JP2015524556A5 - - Google Patents

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Publication number
JP2015524556A5
JP2015524556A5 JP2015520466A JP2015520466A JP2015524556A5 JP 2015524556 A5 JP2015524556 A5 JP 2015524556A5 JP 2015520466 A JP2015520466 A JP 2015520466A JP 2015520466 A JP2015520466 A JP 2015520466A JP 2015524556 A5 JP2015524556 A5 JP 2015524556A5
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JP
Japan
Prior art keywords
laser diode
incident beam
stacks
laser
light
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JP2015520466A
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English (en)
Japanese (ja)
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JP6282643B2 (ja
JP2015524556A (ja
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Priority claimed from US13/924,216 external-priority patent/US8896827B2/en
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Publication of JP2015524556A5 publication Critical patent/JP2015524556A5/ja
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Publication of JP6282643B2 publication Critical patent/JP6282643B2/ja
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JP2015520466A 2012-06-26 2013-06-26 ウェハ検査ツールのためのダイオードレーザーベースの広帯域光源 Active JP6282643B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261664493P 2012-06-26 2012-06-26
US61/664,493 2012-06-26
US13/924,216 US8896827B2 (en) 2012-06-26 2013-06-21 Diode laser based broad band light sources for wafer inspection tools
US13/924,216 2013-06-21
PCT/US2013/047901 WO2014004679A1 (en) 2012-06-26 2013-06-26 Diode laser based broad band light sources for wafer inspection tools

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018009830A Division JP2018119963A (ja) 2012-06-26 2018-01-24 ウェハ検査ツールのためのダイオードレーザーベースの広帯域光源

Publications (3)

Publication Number Publication Date
JP2015524556A JP2015524556A (ja) 2015-08-24
JP2015524556A5 true JP2015524556A5 (cg-RX-API-DMAC7.html) 2016-08-12
JP6282643B2 JP6282643B2 (ja) 2018-02-21

Family

ID=49774195

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2015520466A Active JP6282643B2 (ja) 2012-06-26 2013-06-26 ウェハ検査ツールのためのダイオードレーザーベースの広帯域光源
JP2018009830A Pending JP2018119963A (ja) 2012-06-26 2018-01-24 ウェハ検査ツールのためのダイオードレーザーベースの広帯域光源
JP2019215516A Active JP6932174B2 (ja) 2012-06-26 2019-11-28 半導体デバイスの検査または計測を実行するための光学装置及び方法

Family Applications After (2)

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JP2018009830A Pending JP2018119963A (ja) 2012-06-26 2018-01-24 ウェハ検査ツールのためのダイオードレーザーベースの広帯域光源
JP2019215516A Active JP6932174B2 (ja) 2012-06-26 2019-11-28 半導体デバイスの検査または計測を実行するための光学装置及び方法

Country Status (5)

Country Link
US (2) US8896827B2 (cg-RX-API-DMAC7.html)
JP (3) JP6282643B2 (cg-RX-API-DMAC7.html)
KR (2) KR102091987B1 (cg-RX-API-DMAC7.html)
IL (2) IL236401B (cg-RX-API-DMAC7.html)
WO (1) WO2014004679A1 (cg-RX-API-DMAC7.html)

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