JP2015526368A - Multilayer substrate structure and manufacturing method and system thereof - Google Patents

Abstract

A multilayer substrate structure includes a substrate, a thermal matching layer formed on the substrate, and a lattice matching layer on the thermal matching layer. The thermal matching layer includes at least one of molybdenum, molybdenum copper, mullite, sapphire, graphite, aluminum oxynitride, silicon, silicon carbide, zinc oxide, and rare earth oxide. The lattice matching layer includes a first chemical element and a second chemical element for forming an alloy. The first and second chemical elements have similar crystal structures and chemical characteristics. The thermal expansion coefficient of the thermal matching layer and the lattice parameter of the lattice matching layer are both equal to the constituent elements of the III-V compound semiconductor. The lattice constant of the lattice matching layer is equal to that of the constituent element of the III-V compound semiconductor. The lattice matching layer and the thermal matching layer are deposited on a substrate using a lattice control shutter. [Selection] Figure 5

Description

  This application is based on US Provisional Application No. 61 / 662,918, filed June 22, 2012, US Provisional Application No. 61 / 659,944, filed June 14, 2012, March 11, 2013. US patent non-provisional application No. 13 / 794,372, US patent non-provisional application No. 13 / 794,327 filed on March 11, 2013, and US patent non-provisional application filed March 11, 2013 No. 13 / 794,285, which claims the benefit of priority, the disclosure of each application is incorporated herein by reference.

  Exemplary embodiments of the present invention relate to semiconductor materials, methods, and apparatus, and more particularly, to a multilayer substrate structure for epitaxial growth of III-V compound semiconductors and a manufacturing system thereof.

  III-V compound semiconductors such as gallium nitride (GaN), gallium arsenide (GaAs), indium nitride (InN), aluminum nitride (AlN), and gallium phosphide (GaP) are used for microwave frequency integrated circuits, light emitting diodes, Widely used in the manufacture of electronic equipment such as laser diodes, solar cells, high power high frequency electronic equipment, and optoelectronic devices. In order to improve throughput and reduce manufacturing costs, it is desirable to increase the substrate size (eg, diameter). Since growth of large-sized III-V compound semiconductors is expensive, not only semiconductors such as silicon carbide (SiC), sapphire, and silicon are used as substrates for epitaxial growth of III-V compound semiconductors, Many foreign materials are commonly used, including metals, metal oxides and metal nitrides.

  However, epitaxial growth of III-V compound semiconductors (eg, GaN) on a substrate (eg, sapphire) is epitaxial due to lattice mismatch and thermal expansion coefficient mismatch between the GaN layer and the foreign material of the underlying substrate. There are many challenges to the crystal quality of the layer (eg, grain boundaries, dislocations and other extended defects, and point defects). The difference in coefficient of thermal expansion between the GaN layer and the underlying substrate results in a large curvature across the wafer and results in returning to room temperature during processing and post-processing, and a significant mismatch in lattice constant is due to high dislocation density, Undesirable strains and defects propagated in the epitaxial GaN layer result. To address these issues, stress relaxation strategies such as a method of growing a buffer layer between the GaN layer and the sapphire substrate, or a method of offsetting compression and tension strain by alternately layering appropriate materials are used. It is done. However, by adding a buffer layer or stress relief layer, the dislocation density remains high, and manufacturing costs and complexity are reduced due to the use of deposition techniques similar to those used to grow active device layers. Increase greatly.

  Molecular beam epitaxy (MBE) when heterogeneous materials including metals, metal oxides, metal nitrides, as well as semiconductors such as silicon carbide (SiC), sapphire and silicon are used as substrates for epitaxial growth of semiconductors Alternatively, a semiconductor thin film is deposited on a substrate using metal organic chemical vapor deposition (MOCVD) techniques and optionally atomic layer deposition (ALD) or atomic layer epitaxy (ALE) techniques. However, even with these methods, not all atoms, ions, or molecules are built in a regular array, so many atoms form undesirable bond orientations that adversely affect the electronic properties of semiconductor materials. As well as significantly reducing the crystal quality. Crystal quality is usually expressed by crystal size, crystal grain size, carrier lifetime, and diffusion distance.

  Some techniques, such as zone melt recrystallization (ZMR), are designed to improve crystal material quality, but the temperature generated to melt a portion of the deposited film can be processed by the underlying substrate The disadvantage is that the maximum temperature may be exceeded. In order to prevent the base substrate from being heated to the melting point of the deposited film, the heating time can be shortened. However, when the heating time is shortened, when the crystal structure is solidified, it grows only in the vertical direction without growing simultaneously in both the vertical and horizontal directions. Therefore, epitaxial growth occupies most of the vertical direction, not the horizontal direction, and as a result, small crystal grain patches can be formed along the substrate.

  According to one embodiment of the present invention, a multilayer substrate structure comprises a substrate, a thermal matching layer formed on the substrate, and a lattice matching layer on the thermal matching layer. The thermal matching layer includes at least one of molybdenum, molybdenum copper, mullite, sapphire, graphite, aluminum oxynitride, silicon, silicon carbide, zinc oxide, and rare earth oxide. The lattice matching layer includes a first chemical element and a second chemical element for forming an alloy. The first and second chemical elements have similar crystal structures and chemical properties. The thermal expansion coefficient of the thermal matching layer is almost the same as that of the constituent elements of the III-V compound semiconductor.

  According to one embodiment of the present invention, a method for producing a multilayer substrate structure includes providing a substrate and growing a thermal matching layer on the substrate. The thermal matching layer includes at least one of molybdenum, molybdenum copper, mullite, sapphire, graphite, aluminum oxynitride, silicon, silicon carbide, zinc oxide, and rare earth oxide. The method also includes growing a lattice matching layer on the heat matching layer. The lattice matching layer includes a first chemical element and a second chemical element for forming an alloy. The lattice matching layer includes a first chemical element and a second chemical element for forming an alloy. The first and second chemical elements have similar crystal structures and chemical properties. The thermal expansion coefficient of the thermal matching layer is almost the same as that of the constituent elements of the III-V compound semiconductor.

  According to one embodiment of the present invention, a method for depositing a film on a substrate is disposed between the substrate and the raw material using a line-of-sight deposition method to direct the raw material from a material source onto the surface of the substrate. Blocking certain portions of the substrate with a shutter, creating blocked and unblocked substrate portions to prevent material from being deposited on the first blocked portion of the substrate, and blocking Cause relative movement between the shutter and the substrate so that the number of substrate portions reduced and the number of unblocked substrate portions increases, thereby creating a moving lateral growth boundary and lateral epitaxial growth across the substrate Providing a step.

  According to one embodiment of the present invention, a system for depositing a film on a substrate comprises a lateral control shutter. The lateral control shutter is disposed between the substrate and the raw material and is configured to block a portion of the substrate and prevent the raw material from depositing on the blocked substrate portion. To create a moving lateral growth boundary, one of the lateral control shutters and / or the substrate interacts with the other, resulting in lateral epitaxial deposition of the entire substrate and crystals having a large grain size across the substrate surface Resulting in film formation.

  Having described embodiments of the present invention in general terms, reference will now be made to the accompanying drawings (not necessarily drawn to scale).

1 illustrates an example of a cross-sectional view of an exemplary multilayer substrate structure, according to a representative embodiment. 1 illustrates an example of a cross-sectional view of an exemplary multilayer substrate structure, according to a representative embodiment. 1 illustrates an example of a cross-sectional view of an exemplary multilayer substrate structure, according to a representative embodiment. 1 illustrates an example of a cross-sectional view of an exemplary multilayer substrate structure, according to a representative embodiment. A schematic diagram of a hexagonal close-packed structure is shown. The schematic of the unit cell which shows a lattice constant is shown. A periodic table is shown. FIG. 3 shows a stepwise correlation diagram between the dislocation temperature and atomic concentration of constituent elements according to a representative embodiment. 1 illustrates an example of a system for depositing a film on a substrate, according to a representative embodiment. An example of the angular distribution of the evaporated substance in the sputtering deposition process is shown. An example of the angular distribution of the evaporated substance in the sputtering deposition process is shown. An example of the angular distribution of the evaporated substance in the sputtering deposition process is shown. 2 illustrates an example of a method for growing large expanded crystals on a substrate, in accordance with an exemplary embodiment of the present invention. 2 illustrates an example of a method for growing large expanded crystals on a substrate, in accordance with an exemplary embodiment of the present invention. 2 illustrates an example of a method for growing large expanded crystals on a substrate, in accordance with an exemplary embodiment of the present invention. 2 illustrates an example of a method for growing large expanded crystals on a substrate, in accordance with an exemplary embodiment of the present invention.

  Various embodiments are described in more detail with reference to the accompanying drawings. These embodiments are provided so that this disclosure will fully and completely convey the scope of the invention to those skilled in the art who have knowledge in the art. Like numbers refer to like elements throughout the specification.

  FIG. 1A illustrates an example of a cross-sectional view of a multilayer substrate structure 100 according to one embodiment. The multilayer substrate structure 100 includes a substrate 102 and an epitaxial layer 104 epitaxially grown on the substrate 102. The substrate 102 may include other types of materials, such as semiconductor materials, compound semiconductor materials, or metals, non-metals, depending on various applications. For example, the materials include molybdenum, copper copper, mullite, sapphire, graphite, aluminum oxynitride, silicon, silicon carbide, zinc oxide, and rare earth oxides, and / or other suitable materials.

  Epitaxial layer 104 includes a III-V compound semiconductor such as aluminum nitride (AlN), gallium nitride (GaN), indium gallium nitride (InGaN), and indium nitride (InN). As described above, a lattice constant mismatch may occur between the substrate 102 and the epitaxial layer 104. In order to reduce or eliminate defects caused by the lattice constant mismatch, in the growth of the epitaxial layer 104 on the substrate 102, a thickness of 5 nm to 100 nm for adjusting the lattice mismatch between the substrate 102 and the epitaxial layer 104 is set. It is possible to use a lattice matching layer 106 having the same. The lattice matching layer 106 may include two or more constituent elements (for example, two constituent elements of a first chemical element and a second chemical element) for forming an alloy. The first chemical element is miscible with the second chemical element in the alloy. The two constituent elements may have a similar crystal structure at room temperature, such as a hexagonal close-packed structure shown in FIG. 2A. As shown in FIG. 2B, each constituent element has an individual lattice constant including lattice parameters along the a-axis, b-axis, and c-axis, and lattice parameters with inter-axis angles α, β, and γ. Also good. The two constituent elements may have similar chemical properties in addition to similar crystal structures. In one embodiment, both the first and second chemical elements are Group 4 elements of the periodic table shown in FIG. 3 (ie, titanium (Ti), zirconium (Zr), hafnium (Hf), and rutherfordium (Rf). ). Thus, the alloy may be produced from the elements Ti and Zr, the elements Ti and Hf, and the elements Zr and Hf and have a crystal structure similar to these constituent elements at room temperature, or two elements May be generated from any combination. The alloy may include a third chemical element or even more elements having a similar crystal structure and similar chemical properties.

In order to make the lattice constant of the lattice matching layer 106 approximately equal to that of the epitaxial layer 104, a linear relationship exists between the first and second chemical elements and their associated lattice parameters at a constant temperature. The molar fraction of the atomic concentration of the first chemical element with respect to the second chemical element is P ₁ : (1-P ₁ ). Since the lattice parameter value of the alloy obtained by the composition factor is controlled, the molar fraction changes from application to application. In one embodiment, when the epitaxial layer 104 includes GaN and the alloy includes Ti mixed with Zr, the atomic concentration P _Zr of _Zr is greater than 75% and less than 90%. For example, P _Zr may be about 86%. Further, the atomic concentration P _Ti of _Ti is (1-P _Zr ). The first lattice parameter of Zr (for example, the a-axis lattice parameter a _Zr ) is 3.23Å. The second lattice parameter of Ti (eg, the a-axis lattice parameter a _Ti ) is 2.951 Å. As a result, the lattice constant _{P A} along the a-axis of the _{alloy, P Zr × a Zr + (} 1-P Zr) × a Ti = 86% × 3.23 + 14% × 2.951 = 3.19Å , and the this Is approximately equal to the a-axis lattice constant P _GaN of hexagonal close-packed GaN with P _GaN = 3.189１８. Depending on the constituent elements and other factors, the atomic concentration of the first chemical element relative to the second chemical element is about 43%: 57% or 99%: 1%.

  When the epitaxial layer 104 includes different compound semiconductors (eg, AlN, InGaN, InN, and / or other group III-V compound semiconductors), the constituent elements of the lattice matching layer 106 and / or the molar fractions of the constituent elements are The lattice constant of the matching layer 106 can be adjusted to match that of the epitaxial layer 104. For example, when the epitaxial layer 104 contains AlN and the constituent elements of the lattice matching layer 106 are Zr and Ti, the atomic concentration of Zr can be adjusted to be less than 75% and greater than 50%. In another embodiment using the same constituent elements, the atomic concentration of Zr may be higher than 90% when the epitaxial layer 104 includes InGaN. In order to achieve 100% lattice matching, not only the material of the epitaxial layer 104 but also the thickness of the epitaxial layer 104 causes changes in the constituent element selection and the constituent element mole fraction. Even if the thickness of the epitaxial layer 104 is changed, it is in the range of 5 nm to 500 nm. In other words, the thickness and material of the epitaxial layer 104 determine the selection and mole fraction of the constituent elements in forming the lattice matching layer 106. Epitaxial layer 104 may be any epitaxial layer (such as vacuum deposition, sputtering, molecular beam epitaxy, pulsed laser deposition, metal organic vapor deposition, atomic layer deposition, and / or other suitable epitaxial deposition methods). Using techniques, the crystal pattern of the lattice matching layer 106 is epitaxially grown on the lattice matching layer 106 to transfer it to the epitaxial layer 104. The lattice matching layer 106 may be formed using any one of deposition techniques such as vacuum evaporation, sputtering, molecular beam epitaxy, pulsed laser deposition, metal organic chemical vapor deposition, and atomic layer deposition. Formed on a formation (eg, substrate 102).

Since the hexagonal close-packed phase (α phase) has a potential advantage over the body-centered cubic phase (β phase) in certain optoelectronic devices and power semiconductor applications, it has a crystal pattern similar to that of the lattice matching layer 106. In order to achieve this, it is desirable to grow the epitaxial layer 104 in the α phase. FIG. 4 shows the correlation between the α-β phase transition temperature and the atomic concentration of Zr and Ti, according to one embodiment. For example, when P _Zr is 50%, P _Ti = 1−P _Zr = 50% and the α-β phase transition temperature is about 605 ° C. When _PZr is 84% (as an example of the embodiment described above), the α-β phase transition temperature is about 780 ° C. In applications that form multiple quantum well (MQW) devices on the epitaxial layer 104 (eg, ultra-bright LEDs), epitaxial deposition methods such as metal organic chemical vapor deposition and atomic layer deposition, and / or any other suitable The epitaxial growth method is performed in a temperature range of 700 ° C. to 850 ° C. In the present embodiment, in an attempt to transfer the crystal pattern of the lattice matching layer 106 to the epitaxial layer 104 in the α phase instead of the β phase dislocation, the multilayer substrate structure has an α-β phase transition temperature of any heating method / heat source. It is heated at a temperature lower than 780 ° C. but higher than 700 ° C. Since the formation of the epitaxial layer 104 is permanently set to the α phase, the subsequent growth of the MQW and any additional device layers may raise or lower the heating temperature of the multilayer substrate structure above 780 ° C. it can. The temperature is first raised above the α-β phase transition temperature and then immediately lowered below the α-β phase transition temperature, thereby generating a phase transition free energy and a large transverse phase that produces a single crystal α phase in the lattice matching layer. Crystallize the direction region.

  The introduction of the lattice matching layer 106 reduces the stress that may develop during the epitaxial growth and occur in the epitaxial layer 104 as a result of the difference in lattice constant between the substrate 102 and the epitaxial layer 104, thereby Growth of high crystal quality epitaxial layer 104 is facilitated. If such stress is not removed by the lattice matching layer, the stress can cause defects in the crystal structure of the epitaxial layer 104. The defects in the crystal structure of the epitaxial layer 104 make it difficult to achieve a high quality crystal structure with epitaxy in any subsequent device growth. The lattice matching layer 106 is also disclosed in a US patent application specification entitled “A Lattice Matching Layer For Use In A Multilayer Substrate Structure” (tentative name: a lattice matching layer for use in a multilayer substrate structure).

  As described above, the substrate 102 can include a semiconductor material, a compound semiconductor material, or other types of materials such as metals and non-metals. In some embodiments, the substrate 102 may be in the form of a polycrystalline solid. Since the polycrystalline substrate is not a single crystal but a polycrystal, it adversely affects the lattice matching layer 106, thereby causing a lattice constant between the lattice matching layer 106 and the epitaxial layer 104 (a plurality of crystal grains and a plurality of crystal orientations). The difference in (average lattice constant) increases, causing extended defects such as threading dislocations or crystal grain boundaries, resulting in low quality crystals of the epitaxial layer 104. In order to reduce or eliminate the adverse effects of the polycrystalline substrate, an amorphous layer 108 may be introduced between the polycrystalline substrate 102 and the lattice matching layer 106, as shown in FIG. 1B. By adding the amorphous layer 108 between the polycrystalline substrate 102 and the lattice matching layer 106, the influence of the polycrystalline substrate 102 on the lattice matching layer 106 can be reduced. Thereby, only the crystals of the lattice matching layer 106 are transferred to the epitaxial layer 104. The amorphous layer 108 may be silicon dioxide, silicon nitride, tantalum nitride, boron nitride, tungsten nitride, glassy amorphous carbon, silicate glass (eg, borophosphosilicate glass, phosphosilicate glass, etc.) and / or other Suitable materials can be included, but are not limited to this. The amorphous layer 108 can have a thickness of 5 nm to 100 nm.

In some embodiments, the coefficient of thermal expansion of the substrate 102 is different from that of the upper layer, resulting in increased substrate bending. For example, when the coefficient of thermal expansion of the substrate 102 is larger than that of the upper layer (for example, when the substrate includes sapphire), biaxial compression strain occurs. When the coefficient of thermal expansion of the substrate is smaller than that of the upper layer (eg, when the substrate contains silicon), tensile strain occurs. In order to overcome obstacles due to thermal expansion mismatch, the substrate is used as a thermal matching layer 102a by including several chemical elements (as shown in FIGS. 1C and 1D), as shown in FIG. 1C. As described above, the thermal mismatch between the substrate (ie, the thermal matching layer 102a in the present embodiment) and the lattice matching layer 106, or between the substrate and the amorphous layer 108 as shown in FIG. 1D. adjust. In one embodiment, the thermal matching layer 102a comprises molybdenum or its related alloy. Molybdenum has a thermal expansion coefficient of about 5.4 × 10 ⁻⁶ / K, which is approximately equal to that of some III-V compound semiconductors such as GaN. The substrate can be produced using various methods for the growth of metals, crystals, and alloys thereof. Examples of growth methods include Czochralski, float zone (FZ), directional solidification (DS), zone melt recrystallization (ZMR), sintering, isostatic pressing, electrochemical plating, plasma torch deposition, and / or Or there are other suitable methods. The thermal matching layer 102a has a thickness in the range of 5 nm to 1 mm.

The introduction of a thermal matching layer and a lattice matching layer reduces or completely eliminates thermal expansion mismatch and strain due to lattice mismatch. As a result, the dislocation density of the formed epitaxial layer 104 is smaller than 10 ² / cm ² (less than 100 dislocations per 1 cm ² ). In the development of light emitting diodes (LEDs), the reduction or elimination of distortion may meet the requirement to overcome the so-called “green gap”. “Green gap” is an industry expression that means a reduction in the output of LED light from a multiple quantum well (MQW) LED that alloys indium with GaN to produce a green LED. This reduction in output green light is due to excessive strain in the substrate, stress-induced extended defects, and defect density caused by point defects propagating to the active MQW device layer, within the 1-5 mm ² device area. For forward currents greater than 50 mA.

  Since the human eye is most sensitive to green and green light has a strong impact on human perception of white light quality, this embodiment allows growth of high quality crystal devices on layer 104 To. Furthermore, the exemplary embodiments of the present invention are suitable for a cost-effective method in creating a green LED crystal template. Thus, by filling the “green gap”, it has the highest theoretical effectiveness over the down-converted LED phosphors used today, and the high white LED based on mixed red, green and blue light The performance can be further improved.

  FIG. 5 illustrates a system 500 for depositing a film on a substrate in accordance with an exemplary embodiment (words such as “example”, “exemplary” used herein serve as an example or illustration. To fulfill "). In order to facilitate lateral A epitaxial deposition of the thin film 502 on the substrate 504, a lateral control shutter 506 is employed and disposed between the substrate 505 and the material source 508. Material source 508 is configured to deposit the raw material on the substrate surface using a suitable deposition method. Depending on the deposition method used, the raw material evaporates in the form of atoms or molecules from a solid or liquid source and is transported to the substrate as a vapor via a vacuum or low pressure gas or plasma environment. The evaporating material may be an element, alloy or compound in various charged states. When the evaporating material has a long mean free path of more than 1 meter, the evaporating material trajectory can be considered as a straight line of sight. Therefore, the deposition method used is defined as the line-of-sight deposition method. Line-of-sight deposition methods include physical vapor deposition, including vacuum deposition, sputtering, pulsed laser deposition, molecular beam epitaxy, atomic layer deposition, atomic layer epitaxy, plasma torch deposition, and / or other suitable methods. Or chemical vapor deposition. Chemical vapor deposition is atmospheric pressure chemical vapor deposition and / or other suitable chemical vapor deposition. Depending on the form of the material source, vacuum deposition methods include thermal deposition methods, laser beam or convergent lamp deposition methods, arc discharge deposition methods, and electron beam deposition methods. Similarly, depending on the form of the material source, the sputtering method includes any one of a direct current sputtering method, a magnetron sputtering method, a high frequency sputtering method, and a pulse laser sputtering method.

  In any application of the deposition method described above, the distance L1 between the material source 508 and the substrate 504 may be less than the mean free path of the gas molecules so that most molecules in the gas can reach a straight line. . In order to uniformly form the thin film 502 on the surface of the substrate 504, the distance L2 between the lateral control shutter 506 and the substrate surface may be smaller than the mean free path of gas molecules. The mean free path of this embodiment is defined as the mean distance traveled before a gas molecule collides with another gas molecule. The substrate 504 can include silicon dioxide, silicon nitride, amorphous boron nitride, amorphous tungsten nitride, glassy amorphous carbon, amorphous rare earth oxide, amorphous zinc oxide, and silicate glass.

  Different deposition methods have different flux angle distributions on the substrate. There are many methods for each deposition method to help improve the angular distribution of the substrate. Taking the sputtering deposition method as an example, in a general sputtering deposition method, as shown in FIG. 6A, atoms are emitted from a material source (for example, a sputtering target) with a cosine angle distribution. It is not uncommon for most of them not to strike the substrate at normal incidence angles. In order to form a more normal angular distribution in the substrate, a collimator may be employed between the substrate and the sputtering target in a magnetron sputtering system. The use of a collimator reduces the abnormal flux from the sputtering target and improves the directivity of the deposit. The angular distribution of collimated incidence is shown in FIG. 6B. In the ion-assisted deposition method, some of the sputtered atoms are ionized. The ionized atoms are concentrated in the vicinity of θ = 0 ° to form a directional angular distribution, for example, a directional angular distribution 602, while neutral species generally have a cosine angular distribution 604. As shown in FIG. 6C, the overall angular distribution is seen as a superposition of cosine and directional angular distribution.

  In the vapor deposition method, the angle of incidence of the material deposited on the substrate affects the film properties, crystal orientation, and other properties. Depending on the angular distribution of the incident atomic flux produced by the material source and the desired angular distribution of the atoms in the substrate, the vaporized material is deposited on the substrate surface at normal or non-normal incident angles. Returning to FIG. 5, the raw material is deposited at an incident angle of −15 ° to + 15 °. The average angle of incidence of the deposited atomic flux varies with the deposition shape, the type of evaporation source, and the relative motion between the substrate and the material source.

  As shown in FIG. 5, a lateral control shutter 506 is used to control film growth. A lateral control shutter 506 defines a lateral boundary (unnumbered) of the deposited thin film 502 and covers a predetermined portion of the substrate 504 to prevent the deposition of raw materials on portions of the substrate surface. In operation, by moving one or the other of the lateral control shutter 506 or the substrate 504, the lateral boundary of the deposited thin film 502 is moved, and the growth edge of the film is advanced to facilitate lateral epitaxial deposition of the entire substrate. To be controlled. In one embodiment shown in FIG. 5, the lateral control shutter 506 moves in direction A relative to the substrate 504. In another embodiment, the lateral control shutter remains stationary and the substrate moves relative to the lateral control shutter. In yet another embodiment, both the lateral control shutter and the substrate move at different speeds to achieve relative movement with respect to each other. System 500 may further include a drive system (not shown) that controls the relative motion between the lateral control shutter and the substrate. The system 500 may include a trailing control shutter 512 that is used to shield unwanted deposition on the single crystal remaining after the advancing growth edge of the thin film 502. The latter helps to maintain a uniform film thickness throughout the thin film 502. If a trailing control shutter is used, trailing control shutter 512 is configured to avoid further epitaxial deposition on newly crystallized thin film 502 on substrate 504.

  Many film properties, such as the grain size of the deposited material on the substrate, are affected by the deposition temperature, so temperature control is desirable. The system 500 includes different types of heat sources (eg, heat source 510 in FIG. 5) to control the temperature of the substrate and / or provide the high temperature used for the deposition process, depending on the deposition method used. . For example, in a vacuum deposition process, typically a heat source thermally evaporates the raw material, desorbs the deposited material from the target source surface, heats the substrate for cleaning and subsequent processing, dissolves the raw material, and It is used to add thermal kinetic energy or to increase the surface mobility of adsorbed atoms or molecules involved in the substrate surface deposition process. Heat is generated in the vacuum vessel by many different techniques. In examples of sputtering deposition methods, the substrate is heated by ion bombardment, electrons, light radiation, induction heating, or other heating techniques. The heat source is built into the system or outside the system. Typical heat sources include radiant heating (infrared heating, laser, etc.), hot wire radiant heating, focused lamp heating, induction heating, direct metal pedestal heating, or ceramic pedestal heating.

  When a film of single crystal material is deposited on the substrate, epitaxial growth occurs, and if the single seed crystal is separated from the substrate surface or the substrate is a single crystal, the crystal structure of the substrate is reproduced as the growth material. The The lateral growth of the deposited material is important because lateral growth of the crystal plays an important role in determining material properties such as dislocation density and strain due to lattice mismatch between the deposited material and the substrate. A lateral control shutter can be used to facilitate this. Due to the relative movement between the lateral control shutter and the substrate, epitaxial growth initially occurs in a direction substantially perpendicular to the surface of the substrate (eg, longitudinal) and then substantially relative to the surface of the substrate. Proceeding in a matching direction (for example, parallel direction). The lateral crystal epitaxial growth is shown in FIG. 7A. In FIG. 7A, the lateral control shutter 706 moves from the left end 712 of the substrate toward the other end (not shown) of the substrate, thereby starting epitaxial growth from the left end 712. A plurality of crystal grains grow at many points on the left end 712 and serve as seed crystals for subsequent crystal growth. Crystals initially grow vertically. With the movement between the lateral control shutter 706 and the substrate, the crystal can grow simultaneously in the lateral and longitudinal directions.

  The crystal grain size of the deposited film plays an important role in electrical properties. As the grain size increases, the number of grain boundaries per unit region and the number of boundary interfaces decreases. For example, high density grain boundaries or extended defects in the crystal structure, such as small grain size, tend to reduce the electrical and thermal conductivity of the deposited film. Therefore, it is desirable to increase the crystal grain size as much as possible. Exemplary embodiments that achieve the minimum grain boundaries and the minimum number of grains on the substrate are shown in FIGS. 7B-7D.

  As shown in FIG. 7B, a lateral control shutter 706 is disposed between the substrate (not shown) and the material source (not shown), leaving an area exposed to the material source (eg, area 714). Cover part of the substrate. Region 714 has sharp corners or edges. In the present embodiment, the acute angle is a corner of the substrate created by adjusting the arrangement of the lateral control shutter and the substrate. With such an arrangement, the self-selected crystal mother grains 716 grow at an acute angle. The crystal grain serves as a seed crystal that initiates crystallization and provides a starting point for deposition. Due to the relative movement in the lateral direction between the lateral control shutter 706 and the substrate, a crystal grows on the entire surface of the substrate simultaneously in both the longitudinal and lateral directions. In another embodiment, there is at least one crystal grain that grows at an acute angle, and the lateral advance helps to drive the grain boundary outward, with a very large lateral dimension throughout the substrate. Effectively form a number of crystal grains.

  In the embodiment shown in FIG. 7C, a portion of the substrate surface is patterned to form a surface relief structure (eg, surface relief structure 720), thereby depositing a thin film on the substrate surface or on the substrate surface. Graphoepitaxy is used to create long range order during recrystallization of the molten material. The surface relief structure 720 functions as a template for growing crystal grains on the substrate, and induces a desired crystal orientation in the newly grown thin film. The crystal host is then used to provide a starting point for initiating crystallization and starting film formation. Similar to the embodiment shown in FIG. 7B, the lateral interaction between the lateral control shutter 506 and the substrate causes a single crystal grain to grow across the surface of the substrate simultaneously in both the longitudinal and lateral directions. The surface relief structure 720 can be created by various lithography techniques, such as optical lithography, electron beam lithography, nanoimprint lithography, or focused ion beam (FIB) lithography, and / or other suitable lithography techniques. Alternatively, the surface relief structure 720 may be moved or added to the corners or edges of the substrate by laser heat treatment or ablation. In the present embodiment, the crystal mother grains may protrude onto the substrate surface as the growing edge advances away from the corner.

  In addition to the introduction of the surface relief structure 720, the crystal mother grains 722 may be added to one point of the substrate (for example, a corner of the substrate). Crystal mother grains are used to provide a starting point for initiating crystallization and starting film formation. Similarly, the added crystal mother grain may protrude onto the substrate surface as the growing edge progresses away from the corner.

  Similar to FIG. 7B, FIG. 7D shows a crystal grain that begins to grow at an acute angle in region 724 of the substrate having a region exposed to the material source and grows laterally outward. In contrast to FIG. 7B, the acute angle of this embodiment is not created by adjusting the placement of the substrate and the lateral control shutter. The acute angle is formed by a shutter having such a shape. The crystal grain grows at an acute angle, serves as a seed crystal that initiates crystallization and provides a starting point for starting deposition. A further advantage of using the illustrated triangle or crescent shape with the same curvature is that through grain competition, the grain boundaries grow perpendicular to the shape of the shutter edge. The latter necessarily grows arbitrary grains parallel to the wider surface of the substrate as the growing edge progresses away from the seed crystal.

  In the embodiments described above, the shutter has various shapes according to different applications. For example, as shown in FIG. 7D, the shutter may have a polygonal or arcuate shape. A shape having an acute angle at which a crystal mother grain grows is defined by the outer peripheral portion of the polygon. The shutter may be rectangular, square, circular, triangular, crescent shaped, or “chevron symbol” shaped, and / or any other suitable shape. For example, a shutter can be used to grow a lattice matching layer in a multilayer substrate structure.

  Many modifications and other exemplary embodiments described herein will benefit one skilled in the art to which these exemplary embodiments pertain to the teachings presented in the foregoing description and accompanying drawings. It reminds me of having Accordingly, it should be understood that the embodiments should not be limited to the particulars disclosed, and that modifications and other embodiments are intended to be included within the scope of the claims. Moreover, the foregoing description and associated drawings describe exemplary embodiments in connection with some exemplary combinations of elements and / or functionality, but depart from the scope of the appended claims. Rather, it should be understood that different combinations of elements and / or functions may be provided by alternative embodiments. In this regard, for example, different combinations of elements and / or functions are also intended to be described as part of the appended claims.

Claims (36)

A multilayer substrate structure,
A first chemical element having a hexagonal close-packed structure at room temperature that converts to a body-centered cubic structure at an α-β phase transition temperature higher than room temperature, wherein the hexagonal close-packed structure of the first chemical element is A first chemical element having a lattice parameter of 1;
A second chemical element having a hexagonal close-packed structure having a chemical property similar to that of the first chemical element at room temperature, wherein the hexagonal close-packed structure of the second chemical element is a second lattice. A second chemical element that is miscible with the first chemical element to form an alloy having parameters and a hexagonal close-packed structure at room temperature;
A multilayer substrate structure, wherein a lattice constant of the alloy is equal to a lattice constant of a constituent element of a group III-V compound semiconductor.   Due to the presence of a linear relationship between the first and second chemical elements and their lattice parameters at a constant temperature, the lattice constant of the alloy becomes the lattice constant of the constituent element of the III-V compound semiconductor. The multilayer substrate structure according to claim 1, wherein the multilayer substrate structure is equal.   The multilayer substrate structure according to claim 1, wherein at least one of the first and second chemical elements belongs to a Group 4 element of the periodic table.   2. The multilayer substrate structure according to claim 1, wherein a molar ratio of an atomic concentration of the first chemical element to the second chemical element is 14% to 86%.   The multilayer substrate structure according to claim 1, wherein a molar ratio of an atomic concentration of the first chemical element to the second chemical element is 43% to 57%.   The multilayer substrate structure according to claim 1, wherein a molar ratio of an atomic concentration of the first chemical element to the second chemical element is 99% to 1%.   The lattice matching layer has a third chemical element, the third chemical element has the same crystal structure and similar chemical characteristics as the first and second chemical elements, and forms an alloy. In order to be miscible with the first and second chemical elements, and by having a linear relationship between the first, second and third chemical elements and their lattice parameters at a constant temperature, the The multilayer substrate structure according to claim 1, wherein a lattice constant of the alloy is equal to a lattice constant of the constituent element of the group III-V compound semiconductor.   The group III-V compound semiconductor includes one of aluminum nitride (AlN), gallium nitride (GaN), indium gallium nitride (InGaN), and indium nitride (InN). The multilayer substrate structure described in 1.   A heat matching layer formed on the substrate, wherein the heat matching layer is at least one of molybdenum, molybdenum copper, mullite, sapphire, graphite, aluminum oxynitride, silicon, silicon carbide, zinc oxide, and rare earth oxide. The multilayer substrate structure according to claim 1, wherein a thermal expansion coefficient of the thermal matching layer is equal to a thermal expansion coefficient of a constituent element of the group III-V compound semiconductor.   Further comprising an amorphous layer between the thermal matching layer and the lattice matching layer, the amorphous layer comprising silicon dioxide, tantalum nitride, boron nitride, tungsten nitride, silicon nitride, glassy amorphous carbon, and silicate The multilayer substrate structure of claim 1, comprising any one of glasses. A method of forming a multilayer substrate structure, wherein the multilayer substrate structure includes a lattice matching layer, and the lattice matching layer comprises:
A first chemical element having a hexagonal close-packed structure at room temperature that converts to a body-centered cubic structure at an α-β phase transition temperature higher than room temperature, wherein the hexagonal close-packed structure of the first chemical element is A first chemical element having a lattice parameter of 1;
A second chemical element having a hexagonal close-packed structure having a chemical property similar to that of the first chemical element at room temperature, wherein the hexagonal close-packed structure of the second chemical element is a second lattice. A second chemical element that is miscible with the first chemical element to form an alloy having parameters and a hexagonal close-packed structure at room temperature;
A method wherein the lattice constant of the alloy is equal to the lattice constant of a constituent element of the III-V compound semiconductor.   Forming a thermal matching layer on which the lattice matching layer is grown, wherein the thermal matching layer is molybdenum, molybdenum copper, mullite, sapphire, graphite, aluminum oxynitride, silicon, silicon carbide, zinc oxide, and The method of claim 11, comprising at least one of rare earth oxides.   The thermal expansion coefficient of the first chemical element and the thermal expansion coefficient of the second chemical element along the plane are interpolated so as to reach a primary estimate of the thermal expansion coefficient of the alloy along the same plane. The method according to claim 11, further comprising the step of: wherein the thermal expansion coefficient of the alloy is an expansion coefficient of the constituent element of the III-V compound semiconductor along the same plane.   The method of claim 11, further comprising heating the multilayer substrate structure below an α-β phase transition temperature, allowing epitaxial growth of an epitaxy layer on the lattice matching layer in an accurate α phase. the method of.   a step of heating the multilayer substrate structure to a temperature higher than the α-β phase transition temperature and immediately lowering the temperature to below the α-β phase transition temperature, and a large lateral region that becomes a single crystal α phase in the lattice matching layer. The method according to claim 11, characterized in that it results in the generation of phase transition free energy for crystallization. A method of depositing a film on a substrate, comprising:
Directing the raw material from a material source onto the substrate surface using a line-of-sight deposition method;
A predetermined portion of the substrate is blocked by a shutter disposed between the substrate and the raw material to form a blocked substrate portion and an unblocked substrate portion, and onto the first blocked portion of the substrate. Preventing the deposition of raw materials,
Causes relative movement between the shutter and the substrate such that the blocked substrate portion is reduced and the unblocked substrate portion is increased, thereby causing lateral epitaxial growth across the substrate. Creating a lateral growth boundary.   The method of claim 16, further comprising growing a crystal on the substrate using one or more grains as a seed crystal.   The substrate portion of the substrate has an acute angle, and further includes a step of growing a crystal mother grain around the acute angle, the crystal mother grain starts to crystallize and starts film formation 17. A method according to claim 16, characterized in that it is used to provide a starting point.   Applying any one of lithographic processing, laser heat treatment, and ablation to pattern at least a portion of the substrate to induce a desired crystal orientation in the newly grown film to form a surface relief structure The surface relief structure serves as a template for growing crystal grains on the substrate, and the crystal grains provide a starting point for initiating crystallization and starting a new film formation. Method according to claim 16, characterized in that it is used for   The method further includes the step of adding a seed crystal at a desired position on the substrate, wherein the seed crystal is used to provide a starting point for initiating crystallization and starting a new film formation. The method of claim 16.   Further comprising the step of blocking the second portion of the substrate by a trailing control shutter, and controlling epitaxial deposition on the crystalline film formed on the portion of the substrate blocked by the trailing control shutter, or Method according to claim 16, characterized in that it is avoided. A system for depositing a film on a substrate,
The lateral control comprising a lateral control shutter disposed between the substrate and the raw material and configured to block a portion of the substrate and preventing deposition of raw material on the blocked portion of the substrate; A lateral growth boundary is formed by moving one of the shutter and / or the substrate relative to the other, lateral epitaxial deposition on the entire substrate, and a large grain size on the entire surface of the substrate. A system characterized by causing the formation of a crystalline film.   The method further comprises a trailing control shutter, wherein an opening between the lateral shutter and the trailing control shutter is formed so that the crystal film has a desired uniform thickness. 23. The system according to 22.   The lateral control shutter has a shutter end having any one of a rectangular shape, a square shape, a circular shape, a triangular shape, a crescent shape, a “chevron” shape, a straight shape, an arc shape, and a polygon shape. The system of claim 22.   23. The system of claim 22, wherein the raw material is disposed in association with the lateral control shutter and deposits the raw material on the surface of the substrate using a line-of-sight deposition method.   23. The system of claim 22, further comprising a collimator, wherein the collimator is disposed between the raw material and the substrate.   A heat source, wherein the heat source includes any one of infrared heating, heat ray radiant heating, laser, focused lamp heating, raster charged particle beam, induction heating, direct metal pedestal heating, and ceramic pedestal heating, The system of claim 22. A method of depositing a film on a substrate, comprising:
Directing a raw material from a material source onto the surface of the substrate using a line-of-sight deposition method;
A predetermined portion of the substrate is blocked by a shutter disposed between the substrate and the raw material to form a blocked substrate portion and an unblocked substrate portion, and onto the first blocked portion of the substrate. Preventing the deposition of raw materials,
Causing a mutual movement between the shutter and the substrate such that the blocked substrate portion is reduced and the unblocked substrate portion is increased, thereby forming a moving lateral growth boundary Providing lateral epitaxial growth over the entire substrate.   30. The method of claim 28, further comprising growing a crystal on the substrate with one or more grains serving as a seed crystal.   The substrate portion of the substrate has an acute angle, and further includes a step of growing a crystal mother grain around the acute angle, the crystal mother grain starting to crystallize, and starting film formation 29. The method of claim 28, wherein the method is used to provide   Applying any one of lithographic processing, laser heat treatment, and ablation to pattern at least a portion of the substrate to induce a desired crystal orientation in the newly grown film to form a surface relief structure The surface relief structure serves as a template for growing crystal grains on the substrate, and the crystal grains provide a starting point for initiating crystallization and starting a new film formation. The method according to claim 28, characterized in that it is used in   The method further includes the step of adding a seed crystal at a desired position on the substrate, wherein the seed crystal is used to provide a starting point for initiating crystallization and starting a new film formation. 30. The method of claim 28.   The method further includes blocking a second portion of the substrate by a trailing control shutter, and controlling or avoiding epitaxial deposition on the crystal film formed on the portion of the substrate blocked by the trailing control shutter. 30. The method of claim 28, wherein:   30. The method of claim 28, further comprising collimating the raw material using a collimator disposed between the raw material and the substrate.   29. The method of claim 28, wherein the line-of-sight deposition method comprises one of physical vapor deposition or chemical vapor deposition.   29. The method of claim 28, further comprising heating the substrate by any one of infrared heating, heat ray radiation heating, laser, focused lamp heating, induction heating, direct metal pedestal heating, and ceramic pedestal heating. The method described.