JP2015212994A5 - - Google Patents

Download PDF

Info

Publication number
JP2015212994A5
JP2015212994A5 JP2015092990A JP2015092990A JP2015212994A5 JP 2015212994 A5 JP2015212994 A5 JP 2015212994A5 JP 2015092990 A JP2015092990 A JP 2015092990A JP 2015092990 A JP2015092990 A JP 2015092990A JP 2015212994 A5 JP2015212994 A5 JP 2015212994A5
Authority
JP
Japan
Prior art keywords
nft
metal
containing layer
subjecting
conditions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015092990A
Other languages
English (en)
Other versions
JP2015212994A (ja
Filing date
Publication date
Priority claimed from US14/266,920 external-priority patent/US9305572B2/en
Application filed filed Critical
Publication of JP2015212994A publication Critical patent/JP2015212994A/ja
Publication of JP2015212994A5 publication Critical patent/JP2015212994A5/ja
Pending legal-status Critical Current

Links

Claims (5)

  1. 近接場トランスデューサ（ＮＦＴ）構造の少なくとも一部を形成する工程と；
    前記ＮＦＴの一部の少なくとも一方の表面上に材料を堆積させて金属含有層を形成する工程と；
    前記金属含有層に、前記ＮＦＴの一部の少なくとも一方の表面内への前記材料の少なくとも一部の拡散を引き起こす条件を施す工程と
    を含む方法。
  2. 前記金属含有層に、拡散を引き起こす条件を施す工程が、アニールを含む、請求項１に記載の方法。
  3. 前記アニールが、オーブンアニールまたはレーザーアニールを含む、請求項２に記載の方法。
  4. 近接場トランスデューサ（ＮＦＴ）構造の少なくとも一部を形成する工程と；
    前記ＮＦＴの少なくとも空気ベアリング表面上に材料を堆積させて金属含有層を形成する工程と；
    前記金属含有層に、前記ＮＦＴの一部の少なくとも一方の表面内への前記材料の少なくとも一部の拡散を引き起こす条件を施す工程と；
    前記金属含有層の少なくとも一部を取り除く工程と；および
    オーバーコート層を適用する工程と
    を含む方法。
  5. 近接場トランスデューサ（ＮＦＴ）構造の少なくとも一部を形成する工程と；
    前記ＮＦＴの少なくとも空気ベアリング表面上に材料を堆積させて金属含有層を形成する工程と；
    前記ＮＦＴの空気ベアリング表面上にはない金属含有層の一部を取り除く工程と；
    前記金属含有層に、前記ＮＦＴの一部の少なくとも一方の表面内への前記材料の少なくとも一部の拡散を引き起こす条件を施す工程と；
    前記金属含有層の少なくとも一部を取り除く工程と；および
    オーバーコート層を適用する工程
    を含む方法。
JP2015092990A 2014-05-01 2015-04-30 近接場トランスデューサ（ｎｆｔ）の一部を形成する方法およびそれによって形成された物品 Pending JP2015212994A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/266,920 2014-05-01
US14/266,920 US9305572B2 (en) 2014-05-01 2014-05-01 Methods of forming portions of near field transducers (NFTS) and articles formed thereby

Publications (2)

Publication Number Publication Date
JP2015212994A JP2015212994A (ja) 2015-11-26
JP2015212994A5 true JP2015212994A5 (ja) 2018-06-14

Family

ID=54355686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015092990A Pending JP2015212994A (ja) 2014-05-01 2015-04-30 近接場トランスデューサ（ｎｆｔ）の一部を形成する方法およびそれによって形成された物品

Country Status (4)

Country Link
US (3) US9305572B2 (ja)
JP (1) JP2015212994A (ja)
KR (1) KR101789600B1 (ja)
CN (1) CN105047204B (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6038843B2 (ja) * 2013-06-24 2016-12-07 シーゲイト テクノロジー エルエルシーＳｅａｇａｔｅ Ｔｅｃｈｎｏｌｏｇｙ ＬＬＣ 少なくとも１つの相互混合層を含む装置
US9548076B2 (en) 2013-11-08 2017-01-17 Seagate Technology Llc Magnetic devices with overcoats
US9620150B2 (en) * 2014-11-11 2017-04-11 Seagate Technology Llc Devices including an amorphous gas barrier layer
US9552833B2 (en) * 2014-11-11 2017-01-24 Seagate Technology Llc Devices including a multilayer gas barrier layer
US9741381B1 (en) 2015-05-28 2017-08-22 Seagate Technology Llc Near field transducers (NFTs) including a protective layer and methods of forming
US10971176B2 (en) 2019-02-21 2021-04-06 International Business Machines Corporation Tunnel magnetoresistive sensor with adjacent gap having chromium alloy seed layer and refractory material layer
US11377736B2 (en) 2019-03-08 2022-07-05 Seagate Technology Llc Atomic layer deposition systems, methods, and devices
US10643641B1 (en) * 2019-03-29 2020-05-05 Western Digital Technologies, Inc. Methods and apparatuses for localized annealing of sliders configured for heat assisted magnetic recording
US10910007B1 (en) * 2020-02-14 2021-02-02 Western Digital Technologies, Inc. Heat-assisted magnetic recording device capable of providing negative electrical potential at NFT
US11798581B1 (en) 2021-04-02 2023-10-24 Seagate Technology Llc Heat-assisted magnetic recording head with nanoparticles

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3050343C2 (de) 1980-04-25 1985-06-27 Stanislav Petrovič Dmitriev Einrichtung zur Elektronenbestrahlung von Objekten
US4898774A (en) 1986-04-03 1990-02-06 Komag, Inc. Corrosion and wear resistant magnetic disk
US5482611A (en) 1991-09-30 1996-01-09 Helmer; John C. Physical vapor deposition employing ion extraction from a plasma
DE4200235C1 (ja) 1992-01-08 1993-05-06 Hoffmeister, Helmut, Dr., 4400 Muenster, De
JP3407548B2 (ja) 1996-03-29 2003-05-19 株式会社日立製作所 イオン打込み装置及びこれを用いた半導体製造方法
AU3224297A (en) 1996-05-31 1998-01-05 Akashic Memories Corporation Highly tetrahedral amorphous carbon films and methods for their production
US6312766B1 (en) 1998-03-12 2001-11-06 Agere Systems Guardian Corp. Article comprising fluorinated diamond-like carbon and method for fabricating article
US6130436A (en) 1998-06-02 2000-10-10 Varian Semiconductor Equipment Associates, Inc. Acceleration and analysis architecture for ion implanter
EP1069809A1 (en) 1999-07-13 2001-01-17 Ion Beam Applications S.A. Isochronous cyclotron and method of extraction of charged particles from such cyclotron
US6632483B1 (en) 2000-06-30 2003-10-14 International Business Machines Corporation Ion gun deposition and alignment for liquid-crystal applications
US6589676B1 (en) 2000-07-25 2003-07-08 Seagate Technology Llc Corrosion resistant magnetic thin film media
US6641932B1 (en) 2000-09-05 2003-11-04 Seagate Technology, Llc Magnetic thin film media with chromium capping layer
JP4184668B2 (ja) 2002-01-10 2008-11-19 富士通株式会社 Ｃｐｐ構造磁気抵抗効果素子
DE602006014454D1 (de) 2006-12-28 2010-07-01 Fond Per Adroterapia Oncologic Ionenbeschleunigungssystem für medizinische und/oder andere anwendungen
US7544958B2 (en) 2007-03-23 2009-06-09 Varian Semiconductor Equipment Associates, Inc. Contamination reduction during ion implantation
US20100190036A1 (en) 2009-01-27 2010-07-29 Kyriakos Komvopoulos Systems and Methods for Surface Modification by Filtered Cathodic Vacuum Arc
DE102009032275A1 (de) 2009-07-08 2011-01-13 Siemens Aktiengesellschaft Beschleunigeranlage und Verfahren zur Einstellung einer Partikelenergie
US7998607B2 (en) 2009-07-31 2011-08-16 Hitachi Global Storage Technologies Netherlands, B.V. Partially-oxidized cap layer for hard disk drive magnetic media
US8351151B2 (en) 2010-11-02 2013-01-08 Hitachi Global Storage Technologies Netherlands B.V. Thermally assisted magnetic write head employing a near field transducer (NFT) having a diffusion barrier layer between the near field transducer and a magnetic lip
US20130164454A1 (en) 2011-04-07 2013-06-27 Seagate Technology Llc Methods of forming layers
EP2568305B1 (en) 2011-09-09 2016-03-02 Crocus Technology S.A. Magnetic tunnel junction with an improved tunnel barrier
US9880232B2 (en) 2012-03-14 2018-01-30 Seagate Technology Llc Magnetic sensor manufacturing
US8514673B1 (en) 2012-04-24 2013-08-20 Seagate Technology Llc Layered near-field transducer
US9281003B2 (en) * 2012-04-25 2016-03-08 Seagate Technology Llc Devices including near field transducer and adhesion layers
US8902719B2 (en) 2012-04-25 2014-12-02 Seagate Technology Llc Heat assisted magnetic recording heads having bilayer heat sinks
US8945731B2 (en) 2012-06-29 2015-02-03 Seagate Technology Llc Interlayer for device including NFT and cladding layers
US20140113160A1 (en) 2012-10-18 2014-04-24 Seagate Technology Llc Articles including intermediate layer and methods of forming
US9047908B2 (en) 2013-04-23 2015-06-02 HGST Netherlands B.V. Heat-assisted magnetic recording (HAMR) head with diffusion barrier between waveguide core and write pole lip
US9281002B2 (en) * 2013-06-24 2016-03-08 Seagate Technology Llc Materials for near field transducers and near field transducers containing same
US8971161B2 (en) 2013-06-24 2015-03-03 Seagate Technology Llc Devices including at least one adhesion layer and methods of forming adhesion layers
JP2015056653A (ja) * 2013-09-13 2015-03-23 株式会社東芝 記憶装置
US9099111B2 (en) * 2013-12-18 2015-08-04 HGST Netherlands B.V. Heat assisted magnetic recording head employing noble metal alloy as diffusion barrier layer

Similar Documents

Publication Publication Date Title
JP2015212994A5 (ja)
JP2014237545A5 (ja)
JP2015173104A5 (ja) 剥離方法
EP3490146A4 (en) METHOD FOR PRODUCING A COMPOSITE SUBSTRATE FOR A SURFACE ACOUSTIC SHAFT DEVICE AND SURFACE ACOUSTIC SHAFT DEVICE WITH A COMPOSITE SUBSTRATE
JP2017050574A5 (ja) ダイシングテープ加熱装置及びダイシングテープ加熱方法
WO2017067813A3 (en) A method of manufacturing a pellicle for a lithographic apparatus, a pellicle for a lithographic apparatus, a lithographic apparatus, a device manufacturing method, an apparatus for processing a pellicle, and a method for processing a pellicle
JP2016001457A5 (ja) 電子機器及びその作製方法
WO2016014439A3 (en) Forming enhancement mode iii-nitride devices
JP2015518270A5 (ja)
FR2981346B1 (fr) Procede de traitement thermique de couches d'argent
TW201611908A (en) Substrate processing method, substrate processing apparatus, substrate processing system and recording medium
JP2016508106A5 (ja)
EP3450394A4 (en) METHOD FOR PRODUCING SIC SUBSTRATE HAVING GRAPHENE PRECURSOR AND METHOD FOR SURFACE TREATMENT OF SIC SUBSTRATE
JP2018518013A5 (ja) 流体導管が埋め込まれた半導体製造装置及び導管の形成方法
JP2016507642A5 (ja)
JP2016095504A5 (ja)
TWI455901B (zh) 強化玻璃之加工方法及強化玻璃用加工裝置
FR2957280B1 (fr) Procede de fabrication d'un complexe metallique
JP2016540360A5 (ja) 基板処理システム及び基板処理方法
JP2015143837A5 (ja) トナーおよびトナーの製造方法
JP2019522335A5 (ja)
JP2015530630A5 (ja)
JP2015076119A5 (ja)
JP2017228734A5 (ja)
EP3424628A4 (en) METHOD FOR MANUFACTURING MECHANICAL ELEMENTS, DEVICE FOR MANUFACTURING MECHANICAL ELEMENTS, METHOD FOR TREATING ROTATIONAL SYMMETRIC SURFACE, AND RECORDING MEDIUM AND PROGRAM