JP2015206431A - Plug valve, liquid supply method, liquid supply device, and coating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plug valve capable of suppressing flowing of foreign matters, a liquid supply method, a liquid supply device, and a coating device.SOLUTION: A plug valve capable of closing a liquid supply passage by rotational motion of a plug member mounted on a valve body, is provided. The plug member includes a plug-side groove portion formed on its outer surface. The valve body includes a liquid inflow port for allowing a liquid to flow inside, a liquid outflow port for allowing the liquid to flow out to the external, and a body-side groove portion opposed to the outer surface of the plug member. A part between the liquid inflow port and the liquid outflow port, and the body-side groove portion is switched between a first state in which the part between the liquid inflow port and the liquid outflow portion, and the body-side groove portion is bypassed by the plug-side groove portion, and a second state in which the part between the liquid inflow port and the liquid outflow port, and the body-side groove portion is not bypassed by the plug-side groove portion, according to the rotational motion of the plug member.

Description

  The present invention relates to a plug valve, a liquid supply method, a liquid supply apparatus, and a coating apparatus.

  A high-viscosity liquid such as a chemical solution requires a high pressure during ejection. Therefore, conventionally, a plug valve having excellent pressure resistance is known as such a high-viscosity liquid supply valve (see, for example, Patent Document 1). The plug valve includes a valve body and a plug member that is rotatably attached to the valve body. The plug valve rotates the plug member to connect the through-hole formed in the plug member and the liquid supply path provided in the valve body, so that the liquid can be supplied.

JP 2004-132469 A

  However, since the conventional plug valve has a structure in which foreign matter (liquid sediment or the like) easily accumulates in the gap between the plug member and the valve main body, when the liquid supply path is opened by the rotation of the plug member, the foreign matter There was a risk of flowing downstream.

  The present invention has been made in view of such problems, and an object thereof is to provide a plug valve, a liquid supply method, a liquid supply apparatus, and a coating apparatus that can suppress the inflow of foreign matter.

  According to the first aspect of the present invention, in the plug valve capable of closing the liquid supply path by the turning operation of the plug member attached to the valve body, the plug member includes a plug side groove formed on the outer surface. The valve body includes a liquid inflow port for allowing the liquid to flow into the interior, a liquid outflow port for allowing the liquid to flow out to the outside, and a body side groove facing the outer surface of the plug member, and the plug member A first state in which a space between the liquid inlet and the liquid outlet and the main body side groove is bypassed by the plug side groove, and the liquid inlet and the liquid outlet. There is provided a plug valve plug in which a second state in which the main body side groove is not bypassed by the plug side groove is switched.

  According to the plug valve according to the first aspect, the liquid held between the main body side groove and the plug side groove in the second state flows into the liquid outlet through the main body side groove and the plug side groove in the first state. Is done. Therefore, since the liquid is prevented from remaining in the gap between the plug member and the valve body, it is possible to suppress the occurrence of a problem that the foreign matter accumulated in the gap flows out from the liquid outlet.

In the first aspect, in the first state, the main body side groove and the plug side groove are arranged so as to cross each other, and in the second state, the main body side groove and the plug side groove are parallel to each other. It is good also as a structure arrange | positioned.
According to this configuration, the first state and the second state can be switched by rotating the plug member by 90 degrees.

In the first aspect, the valve main body may be configured such that at least the liquid inlet and the vicinity of the liquid outlet are made of resin.
According to this configuration, the liquid inlet and the vicinity of the liquid outlet can be easily pressed and deformed using, for example, a nut or the like.

In the first aspect, the valve main body may be configured such that the liquid inlet and the vicinity of the liquid outlet are pressed against the outer surface of the plug member.
According to this configuration, the contact state between the valve main body and the plug member can be easily adjusted by pressing and deforming the liquid inflow port and the vicinity of the liquid outflow port.

In the first aspect, the plug member includes a cylindrical member in which the plug-side groove is formed, the valve body has a curved cross-section of the body-side groove, and the outer peripheral surface of the cylindrical member is It is good also as a structure with a larger curvature radius than a main body side groove part.
According to this configuration, in the first state, the gap side is generated between the outer peripheral surface of the cylindrical member and the plug-side groove, so that the plug-side groove can function as a liquid flow path.

  According to the second aspect of the present invention, in a method of supplying liquid from a liquid supply source to a liquid supply destination by opening and closing a valve provided in a liquid supply path, the plug valve according to the first aspect is used as the valve. The liquid supply method used is provided.

  According to the liquid supply method according to the second aspect, since the liquid supply path is opened and closed using the plug valve according to the first aspect, the highly reliable liquid supply in which foreign matters are prevented from flowing into the liquid supply destination. Can provide a method.

  According to the third aspect of the present invention, in the liquid supply apparatus that supplies liquid from the liquid supply source to the liquid supply destination by opening and closing a valve provided in the liquid supply path, the plug according to the first aspect is used as the valve. A liquid supply apparatus having a valve is provided.

  According to the liquid supply apparatus according to the third aspect, since the liquid supply path is opened and closed using the plug valve according to the first aspect, a highly reliable apparatus in which foreign matters are prevented from flowing into the liquid supply destination. Can be provided.

  According to the fourth aspect of the present invention, an application unit that applies liquid to an object to be applied, a liquid supply path that supplies the liquid to the application part, and a valve that is provided in the liquid supply path, In the coating apparatus provided, a coating apparatus using the plug valve according to the first aspect as the valve is provided.

  According to the coating apparatus which concerns on a 4th aspect, since a liquid supply path is opened and closed using the plug valve which concerns on a 1st aspect, it is suppressed that the foreign material flows into an application part. Therefore, it is possible to provide a highly reliable coating apparatus that can suppress the occurrence of defects due to the inflow of foreign matter and can satisfactorily apply a liquid to an object.

  According to the present invention, the inflow of foreign matter to the downstream side can be suppressed.

The figure which shows schematic structure of a coating device. The sectional side view which shows schematic structure of a valve | bulb. (A), (b) is principal part sectional drawing of a valve | bulb, and the figure which shows operation | movement. The perspective view which shows schematic structure of a plug member. (A)-(c) is a figure which shows the structure of the valve | bulb which concerns on a modification. (A)-(c) is a figure which shows the structure of the plug member which concerns on a modification. (A), (b) is a figure which shows the structure and operation | movement of the valve | bulb which concern on a modification.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the present embodiment, a coating apparatus provided with a plug valve in a liquid supply path will be described as an example. The coating apparatus according to the present embodiment is for coating a chemical liquid (liquid) such as a photoresist having a relatively high viscosity and causing a foreign substance on a semiconductor substrate (wafer).
In addition, in the drawings used in the following description, in order to make the features easy to understand, there are cases where the portions that become the features are enlarged for the sake of convenience, and the dimensional ratios of the respective components are not always the same as the actual ones. Absent.

FIG. 1 is a diagram showing a schematic configuration of a coating apparatus.
As shown in FIG. 1, a coating apparatus 100 according to this embodiment includes a liquid supply source 10, a liquid supply path 11, a valve 20 that can close (open and close) the liquid supply path 11, and a semiconductor as an object to be coated. An application unit 40 for applying a liquid to the substrate 1 and a stage 50 for holding the semiconductor substrate 1 are provided.

  The liquid supply source 10 includes a storage tank that stores the liquid and a transfer pump that transfers the liquid from the storage tank. The liquid supply path 11 connects the liquid supply source 10 and the application unit 40, and supplies the liquid from the liquid supply source 10 side to the application unit 40. The valve 20 is provided in the middle of the liquid supply path 11. The liquid supply path 11 includes an upstream supply path 11 a that connects the valve 20 and the liquid supply source 10, and a downstream supply path 11 b that connects the liquid supply source 10 and the application unit 40. Examples of the application unit 40 include an inkjet head and a slit nozzle.

  FIG. 2 is a side sectional view showing a schematic configuration of the valve 20. 3 is a cross-sectional view of the main part of the valve 20. FIG. 3A shows a state in which the valve 20 closes the liquid supply path, and FIG. 3B shows a state in which the valve 20 opens the liquid supply path. It is shown.

  As shown in FIG. 2, the valve 20 is a so-called plug valve type valve, and includes a plug member 21 and a valve body 22. A drive device 30 for rotating the plug member 21 relative to the valve body 22 is attached to the plug member 21. As the drive device 30, for example, a conventionally known device such as an actuator or a motor device is employed. The drive device 30 has a rotating shaft 31 for rotating the plug member 21.

  FIG. 4 is a perspective view showing a schematic configuration of the plug member 21. As shown in FIG. 4, the plug member 21 is composed of a metal columnar member. The plug member 21 has an attachment hole 19 for attaching the rotating shaft 31 of the drive device 30 on one end surface side. The plug member 21 has a smaller outer diameter on the other end surface 21B side than on the one end surface 21A side.

  The plug member 21 has a pair of plug side grooves 24 and 25 formed on the outer peripheral surface 21a. The pair of plug-side groove portions 24 and 25 are formed so that the positions of the plug-side groove portions 24 and 25 are 180 degrees different from each other with respect to the outer peripheral surface 21a. The pair of plug side grooves 24 and 25 have the same shape. The pair of plug-side grooves 24 and 25 are formed along a direction intersecting the axial direction of the plug member 21, for example, a direction orthogonal to the present embodiment. The depths of the pair of plug-side grooves 24 and 25 are appropriately set according to the design requirements (liquid supply capability) of the valve 20.

  As shown in FIGS. 2 and 3, the valve main body 22 is constituted by a cylindrical member. In this embodiment, the valve body 22 is made of a resin material such as Duracon or UPE (ultra high molecular weight polyethylene).

  An insertion hole 32 for inserting the plug member 21, a liquid inflow path 36, and a liquid outflow path 37 are formed in the valve body 22. The liquid inflow path 36 and the liquid outflow path 37 are straight along a direction orthogonal to the axial direction of the valve body 22 (the radial direction of the cross-sectional shape) so as to connect the outer peripheral surface 22a of the valve body 22 and the insertion hole 32. Formed side by side.

The liquid inflow path 36 is a path for guiding the liquid from the liquid supply source 10 to the inside of the valve by being connected to the upstream supply path 11a. The liquid outflow path 37 is a path for guiding the liquid from the inside of the valve to the application unit 40 by being connected to the downstream supply path 11b.
Of the liquid inflow path 36, an opening communicating with the insertion hole 32 constitutes a liquid inflow port 36a, and among the liquid outflow path 37, an opening communicating with the insertion hole 32 constitutes a liquid outflow outlet 37a.

  The valve body 22 holds the plug member 21 via a bearing member 33 installed on the inner wall surface of the insertion hole 32. As a result, the plug member 21 can be easily rotated with respect to the valve body 22 by the driving device 30.

  A pair of seal members 26 and 27 are installed on the inner wall surface of the insertion hole 32 of the valve body 22. The pair of seal members 26 and 27 are disposed between the inner wall surface of the valve main body 22 and the outer peripheral surface of the valve main body 22, and examples thereof include an O-ring.

  A pair of pipe screws 38 and 39 are attached to the outer peripheral surface 22 a of the valve body 22. The inner surface of the pipe screw 38 constitutes a part of the liquid inflow path 36, and the inner surface of the pipe screw 39 constitutes a part of the liquid outflow path 37.

  A pair of main body side groove portions 34 and 35 corresponding to the plug side groove portions 24 and 25 are formed on the inner wall surface of the insertion hole 32 of the valve main body 22. The pair of main body side groove portions 34 and 35 are formed at substantially the same height as the plug side groove portions 24 and 25 of the plug member 21 inserted into the insertion hole 32 (see FIG. 2). Note that the main body side groove portions 34 and 35 and the plug side groove portions 24 and 25 are formed at substantially the same height, that the main body side groove portions 34 and 35 and the plug side groove portions 24 and 25 are at least partially overlapped in the height direction. Means that they can communicate with each other.

  The regions where the plug-side groove portions 24 and 25 and the body-side groove portions 34 and 35 are formed are sealed by the pair of seal members 26 and 27. That is, in the valve 20, leakage of the liquid flowing between the plug side grooves 24 and 25 and the main body side grooves is prevented by the seal members 26 and 27.

  In FIG. 3A, the plug side grooves 24 and 25 and the main body side grooves 34 and 35 are arranged in parallel to each other. At this time, the liquid inlet 36 a and the liquid outlet 37 a are closed by the outer peripheral surface 21 a of the plug member 21. Therefore, the liquid inflow port 36a and the liquid outflow port 37a are not bypassed (connected) by the plug side grooves 24 and 25 (second state) between the main body side grooves 34 and 35.

  In the present embodiment, the pipe screws 38 and 39 have nuts 27 and 28 attached to screw portions formed on the respective base portions 38a and 39a. The nuts 27 and 28 are in contact with the contact surface 22a1 formed on the outer peripheral surface 22a.

  In this embodiment, since the valve body 22 is made of a resin material such as Duracon or UPE as described above, when the nuts 27 and 28 are tightened into the screw portions (base portions 38a and 39a), the nuts 27 and 28 The contact surface 22a1 is displaced inward by being pressed. On the other hand, when the tightening by the nuts 27 and 28 is loosened, the inward displacement of the contact surface 22a1 is reduced.

  In this embodiment, by adjusting the tightening amount of the nuts 27 and 28, the contact surface 22a1 is pressed and displaced inward by a predetermined amount. Thereby, it is possible to easily adjust the contact state (sealed state) between the outer peripheral surface 21a of the plug member 21 and the liquid inlet 36a and the liquid outlet 37a. Furthermore, since the valve body 22 is made of resin, an increase in contact resistance with respect to the metal plug member 21 (insertion hole 32) is suppressed even when the contact surface 22a1 is displaced inward.

  Based on such a configuration, the valve 20 can smoothly rotate the plug member 21 inserted into the insertion hole 32 (see FIG. 2). Moreover, since the outer peripheral surface 21a, the liquid inflow port 36a, and the liquid outflow port 37a are in close contact with each other, the space S configured by the plug side groove portions 24 and 25 and the main body side groove portions 34 and 35 can be reliably sealed. Therefore, the liquid held in the space S does not flow into the liquid outflow path 37. Further, the liquid does not flow into the space S from the liquid inflow path 36.

  Thus, the valve 20 can close the liquid supply path 11 by rotating the plug member 21 as shown in FIG. 3A in order to realize the second state. Therefore, it is possible to block the flow of liquid from the upstream supply path 11a side to the downstream supply path 11b side.

  Here, returning to FIG. FIG. 3B shows a state where the position of the plug member 21 shown in FIG. 3A is rotated by 90 degrees. In FIG. 3B, the plug member 21 is rotated 90 degrees counterclockwise so that the plug side groove 24 faces the liquid inlet 36a and the plug side groove 25 faces the liquid outlet 37a. The case is illustrated.

  As shown in FIG. 3B, when the position of the plug member 21 is rotated 90 degrees counterclockwise, the plug-side groove portions 24 and 25 and the main body-side groove portions 34 and 35 are arranged so as to cross each other. The plug-side grooves 24 and 25 move to positions facing the liquid inlet 36a and the liquid outlet 37a, respectively, and the closed state of the liquid inlet 36a and the liquid outlet 37a by the outer peripheral surface 21a of the plug member 21 is released. . Therefore, the liquid inlet 36a and the liquid outlet 37a and the main body side grooves 34 and 35 are bypassed (connected) by the plug side grooves 24 and 25 (first state).

  The main body side grooves 34 and 35 are curved in cross section. In the present embodiment, the outer peripheral surface 21a of the plug member 21 made of a cylindrical member has a larger radius of curvature than the main body side grooves 34 and 35. Thereby, in the said 1st state, since a clearance gap arises between the outer peripheral surface 21a of the plug member 21, and the plug side groove parts 24 and 25, the plug side groove parts 24 and 25 can be functioned as a liquid flow path.

  Therefore, the liquid supplied from the upstream supply path 11 a flows into the plug-side groove portion 24 via the liquid inlet 36 a of the liquid inflow path 36. The liquid that has flowed into the plug-side groove 24 flows into the plug-side groove 25 via the main body-side grooves 34 and 35. The liquid that has flowed into the plug-side groove 25 flows from the liquid outlet 37a into the liquid outlet 37. The liquid that has flowed into the liquid outflow path 37 is supplied to the coating unit 40 via the downstream supply path 11b.

  Thus, according to the liquid supply method using the valve 20 and the valve 20 of the present embodiment, the liquid S is held in the space S configured by the plug side groove portions 24 and 25 and the main body side groove portions 34 and 35 in the second state. In the first state, the liquid can flow into the liquid outlet 37a through the main body side grooves 34 and 35 and the plug side grooves 24 and 25.

  That is, the valve 20 replaces the main body side groove portions 34 and 35 and the plug side groove portions 24 and 25 that constitute the liquid holding space (the space S) in the second state in which the liquid supply passage 11 is closed with the liquid supply passage 11. In the first state where the liquid is opened, the liquid inflow path 36 and the liquid outflow path 37 can be functioned as a liquid flow path.

  Therefore, it is possible to prevent the liquid from remaining in the gap (the space S) between the plug member 21 and the valve main body 22 for a long time in the second state. As a result, the generation of foreign matter due to the residual liquid in the gap is suppressed, and the occurrence of problems such as foreign matter flowing out from the liquid outlet 37a to the application unit 40 side (liquid supply destination) with the opening and closing of the valve 20 is suppressed. can do.

  The present invention is not limited to the above-described embodiment, and can be appropriately changed without departing from the spirit or idea of the invention that can be read from the claims and the entire specification. For example, in the above embodiment, the case where the entire valve body 22 is made of a resin material has been described as an example. However, the present invention is not limited to this, and only a part of the valve body 22 is made of a resin material. May be. For example, the valve main body 22 may be formed of a resin material at least in a portion that needs to be deformed to be pressed (in the vicinity of the liquid inlet and the liquid outlet), and the other portion may be formed of a metal material.

  Moreover, in the said embodiment, although the case where the plug valve of this invention was applied to the coating device 100 which supplies the liquid to the application part 40 via the liquid supply path 11 from the liquid supply source 10 was mentioned as an example, to this, There is no limit.

For example, the plug valve of the present invention may be applied as a valve that closes a liquid supply path of a liquid supply apparatus that supplies a predetermined liquid from a liquid supply source to factory production equipment (liquid supply destination). According to this, since the liquid can be supplied to the liquid supply destination by opening and closing the liquid supply path using the plug valve of the present invention, the reliability of the foreign matter flowing into the liquid supply destination is suppressed. A high liquid supply method can be provided. In addition, it is possible to provide a highly reliable liquid supply apparatus in which foreign matters are prevented from flowing into the liquid supply destination.
In this case, the type of liquid supplied to the liquid supply destination is not particularly limited, and any liquid may be used as long as it has a relatively high viscosity and may cause a foreign matter. The plug valve of the invention is preferred.

  Moreover, in the said embodiment, the contact surface 22a1 is pressed by adjusting the tightening amount of the nuts 27 and 28, and the outer peripheral surface 21a of the plug member 21, and the liquid inflow port 36a and the liquid outflow port 37a contact. Although the state is adjusted, the present invention is not limited to this.

Here, as a modified example of the valve, another mode for adjusting the contact state between the outer peripheral surface 21a of the plug member 21 and the liquid inlet 36a and the liquid outlet 37a will be described.
FIG. 5 is a diagram showing a schematic configuration of a valve according to a modification, FIG. 5 (a) is a valve according to a first modification, FIG. 5 (b) is a valve according to a second modification, 5 (c) is a valve according to a third modification. In FIG. 5, the same members and configurations as those of the above embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 5A, the valve 20 </ b> A according to the first modification is attached by screwing pipe screws 38 and 39 into the valve body 22. In this modification, the valve main body 22 has bolts 41 and 42 attached at positions corresponding to the main body side grooves 34 and 35. The bolts 41 and 42 are screwed into screw holes formed in the valve main body 22.

  Since the valve body 22 is made of a resin material such as Duracon or UPE as described above, the valve body 22 is pressed by the bolts 41 and 42 when the bolts 41 and 42 are screwed into screw holes (not shown). To move inward. On the other hand, when the screwing with the bolts 41 and 42 is loosened, the inward displacement of the valve body 22 is reduced.

  As described above, according to this modification, the valve main body 22 is displaced by screwing the bolts 41 and 42 into the valve main body 22, so that the outer peripheral surface 21 a of the plug member 21, the liquid inlet port 36 a and the liquid outlet port 37 a. The contact state (sealed state) with can be easily adjusted.

  Further, the valve 20B according to the second modification is attached by screwing pipe screws 38 and 39 into the valve body 22 as shown in FIG. The valve 20 </ b> B further includes a ring member 43 disposed so as to surround the outer periphery of the valve main body 22. The ring member 43 is configured by bending a plate-like member into a ring shape, and is fixed by a screw member 44 in a state where both end portions have a gap. The ring member 43 reduces the inner diameter of the ring member 43 by tightening the screw member 44, and increases the inner diameter of the ring member 43 by loosening the tightening of the screw member 44.

  The valve body 22 is made of a resin material such as Duracon or UPE as described above. Therefore, the valve main body 22 is pressed and displaced inward when the inner diameter of the ring member 43 is reduced by tightening the screw member 44. On the other hand, the valve body 22 is less displaced by increasing the inner diameter of the ring member 43 by loosening the tightening of the screw member 44.

  As described above, according to this modification, the valve main body 22 is displaced by screwing the screw member 44 of the ring member 43, whereby the outer peripheral surface 21a of the plug member 21, the liquid inlet port 36a, and the liquid outlet port 37a. The contact state (sealed state) can be easily adjusted.

  Further, the valve 20C according to the third modification is attached by screwing pipe screws 38 and 39 into the valve body 22 as shown in FIG. In addition, the valve main body 22 has nuts 46 and 47 screwed to threaded portions (not shown) provided on the outer surfaces of the pipe screws 38 and 39 through an O-ring 45.

  When the nuts 46 and 47 are screwed in, the O-ring 45 is pressed by being sandwiched between the nuts 46 and 47 and the valve body 22. Thereby, the valve body 22 is displaced by being pressed inward by the pressed O-ring 45. On the other hand, when the nuts 46 and 47 are loosened, the valve body 22 reduces the amount of pressing of the O-ring 45 and the displacement is reduced.

  As described above, according to the present modification, the valve body 22 is displaced by screwing the nuts 46 and 47 so that the outer peripheral surface 21a of the plug member 21 is in contact with the liquid inlet 36a and the liquid outlet 37a ( (Sealed state) can be easily adjusted.

  Moreover, the shape of a pair of plug side groove parts 24 and 25 formed in the outer peripheral surface 21a of the plug member 21 is not restricted to the form shown in FIG. 6A to 6C are views showing a cross-sectional configuration according to a modification of the plug-side groove.

  For example, the pair of plug side grooves 24 and 25 may have a curved surface shape as shown in FIG. 6A or a triangular shape as shown in FIG. Or a quadrangular shape as shown in FIG.

  Moreover, in the said embodiment, although the case where a pair of plug side groove parts 24 and 25 were formed in the outer peripheral surface 21a of the plug member 21 was mentioned as an example, the number of plug side groove parts is not limited to this, For example, 1 It may be individual.

  FIG. 7 is a cross-sectional view of a main part of a valve 120 according to a modified example. FIG. 7A shows a state in which the valve 120 closes the liquid supply path, and FIG. It shows the open state.

In the valve 120 according to this modification, only the plug-side groove portion 124 (corresponding to the plug-side groove portion 24) is formed on the outer peripheral surface 121a of the plug member 121.
In FIG. 7A, the plug-side groove portion 24 and the main body-side groove portions 34, 35 are arranged in a state where they intersect each other by a predetermined angle. At this time, the liquid outlet 37 a communicates with the main body side groove 34 via the plug side groove 124, but the liquid inlet 36 a is closed by the outer peripheral surface 121 a of the plug member 121. Therefore, the liquid inflow port 36a and the liquid outflow port 37a are not bypassed (connected) by the plug side groove portion 34 (second state) between the main body side groove portion 34.

  On the other hand, by rotating the plug member 121 by a predetermined angle, a state (first state) in which the liquid inlet 36a and the liquid outlet 37a are bypassed (connected) by the plug-side groove 124 between the main body-side groove 34 is set. Is possible.

  As shown in FIG. 7B, when the position of the plug member 121 is rotated counterclockwise by a predetermined angle, the plug side groove portions 24 and 25 and the main body side groove portions 34 and 35 are arranged in parallel to each other, and the plug member 121 The closed state of the liquid outlet 37 a by the outer peripheral surface 121 a is released, and the liquid inlet 36 a and the liquid outlet 37 a are communicated by the plug-side groove 124. Therefore, the liquid inflow port 36a and the liquid outflow port 37a and the main body side groove portion 34 are bypassed (connected) by the plug side groove portion 124 (first state).

  According to this modification shown in FIGS. 7A and 7B, the plug member 121 in which only the plug-side groove 124 is formed on the outer peripheral surface 121a can be used. Therefore, since the plug member 121 can be easily processed, the cost of the valve 120 can be reduced.

  In this modification, the case where the pair of main body side grooves 34 and 35 are formed in the valve main body 22 has been described as an example, but only one of the main body side grooves 34 and 35 may be formed. good. In this case, for example, when only the main body side groove portion 35 is formed, the rotation of the plug member 21 may be performed at a position rotated 180 degrees from the position shown in FIGS. .

DESCRIPTION OF SYMBOLS 1 ... Semiconductor substrate (to-be-coated object), 10 ... Liquid supply source, 11 ... Liquid supply path, 20, 20A, 20B, 20C, 120 ... Valve (plug valve), 21, 121 ... Plug member, 21a, 121a ... Outer periphery Surface, 22 ... Valve body, 24, 25, 124 ... Plug side groove, 26 ... Seal member, 34, 35, 134 ... Body side groove, 36 ... Liquid inflow path, 36a ... Liquid inflow path, 37 ... Liquid outflow path, 37a ... Liquid outlet, 40 ... Application unit, 100 ... Application device.

Claims (8)

In the plug valve capable of closing the liquid supply path by the rotation of the plug member attached to the valve body,
The plug member includes a plug-side groove formed on the outer surface,
The valve body includes a liquid inflow port through which the liquid flows in, a liquid outflow port through which the liquid flows out to the outside, and a main body side groove portion facing the outer surface of the plug member,
In accordance with the turning operation of the plug member,
A first state in which the liquid inlet and the liquid outlet and the main body side groove are bypassed by the plug side groove;
A plug valve in which the liquid inlet and the second state where the liquid outlet and the main body side groove are not bypassed by the plug side groove are switched. In the first state, the main body side groove and the plug side groove are arranged so as to cross each other,
The plug valve according to claim 1, wherein in the second state, the main body side groove and the plug side groove are arranged in parallel to each other. The plug valve according to claim 1 or 2, wherein the valve body is made of resin at least in the vicinity of the liquid inlet and the liquid outlet. The plug valve according to claim 3, wherein the valve main body is pressed against the outer surface of the plug member at a vicinity of the liquid inlet and the liquid outlet. The plug member includes a columnar member in which the plug side groove is formed,
The valve body has a curved cross section of the body side groove portion,
The plug valve according to any one of claims 1 to 4, wherein an outer peripheral surface of the columnar member has a radius of curvature larger than that of the main body side groove portion. In a method of supplying liquid from a liquid supply source to a liquid supply destination by opening and closing a valve provided in the liquid supply path,
The liquid supply method using the plug valve as described in any one of Claims 1-5 as said valve | bulb. In a liquid supply apparatus that supplies liquid from a liquid supply source to a liquid supply destination by opening and closing a valve provided in the liquid supply path,
The liquid supply apparatus provided with the plug valve as described in any one of Claims 1-5 as said valve | bulb. In an application apparatus comprising: an application unit that applies a liquid to an object to be applied; a liquid supply path that supplies the liquid to the application unit; and a valve that is provided in the liquid supply path.
The coating device using the plug valve as described in any one of Claims 1-5 as said valve | bulb.

Images