JP2017504835A5 - - Google Patents

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Publication number
JP2017504835A5
JP2017504835A5 JP2016545903A JP2016545903A JP2017504835A5 JP 2017504835 A5 JP2017504835 A5 JP 2017504835A5 JP 2016545903 A JP2016545903 A JP 2016545903A JP 2016545903 A JP2016545903 A JP 2016545903A JP 2017504835 A5 JP2017504835 A5 JP 2017504835A5
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JP
Japan
Prior art keywords
restoring force
movable reflector
deformable element
interferometric modulator
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016545903A
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English (en)
Japanese (ja)
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JP2017504835A (ja
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Publication date
Priority claimed from US14/265,193 external-priority patent/US9372338B2/en
Application filed filed Critical
Publication of JP2017504835A publication Critical patent/JP2017504835A/ja
Publication of JP2017504835A5 publication Critical patent/JP2017504835A5/ja
Pending legal-status Critical Current

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JP2016545903A 2014-01-17 2014-12-16 大きい安定的動き範囲を有する多状態干渉変調器 Pending JP2017504835A (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201461928953P 2014-01-17 2014-01-17
US61/928,953 2014-01-17
US14/265,193 US9372338B2 (en) 2014-01-17 2014-04-29 Multi-state interferometric modulator with large stable range of motion
US14/265,193 2014-04-29
PCT/US2014/070630 WO2015108649A1 (en) 2014-01-17 2014-12-16 Multi-state interferometric modulator with large stable range of motion

Publications (2)

Publication Number Publication Date
JP2017504835A JP2017504835A (ja) 2017-02-09
JP2017504835A5 true JP2017504835A5 (https=) 2018-01-18

Family

ID=52282975

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016545903A Pending JP2017504835A (ja) 2014-01-17 2014-12-16 大きい安定的動き範囲を有する多状態干渉変調器

Country Status (6)

Country Link
US (1) US9372338B2 (https=)
JP (1) JP2017504835A (https=)
KR (1) KR20160110462A (https=)
CN (1) CN105899995B (https=)
TW (1) TWI644125B (https=)
WO (1) WO2015108649A1 (https=)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102193091B1 (ko) * 2014-05-22 2020-12-21 엘지디스플레이 주식회사 낮은 반사율을 갖는 블랙 매트릭스를 구비한 평판 표시장치 및 그 제조 방법
TWI581004B (zh) * 2015-11-18 2017-05-01 財團法人工業技術研究院 可調式光學裝置
CN108916688B (zh) * 2017-04-24 2020-08-18 京东方科技集团股份有限公司 光源和照明装置
WO2019009393A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス及びその製造方法
JP7112876B2 (ja) 2017-07-06 2022-08-04 浜松ホトニクス株式会社 光学デバイス
WO2019009392A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
CN110799883B (zh) 2017-07-06 2022-04-12 浜松光子学株式会社 光学装置
JP6514804B1 (ja) 2017-07-06 2019-05-15 浜松ホトニクス株式会社 光学デバイス
TWI785068B (zh) 2017-07-06 2022-12-01 日商濱松赫德尼古斯股份有限公司 光學裝置
JP6503151B1 (ja) * 2017-07-06 2019-04-17 浜松ホトニクス株式会社 光学デバイス
CN107561683B (zh) * 2017-09-15 2023-05-16 京东方科技集团股份有限公司 像素结构、显示基板及其控制方法、显示装置
EP3712673B1 (en) 2017-11-15 2023-11-08 Hamamatsu Photonics K.K. Optical device production method
DE102018217054A1 (de) * 2018-10-05 2020-04-09 Robert Bosch Gmbh Spiegeleinrichtung für eine Interferometereinrichtung, Interferometereinrichtung, Verfahren zur Herstellung einer Spiegeleinrichtung für eine Interferometereinrichtung, und Verfahren zur Herstellung einer Interferometereinrichtung
DE102019212597A1 (de) * 2019-08-22 2021-02-25 Robert Bosch Gmbh Mikromechanische Interferometereinrichtung und Verfahren zum Herstellen einer mikromechanischen Interferometereinrichtung
IT201900024475A1 (it) * 2019-12-18 2021-06-18 St Microelectronics Srl Dispositivo micromeccanico con gruppo elastico a costante elastica variabile
FI130707B1 (en) 2020-03-31 2024-01-31 Teknologian Tutkimuskeskus Vtt Oy Fabry-Perot interferometer that has support elements
IT202200003506A1 (it) 2022-02-24 2023-08-24 St Microelectronics Srl Dispositivo micromeccanico per la misura migliorata di accelerazioni
DE102022211284A1 (de) * 2022-10-25 2024-04-25 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanische Struktur und mikromechanischer Lautsprecher
DE102023207523A1 (de) * 2023-08-04 2025-02-06 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Bauteil mit einer Membranfeder und Verfahren zur Herstellung einer Membranfeder

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5142414A (en) * 1991-04-22 1992-08-25 Koehler Dale R Electrically actuatable temporal tristimulus-color device
US6680792B2 (en) * 1994-05-05 2004-01-20 Iridigm Display Corporation Interferometric modulation of radiation
US6710908B2 (en) 1994-05-05 2004-03-23 Iridigm Display Corporation Controlling micro-electro-mechanical cavities
JP3512963B2 (ja) 1995-12-15 2004-03-31 テキサス インスツルメンツ インコーポレイテツド マイクロメカニカルデバイス
US7532377B2 (en) 1998-04-08 2009-05-12 Idc, Llc Movable micro-electromechanical device
US6329738B1 (en) 1999-03-30 2001-12-11 Massachusetts Institute Of Technology Precision electrostatic actuation and positioning
KR100738064B1 (ko) 2001-02-27 2007-07-12 삼성전자주식회사 비선형적 복원력의 스프링을 가지는 ｍｅｍｓ 소자
US6836029B2 (en) 2001-11-28 2004-12-28 International Business Machines Corporation Micro-electromechanical switch having a conductive compressible electrode
US7265477B2 (en) 2004-01-05 2007-09-04 Chang-Feng Wan Stepping actuator and method of manufacture therefore
KR101255691B1 (ko) * 2004-07-29 2013-04-17 퀄컴 엠이엠에스 테크놀로지스, 인크. 간섭 변조기의 미소기전 동작을 위한 시스템 및 방법
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US8008736B2 (en) * 2004-09-27 2011-08-30 Qualcomm Mems Technologies, Inc. Analog interferometric modulator device
US7612932B2 (en) 2004-09-27 2009-11-03 Idc, Llc Microelectromechanical device with optical function separated from mechanical and electrical function
US7486854B2 (en) 2006-01-24 2009-02-03 Uni-Pixel Displays, Inc. Optical microstructures for light extraction and control
US7724417B2 (en) * 2006-12-19 2010-05-25 Qualcomm Mems Technologies, Inc. MEMS switches with deforming membranes
US8274200B2 (en) 2007-11-19 2012-09-25 Xcom Wireless, Inc. Microfabricated cantilever slider with asymmetric spring constant
US8314984B2 (en) 2008-02-14 2012-11-20 Miradia Inc. Method and system for optical MEMS with flexible landing structures
US8164821B2 (en) 2008-02-22 2012-04-24 Qualcomm Mems Technologies, Inc. Microelectromechanical device with thermal expansion balancing layer or stiffening layer
US7859740B2 (en) 2008-07-11 2010-12-28 Qualcomm Mems Technologies, Inc. Stiction mitigation with integrated mech micro-cantilevers through vertical stress gradient control
US8270062B2 (en) 2009-09-17 2012-09-18 Qualcomm Mems Technologies, Inc. Display device with at least one movable stop element
JP5348032B2 (ja) * 2010-03-16 2013-11-20 セイコーエプソン株式会社 光フィルター並びにそれを用いた分析機器及び光機器
JP5177209B2 (ja) * 2010-11-24 2013-04-03 株式会社デンソー ファブリペロー干渉計
US20130335808A1 (en) 2012-06-14 2013-12-19 Qualcomm Mems Technologies, Inc. Analog imod having high fill factor
US9096419B2 (en) 2012-10-01 2015-08-04 Qualcomm Mems Technologies, Inc. Electromechanical systems device with protrusions to provide additional stable states

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