JP2015519607A5 - - Google Patents

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Publication number
JP2015519607A5
JP2015519607A5 JP2015515016A JP2015515016A JP2015519607A5 JP 2015519607 A5 JP2015519607 A5 JP 2015519607A5 JP 2015515016 A JP2015515016 A JP 2015515016A JP 2015515016 A JP2015515016 A JP 2015515016A JP 2015519607 A5 JP2015519607 A5 JP 2015519607A5
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JP
Japan
Prior art keywords
shutter
display device
opening
recess
depression
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015515016A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015519607A (ja
JP6246798B2 (ja
Filing date
Publication date
Priority claimed from US13/486,722 external-priority patent/US9063333B2/en
Application filed filed Critical
Publication of JP2015519607A publication Critical patent/JP2015519607A/ja
Publication of JP2015519607A5 publication Critical patent/JP2015519607A5/ja
Application granted granted Critical
Publication of JP6246798B2 publication Critical patent/JP6246798B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015515016A 2012-06-01 2013-05-06 マイクロ電気機械デバイスおよび製造方法 Expired - Fee Related JP6246798B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/486,722 US9063333B2 (en) 2012-06-01 2012-06-01 Microelectromechanical device and method of manufacturing
US13/486,722 2012-06-01
PCT/US2013/039652 WO2013180903A1 (en) 2012-06-01 2013-05-06 Display apparatus comprising micro-electromechanical light modulator including a shutter

Publications (3)

Publication Number Publication Date
JP2015519607A JP2015519607A (ja) 2015-07-09
JP2015519607A5 true JP2015519607A5 (https=) 2016-06-02
JP6246798B2 JP6246798B2 (ja) 2017-12-13

Family

ID=48534483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515016A Expired - Fee Related JP6246798B2 (ja) 2012-06-01 2013-05-06 マイクロ電気機械デバイスおよび製造方法

Country Status (7)

Country Link
US (1) US9063333B2 (https=)
EP (1) EP2856238A1 (https=)
JP (1) JP6246798B2 (https=)
KR (1) KR20150015539A (https=)
CN (1) CN104350410B (https=)
TW (1) TWI566223B (https=)
WO (1) WO2013180903A1 (https=)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140225904A1 (en) * 2013-02-13 2014-08-14 Pixtronix, Inc. Shutter assemblies fabricated on multi-height molds
US20150279282A1 (en) * 2014-03-28 2015-10-01 Pixtronix, Inc. Distributed electrostatic actuator for mems devices
CN105700226A (zh) * 2016-04-25 2016-06-22 京东方科技集团股份有限公司 视角控制机构、导光板、背光模组、阵列基板及显示面板
CN105700243A (zh) * 2016-04-29 2016-06-22 京东方科技集团股份有限公司 一种显示面板以及显示装置
CN105895023B (zh) * 2016-06-03 2019-03-15 深圳市华星光电技术有限公司 微机电光阀、显示屏和显示装置
CN107577043B (zh) * 2016-07-04 2021-10-08 爱德华·帕克奇亚恩 用于显示器的mems光调制器
KR102590788B1 (ko) * 2016-07-04 2023-10-17 에드워드 파크얀 Mems 디스플레이
JP7015104B2 (ja) * 2016-07-04 2022-02-15 エドワード・パクチャン Ｍｅｍｓディスプレイ
KR102712568B1 (ko) * 2016-07-04 2024-09-30 에드워드 파크얀 디스플레이용 mems 광 변조기
JP6953116B2 (ja) * 2016-07-04 2021-10-27 エドワード・パクチャン Ｍｅｍｓディスプレイ
CN115567777B (zh) * 2022-09-30 2023-08-29 杭州海康微影传感科技有限公司 微机电挡片及其制备方法、图像传感器组件及其制备方法、图像传感器及其制作方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1190687C (zh) * 2002-02-07 2005-02-23 台湾积体电路制造股份有限公司 具有阻隔构件的反射式液晶光闸
US7417782B2 (en) * 2005-02-23 2008-08-26 Pixtronix, Incorporated Methods and apparatus for spatial light modulation
JP2006071949A (ja) * 2004-09-01 2006-03-16 Fuji Photo Film Co Ltd レンズ付きフイルムユニット
CN100470305C (zh) * 2004-09-27 2009-03-18 Idc公司 用结构加强的背板保护微机电系统阵列的电子装置及制法
CN1755495A (zh) * 2004-09-27 2006-04-05 Idc公司 制造mems系统的预结构的方法
US7405852B2 (en) * 2005-02-23 2008-07-29 Pixtronix, Inc. Display apparatus and methods for manufacture thereof
CN102060258B (zh) * 2005-02-23 2013-07-10 皮克斯特隆尼斯有限公司 微电子机械快门组件
US8526096B2 (en) * 2006-02-23 2013-09-03 Pixtronix, Inc. Mechanical light modulators with stressed beams
EP2074464A2 (en) 2007-01-19 2009-07-01 Pixtronix Inc. Mems display apparatus
CN201066421Y (zh) * 2007-07-05 2008-05-28 比亚迪股份有限公司 可防止漏光的背光模组及液晶显示器
US8169679B2 (en) 2008-10-27 2012-05-01 Pixtronix, Inc. MEMS anchors
KR20120129256A (ko) * 2011-05-19 2012-11-28 삼성디스플레이 주식회사 표시 기판, 이의 제조 방법 및 이를 포함하는 표시 패널
JP5856759B2 (ja) * 2011-06-03 2016-02-10 ピクストロニクス，インコーポレイテッド 表示装置
US9809445B2 (en) * 2011-08-26 2017-11-07 Qualcomm Incorporated Electromechanical system structures with ribs having gaps

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