 | 管腔内ポリマー堆積装置及び方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9382623B2 (ja) |
JP (1) | JP6567885B2 (ja) |
KR (1) | KR20150143352A (ja) |
CN (1) | CN105177532B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020515723A (ja) * | 2017-03-31 | 2020-05-28 | デュララ テクノロジーズ、エルエルシー | 表面をコーティングするシステム及び方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5940850A (ja) * | 1982-08-30 | 1984-03-06 | 株式会社島津製作所 | 管状体内面のプラズマ処理装置 |
JPH0748715A (ja) * | 1993-04-21 | 1995-02-21 | Bend Res Inc | 内側中空微小基材のプラズマ重合および表面変性方法並びにこの方法により製造された製品 |
US6101973A (en) * | 1997-09-03 | 2000-08-15 | Medtronic, Inc. | Apparatus for reducing friction on polymeric surfaces |
JP2005158601A (ja) * | 2003-11-27 | 2005-06-16 | Fujita Giken Kk | 中空ワークの内面加工方法 |
JP2006002230A (ja) * | 2004-06-18 | 2006-01-05 | Rikogaku Shinkokai | 薄膜形成装置及び薄膜形成方法 |
JP2007191754A (ja) * | 2006-01-19 | 2007-08-02 | Shinko Seiki Co Ltd | プラズマcvd装置 |
JP2008174793A (ja) * | 2007-01-18 | 2008-07-31 | Nanotec Corp | 成膜装置及び成膜方法。 |
JP2011521106A (ja) * | 2008-05-13 | 2011-07-21 | サブ−ワン・テクノロジー・インコーポレーテッド | 太陽熱およびその他の応用例におけるパイプの内面および外面のコーティング方法 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5598232A (en) * | 1979-01-22 | 1980-07-26 | Agency Of Ind Science & Technol | Internal treatment of plastic tube member |
DE3204846A1 (de) * | 1982-02-11 | 1983-08-18 | Schott Glaswerke, 6500 Mainz | Plasmaverfahren zur innenbeschichtung von glasrohren |
JPS58157829A (ja) * | 1982-03-12 | 1983-09-20 | Toray Ind Inc | プラスチツク管内面の放電処理方法 |
US4692347A (en) * | 1983-07-07 | 1987-09-08 | The Curators Of The University Of Missouri | Method of interiorly coating tubing |
JPH0387372A (ja) * | 1988-07-22 | 1991-04-12 | Canon Inc | 堆積膜形成方法 |
US5198033A (en) * | 1991-10-31 | 1993-03-30 | Medtronic, Inc. | Continuous plasma surface treatment apparatus for running length polymeric tubing |
US5593550A (en) * | 1994-05-06 | 1997-01-14 | Medtronic, Inc. | Plasma process for reducing friction within the lumen of polymeric tubing |
US7300684B2 (en) * | 2004-07-15 | 2007-11-27 | Sub-One Technology, Inc. | Method and system for coating internal surfaces of prefabricated process piping in the field |
WO2008044555A1 (fr) * | 2006-10-06 | 2008-04-17 | Asahi Tech Co., Ltd. | élément résistant à la corrosion et son procédé de fabrication |
US8231568B2 (en) * | 2007-10-16 | 2012-07-31 | Nordson Corporation | Syringes with a reduced susceptibility to freeze-thaw void formation and methods of manufacturing such syringes |
US7985188B2 (en) * | 2009-05-13 | 2011-07-26 | Cv Holdings Llc | Vessel, coating, inspection and processing apparatus |
US8753725B2 (en) * | 2011-03-11 | 2014-06-17 | Southwest Research Institute | Method for plasma immersion ion processing and depositing coatings in hollow substrates using a heated center electrode |
US20130146225A1 (en) * | 2011-12-08 | 2013-06-13 | Mks Instruments, Inc. | Gas injector apparatus for plasma applicator |
-
2014
- 2014-06-13 US US14/304,199 patent/US9382623B2/en active Active
-
2015
- 2015-06-12 CN CN201510398705.8A patent/CN105177532B/zh active Active
- 2015-06-12 KR KR1020150083264A patent/KR20150143352A/ko unknown
- 2015-06-12 JP JP2015118778A patent/JP6567885B2/ja not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5940850A (ja) * | 1982-08-30 | 1984-03-06 | 株式会社島津製作所 | 管状体内面のプラズマ処理装置 |
JPH0748715A (ja) * | 1993-04-21 | 1995-02-21 | Bend Res Inc | 内側中空微小基材のプラズマ重合および表面変性方法並びにこの方法により製造された製品 |
US6101973A (en) * | 1997-09-03 | 2000-08-15 | Medtronic, Inc. | Apparatus for reducing friction on polymeric surfaces |
JP2005158601A (ja) * | 2003-11-27 | 2005-06-16 | Fujita Giken Kk | 中空ワークの内面加工方法 |
JP2006002230A (ja) * | 2004-06-18 | 2006-01-05 | Rikogaku Shinkokai | 薄膜形成装置及び薄膜形成方法 |
JP2007191754A (ja) * | 2006-01-19 | 2007-08-02 | Shinko Seiki Co Ltd | プラズマcvd装置 |
JP2008174793A (ja) * | 2007-01-18 | 2008-07-31 | Nanotec Corp | 成膜装置及び成膜方法。 |
JP2011521106A (ja) * | 2008-05-13 | 2011-07-21 | サブ−ワン・テクノロジー・インコーポレーテッド | 太陽熱およびその他の応用例におけるパイプの内面および外面のコーティング方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020515723A (ja) * | 2017-03-31 | 2020-05-28 | デュララ テクノロジーズ、エルエルシー | 表面をコーティングするシステム及び方法 |
Also Published As
Publication number | Publication date |
---|---|
CN105177532A (zh) | 2015-12-23 |
US20150361558A1 (en) | 2015-12-17 |
US9382623B2 (en) | 2016-07-05 |
JP6567885B2 (ja) | 2019-08-28 |
KR20150143352A (ko) | 2015-12-23 |
CN105177532B (zh) | 2019-11-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20070235427A1 (en) | Apparatus and method for treating a workpiece with ionizing gas plasma | |
EP3540093B1 (en) | Planetary rotary shelf device for nano-coating apparatus | |
KR101302237B1 (ko) | 성막방법 및 발유성 기재 | |
US5693376A (en) | Method for plasma source ion implantation and deposition for cylindrical surfaces | |
KR101057209B1 (ko) | 성막방법 | |
TW469534B (en) | Plasma processing method and apparatus | |
CN110965040B (zh) | 用于制备dlc的镀膜设备及其应用 | |
JP6567885B2 (ja) | 管腔内ポリマー堆積装置及び方法 | |
TW200605196A (en) | Improved deposition repeatability of PECVD films | |
EP2539082B1 (en) | Medicament dispenser device | |
Bauer et al. | Growth precursors for aC: H film deposition in pulsed inductively coupled methane plasmas | |
Hegemann et al. | Design of functional coatings | |
Obrusník et al. | Modelling of the gas flow and plasma co-polymerization of two monomers in an atmospheric-pressure dielectric barrier discharge | |
Malyshev et al. | Electron-stimulated desorption from polished and vacuum fired 316LN stainless steel coated with Ti-Zr-Hf-V | |
US20190085447A1 (en) | Plasma polymerization coating apparatus and process | |
Corbella | Upscaling plasma deposition: The influence of technological parameters | |
TW200520028A (en) | Plasma-processing apparatus and method | |
Babij et al. | Atmospheric pressure plasma jet for mass spectrometry | |
WO2014156755A1 (ja) | 成膜装置、成膜方法及び成膜プログラム | |
Primc et al. | Oxygen atom density in a large reactor powered by four inductively coupled plasma sources | |
Liu et al. | Dose and energy uniformity over inner surface in plasma immersion ion implantation | |
Laurent et al. | Influence of a square pulse voltage on argon-ethyl lactate discharges and their plasma-deposited coatings using time-resolved spectroscopy and surface characterization | |
Choukourov et al. | Plasma polymerization on mesoporous surfaces: n-hexane on titanium nanoparticles | |
Wang et al. | Deposition of polymer thin film using an atmospheric pressure micro-plasma driven by dual-frequency excitation | |
Ma et al. | Synthesis of ceramic films on metallic substrates using magnetron-sputtering deposition synchro-enhanced by microwave ECR plasma source ion implantation under high vacuum conditions |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180509 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190131 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190131 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190426 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20190702 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20190801 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6567885 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |