JP2013539040A5 - - Google Patents
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- Publication number
- JP2013539040A5 JP2013539040A5 JP2013531587A JP2013531587A JP2013539040A5 JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5 JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013531587 A JP2013531587 A JP 2013531587A JP 2013539040 A5 JP2013539040 A5 JP 2013539040A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive electrode
- dielectric layer
- sensor element
- conductive
- shitsupo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002745 absorbent Effects 0.000 claims 5
- 239000002250 absorbent Substances 0.000 claims 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 3
- 239000002041 carbon nanotube Substances 0.000 claims 3
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 3
- 239000012530 fluid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US38813010P | 2010-09-30 | 2010-09-30 | |
| US61/388,130 | 2010-09-30 | ||
| PCT/US2011/049145 WO2012044419A1 (en) | 2010-09-30 | 2011-08-25 | Sensor element, method of making the same, and sensor device including the same |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013539040A JP2013539040A (ja) | 2013-10-17 |
| JP2013539040A5 true JP2013539040A5 (cg-RX-API-DMAC7.html) | 2014-09-25 |
| JP5932806B2 JP5932806B2 (ja) | 2016-06-08 |
Family
ID=44681415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013531587A Expired - Fee Related JP5932806B2 (ja) | 2010-09-30 | 2011-08-25 | センサー素子、その製造方法、及びそれを含むセンサー装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9341588B2 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2622334B1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP5932806B2 (cg-RX-API-DMAC7.html) |
| CN (1) | CN103154714A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2012044419A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100053536A (ko) | 2007-06-29 | 2010-05-20 | 아트피셜 머슬, 인코퍼레이션 | 감각적 피드백을 부여하는 전기활성 고분자 변환기 |
| EP2239793A1 (de) | 2009-04-11 | 2010-10-13 | Bayer MaterialScience AG | Elektrisch schaltbarer Polymerfilmaufbau und dessen Verwendung |
| US10228344B2 (en) | 2010-09-30 | 2019-03-12 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| SG193003A1 (en) | 2011-03-01 | 2013-10-30 | Bayer Ip Gmbh | Automated manufacturing processes for producing deformable polymer devices and films |
| CN103703404A (zh) | 2011-03-22 | 2014-04-02 | 拜耳知识产权有限责任公司 | 电活化聚合物致动器双凸透镜系统 |
| CN103492872B (zh) | 2011-04-13 | 2016-04-06 | 3M创新有限公司 | 使用吸收性传感器元件的方法 |
| KR20140026469A (ko) | 2011-04-13 | 2014-03-05 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 일체형 가열을 갖는 센서 요소를 포함하는 증기 센서 |
| EP2697635B1 (en) | 2011-04-13 | 2017-03-22 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
| WO2012170248A1 (en) | 2011-06-08 | 2012-12-13 | 3M Innovative Properties Company | Humidity sensor and sensor element therefor |
| US9244008B2 (en) | 2011-06-16 | 2016-01-26 | 3M Innovative Properties Company | Surface plasmon resonance sensor element and sensor including the same |
| EP2791667B1 (en) | 2011-12-13 | 2018-03-28 | 3M Innovative Properties Company | Method for identification and quantitative determination of an unknown organic compound in a gaseous medium |
| WO2013142552A1 (en) | 2012-03-21 | 2013-09-26 | Bayer Materialscience Ag | Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices |
| JP6129304B2 (ja) | 2012-05-29 | 2017-05-17 | スリーエム イノベイティブ プロパティズ カンパニー | 湿度センサ及びセンサ素子 |
| KR20150031285A (ko) | 2012-06-18 | 2015-03-23 | 바이엘 인텔렉쳐 프로퍼티 게엠베하 | 연신 공정을 위한 연신 프레임 |
| EP2864770B1 (en) | 2012-06-25 | 2017-09-27 | 3M Innovative Properties Company | Sensor element, method of making, and method of using the same |
| US9702840B2 (en) | 2012-08-02 | 2017-07-11 | 3M Innovative Properties Company | Portable electronic device and vapor sensor card |
| US9317068B2 (en) | 2012-09-24 | 2016-04-19 | Donaldson Company, Inc. | Venting assembly and microporous membrane composite |
| TW201436311A (zh) * | 2012-10-16 | 2014-09-16 | 拜耳智慧財產有限公司 | 金屬化介電膜之方法 |
| US9590193B2 (en) | 2012-10-24 | 2017-03-07 | Parker-Hannifin Corporation | Polymer diode |
| CN105578969B (zh) * | 2013-09-26 | 2019-01-22 | 3M创新有限公司 | 适用于检测在皮肤部位处的醇残留的蒸汽传感器 |
| CN103698360A (zh) * | 2013-12-13 | 2014-04-02 | 苏州纳格光电科技有限公司 | 半导体气体传感器 |
| KR102414098B1 (ko) * | 2014-02-27 | 2022-06-29 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 주변-미만 온도 증기 센서 및 이용 방법 |
| CN106716152A (zh) | 2014-07-22 | 2017-05-24 | 布鲁尔科技公司 | 薄膜型基于电阻的传感器 |
| WO2016096520A1 (en) * | 2014-12-18 | 2016-06-23 | Koninklijke Philips N.V. | Hydration state indicator |
| US10083883B2 (en) * | 2016-06-20 | 2018-09-25 | Applied Materials, Inc. | Wafer processing equipment having capacitive micro sensors |
| US11287395B2 (en) | 2016-09-09 | 2022-03-29 | Hokuriku Electric Industry Co., Ltd. | Capacitive gas sensor |
| US10209186B2 (en) * | 2017-01-03 | 2019-02-19 | International Business Machines Corporation | Chemical sensing based on plasmon resonance in carbon nanotubes |
| EP3638112A4 (en) * | 2017-06-20 | 2021-03-31 | Abdolahad, Mohammad | REAL-TIME, MARKERLESS ANALYZER FOR IN VITRO AND IN VIVO DETECTION OF AREAS SUSPECTED IN CANCER |
| WO2019173648A1 (en) | 2018-03-08 | 2019-09-12 | Exxonmobil Research And Engineering Company | Functionalized membranes and methods of production thereof |
| JP7106651B2 (ja) * | 2018-08-17 | 2022-07-26 | 富士フイルム株式会社 | センサ |
| CN109546890B (zh) * | 2019-01-18 | 2020-07-31 | 清华大学 | 湿气发电方法及装置 |
| JP2023550705A (ja) * | 2020-11-11 | 2023-12-05 | ビー．ジー． ネゲヴ テクノロジーズ アンド アプリケーションズ リミテッド、アット ベン－グリオン ユニヴァーシティ | 病原体を検出するためのデバイス及び方法 |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SE9704329D0 (sv) * | 1997-11-25 | 1997-11-25 | Siemens Elema Ab | Gasmätare |
| US6085576A (en) * | 1998-03-20 | 2000-07-11 | Cyrano Sciences, Inc. | Handheld sensing apparatus |
| JP2003227806A (ja) * | 2002-02-01 | 2003-08-15 | Kansai Research Institute | 気体物質検知方法 |
| US20070048180A1 (en) | 2002-09-05 | 2007-03-01 | Gabriel Jean-Christophe P | Nanoelectronic breath analyzer and asthma monitor |
| US7449146B2 (en) | 2002-09-30 | 2008-11-11 | 3M Innovative Properties Company | Colorimetric sensor |
| GB0317557D0 (en) | 2003-07-26 | 2003-08-27 | Univ Manchester | Microporous polymer material |
| US7217354B2 (en) * | 2003-08-29 | 2007-05-15 | Ut-Battelle, Llc | Method and apparatus for detection of chemical vapors |
| GB0322832D0 (en) | 2003-09-30 | 2003-10-29 | Epigem Ltd | Sensor platforms utilising nanoporous membranes |
| US6997039B2 (en) | 2004-02-24 | 2006-02-14 | Clemson University | Carbon nanotube based resonant-circuit sensor |
| CN1946998B (zh) * | 2004-03-31 | 2012-06-20 | 新加坡科技研究局 | 用于测量测试材料气体渗透率的传感器 |
| US8052932B2 (en) * | 2006-12-22 | 2011-11-08 | Research Triangle Institute | Polymer nanofiber-based electronic nose |
| US7776269B2 (en) | 2005-03-15 | 2010-08-17 | The United States Of America As Represented By The Secretary Of The Navy | Capacitive based sensing of molecular adsorbates on the surface of single wall nanotubes |
| US7837844B2 (en) * | 2005-04-26 | 2010-11-23 | Seacoast Science, Inc. | Interdigitated chemical sensors, and methods of making and using the same |
| US7208327B2 (en) * | 2005-05-25 | 2007-04-24 | Intel Corporation | Metal oxide sensors and method of forming |
| US8293340B2 (en) | 2005-12-21 | 2012-10-23 | 3M Innovative Properties Company | Plasma deposited microporous analyte detection layer |
| US7556774B2 (en) | 2005-12-21 | 2009-07-07 | 3M Innovative Properties Company | Optochemical sensor and method of making the same |
| US7767143B2 (en) | 2006-06-27 | 2010-08-03 | 3M Innovative Properties Company | Colorimetric sensors |
| US8067110B2 (en) | 2006-09-11 | 2011-11-29 | 3M Innovative Properties Company | Organic vapor sorbent protective device with thin-film indicator |
| JP2010532095A (ja) | 2007-06-28 | 2010-09-30 | スリーエム イノベイティブ プロパティズ カンパニー | 界面導電性クラスターを組み入れた薄膜トランジスタ |
| US20090091337A1 (en) | 2007-10-04 | 2009-04-09 | Robinson Joshua A | Carbon film composite, method of manufacturing a carbon film composite and sensor made therewith |
| KR101476487B1 (ko) | 2007-10-05 | 2014-12-24 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 플라즈마-증착된 미공성 층을 포함하는 유기 화학적 센서와, 제조 및 사용 방법 |
| JP2010540966A (ja) * | 2007-10-05 | 2010-12-24 | スリーエム イノベイティブ プロパティズ カンパニー | ミクロ孔質ポリマーを含む有機化学センサー、及び使用方法 |
| JP5128380B2 (ja) * | 2008-06-19 | 2013-01-23 | 一般財団法人電力中央研究所 | 分解ガスセンサ |
| BRPI0918200A2 (pt) | 2008-12-23 | 2015-12-08 | 3M Innovative Properties Co | elemento de detecção e método de detecção de analitos químicos orgânicos |
| CN101811658B (zh) | 2009-02-20 | 2012-09-19 | 清华大学 | 碳纳米管阵列传感器及其制备方法 |
| RU2487337C2 (ru) | 2009-03-30 | 2013-07-10 | 3М Инновейтив Пропертиз Компани | Способ контроля вещества в атмосфере и устройство для его осуществления |
| JP5800897B2 (ja) | 2010-06-15 | 2015-10-28 | スリーエム イノベイティブ プロパティズ カンパニー | 可変静電容量センサ及びその作製方法 |
| US10228344B2 (en) | 2010-09-30 | 2019-03-12 | 3M Innovative Properties Company | Sensor element, method of making the same, and sensor device including the same |
| EP2697635B1 (en) | 2011-04-13 | 2017-03-22 | 3M Innovative Properties Company | Method of detecting volatile organic compounds |
-
2011
- 2011-08-25 US US13/825,663 patent/US9341588B2/en active Active
- 2011-08-25 CN CN2011800475842A patent/CN103154714A/zh active Pending
- 2011-08-25 WO PCT/US2011/049145 patent/WO2012044419A1/en not_active Ceased
- 2011-08-25 EP EP11761429.7A patent/EP2622334B1/en not_active Not-in-force
- 2011-08-25 JP JP2013531587A patent/JP5932806B2/ja not_active Expired - Fee Related