JP2015224131A - Unwinding device of long-size resin film, surface treatment device and manufacturing method of resin film with metallic film - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an unwinding device of a long-size resin film, a surface treatment device and a manufacturing method of a resin film with a metallic film capable of efficiently eliminating static electricity due to peeling electrification between a long-size resin film F unwound from an unwinding roll 52 disposed in a decompression chamber and a long-size resin film wound on the unwinding roll.SOLUTION: An unwinding device of a long-size resin film includes a gas blow-out means for blowing gas against a film peeling part provided on a peeling surface side space part 81 of a film peeling part 80 in which long size resin film is unwound from an unwinding roller and is constituted with a plurality of gas blow-out port groups or a single long-size gas blow-out port provided along the width direction of such a long-size resin film that the gas blow-out port 70 of the gas blow-out means is unwound such that static electricity due to peeling electrification between the long-size resin film unwound from the unwinding roll and the long-size resin film wound onto the unwinding roll is eliminated.

Description

  The present invention relates to an unwinding apparatus for a long resin film that includes an unwinding roll around which a long resin film is wound in a vacuum chamber, and unwinds the long resin film from the unwinding roll to the winding roll. In particular, a long resin film unwinding device that can efficiently remove static electricity due to peeling electrification between the long resin film unwound from the unwinding roll and the long resin film wound around the unwinding roll is incorporated with this device. The present invention relates to a surface treatment apparatus and a method for producing a resin film with a metal film.

  In a liquid crystal panel, a notebook computer, a digital camera, a mobile phone, and the like, a flexible wiring board in which a wiring pattern is formed on a long resin film is used. This flexible wiring board can be obtained by subjecting a resin film with a metal film, in which a metal film is formed on one or both sides of a long resin film, to a patterning process using a thin film technique such as photolithography or etching. In recent years, the wiring pattern of a flexible wiring board has been increasingly miniaturized and densified, and accordingly, a high-quality resin film with a metal film that does not contain impurities is required.

  As a manufacturing method of this type of resin film with a metal film, conventionally, a method in which a metal foil is attached to a long resin film with an adhesive (manufacturing method of a three-layer substrate), a resin solution is coated on the metal foil. Thereafter, a method of producing by drying (casting method), a method of producing a metal film on a long resin film by a vacuum film-forming method alone, or a combination of a vacuum film-forming method and a wet plating method ( Metallizing method) is known.

  In the metallizing method, a vacuum deposition method, a sputtering method, an ion plating method, an ion beam sputtering method or the like is used as the vacuum film forming method. For example, Patent Document 1 describes a method in which chromium is sputtered onto a polyimide insulating layer to form a chromium layer, and then copper is sputtered to form a conductor layer made of copper. Among these, chromium is known as a metal having corrosion resistance to acids and the like.

  Patent Document 2 discloses an unwinding / winding-up (roll-to-roll) vacuum sputtering apparatus called a sputtering web coater as an apparatus for continuously forming a film on a long resin film by a vacuum film forming method. Is disclosed. This unwinding / winding-type vacuum sputtering apparatus is provided with a cooling roll (also referred to as a cooling can roll) that winds and cools a long resin film conveyed by roll-to-roll. If such a sputtering web coater is used, it becomes possible to produce the resin film with a metal film by the process by a continuous metalizing method.

  By the way, in a vacuum sputtering apparatus in which a long resin film is conveyed by roll-to-roll, when the long resin film wound around the unwinding roll is peeled off and unwound from the unwinding roll, or the long resin film When transported while in contact with the transport roll, static electricity may be charged to the long resin film due to peeling or friction, and a defect occurs in the long resin film during transport of the long resin film. It has been found that there is a high possibility that various problems such as scratches on the long resin film and winding of the long resin film into the roll occur.

  Patent Document 3 describes that even when a long resin film is conveyed by roll-to-roll in a vacuumed vacuum chamber, static electricity charged on the long resin film can be removed by blowing gas toward the long resin film. It is shown.

Japanese Patent Laid-Open No. 2-98994 Japanese Patent Laid-Open No. 62-247073 JP 2009-181938 A

  By adopting the method of Patent Document 3 in which gas is blown toward the long resin film transported in the decompression chamber, static electricity due to frictional charging between the long resin film and the transport roll can be eliminated. The effect was insufficient to neutralize static electricity due to peeling charging between the long resin film unwound from the unwinding roll and the long resin film wound around the unwinding roll. This is because peeling charge accumulates on the unwinding-side raw material roll (unwinding roll), so that the longer the resin film is, the longer it becomes possible to eliminate static electricity even if the gas is blown toward the long resin film. it was thought.

  On the other hand, in the case of an electric force line type (for example, voltage application method such as AC type or DC type) static elimination device that can be eliminated without using gas in a vacuumed vacuum chamber, a long ultraviolet resin film, The effect of removing static electricity due to frictional charging of the transport rolls was not sufficient, and there was almost no effect of removing static electricity due to peeling charging.

  This invention was made paying attention to such a problem, The place made into the subject is peeling between the long resin film unwound from the unwinding roll, and the long resin film wound around the unwinding roll An object of the present invention is to provide an unwinding device for a long resin film from which static electricity due to electrification is efficiently removed and a surface treatment device in which this device is incorporated, and also to provide a method for producing a resin film with a metal film.

  Then, as a result of the present inventor's intensive studies to solve the above-mentioned problems, the film peeling portion is formed on the peeling surface side space portion of the film peeling portion where the long resin film is unwound from the raw material roll (that is, the unwinding roll). It has been found that the static electricity of the long resin film due to peeling electrification can be efficiently eliminated by providing the gas blowing means for blowing the gas toward the surface.

That is, the first invention according to the present invention is:
In the unwinding apparatus for the long resin film, the unwinding roll around which the long resin film is wound is provided in the decompression chamber, and the long resin film is unwound from the unwinding roll toward the winding roll.
A gas blowing means for blowing gas toward the film peeling portion is provided in the peeling surface side space portion of the film peeling portion from which the long resin film is unwound from the unwinding roll, and the gas blowing port of the gas blowing means is wound. A long resin film unwound from an unwinding roll, composed of a plurality of gas blowout port groups or a single long gas blowout port provided along the width direction of the long resin film It is characterized in that static electricity due to peeling electrification between long resin films wound around a roll is removed.

In addition, the second invention,
In the unwinding apparatus for the long resin film according to the first invention,
A touch roll whose outer peripheral surface is in contact with the upper surface of the long resin film conveyed between the unwinding roll and the nearest downstream roll located next to the unwinding roll, and a touch roll in contact with the long resin film A detachable holding member, and a connecting member that connects the gas blowing port of the gas blowing unit and the touch roll, and is displaced according to the unwinding supply amount of the long resin film. The gas blowing port of the gas blowing means is made to follow the positional relationship between the film peeling portion and the gas blowing port is maintained substantially constant,
The third invention is
In the unwinding device for the long resin film according to the second invention,
A long resin film conveyed between the unwinding roll and the nearest downstream roll is provided in the vicinity of both ends in the width direction, and the rotation center axis of the touch roll is slidably engaged. The holding member is constituted by a pair of rail-shaped guide portions having a gap portion,
The fourth invention is:
In the unwinding device for the long resin film according to the second invention,
The holding member is supported by a pair of arm portions having a support portion rotatably supporting the rotation center axis of the touch roll on the distal end side, the base end side being rotatably fixed, and the distal end side being swung vertically. It is composed of
The fifth invention is:
In the unwinding apparatus for the long resin film according to the first invention,
The gas discharged from the gas outlet is an inert gas,
The sixth invention is:
In the unwinding device for the long resin film according to the fifth invention,
The inert gas is an argon gas.

Next, the seventh invention
A decompression chamber, an unwinding device for unwinding a long resin film from the unwinding roll provided in the decompression chamber to the winding roll, and a roll-to-roll transport provided between the unwinding roll and the winding roll. In the surface treatment apparatus provided with the surface treatment means for performing the surface treatment on the long resin film,
The unwinding device is constituted by the unwinding device for a long resin film described in any one of the first to sixth inventions,
The eighth invention
In the surface treatment apparatus according to the seventh invention,
The surface treatment means is constituted by a sputtering film forming means.

In addition, the ninth invention,
In the method for producing a metal film-attached resin film in which a metal film is formed on at least one surface of the long resin film without an adhesive layer,
A metal film is formed on at least one surface of the long resin film using the surface treatment apparatus according to the eighth invention,
The tenth invention is
In the method for producing a resin film with a metal film according to the ninth invention,
A seed layer is formed on at least one surface of the long resin film, and a copper layer is formed on the surface of the seed layer.

According to the long resin film unwinding device described in the first invention,
A gas blowing means for blowing gas toward the film peeling portion is provided in the separation surface side space portion of the film peeling portion where the long resin film is unwound from the unwinding roll, and the gas blowing port of the gas blowing means is unwound. It is composed of a plurality of gas outlet groups provided along the width direction of the long resin film or a single long gas outlet, and the long resin film and the unwinding roll are unwound from the unwinding roll. Since static electricity due to peeling electrification between the wound long resin films is neutralized, it is possible to prevent the above-described defects of the long resin film generated by charging.

Furthermore, according to the unwinding device for the long resin film described in the second invention,
A touch roll whose outer peripheral surface is in contact with the upper surface of the long resin film conveyed between the unwinding roll and the nearest downstream roll located next to the unwinding roll, and a touch roll in contact with the long resin film A gas blower is provided to a film peeling portion that is provided with a holding member that is movably held in the vertical direction and a connecting member that connects the gas blowout port of the gas blowout means and the touch roll, and is displaced according to the supply amount of the long resin film. Since the positional relationship between the film peeling part and the gas blowing port is kept substantially constant by following the gas blowing port of the means, the raw material roll that changes according to the unwinding supply amount of the long resin film It is possible to obtain a substantially equivalent charge eliminating effect regardless of the (unwinding roll) diameter.

Explanatory drawing which shows schematic structure of the vacuum film-forming apparatus (sputtering web coater) of the roll-to-roll system in which the unwinding apparatus which concerns on this invention was integrated. FIG. 2A is an operation explanatory view of the unwinding apparatus according to the present invention in which the gas blowing port of the gas blowing means follows the film peeling portion displaced according to the unwinding supply amount of the long resin film, and FIG. FIG. 2B is an operation explanatory diagram when the roll (unwinding roll) diameter is large, and FIG. 2B is an operation explanatory diagram when the raw material roll (unwinding roll) diameter is reduced according to the unwinding supply amount of the long resin film. FIG. 3 is an operation explanatory view of the unwinding device according to the modification of the present invention in which the gas blowing port of the gas blowing means follows the film peeling portion that is displaced according to the unwinding supply amount of the long resin film. ) Is an explanatory diagram of the action when the diameter of the raw material roll (unwinding roll) is large, and FIG. 3B is an explanation of the action when the diameter of the raw material roll (unwinding roll) is reduced according to the unwinding supply amount of the long resin film. Figure.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

(1) Roll-to-roll vacuum film forming apparatus incorporating the unwinding apparatus of the present invention About a surface treatment apparatus incorporating the unwinding apparatus of the present invention, a roll-to-roll vacuum film forming apparatus (sputtering web coater) Will be described as an example.

  As shown in FIG. 1, the vacuum film forming apparatus (sputtering web coater) 50 is formed in a vacuum chamber (decompression chamber) 51 and conveyed from an unwinding roll (raw material roll) 52 toward a winding roll 64. It is an apparatus for performing a sputtering film forming process while winding a long resin film F as a film substrate around a can roll 56 and cooling it, and a resin film with a metal film can be continuously produced. Here, the raw material roll means a roll around which the long resin film F before the surface treatment is wound.

More specifically, the vacuum chamber (decompression chamber) 51 is provided with various exhaust means such as a dry pump, a turbo molecular pump, and a cryocoil (not shown), and reaches the inside of the vacuum chamber (decompression chamber) 51. After reducing the pressure to about 10 ⁻⁴ Pa, an inert gas such as argon gas, nitrogen gas or helium gas or a sputtering gas such as oxygen gas added according to the purpose is introduced to reduce the pressure to about 0.1 to 10 Pa. It can be adjusted. The shape and material of the vacuum chamber (decompression chamber) 51 are not particularly limited as long as they can withstand the above-described depressurized state, and various types can be used.

  In the vacuum chamber (decompression chamber) 51, various rolls that demarcate the transport path of the long resin film F are provided. In the conveyance path from the unwinding roll (raw material roll) 52 to the can roll 56, a free roll (next to the unwinding roll 52) that guides the long resin film F unwound from the unwinding roll (raw material roll) 52. 53, which corresponds to the nearest downstream roll positioned), a tension sensor roll 54 for measuring the tension of the long resin film F, and a motor for introducing the long resin film F fed from the tension sensor roll 54 into the can roll 56 Drive feed rolls 55 are arranged in this order.

  In the same way as described above, a motor-driven feed roll 61 that adjusts the peripheral speed of the can roll 56 and a tension sensor roll 62 that measures the tension of the long resin film F are also provided on the conveyance path from the can roll 56 to the take-up roll 64. And the free roll 63 which guides the long resin film F is arrange | positioned in this order.

  In the unwinding roll 52 and the winding roll 64, torque control is performed by a powder clutch or the like, whereby the tension balance of the long resin film F is maintained. In the can roll 56 that is rotationally driven by a motor, a refrigerant circulates in the interior in order to cool the long resin film F that is heated by a sputtering process with a heat load. The rotation speeds of the feed rolls 55 and 61 are adjusted with respect to the peripheral speed of the can roll 56, whereby the long resin film F can be brought into close contact with the outer peripheral surface of the can roll 56 and conveyed.

  Four magnetron sputtering cathodes 57, 58, 59, and 60 are provided in this order along the conveyance path of the long resin film F at a position facing the outer peripheral surface of the can roll 56. Each of these magnetron sputtering cathodes 57 to 60 has a target (not shown) attached to the surface facing the outer peripheral surface of the can roll 56, and sputtered particles sputtered from these targets are long resin. A metal film is formed by depositing on the surface of the film F.

(2) Unwinding device for long resin film according to the present invention incorporated in a vacuum film forming apparatus Unwinding unit 75 for unwinding long resin film F related to vacuum film forming apparatus (sputtering web coater) 50 A gas blowing means for blowing gas toward the film peeling portion 80 is provided in the peeling surface side space portion 81 of the film peeling portion 80 where the long resin film F is unwound from the roll 52, and the long resin film F The gas blowing port 70 of the gas blowing means is constituted by a plurality of gas blowing groups or a single long gas blowing port (not shown) provided along the width direction. Further, the gas outlet 70 composed of a plurality of gas outlet groups or a single long gas outlet is connected to a touch roll 71 whose outer peripheral surface is in contact with the upper surface of the long resin film F, and is long. The positional relationship between the film peeling unit 80 and the gas blowing port 70 is kept substantially constant by causing the gas blowing port 70 of the gas blowing means to follow the film peeling unit 80 that is displaced according to the unwinding supply amount of the resin film F. It has come to be.

  And by blowing gas toward the film peeling part 80 from which the long resin film F is unwound from the gas blowing means, the long resin film F unwound from the unwinding roll 52 and the unwinding roll 52 are wound. It is possible to eliminate static electricity caused by peeling charging between the long resin films F. Furthermore, since the gas blowing means is provided in the separation surface side space portion 81 of the film peeling portion 80 where the long resin film F is unwound, not only the long resin film F but also a raw material roll (unwinding roll) The gas is also blown onto the gas 52, so that the peeling charge accumulated in the raw material roll (unwinding roll) 52 can be alleviated and the charge can be effectively removed. In order to provide such a charge removal function, the gas blowing means needs to be provided in the separation surface side space portion 81 of the film peeling portion 80, and is opposite to the peeling surface of the film peeling portion 80 [the winding shown in FIG. It is not installed on the upper side of the take-out roll (raw material roll) 52].

  Moreover, the gas sprayed toward the film peeling part 80 from which the long resin film F is unwound is introduced from the outside of the vacuum chamber (decompression chamber) 51, and examples of the gas include argon gas, nitrogen gas, and helium gas. Inert gas is preferable, and argon gas is more preferable. The flow rate of the introduced gas is appropriately adjusted according to the charging potential allowed for the long resin film F, but is preferably 300 sccm to 1500 sccm. As a matter of course, the flow rate of the introduced gas is preferably set as small as possible in order to reduce the load on the exhaust means connected to the vacuum chamber (decompression chamber) 51.

  By the way, since the diameter of the raw material roll (unwinding roll) 52 changes (gradually decreases) according to the unwinding supply amount of the long resin film F, the film peeling portion is always used regardless of the diameter of the raw material roll (unwinding roll) 52. It is desirable that gas be blown to 80. For this reason, the gas blowing port 70 of the gas blowing means is connected to the touch roll 71 whose outer peripheral surface is in contact with the upper surface of the long resin film F as described above, and the positional relationship between the film peeling portion 80 and the gas blowing port 70 is It is held substantially constant.

  That is, as shown in FIGS. 2 (A) and 2 (B), it is transported between an unwinding roll (raw material roll) 52 and a free roll (nearest downstream roll) 53 located next to the unwinding roll 52. A touch roll 71 whose outer peripheral surface is in contact with the upper surface of the long resin film F, a holding member 90 that holds the touch roll 71 in contact with the long resin film F so as to be movable in the vertical direction, and a gas blowing port of the gas blowing means 70 and the touch roll 71 are connected to each other, and the gas peeling port 80 is made to follow the gas peeling port 80 with respect to the film peeling unit 80 which is displaced according to the supply amount of the long resin film F. The positional relationship with the mouth 70 is kept substantially constant. The touch roller 71 is movable in the vertical direction by its own weight in FIGS. With this configuration, the relative positional relationship between the gas outlet 70 and the touch roller 71 is always constant, and the touch roller 71 rides on the long resin film F by its own weight, so that a raw material roll (unwinding roll) Even if the diameter of 52 changes and the conveyance position of the long resin film F changes, the touch roller 71 moves, and the positional relationship between the gas outlet 70 and the film peeling portion 80 where the long resin film F is unwound is as follows. It can arrange | position so that it may become substantially constant. Furthermore, by attaching a mechanism for finely adjusting the gas discharge direction of the gas outlet 70 in accordance with the position of the touch roller 71, a film peeling portion corresponding to a change in the diameter of the raw material roll (unwinding roll) 52 It is more preferable because the gas can be blown to the optimum position even for 80 movements.

  As the holding member 90 that holds the touch roller 71 so as to be movable in the vertical direction, a free roll (raw material roll) 52 and a free roll positioned next to the unwind roll 52 as shown in FIGS. Centered on the long resin film F conveyed between the rolls (nearest downstream rolls) 53, each is provided in the vicinity of both ends in the width direction, and the rotation center axis of the touch roll 71 is slidably engaged. The method of comprising by a pair of rail-shaped guide part 72 which comprises the clearance gap part to perform can be illustrated. As another embodiment, as shown in FIGS. 3A and 3B, the distal end side 77 has a support portion for rotatably supporting the rotation center axis of the touch roll 71 and the proximal end side 78 is rotatable. A method in which the distal end side 77 is configured by a pair of arm portions 73 that are fixed to the top and swings in the vertical direction is exemplified. In addition, the method of changing the position of the gas blower outlet 70 according to the displacement of the long resin film F using the said touch roller 71 is not limited to the said method naturally.

(3) Manufacturing Method of Resin Film with Metal Film By using the vacuum film forming apparatus (sputtering web coater) 50, a high-quality resin film with a metal film that is not affected by charging of the long resin film F is manufactured. be able to. For example, by attaching a nickel-based alloy target to the sputtering cathode 57 shown in FIG. 1 and attaching a copper target to the sputtering cathodes 58 to 60, an adhesive layer is not provided on at least one surface of the long resin film F. A high-quality resin film with a metal film in which a film made of a nickel-based alloy or the like and a copper film are laminated can be manufactured.

  In addition, when it is desired to further increase the thickness of the metal film obtained by the sputtering film formation, the metal film can be further laminated by performing a wet plating process after the sputtering film formation. When performing such a wet plating process, a combination of forming a metal film only by an electroplating process and a wet plating method such as an electroless plating process as a primary plating and an electrolytic plating process as a secondary plating, etc. Sometimes. Various conditions of a general wet plating method can be employed for the wet plating process.

  And the flexible wiring board used for a liquid crystal television, a mobile telephone, etc. can be obtained by patterning using the subtractive method etc. with respect to the resin film with a metal film manufactured by the said method. The subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  Next, for the long resin film F, a resin film such as a polyethylene terephthalate (PET) film or a heat resistant resin film such as a polyimide film can be used. In particular, a heat resistant resin film is suitable for the resin film with a metal film, and specifically, a polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate system. A film, a liquid crystal polymer film and the like are preferable. This is because these heat-resistant resin films have flexibility as a flexible substrate with a metal film, strength necessary for practical use, and electrical insulation suitable as a wiring material.

  By the way, a film made of Ni alloy or the like is called a seed layer, and various known metals and alloys such as chromium, inconel, Ni—Cr alloy, constantan, or monel can be used, and the composition thereof is a resin film with a metal film. It is appropriately selected according to desired characteristics such as electrical insulation and migration resistance.

  Examples of the present invention will be specifically described below with reference to comparative examples.

[Example 1]
A vacuum film forming apparatus (sputtering web coater) 50 shown in FIG. 1 is prepared, a “Ni-20 mass% Cr alloy target” is attached to the sputtering cathode 57, and a “Cu target” is attached to the sputtering cathodes 58, 59, 60. Attached. Also, a polyimide film [trade name Kapton (registered trademark), manufactured by Toray DuPont Co., Ltd.] having a thickness of 38 μm is prepared as a long resin film, and “Ni-20 mass% Cr alloy film” is 10 nm. It was set so that a “copper film” of 100 nm was laminated on the surface.

  After making the inside of the vacuum chamber (decompression chamber) 51 into a reduced pressure atmosphere, the long resin film F was conveyed by roll-to-roll, wound around the outer peripheral surface of the can roll 56, and sputter film formation was performed while cooling. At that time, as shown in FIGS. 2A and 2B, the flow rate of argon gas is changed from the blow-out port 70 toward the unwinding roll (raw material roll) 52 and the film peeling portion 80 of the long resin film F. While sprayed.

  At the position immediately before reaching the free roll (the latest downstream roll) 53 shown in FIG. 1, the charge amount of the long resin film F is measured using a non-contact sensor (surface potential meter KSD-0120 manufactured by Kasuga Electric Co., Ltd.). As a result of measurement, the charge amount decreased as the argon gas flow rate increased.

  Then, when the flow rate was 500 sccm, it decreased to within the control value ± 10 kV, and it was confirmed that there was almost no charge when the flow rate was 1500 sccm.

[Comparative Example 1]
2A and 2B, the direction of the gas outlet 70 is rotated counterclockwise by 120 °, and argon gas is released toward the film surface opposite to the peeling surface of the film peeling portion 80 in the long resin film F. It changed into the structure made to perform, it carried out similarly to Example 1 except having made gas blow only on the elongate resin film F, and performed the same measurement.

  Even in this case, although the charge removal effect of the charge amount was confirmed, 1000 sccm was required to reach the control value of ± 10 kV, and therefore, from the gas blowing port 70 arranged on the peeling surface side of the film peeling portion 80. It was confirmed that spraying argon gas had a larger static elimination effect and saved the amount of argon used. Furthermore, since the amount of argon gas introduced from the outside is saved, it has been confirmed that the load on the exhaust means is also reduced.

  According to the long resin film unwinding apparatus according to the present invention, static electricity due to peeling electrification between the long resin film unwound from the unwinding roll and the long resin film wound around the unwinding roll can be efficiently removed. Therefore, it has industrial applicability to be applied by being incorporated in a vacuum film forming apparatus (sputtering web coater) suitable for the production of a resin film with a metal film.

50 Vacuum deposition system (sputtering web coater)
51 Vacuum chamber (decompression chamber)
52 Unwinding roll 53 Free roll (nearest downstream roll)
54, 62 Tension sensor roll 55, 61 Feed roll 56 Can roll 57, 58, 59, 60 Magnetron sputtering cathode 63 Free roll 64 Take-up roll 70 Gas outlet 71 Touch roll 72 Rail-shaped guide part 73 Arm part 75 Unwind part 76 connecting member 77 distal end side 78 proximal end side 80 film peeling portion 81 peeling surface side space portion 90 holding member F long resin film

Claims (10)

In the unwinding apparatus for the long resin film, the unwinding roll around which the long resin film is wound is provided in the decompression chamber, and the long resin film is unwound from the unwinding roll toward the winding roll.
A gas blowing means for blowing gas toward the film peeling portion is provided in the peeling surface side space portion of the film peeling portion from which the long resin film is unwound from the unwinding roll, and the gas blowing port of the gas blowing means is wound. A long resin film unwound from an unwinding roll, composed of a plurality of gas blowout port groups or a single long gas blowout port provided along the width direction of the long resin film An unwinding device for a long resin film, wherein static electricity due to peeling electrification between long resin films wound around a roll is removed.   A touch roll whose outer peripheral surface is in contact with the upper surface of the long resin film conveyed between the unwinding roll and the nearest downstream roll located next to the unwinding roll, and a touch roll in contact with the long resin film A detachable holding member, and a connecting member that connects the gas blowing port of the gas blowing unit and the touch roll, and is displaced according to the unwinding supply amount of the long resin film. 2. The long resin according to claim 1, wherein the positional relationship between the film peeling portion and the gas blowing port is maintained substantially constant by following the gas blowing port of the gas blowing means. Film unwinding device.   A long resin film conveyed between the unwinding roll and the nearest downstream roll is provided in the vicinity of both ends in the width direction, and the rotation center axis of the touch roll is slidably engaged. The long resin film unwinding device according to claim 2, wherein the holding member is constituted by a pair of rail-shaped guide portions each having a gap portion.   The holding member is supported by a pair of arm portions having a support portion rotatably supporting the rotation center axis of the touch roll on the distal end side, the base end side being rotatably fixed, and the distal end side being swung vertically. It is comprised, The unwinding apparatus of the long resin film of Claim 2 characterized by the above-mentioned.   The long resin film unwinding device according to claim 1, wherein the gas discharged from the gas outlet is an inert gas.   6. The unwinding apparatus for a long resin film according to claim 5, wherein the inert gas is an argon gas. A decompression chamber, an unwinding device for unwinding a long resin film from the unwinding roll provided in the decompression chamber to the winding roll, and a roll-to-roll transport provided between the unwinding roll and the winding roll. In the surface treatment apparatus provided with the surface treatment means for performing the surface treatment on the long resin film,
The said unwinding apparatus is comprised by the unwinding apparatus of the long resin film in any one of Claims 1-6, The surface treatment apparatus characterized by the above-mentioned.   The surface treatment apparatus according to claim 7, wherein the surface treatment means includes a sputtering film formation means. In the method for producing a metal film-attached resin film in which a metal film is formed on at least one surface of the long resin film without an adhesive layer,
A method for producing a resin film with a metal film, comprising using the surface treatment apparatus according to claim 8 to form a metal film on at least one surface of a long resin film.   The method for producing a resin film with a metal film according to claim 9, wherein a seed layer is formed on at least one surface of the long resin film, and a copper layer is formed on the surface of the seed layer.

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