JP2015505958A - イオン注入法によって作られた結晶センサ - Google Patents
イオン注入法によって作られた結晶センサ Download PDFInfo
- Publication number
- JP2015505958A JP2015505958A JP2014544755A JP2014544755A JP2015505958A JP 2015505958 A JP2015505958 A JP 2015505958A JP 2014544755 A JP2014544755 A JP 2014544755A JP 2014544755 A JP2014544755 A JP 2014544755A JP 2015505958 A JP2015505958 A JP 2015505958A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- conductive region
- property
- designed
- ion implantation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 106
- 238000005468 ion implantation Methods 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 claims abstract description 44
- 150000002500 ions Chemical class 0.000 claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 claims abstract description 13
- 239000012530 fluid Substances 0.000 claims description 33
- 230000015572 biosynthetic process Effects 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000012545 processing Methods 0.000 claims description 7
- 238000000137 annealing Methods 0.000 claims description 5
- 238000009412 basement excavation Methods 0.000 claims description 4
- -1 berlinite Chemical compound 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000002178 crystalline material Substances 0.000 claims description 4
- 238000009684 ion beam mixing Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052451 lead zirconate titanate Inorganic materials 0.000 claims description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- ILRRQNADMUWWFW-UHFFFAOYSA-K aluminium phosphate Chemical compound O1[Al]2OP1(=O)O2 ILRRQNADMUWWFW-UHFFFAOYSA-K 0.000 claims description 2
- ORCSMBGZHYTXOV-UHFFFAOYSA-N bismuth;germanium;dodecahydrate Chemical compound O.O.O.O.O.O.O.O.O.O.O.O.[Ge].[Ge].[Ge].[Bi].[Bi].[Bi].[Bi] ORCSMBGZHYTXOV-UHFFFAOYSA-N 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 claims description 2
- 235000016693 dipotassium tartrate Nutrition 0.000 claims description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 2
- AVTYONGGKAJVTE-OLXYHTOASA-L potassium L-tartrate Chemical compound [K+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O AVTYONGGKAJVTE-OLXYHTOASA-L 0.000 claims description 2
- 239000001472 potassium tartrate Substances 0.000 claims description 2
- RIUWBIIVUYSTCN-UHFFFAOYSA-N trilithium borate Chemical compound [Li+].[Li+].[Li+].[O-]B([O-])[O-] RIUWBIIVUYSTCN-UHFFFAOYSA-N 0.000 claims description 2
- AKVPCIASSWRYTN-UHFFFAOYSA-N zinc oxygen(2-) silicon(4+) Chemical compound [Si+4].[O-2].[Zn+2].[O-2].[O-2] AKVPCIASSWRYTN-UHFFFAOYSA-N 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000002131 composite material Substances 0.000 claims 1
- 238000001459 lithography Methods 0.000 claims 1
- 239000002019 doping agent Substances 0.000 description 13
- 239000000523 sample Substances 0.000 description 8
- 239000010410 layer Substances 0.000 description 7
- 238000005452 bending Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- 230000000670 limiting effect Effects 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 239000012535 impurity Substances 0.000 description 4
- 125000004429 atom Chemical group 0.000 description 3
- 239000000969 carrier Substances 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035515 penetration Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005280 amorphization Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- OKZIUSOJQLYFSE-UHFFFAOYSA-N difluoroboron Chemical compound F[B]F OKZIUSOJQLYFSE-UHFFFAOYSA-N 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B47/00—Survey of boreholes or wells
- E21B47/10—Locating fluid leaks, intrusions or movements
- E21B47/107—Locating fluid leaks, intrusions or movements using acoustic means
-
- E—FIXED CONSTRUCTIONS
- E21—EARTH OR ROCK DRILLING; MINING
- E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
- E21B49/00—Testing the nature of borehole walls; Formation testing; Methods or apparatus for obtaining samples of soil or well fluids, specially adapted to earth drilling or wells
- E21B49/08—Obtaining fluid samples or testing fluids, in boreholes or wells
- E21B49/10—Obtaining fluid samples or testing fluids, in boreholes or wells using side-wall fluid samplers or testers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
Landscapes
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Geology (AREA)
- Mining & Mineral Resources (AREA)
- Geochemistry & Mineralogy (AREA)
- Pathology (AREA)
- Environmental & Geological Engineering (AREA)
- Fluid Mechanics (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Geophysics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Remote Sensing (AREA)
Abstract
Description
Claims (21)
- 対象となる性質を感知するように設計された結晶を選択し、
イオン注入法を用いて該結晶にイオンを注入し、該結晶内に導電領域を作り、該導電領域が前記対象となる性質を感知する信号を与えることができること
を特徴とする、結晶センサの製造方法。 - 前記結晶が圧電性結晶であることを特徴とする、請求項1に記載の製造方法。
- 前記圧電性結晶が、水晶、PZT、ニオブ酸リチウム、タンタル酸リチウム、ホウ酸リチウム、ベルリナイト、ヒ化ガリウム、四ホウ酸リチウム、リン酸アルミニウム、酸化ビスマスゲルマニウム、多結晶性チタン酸ジルコニウムセラミックス、高アルミナ質セラミックス、シリコン−酸化亜鉛複合体、又は酒石酸ジカリウムを含むことを特徴とする、請求項2に記載の製造方法。
- 前記導電領域が少なくとも1つの電極を有することを特徴とする、請求項2に記載の製造方法。
- 前記少なくとも1つの電極が相互に電気的に絶縁された2つ以上の電極を含むことを特徴とする、請求項4に記載の製造方法。
- 1以上の周波数の交流電圧を前記2つ以上の電極に印加すると、前記圧電性結晶が、流体内で共振するように設計された形状を有することを特徴とする、請求項5に記載の製造方法。
- 前記形状が音叉の形状であることを特徴とする、請求項6に記載の製造方法。
- 前記導電領域の一部にアクセスするために結晶材料を除去することをさらに含むことを特徴とする、請求項1に記載の製造方法。
- 前記導電領域の前記一部に金属層を蒸着して接触パッドを形成することをさらに含むことを特徴とする、請求項8に記載の製造方法。
- イオンビーム混合を用いて前記導電領域の前記一部に前記金属層を密着させることをさらに含むことを特徴とする、請求項9に記載の製造方法。
- イオンを注入することが結晶を焼き鈍すことを含むことを特徴とする、請求項1に記載の製造方法。
- イオンを注入することが、リソグラフィーを用いてマスクを作ることと、該マスクに従ってイオン注入を行うこととを含むことを特徴とする、請求項1に記載の製造方法。
- イオン注入を行った前記結晶の表面に、該結晶と同じ材料の1以上の格子層を形成することをさらに含むことを特徴とする、請求項1に記載の製造方法。
- 地中を貫く掘削孔を通してキャリアを搬送し、
イオン注入法によって作られて前記対象の性質に関する信号を与えるように設計された導電領域を結晶内に有する結晶を該キャリアに配置して前記対象の性質を測定可能に配設し、
該信号を用いて前記対象の性質の評価を行うこと
を特徴とする、対象の性質をダウンホールで評価する方法。 - 前記導電領域に電圧を印加することをさらに含むことを特徴とする、請求項14に記載の方法。
- 地層を貫く掘削孔を通して搬送されるように設計されているキャリアと、
該キャリアに配置されて前記対象の性質を測定可能であるように設計されている結晶であってイオン注入法によって作られて前記対象の性質に関連する信号を与えるように設計されている導電領域を該結晶内に有する結晶と、
該信号を受けて前記対象の性質を評価するように設計されている処理装置と
を含むことを特徴とする、対象の性質をダウンホールで評価する装置。 - 前記導電領域が電極を有することを特徴とする、請求項16に記載の装置。
- 交流電圧を前記電極に印加すると、前記圧電性結晶が流体内で共振するように設計されていることを特徴とする、請求項17に記載の装置。
- 前記結晶が圧電性結晶であることを特徴とする、請求項18に記載の装置。
- 前記導電領域が対象の性質を感知することに係る信号を受け取ると、該導電領域が電荷を伝導するように設計され、前記対象の性質を評価することを特徴とする、請求項16に記載の装置。
- 前記キャリアが、ワイヤライン、スリックライン(slickline)、ドリルストリング、又はコイル管であることを特徴とする、請求項16に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/307,801 US9151153B2 (en) | 2011-11-30 | 2011-11-30 | Crystal sensor made by ion implantation for sensing a property of interest within a borehole in the earth |
US13/307,801 | 2011-11-30 | ||
PCT/US2012/064623 WO2013081806A1 (en) | 2011-11-30 | 2012-11-12 | Crystal sensor made by ion implantation |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015505958A true JP2015505958A (ja) | 2015-02-26 |
JP2015505958A5 JP2015505958A5 (ja) | 2016-01-07 |
JP6140181B2 JP6140181B2 (ja) | 2017-05-31 |
Family
ID=48466252
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014544755A Active JP6140181B2 (ja) | 2011-11-30 | 2012-11-12 | イオン注入法によって作られた結晶センサ |
Country Status (5)
Country | Link |
---|---|
US (1) | US9151153B2 (ja) |
EP (1) | EP2786178B1 (ja) |
JP (1) | JP6140181B2 (ja) |
CN (1) | CN104011565B (ja) |
WO (1) | WO2013081806A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018523768A (ja) * | 2015-08-07 | 2018-08-23 | サウジ アラビアン オイル カンパニー | 電気機械共振器を用いて流体特性を測定する装置および方法 |
US11333015B2 (en) | 2016-08-04 | 2022-05-17 | Saudi Arabian Oil Company | Method for capacitive cancellation of tuning fork for fluid property measurements |
JP2022159096A (ja) * | 2021-03-31 | 2022-10-17 | ティーイー コネクティビティ センサーズ フランス | 音叉型機械共振器を備える、流体の特性を感知するための流体センサ |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9677394B2 (en) * | 2013-06-28 | 2017-06-13 | Schlumberger Technology Corporation | Downhole fluid sensor with conductive shield and method of using same |
WO2015088474A1 (en) * | 2013-12-09 | 2015-06-18 | Halliburton Energy Services, Inc. | Polycrystalline transparent ceramics for use with a logging sensor or tool |
EP3204605B1 (en) | 2014-12-31 | 2023-06-28 | Halliburton Energy Services, Inc. | Integrated multiple parameter sensing system and method for leak detection |
US9562430B1 (en) | 2015-10-05 | 2017-02-07 | Baker Hughes Incorporated | Chemiresistive sensors for downhole tools |
CA3022321C (en) | 2016-06-02 | 2022-03-29 | Halliburton Energy Services, Inc. | Acoustic receivers with cylindrical crystals |
US10958358B2 (en) | 2018-05-22 | 2021-03-23 | Baker Hughes, A Ge Company, Llc | Signal transmission system and method |
US11066930B2 (en) | 2018-12-31 | 2021-07-20 | Baker Hughes Oilfield Operations Llc | Systems and method for analyzing downhole fluid properties using co-located multi-modal sensors |
US11428100B2 (en) | 2018-12-31 | 2022-08-30 | Baker Hughes Oilfield Operations Llc | Systems and methods for obtaining downhole fluid properties |
GB2610149B (en) * | 2018-12-31 | 2023-07-26 | Baker Hughes Oilfield Operations Llc | Systems and methods for obtaining downhole fluid properties |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4510671A (en) * | 1981-08-31 | 1985-04-16 | Kulite Semiconductor Products, Inc. | Dielectrically isolated transducer employing single crystal strain gages |
US6489616B2 (en) * | 2001-03-19 | 2002-12-03 | The Board Of Governors Of Southwest Missouri State University | Doped, organic carbon-containing sensor for infrared detection and a process for the preparation thereof |
US20020178805A1 (en) * | 2001-05-15 | 2002-12-05 | Baker Hughes Inc. | Method and apparatus for downhole fluid characterization using flexural mechanical resonators |
JP2005110230A (ja) * | 2003-09-12 | 2005-04-21 | Matsushita Electric Ind Co Ltd | 薄膜バルク音響共振器、その製造方法、フィルタ、複合電子部品および通信機器 |
US20050182566A1 (en) * | 2004-01-14 | 2005-08-18 | Baker Hughes Incorporated | Method and apparatus for determining filtrate contamination from density measurements |
JP2006228866A (ja) * | 2005-02-16 | 2006-08-31 | Seiko Epson Corp | 圧電アクチュエータの製造方法、圧電アクチュエータ、液体噴射ヘッド及び液体噴射装置 |
JP2009100464A (ja) * | 2007-09-25 | 2009-05-07 | Panasonic Electric Works Co Ltd | 共振装置およびその製造方法 |
WO2010067794A1 (ja) * | 2008-12-10 | 2010-06-17 | 株式会社村田製作所 | 圧電性複合基板の製造方法、および圧電素子の製造方法 |
US20110128003A1 (en) * | 2009-11-30 | 2011-06-02 | Chevron U.S.A, Inc. | System and method for measurement incorporating a crystal oscillator |
JP2011120241A (ja) * | 2009-12-04 | 2011-06-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Fbarタイプのバルク波の音響共振器を製作する方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4471255A (en) * | 1978-10-05 | 1984-09-11 | Clarion Co., Ltd. | Surface acoustic wave parametric device |
CA1180914A (en) | 1981-08-17 | 1985-01-15 | James M. O'connor | Micromechanical chemical sensor |
US5734105A (en) * | 1992-10-13 | 1998-03-31 | Nippondenso Co., Ltd. | Dynamic quantity sensor |
JP2536379B2 (ja) * | 1992-12-31 | 1996-09-18 | 日本電気株式会社 | 圧電トランス |
US5633616A (en) * | 1994-10-07 | 1997-05-27 | Mitsubishi Denki Kabushiki Kaisha | Thin film saw filter including doped electrodes |
JPH0983029A (ja) * | 1995-09-11 | 1997-03-28 | Mitsubishi Electric Corp | 薄膜圧電素子の製造方法 |
JP3039364B2 (ja) * | 1996-03-11 | 2000-05-08 | 株式会社村田製作所 | 角速度センサ |
DE19636461C2 (de) * | 1996-09-07 | 1998-07-09 | Forschungszentrum Juelich Gmbh | Sensoranordnung und Verfahren zu deren Herstellung |
US6429784B1 (en) * | 1999-02-19 | 2002-08-06 | Dresser Industries, Inc. | Casing mounted sensors, actuators and generators |
US6710680B2 (en) * | 2001-12-20 | 2004-03-23 | Motorola, Inc. | Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges |
US7000298B2 (en) * | 2004-04-20 | 2006-02-21 | Honeywell International Inc. | Method a quartz sensor |
US7406761B2 (en) * | 2005-03-21 | 2008-08-05 | Honeywell International Inc. | Method of manufacturing vibrating micromechanical structures |
US7401525B2 (en) | 2005-03-23 | 2008-07-22 | Honeywell International Inc. | Micro-machined pressure sensor with polymer diaphragm |
JP4514639B2 (ja) * | 2005-03-31 | 2010-07-28 | 国立大学法人群馬大学 | カンチレバー型センサ |
US7401522B2 (en) * | 2005-05-26 | 2008-07-22 | Rosemount Inc. | Pressure sensor using compressible sensor body |
GB0612754D0 (en) * | 2006-06-27 | 2006-08-09 | Univ Cambridge Tech | Semiconductor device transducer and method |
US20090100925A1 (en) * | 2006-10-27 | 2009-04-23 | Baker Hughes Incorporated | System and method for coating flexural mechanical resonators |
JP4636292B2 (ja) * | 2008-08-27 | 2011-02-23 | 株式会社村田製作所 | 電子部品及び電子部品の製造方法 |
DE112010000861B4 (de) * | 2009-01-15 | 2016-12-15 | Murata Manufacturing Co., Ltd. | Piezoelektrisches Bauelement und Verfahren zur Herstellung eines piezoelektrischenBauelements |
US8631702B2 (en) * | 2010-05-30 | 2014-01-21 | Honeywell International Inc. | Hemitoroidal resonator gyroscope |
US8878548B2 (en) * | 2010-06-11 | 2014-11-04 | Baker Hughes Incorporated | Method for treating and sealing piezoelectric tuning forks |
JP5637068B2 (ja) * | 2010-08-27 | 2014-12-10 | 株式会社村田製作所 | 弾性境界波装置の製造方法および弾性境界波装置 |
US20130063149A1 (en) * | 2011-07-14 | 2013-03-14 | Baker Hughes Incorporated | Reducing fluid capacitance and conductance effects on piezoelectric resonator measurements |
CN103765771B (zh) * | 2011-09-01 | 2016-09-21 | 株式会社村田制作所 | 压电体波装置及其制造方法 |
-
2011
- 2011-11-30 US US13/307,801 patent/US9151153B2/en active Active
-
2012
- 2012-11-12 WO PCT/US2012/064623 patent/WO2013081806A1/en unknown
- 2012-11-12 JP JP2014544755A patent/JP6140181B2/ja active Active
- 2012-11-12 CN CN201280053219.7A patent/CN104011565B/zh active Active
- 2012-11-12 EP EP12854505.0A patent/EP2786178B1/en active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4510671A (en) * | 1981-08-31 | 1985-04-16 | Kulite Semiconductor Products, Inc. | Dielectrically isolated transducer employing single crystal strain gages |
US6489616B2 (en) * | 2001-03-19 | 2002-12-03 | The Board Of Governors Of Southwest Missouri State University | Doped, organic carbon-containing sensor for infrared detection and a process for the preparation thereof |
US20020178805A1 (en) * | 2001-05-15 | 2002-12-05 | Baker Hughes Inc. | Method and apparatus for downhole fluid characterization using flexural mechanical resonators |
JP2005110230A (ja) * | 2003-09-12 | 2005-04-21 | Matsushita Electric Ind Co Ltd | 薄膜バルク音響共振器、その製造方法、フィルタ、複合電子部品および通信機器 |
US20050182566A1 (en) * | 2004-01-14 | 2005-08-18 | Baker Hughes Incorporated | Method and apparatus for determining filtrate contamination from density measurements |
JP2006228866A (ja) * | 2005-02-16 | 2006-08-31 | Seiko Epson Corp | 圧電アクチュエータの製造方法、圧電アクチュエータ、液体噴射ヘッド及び液体噴射装置 |
JP2009100464A (ja) * | 2007-09-25 | 2009-05-07 | Panasonic Electric Works Co Ltd | 共振装置およびその製造方法 |
WO2010067794A1 (ja) * | 2008-12-10 | 2010-06-17 | 株式会社村田製作所 | 圧電性複合基板の製造方法、および圧電素子の製造方法 |
US20110128003A1 (en) * | 2009-11-30 | 2011-06-02 | Chevron U.S.A, Inc. | System and method for measurement incorporating a crystal oscillator |
JP2011120241A (ja) * | 2009-12-04 | 2011-06-16 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Fbarタイプのバルク波の音響共振器を製作する方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018523768A (ja) * | 2015-08-07 | 2018-08-23 | サウジ アラビアン オイル カンパニー | 電気機械共振器を用いて流体特性を測定する装置および方法 |
US11061158B2 (en) | 2015-08-07 | 2021-07-13 | Saudi Arabian Oil Company | Method and device for measuring fluid properties using an electromechanical resonator |
US11333015B2 (en) | 2016-08-04 | 2022-05-17 | Saudi Arabian Oil Company | Method for capacitive cancellation of tuning fork for fluid property measurements |
JP2022159096A (ja) * | 2021-03-31 | 2022-10-17 | ティーイー コネクティビティ センサーズ フランス | 音叉型機械共振器を備える、流体の特性を感知するための流体センサ |
JP7335386B2 (ja) | 2021-03-31 | 2023-08-29 | ティーイー コネクティビティ センサーズ フランス | 音叉型機械共振器を備える、流体の特性を感知するための流体センサ |
US11921073B2 (en) | 2021-03-31 | 2024-03-05 | MEAS France | Fluid sensor for sensing properties of a fluid comprising a tuning fork mechanical resonator |
Also Published As
Publication number | Publication date |
---|---|
EP2786178B1 (en) | 2019-11-06 |
JP6140181B2 (ja) | 2017-05-31 |
EP2786178A4 (en) | 2015-11-11 |
EP2786178A1 (en) | 2014-10-08 |
US9151153B2 (en) | 2015-10-06 |
US20130134981A1 (en) | 2013-05-30 |
CN104011565A (zh) | 2014-08-27 |
CN104011565B (zh) | 2017-11-28 |
WO2013081806A1 (en) | 2013-06-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6140181B2 (ja) | イオン注入法によって作られた結晶センサ | |
Koumela et al. | Piezoresistance of top-down suspended Si nanowires | |
US8943884B2 (en) | Smart seals and other elastomer systems for health and pressure monitoring | |
Akgul et al. | A negative-capacitance equivalent circuit model for parallel-plate capacitive-gap-transduced micromechanical resonators | |
CN105492718B (zh) | 具有电热效应的井下冷却系统 | |
JP2015505958A5 (ja) | ||
CN108604556A (zh) | 实时工艺特性分析 | |
WO2010059540A2 (en) | Oscillator sensor for determining a property of an earth formation | |
US20230366756A1 (en) | Resonating sensor for high-pressure and high-temperature environments | |
Gröttrup et al. | Piezotronic‐based magnetoelectric sensor: Fabrication and response | |
US20160252406A1 (en) | Temperature sensor using piezoelectric resonator and methods of measuring temperature | |
CA2806543A1 (en) | A novel embedded 3d stress and temperature sensor utilizing silicon doping manipulation | |
Lynes et al. | Effects of gamma ray radiation on the performance of microelectromechanical resonators | |
US20130063149A1 (en) | Reducing fluid capacitance and conductance effects on piezoelectric resonator measurements | |
Lynes et al. | Impact of Silicon Ion Irradiation on Aluminum Nitride‐Transduced Microelectromechanical Resonators | |
US10330746B2 (en) | Method and device for measuring a magnetic field | |
US20130068008A1 (en) | High temperature piezoresistive strain gauges made of silicon-on-insulator | |
Schulz et al. | Electromechanical properties of housed piezoelectric CTGS resonators at high temperatures–Modeling of housing influence | |
US20140298918A1 (en) | Broadband electromechanical spectroscopy | |
Scardelletti | Development of a high temperature silicon carbide capacitive pressure sensor system based on a Clapp-type oscillator circuit | |
Cabuz | Tradeoffs in micro-opto-electro-mechanical system materials | |
Lynes et al. | Unfolding the Effects of Cobalt-60 Irradiation on Contour-Mode Piezoelectric Resonators | |
Cui et al. | Influence of Return Electrode with Different Area on Logging Response of Micro-resistivity Imaging Tool for Oil-based Mud | |
Tsan | Zinc oxide nanowires for dynamic strain sensing | |
Skvortsov et al. | Electrically stimulated movement of edge dislocations in silicon in the temperature range 300–450 K |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20151110 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20151110 |
|
RD13 | Notification of appointment of power of sub attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7433 Effective date: 20160628 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A821 Effective date: 20160629 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20161028 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20161108 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20170208 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20170411 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20170428 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6140181 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |