JP2015518168A5 - - Google Patents
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- Publication number
- JP2015518168A5 JP2015518168A5 JP2015515019A JP2015515019A JP2015518168A5 JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5 JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015515019 A JP2015515019 A JP 2015515019A JP 2015518168 A5 JP2015518168 A5 JP 2015518168A5
- Authority
- JP
- Japan
- Prior art keywords
- humidity sensor
- conductive electrode
- sensor element
- disposed
- capacitance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 229910052783 alkali metal Inorganic materials 0.000 claims 1
- 150000001340 alkali metals Chemical class 0.000 claims 1
- 229920001577 copolymer Polymers 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 239000000178 monomer Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261652496P | 2012-05-29 | 2012-05-29 | |
| US61/652,496 | 2012-05-29 | ||
| PCT/US2013/040709 WO2013180936A1 (en) | 2012-05-29 | 2013-05-13 | Humidity sensor and sensor element |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015518168A JP2015518168A (ja) | 2015-06-25 |
| JP2015518168A5 true JP2015518168A5 (cg-RX-API-DMAC7.html) | 2016-06-30 |
| JP6129304B2 JP6129304B2 (ja) | 2017-05-17 |
Family
ID=48538062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015515019A Active JP6129304B2 (ja) | 2012-05-29 | 2013-05-13 | 湿度センサ及びセンサ素子 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9562872B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2856128B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6129304B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN104487831B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2013180936A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9702840B2 (en) | 2012-08-02 | 2017-07-11 | 3M Innovative Properties Company | Portable electronic device and vapor sensor card |
| KR102187614B1 (ko) * | 2014-07-02 | 2020-12-08 | 주식회사 키 파운드리 | 커패시터형 습도센서 |
| EP3078964B1 (en) * | 2015-04-09 | 2017-05-24 | Honeywell International Inc. | Relative humidity sensor and method |
| US11056365B2 (en) * | 2017-09-27 | 2021-07-06 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fault detection method in semiconductor fabrication facility |
| CN209326840U (zh) | 2018-12-27 | 2019-08-30 | 热敏碟公司 | 压力传感器及压力变送器 |
| EP4027417A1 (en) | 2021-01-07 | 2022-07-13 | AVL List GmbH | Dual purpose sensor for measuring hydrogen and humidity in the anode loop of a fuel cell system |
| CN118706911B (zh) * | 2024-08-29 | 2024-11-15 | 太原科技大学 | 一种平行板电容器式介电传感器及其应用 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57202405A (en) | 1981-06-03 | 1982-12-11 | Sharp Corp | Wick raising device |
| US4520341A (en) * | 1981-12-08 | 1985-05-28 | Sharp Kabushiki Kaisha | Moisture responsive element with crosslinked organic membrane and protective layering |
| JPS5991355A (ja) | 1982-11-16 | 1984-05-26 | Murata Mfg Co Ltd | 湿度センサ |
| JPS59202052A (ja) * | 1983-04-30 | 1984-11-15 | Sharp Corp | 感湿素子 |
| JPS6016451A (ja) | 1983-07-08 | 1985-01-28 | Matsushita Electronics Corp | 樹脂封止型半導体装置の製造方法 |
| JPH0640092B2 (ja) * | 1983-08-09 | 1994-05-25 | 工業技術院長 | 湿度測定方法 |
| JPS61176844A (ja) | 1985-02-01 | 1986-08-08 | Nisshinbo Ind Inc | 感湿素子 |
| US4662220A (en) | 1985-06-20 | 1987-05-05 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Water-absorbing capacitor system for measuring relative humidity |
| JPH01213564A (ja) * | 1988-02-23 | 1989-08-28 | Japan Gore Tex Inc | 感湿素子およびその製造法 |
| JPH0212047A (ja) * | 1988-06-30 | 1990-01-17 | Toshiba Corp | 容量変化型感湿素子およびその製造方法 |
| JPH065216B2 (ja) | 1988-07-26 | 1994-01-19 | 工業技術院長 | 静電容量変化型感湿素子の製造方法 |
| DE3919864A1 (de) * | 1989-06-19 | 1990-12-20 | Testoterm Mestechnik Gmbh & Co | Kapazitiver feuchtesensor |
| US5131990A (en) * | 1989-07-27 | 1992-07-21 | Texas Instruments Incorporated | Fluoropolymer humidity sensors |
| US5036704A (en) | 1990-03-23 | 1991-08-06 | Gas Research Institute | Moisture sensor |
| JP3630306B2 (ja) * | 2001-02-23 | 2005-03-16 | 株式会社豊田中央研究所 | 多官能化電解質及びこれを用いた電気化学デバイス並びに多官能化電解質の製造方法 |
| WO2004078830A1 (ja) | 2003-03-04 | 2004-09-16 | Eamex Corporation | 変形性高強度ポリピロールフィルム |
| US7071271B2 (en) | 2003-10-30 | 2006-07-04 | 3M Innovative Properties Company | Aqueous emulsion polymerization of functionalized fluoromonomers |
| JP2006105628A (ja) * | 2004-09-30 | 2006-04-20 | Tdk Corp | 湿度センサ素子 |
| JP2007139447A (ja) * | 2005-11-15 | 2007-06-07 | Shinshu Univ | 薄膜の透湿度測定装置および透湿度測定方法 |
| CN100579996C (zh) | 2007-01-12 | 2010-01-13 | 山东东岳神舟新材料有限公司 | 带有磺酰氟及醚端基侧基的氟树脂及其合成方法与应用 |
| CN101688052A (zh) | 2007-07-27 | 2010-03-31 | E.I.内穆尔杜邦公司 | 包含无机纳米颗粒的导电聚合物的含水分散体 |
| JP2010540966A (ja) | 2007-10-05 | 2010-12-24 | スリーエム イノベイティブ プロパティズ カンパニー | ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法 |
| KR101476487B1 (ko) | 2007-10-05 | 2014-12-24 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 |
| BRPI0918200A2 (pt) | 2008-12-23 | 2015-12-08 | 3M Innovative Properties Co | elemento de detecção e método de detecção de analitos químicos orgânicos |
| WO2011129967A2 (en) | 2010-04-16 | 2011-10-20 | 3M Innovative Properties Company | Proton conducting materials |
| US8564740B2 (en) | 2010-05-24 | 2013-10-22 | 3M Innovative Properties Company | Directional backlight with reduced crosstalk |
| US10228344B2 (en) | 2010-09-30 | 2019-03-12 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| US9341588B2 (en) | 2010-09-30 | 2016-05-17 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| KR20140026469A (ko) | 2011-04-13 | 2014-03-05 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서 |
| CN103492872B (zh) | 2011-04-13 | 2016-04-06 | 3M创新有限公司 | 使用吸收性传感器元件的方法 |
| EP2697636A1 (en) | 2011-04-13 | 2014-02-19 | 3M Innovative Properties Company | Electronic device including calibration information and method of using the same |
| EP2697635B1 (en) | 2011-04-13 | 2017-03-22 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
| WO2012170248A1 (en) | 2011-06-08 | 2012-12-13 | 3M Innovative Properties Company | Humidity sensor and sensor element therefor |
-
2013
- 2013-05-13 JP JP2015515019A patent/JP6129304B2/ja active Active
- 2013-05-13 WO PCT/US2013/040709 patent/WO2013180936A1/en not_active Ceased
- 2013-05-13 EP EP13726063.4A patent/EP2856128B1/en not_active Not-in-force
- 2013-05-13 US US14/399,381 patent/US9562872B2/en not_active Expired - Fee Related
- 2013-05-13 CN CN201380027971.9A patent/CN104487831B/zh not_active Expired - Fee Related