CN104999797A - Cock valve, liquid supplying method, liquid supplying device, and coating device - Google Patents
Cock valve, liquid supplying method, liquid supplying device, and coating device Download PDFInfo
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- CN104999797A CN104999797A CN201510133642.3A CN201510133642A CN104999797A CN 104999797 A CN104999797 A CN 104999797A CN 201510133642 A CN201510133642 A CN 201510133642A CN 104999797 A CN104999797 A CN 104999797A
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Abstract
The invention provides a cock valve capable of inhibiting flowing of foreign matters, a liquid supplying method, a liquid supplying device, and a coating device. The invention relates to the cock valve, which is used for sealing liquid by utilizing turning operation of a cock component installed on a main valve body. The cock component includes a cock side channel forming in an external surface. The main valve body includes: a liquid inlet enabling liquid to flow inside; a liquid outlet enabling liquid to flow outside; and a main body side channel arranged opposite to the external surface of the cock component. Moreover, turning operation of the cock valve and the cock component is correspondingly switched between a first state and a second state. In the first state, the liquid inlet together with the liquid outlet communicates with the cock side channel through the cock side channel; and in the second state, the liquid inlet together with the liquid outlet communicates with the cock side channel without through the cock side channel.
Description
Technical field
The present invention relates to plug valve, liquid supply method, fluid Supplying apparatus and applying device.
The application based on April 22nd, 2014 in No. 2014-088191, the Japanese Patent Application of Japanese publication and CLAIM OF PRIORITY, and here cite its content.
Background technology
The high viscosity liquids such as liquid need high pressure when discharging.To this, all the time, as the supply valve of such high viscosity liquid, there will be a known the plug valve (for example, referring to patent document 1) of resistance to pressure excellence.This plug valve possesses valve body and is rotatably installed on the cock component of valve body.And the through hole that plug valve makes to be formed at this cock component by making cock component rotate is communicated with the liquid supply road be located on valve body, thus can feed fluid.
At first technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2004-132469 publication
But, because foreign matter (sediment etc. of liquid) is accumulated in the gap of existing plug valve easily between cock component and valve body, therefore, when utilizing the rotation of cock component to open liquid supply road, the downstream of foreign matter possibility flow valves.
Summary of the invention
The present invention completes in view of above-mentioned problem, its object is to provide a kind of plug valve, liquid supply method, fluid Supplying apparatus and the applying device that foreign matter can be suppressed to flow into.
The invention provides a kind of plug valve, because this plug valve can prevent the gap of liquid residue between cock component and valve body, therefore, it is possible to suppress the undesirable condition that the foreign matter accumulating in gap flows out from liquid flowing outlet.In addition, the invention provides the liquid supply method that a kind of reliability is high, this liquid supply method uses described plug valve to carry out, foreign matter is suppressed to flow into liquid supply target, the present invention also provides the fluid Supplying apparatus that a kind of reliability is high, this fluid Supplying apparatus possesses described plug valve, foreign matter is suppressed to flow into liquid supply target, the present invention also provides the applying device that a kind of reliability is high, this coating unit uses described plug valve, that generation can be suppressed to cause because of the inflow of foreign matter is defective, can well to coated thing application of liquid.
That is, the present invention has following mode.
[1] a kind of plug valve, it can utilize the rotational action of the cock component being installed on valve body to carry out the supply route of sealing liquid, wherein, described cock component comprises the cock side groove portion being formed at outer surface, and described valve body comprises: make the liquid inflow port that described liquid internally flows into; Make the liquid flowing outlet that described liquid externally flows out; And the main body side groove portion opposed with the described outer surface of described cock component, the described rotational action of described plug valve and described cock component switches accordingly between the first state and the second state, in said first condition, described liquid inflow port and between described liquid flowing outlet and described main body side groove portion by described cock side groove portion bypass; In said second condition, described liquid inflow port and the not bypass by described cock side groove portion between described liquid flowing outlet and described main body side groove portion.
[2] according to the plug valve described in [1], wherein, in said first condition, described main body side groove portion and described cock side groove portion configure in cross one another mode, in said second condition, described main body side groove portion and described cock side groove portion configure in the mode be parallel to each other.
[3] according to [1] or the plug valve described in [2], wherein, at least described liquid inflow port of described valve body and the vicinity of described liquid flowing outlet are made up of resin material.
[4] according to plug valve described in [3], wherein, near the described liquid inflow port that can press described valve body to the outer surface of described cock component and described liquid flowing outlet.
[5] described any one of [1] to [4] plug valve, wherein, described cock component comprises the cylindrical member being formed with described cock side groove portion, the section of the described main body side groove portion of described valve body has curved surface, and the radius of curvature of the outer peripheral face of described cylindrical member is greater than the radius of curvature of described main body side groove portion.
[6] liquid supply method, it supplies target feed fluid by the valve opening and closing making to be arranged on liquid supply road from liquid supply source to liquid, wherein, described valve uses plug valve described any one of [1] to [5].
[7] fluid Supplying apparatus, it supplies target feed fluid by the valve opening and closing making to be arranged on liquid supply road from liquid supply source to liquid, wherein, described valve uses plug valve described any one of [1] to [5].
[8] applying device, possesses: to the coated portion of coated thing application of liquid; The liquid supply road of described liquid is supplied to described coated portion; And the valve be arranged on described liquid supply road, wherein, described valve uses plug valve described any one of [1] to [5].
According to the 1st aspect of the present invention, a kind of plug valve is provided, it can utilize the rotational action of the cock component being installed on valve body to carry out the supply route of sealing liquid, wherein, described cock component comprises the cock side groove portion being formed at outer surface, and described valve body comprises: make the liquid inflow port that described liquid internally flows into; Make the liquid flowing outlet that described liquid externally flows out; And the main body side groove portion opposed with the described outer surface of described cock component, the described rotational action of described plug valve and described cock component switches accordingly between the first state and the second state, in said first condition, described liquid inflow port and between described liquid flowing outlet and described main body side groove portion by described cock side groove portion bypass; In said second condition, described liquid inflow port and the not bypass by described cock side groove portion between described liquid flowing outlet and described main body side groove portion.
Plug valve involved by first method, the liquid be held in the second condition between main body side groove portion and cock side groove portion flows into liquid flowing outlet via main body side groove portion and cock side groove portion in a first state.Thus, owing to preventing the gap of liquid residue between cock component and valve body, therefore, it is possible to suppress the undesirable condition that the foreign matter lodging in gap flows out from liquid flowing outlet.
On the basis of above-mentioned first method, also can be configured to, in said first condition, described main body side groove portion and described cock side groove portion configure in cross one another mode, in said second condition, described main body side groove portion and described cock side groove portion configure in the mode be parallel to each other.
According to this structure, by making cock component rotate 90 degree, can switch between the first state and the second state.
On the basis of above-mentioned first method, also can be configured to, at least described liquid inflow port of described valve body and the vicinity of described liquid flowing outlet are made up of resin material.
According to this structure, such as nut etc. can be used easily to press the vicinity of liquid inflow port and liquid flowing outlet and make it be out of shape.
On the basis of above-mentioned first method, also can be configured to, near the described liquid inflow port that can press described valve body to the outer surface of described cock component and described liquid flowing outlet.
According to this structure, by making it be out of shape near pressing liquid inflow port and liquid flowing outlet, can the contact condition of easily regulating valve main body and cock component.
On the basis of above-mentioned first method, also can be configured to, described cock component comprises the cylindrical member being formed with described cock side groove portion, the section of the described main body side groove portion of described valve body has curved surface, and the radius of curvature of the outer peripheral face of described cylindrical member is greater than the radius of curvature of described main body side groove portion.
According to this structure, in a first state, owing to producing gap between the outer peripheral face and cock side groove portion of cylindrical member, therefore, it is possible to make cock side groove portion play function as the stream of liquid.
According to the 2nd aspect of the present invention, provide a kind of liquid supply method, it supplies target feed fluid by the valve opening and closing making to be arranged on liquid supply road from liquid supply source to liquid, wherein, described valve uses the plug valve involved by first method.
Liquid supply method involved by second method, owing to using the plug valve involved by first method to carry out opening and closing to liquid supply road, therefore, it is possible to the liquid supply method providing the reliability that inhibits foreign matter to flow into liquid supply target high.
According to the 3rd aspect of the present invention, provide a kind of fluid Supplying apparatus, it supplies target feed fluid by the valve opening and closing making to be arranged on liquid supply road from liquid supply source to liquid, wherein, described valve uses the plug valve involved by first method.
Fluid Supplying apparatus involved by Third Way, owing to using the plug valve involved by first method to carry out opening and closing to liquid supply road, therefore, it is possible to the fluid Supplying apparatus providing the reliability that inhibits foreign matter to flow into liquid supply target high.
According to the 4th aspect of the present invention, a kind of applying device is provided, possesses: to the coated portion of coated thing application of liquid; The liquid supply road of described liquid is supplied to described coated portion; And the valve be arranged on described liquid supply road, wherein, described valve uses the plug valve involved by first method.
Applying device involved by fourth way, owing to using the plug valve involved by first method to come opening and closing liquid supply road, therefore can suppress foreign matter to flow into coated portion.Thus, can provide a kind of to suppress cause because of the inflow of foreign matter defective occurs and can well to the applying device that the reliability of coated thing application of liquid is high.
According to the present invention, foreign matter can be suppressed to downstream side inflow.
Accompanying drawing explanation
Fig. 1 is the figure of the brief configuration that applying device is shown.
Fig. 2 is the sectional view of the brief configuration that valve is shown.
(a), (b) of Fig. 3 is the major part sectional view of valve and the figure of action is shown.
Fig. 4 is the stereogram of the brief configuration that cock component is shown.
(a) ~ (c) of Fig. 5 is the figure of the structure of the valve illustrated involved by variation.
(a) ~ (c) of Fig. 6 is the figure of the structure of the cock component illustrated involved by variation.
(a), (b) of Fig. 7 is the structure of the valve illustrated involved by variation and the figure of action.
Description of reference numerals is as follows:
1 ... semiconductor substrate (coated thing)
10 ... liquid supply source
11 ... liquid supply road
20,20A, 20B, 20C, 120 ... valve (plug valve)
21,121 ... cock component
21a, 121a ... outer peripheral face
22 ... valve body
24,25,124 ... cock side groove portion
26 ... containment member
34,35 ... main body side groove portion
36 ... liquid stream approach
36a ... liquid inflow port
37 ... liquid stream outlet
37a ... liquid flowing outlet
40 ... coated portion
100 ... applying device
Detailed description of the invention
Below, with reference to accompanying drawing, one embodiment of the present invention is described in detail.In the present embodiment, enumerating the applying device possessing plug valve on liquid supply route is that example is described.The applying device of present embodiment is used for viscosity ratio is higher and may produces the liquids (liquid) such as the photoresist of foreign matter and be coated on semiconductor substrate (wafer).
It should be noted that, in order to easy understand feature, the accompanying drawing used in the following description sometimes conveniently and amplify the part becoming feature is shown, the dimension scale etc. of each inscape is not limited to identical with reality.
Fig. 1 is the figure of the brief configuration that applying device is shown.
As shown in Figure 1, the applying device 100 of present embodiment possesses: liquid supply source 10; Liquid supply road 11; The valve 20 on (can opening and closing) liquid supply road 11 can be closed; For the coated portion 40 to semiconductor substrate 1 application of liquid as coated thing; And keep the workbench 50 of semiconductor substrate 1.
Liquid supply source 10 comprises the storagetank of storing liquid and the shifting pump from this storagetank transfer liquid.Liquid supply road 11 couples together between liquid supply source 10 and coated portion 40, from liquid supply source 10 side direction coated portion 40 feed fluid.Valve 20 is arranged on the midway on liquid supply road 11.Liquid supply road 11 comprises the upstream supply road 11a coupled together between valve 20 and liquid supply source 10 and supply road, the downstream 11b will coupled together between valve 20 and coated portion 40.As coated portion 40, such as, injector head, gap nozzle etc. can be exemplified.
Fig. 2 is the sectional view of the brief configuration that valve 20 is shown.Fig. 3 is the major part sectional view of valve 20, and Fig. 3 (a) illustrates state, i.e. second state on valve 20 closing liquid supply road, and Fig. 3 (b) illustrates that valve 20 opens state, i.e. first state on liquid supply road.
As shown in Figure 2, valve 20 is valves of so-called cock valve type, possesses cock component 21 and valve body 22.Cock component 21 is provided with the drive unit 30 for making this cock component 21 rotate relative to valve body 22.As drive unit 30, such as, adopt the existing known drive unit such as actuator, motor apparatus.Drive unit 30 has the rotating shaft 31 for making cock component 21 rotate.
Fig. 4 is the stereogram of the brief configuration that cock component 21 is shown.As shown in Figure 4, cock component 21 is made up of metal cylindrical member.Cock component 21 at one end side, face is formed with the installing hole 19 of the rotating shaft 31 for installing drive unit 30.Compared with the external diameter of an end face 21A side of cock component 21, the external diameter of 21B side, other end is less.
Cock component 21 is formed with a pair cock side groove portion 24,25 on outer peripheral face 21a.
A pair cock side groove portion 24,25 is formed in the mode of the 180 degree of positions that offset one from another relative to outer peripheral face 21a.A pair cock side groove portion 24,25 has mutually the same shape.
A pair cock side groove portion 24,25 along with the direction that the axis of cock component 21 is intersected, be such as that orthogonal direction is formed in the present embodiment.The degree of depth of a pair cock side groove portion 24,25 suitably sets according to the designing requirement (supply capacity of liquid) of valve 20.
As shown in Figure 2,3, valve body 22 is made up of columned component.In the present embodiment, valve body 22 is made up of resin material, such as polyformaldehyde (DURACON), UPE (ultra-high molecular weight polyethylene) etc.
Valve body 22 is formed the patchhole 32 for inserting cock component 21, liquid stream approach 36 and liquid stream outlet 37.Liquid stream approach 36 and liquid stream outlet 37 arrange along the direction (radial direction of section shape) orthogonal with the axis of valve body 22 and are formed on straight line, to make the outer peripheral face 22a of valve body 22 be communicated with patchhole 32.
Liquid stream approach 36 is by the route of liquid from liquid supply source 10 guide valve inside by being connected with supply road, upstream 11a.Liquid stream outlet 37 is by the route of liquid from the inner coated portion 40 of leading of valve by being connected with supply road, downstream 11b.
Opening portion in liquid stream approach 36, that be communicated with patchhole 32 forms liquid inflow port 36a, and opening portion in liquid stream outlet 37, that be communicated with patchhole 32 forms liquid flowing outlet 37a.
Valve body 22 keeps cock component 21 by the bearing components 33 be arranged on the internal face of patchhole 32.Thus, cock component 21 easily can rotate relative to valve body 22 by drive unit 30.
In addition, the internal face of the patchhole 32 of valve body 22 is provided with a pair containment member 26,27.A pair containment member 26,27 is configured between the internal face of valve body 22 and the outer peripheral face of cock component 21, such as, can exemplify O type ring etc.
In addition, the outer peripheral face 22a of valve body 22 is provided with a pair screwed pipe 38,39.The inner surface of screwed pipe 38 forms a part for liquid stream approach 36, and the inner surface of screwed pipe 39 forms a part for liquid stream outlet 37.
The internal face of the patchhole 32 of valve body 22 is formed and cock side groove portion 24,25 corresponding a pair main body side groove portion 34,35.A pair main body side groove portion 34,35 is formed at and the cock side groove portion 24 of the cock component 21 being inserted into patchhole 32,25 roughly the same height (with reference to Fig. 2).It should be noted that, main body side groove portion 34,35 and cock side groove portion 24,25 are formed at roughly the same height and refer to, main body side groove portion 34,35 and cock side groove portion 24,25 are overlapping at least partially in the height direction, and can be communicated with each other.
The forming region of cock side groove portion 24,25 and main body side groove portion 34,35 is sealed by above-mentioned a pair containment member 26,27.That is, valve 20 utilizes containment member 26,27 to prevent from flowing into leaking outside of the liquid between cock side groove portion 24,25 and main body side groove portion 34,35.
In Fig. 3 (a), cock side groove portion 24,25 and main body side groove portion 34,35 configure in parallel with each other.Now, liquid inflow port 36a and liquid flowing outlet 37a is closed by the outer peripheral face 21a of cock component 21.Therefore, liquid inflow port 36a and liquid flowing outlet 37a and the state (the second state) not passing through cock side groove portion 24,25 and bypass (connection) between main body side groove portion 34,35 is formed.
In the present embodiment, screwed pipe 38,39 is separately installed with nut 28,29 on the threaded portion being formed at respective base portion 38a, 39a.Nut 28,29 connects with the bearing surface 22a1 being formed at outer peripheral face 22a.
In the present embodiment, because valve body 22 is made up of resin material as described above, therefore, if nut 28,29 is screwed into threaded portion (base portion 38a, 39a), then bearing surface 22a1 is by the pressing of this nut 28,29, thus bearing surface 22a1 displacement to the inside.On the other hand, that is undertaken by nut 28,29 if unclamp is screwed into, then bearing surface 22a1 displacement to the inside tails off.
In the present embodiment, press bearing surface 22a1 by the amount of screwing of adjusting nut 28,29, make this bearing surface 22a1 displacement ormal weight to the inside.Thereby, it is possible to easily adjust the outer peripheral face 21a of cock component 21 and the contact condition (air-tight state) of liquid inflow port 36a and liquid flowing outlet 37a.In addition, because valve body 22 is made up of resin material, therefore, even if when making bearing surface 22a1 displacement to the inside, also inhibits the increase of the contact resistance relative to metal cock component 21 (patchhole 32).
Based on such structure, valve 20 can make the cock component 21 being inserted into patchhole 32 (with reference to Fig. 2) rotate swimmingly.In addition, because outer peripheral face 21a and liquid inflow port 36a and liquid flowing outlet 37a are close to, therefore, it is possible to the reliably airtight space S be made up of cock side groove portion 24,25 and main body side groove portion 34,35.Thus, the liquid remaining on above-mentioned space S can not flow into liquid stream outlet 37.In addition, liquid also can not from liquid stream approach 36 inflow space S.
So, in order to realize above-mentioned second state, valve 20 makes cock component 21 rotate as shown in Fig. 3 (a), thus can sealing liquid supply road 11.Thus, liquid can be cut off from 11a side, supply road, upstream towards the flowing of 11b side, supply road, downstream.
At this, get back to Fig. 3 (b) and be described.Fig. 3 (b) illustrates the state after making the position of the cock component 21 shown in Fig. 3 (a) rotate 90 degree.It should be noted that, Fig. 3 (b) illustrates following situation: by making cock component 21 rotate counterclockwise 90 degree, making cock side groove portion 24 opposed with liquid inflow port 36a, making cock side groove portion 25 opposed with liquid flowing outlet 37a.
As shown in Fig. 3 (b), when making the position of cock component 21 rotate counterclockwise 90 degree, cock side groove portion 24,25 and main body side groove portion 34,35 configure in cross one another mode, cock side groove portion 24,25 moves to position opposed with liquid inflow port 36a and liquid flowing outlet 37a respectively, removes the outer peripheral face 21a sealing liquid inflow entrance 36a of cock component 21 and the closed state of liquid flowing outlet 37a.Therefore, liquid inflow port 36a and liquid flowing outlet 37a and the state (the first state) passing through cock side groove portion 24,25 and bypass (connection) between main body side groove portion 34,35 is formed.
The section shape of main body side groove portion 34,35 is formed as curved surface.In the present embodiment, the subsequent corrosion of the outer peripheral face 21a of the cock component 21 be made up of cylindrical member is greater than the subsequent corrosion of main body side groove portion 34,35.Thus, under above-mentioned first state, owing to producing gap between the outer peripheral face 21a and main body side groove portion 34,35 of cock component 21, therefore, it is possible to make cock side groove portion 24,25 play function as the stream of liquid.
Thus, supply from supply road, upstream 11a the liquid come and flow into cock side groove portion 24 via the liquid inflow port 36a of liquid stream approach 36.The liquid flowing into cock side groove portion 24 flow into cock side groove portion 25 via main body side groove portion 34,35.The liquid flowing into cock side groove portion 25 flows to liquid stream outlet 37 from liquid flowing outlet 37a.The liquid flowing into liquid stream outlet 37 supplies to coated portion 40 via supply road, downstream 11b.
So, the liquid supply method of valve 20 according to the present embodiment and use valve 20, in the second condition, the liquid being held in the space S be made up of cock side groove portion 24,25 and main body side groove portion 34,35 can be made to flow into liquid flowing outlet 37a via main body side groove portion 34,35 and cock side groove portion 24,25 in a first state.
That is, valve 20 can make to form the main body side groove portion 34,35 in the maintenance space (above-mentioned space S) of liquid under second state on sealing liquid supply road 11 and cock side groove portion 24,25 plays function as making the liquid flow path of liquid stream approach 36 and liquid stream outlet 37 bypass under opening liquid to supply first state on road 11.
Thus, prevent in the second condition, liquid residues in the gap (above-mentioned space S) of cock component 21 and valve body 22 for a long time.Thereby, it is possible to the foreign matter suppressing the residual liquid in gap to cause produces, the undesirable condition that generation foreign matter flows out to side, coated portion 40 (liquid supply target) from liquid flowing outlet 37a along with the opening and closing of valve 20 can be suppressed.
The present invention is not limited to above-mentioned embodiment, suitably can change not departing from by claims and the description purport of invention that limits of entirety or the scope of design.Such as, in the above-described embodiment, although enumerating the situation that valve body 22 entirety is made up of resin material is example, the present invention is not limited thereto, also can be only that a part for valve body 22 is made up of resin material.Such as, also can be that at least the needing of valve body 22 is made up of resin material by the part (vicinity of liquid inflow port and liquid flowing outlet) of compressive strain, other part from metal materials be formed.
In addition, in the above-described embodiment, although situation about enumerating applying plug valve of the present invention from liquid supply source 10 via liquid supply road 11 in the applying device 100 of coated portion 40 feed fluid is example, be not limited thereto.
Such as, also plug valve of the present invention can be used as the valve that the liquid supply road that the production equipment (liquid supply target) from liquid supply source to factory supplies the fluid Supplying apparatus of regulation liquid is closed.Thus, the plug valve of the application of the invention carries out opening and closing to liquid supply road, can supply target feed fluid thus to liquid, therefore, it is possible to the liquid supply method providing the reliability that inhibits foreign matter to flow into liquid supply target high.In addition, the high fluid Supplying apparatus of reliability that inhibit foreign matter to flow into liquid supply target can be provided.
In this case, to the liquid of liquid supply target supply kind without particular limitation of, as long as viscosity ratio is higher and may produce the liquid of foreign matter, plug valve of the present invention is suitable as the valve supply route of such liquid being carried out to opening and closing.
In addition, in the above-described embodiment, press bearing surface 22a1 by the amount of screwing of adjusting nut 28,29, the outer peripheral face 21a of adjustment cock component 21 and the contact condition of liquid inflow port 36a and liquid flowing outlet 37a, but the present invention is not limited thereto.
At this, as the variation of valve, other modes of the outer peripheral face 21a of adjustment cock component 21 and the contact condition of liquid inflow port 36a and liquid flowing outlet 37a are described.
Fig. 5 valve that to be the figure of the brief configuration of the valve illustrated involved by variation, Fig. 5 (a) be involved by the first variation, Fig. 5 (b) is the valve involved by the second variation, and Fig. 5 (c) is the valve involved by the 3rd variation.It should be noted that, in Figure 5, identical Reference numeral is marked to the component identical with above-mentioned embodiment and structure, and detailed.
As shown in Fig. 5 (a), the valve 20A involved by the first variation is by being screwed into valve body 22 by screwed pipe 38,39 and installing.In this variation, valve body 22 is being provided with bolt 41,42 with main body side groove portion 34,35 corresponding positions.Bolt 41,42 is screwed into the screw being formed at valve body 22.
Because valve body 22 is made up of resin material as described above, therefore, when bolt 41,42 is screwed into screw (not shown), this bolt 41,42 push valve main body 22 is utilized, valve body 22 displacement to the inside thus.On the other hand, when unclamp that bolt 41,42 carries out be screwed into time, valve body 22 displacement to the inside tails off.
So, according to this variation, this valve body 22 displacement is made, thereby, it is possible to easily adjust the outer peripheral face 21a of cock component 21 and the contact condition (air-tight state) of liquid inflow port 36a and liquid flowing outlet 37a by bolt 41,42 is screwed into valve body 22.
In addition, as shown in Fig. 5 (b), the valve 20B involved by the second variation is by being screwed into valve body 22 by screwed pipe 38,39 and installing.In addition, the ring component 43 that the mode that valve 20B also possesses the periphery surrounding valve body 22 configures.Ring component 43 is formed by tabular component is curved ring-type, utilizes screw member 44 to fix under the state in generation gap, both ends.For ring component 43, reduced the internal diameter of ring component 43 by the fastening of screw member 44, by unclamping the fastening internal diameter increasing ring component 43 of screw member 44.
As described above, valve body 22 is made up of resin material.Therefore, by the fastening of screw member 44, the internal diameter of ring component 43 is diminished, valve body 22 is pressed and displacement to the inside thus.On the other hand, make the internal diameter of ring component 43 become large by unclamping the fastening of screw member 44, the displacement of valve body 22 diminishes thus.
So, according to this variation, valve body 22 displacement is made, thereby, it is possible to easily adjust the outer peripheral face 21a of cock component 21 and the contact condition (air-tight state) of liquid inflow port 36a and liquid flowing outlet 37a by being screwed into the screw member 44 of ring component 43.
In addition, as shown in Fig. 5 (c), the valve 20C involved by the 3rd variation is by being screwed into valve body 22 by screwed pipe 38,39 and installing.In addition, valve body 22 screws togather across O type ring and nut 46,47, and this nut 46,47 is screwed together in the threaded portion (not shown) on the outer surface being arranged on screwed pipe 38,39.
When being screwed into nut 46,47, O type ring 45 is pressed because being clipped between nut 46,47 and valve body 22.Thus, valve body 22 be pressed after O type ring 45 press and displacement to the inside.On the other hand, by unclamping the fastening of nut 46,47, the pressing quantity of O type ring 45 is reduced, thus the displacement of valve body 22 diminish.
So, according to this variation, make valve body 22 displacement by being screwed into nut 46,47, thereby, it is possible to easily adjust the outer peripheral face 21a of cock component 21 and the contact condition (air-tight state) of liquid inflow port 36a and liquid flowing outlet 37a.
In addition, the shape being formed in a pair cock side groove portion 24,25 on the outer peripheral face 21a of cock component 21 is not limited to the form shown in Fig. 4.Fig. 6 (a) ~ (c) is the figure of the cross-section structure involved by variation that cock side groove portion is shown.
Such as, under the axis of cock component 21 analyses and observe visual angle, a pair cock side groove portion 24,25 both can be the curve form shown in Fig. 6 (a), can be the triangle shown in Fig. 6 (b), also can be the quadrangle shown in Fig. 6 (c).
In addition, in the above-described embodiment, although enumerating the situation that a pair cock side groove portion 24,25 be formed at the outer peripheral face 21a of cock component 21 is example, the quantity of cock side groove portion is not limited thereto, such as, also can be one.
Fig. 7 is the major part sectional view of the valve 120 involved by variation, Fig. 7 (a) illustrate valve 120 closing liquid supply road after state, Fig. 7 (b) illustrate valve 120 open liquid supply road after state.
Valve 120 involved by this variation is only formed with cock side groove portion 124 (corresponding with cock side groove portion 24) on the outer peripheral face 121a of cock component 121.
In Fig. 7 (a), cock side groove portion 24 and main body side groove portion 34,35 are configured to mutually to intersect the state of predetermined angular.Now, although liquid flowing outlet 37a is communicated with main body side groove portion 34 via cock side groove portion 124, liquid inflow port 36a is closed by the outer peripheral face 121a of cock component 121.Therefore, form liquid inflow port 36a and between liquid flowing outlet 37a with main body side groove portion 34, do not pass through the state (the second state) of cock side groove portion 124 and bypass (connection).
On the other hand, by making cock component 121 rotate predetermined angular, liquid inflow port 36a can be formed and between liquid flowing outlet 37a with main body side groove portion 34 by cock side groove portion 124 state (the first state) of bypass (connection).
As shown in Fig. 7 (b), when making the position of cock component 121 rotate counterclockwise predetermined angular, cock side groove portion 124 and main body side groove portion 34,35 configure in parallel to each other, remove the closed state of the outer peripheral face 121a sealing liquid inflow entrance 36a of cock component 121, utilize cock side groove portion 124 that liquid inflow port 36a and liquid flowing outlet 37a is communicated with.Therefore, form liquid inflow port 36a and between liquid flowing outlet 37a with main body side groove portion 34, pass through the state (the first state) of cock side groove portion 124 and bypass (connection).
This variation according to Fig. 7 (a), (b), can be used in the cock component 121 outer peripheral face 121a being only formed with cock side groove portion 124.Thus, the processing transfiguration of cock component 121 is easy, therefore, it is possible to the cost realizing valve 120 reduces.
It should be noted that, in this variation, although being set forth in situation valve body 22 being formed a pair main body side groove portion 34,35 is example, also only can form any one in main body side groove portion 34,35.In this case, such as, when only forming main body side groove portion 35, as long as make the spinning movement of cock component 21 revolve turnback from the position shown in Fig. 7 (a), (b).
Claims (8)
1. a plug valve, it can utilize the rotational action of the cock component being installed on valve body to carry out the supply route of sealing liquid, wherein,
Described cock component comprises the cock side groove portion being formed at outer surface,
Described valve body comprises: make the liquid inflow port that described liquid internally flows into; Make the liquid flowing outlet that described liquid externally flows out; And the main body side groove portion opposed with the described outer surface of described cock component,
The described rotational action of described plug valve and described cock component switches accordingly between the first state and the second state,
In said first condition, described liquid inflow port and between described liquid flowing outlet and described main body side groove portion by described cock side groove portion bypass;
In said second condition, described liquid inflow port and the not bypass by described cock side groove portion between described liquid flowing outlet and described main body side groove portion.
2. plug valve according to claim 1, wherein,
In said first condition, described main body side groove portion and described cock side groove portion configure in cross one another mode,
In said second condition, described main body side groove portion and described cock side groove portion configure in the mode be parallel to each other.
3. plug valve according to claim 1 and 2, wherein,
At least described liquid inflow port of described valve body and the vicinity of described liquid flowing outlet are made up of resin material.
4. plug valve according to claim 3, wherein,
Near the described liquid inflow port that can press described valve body to the outer surface of described cock component and described liquid flowing outlet.
5. plug valve according to any one of claim 1 to 4, wherein,
Described cock component comprises the cylindrical member being formed with described cock side groove portion,
The section of the described main body side groove portion of described valve body has curved surface,
The radius of curvature of the outer peripheral face of described cylindrical member is greater than the radius of curvature of described main body side groove portion.
6. a liquid supply method, it supplies target feed fluid by the valve opening and closing making to be arranged on liquid supply road from liquid supply source to liquid, wherein,
Described valve uses the plug valve according to any one of claim 1 to 5.
7. a fluid Supplying apparatus, it supplies target feed fluid by the valve opening and closing making to be arranged on liquid supply road from liquid supply source to liquid, wherein,
Described valve uses the plug valve according to any one of claim 1 to 5.
8. an applying device, possesses: to the coated portion of coated thing application of liquid; The liquid supply road of described liquid is supplied to described coated portion; And the valve be arranged on described liquid supply road, wherein,
Described valve uses the plug valve according to any one of claim 1 to 5.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-088191 | 2014-04-22 | ||
| JP2014088191A JP6277051B2 (en) | 2014-04-22 | 2014-04-22 | Plug valve, liquid supply method, liquid supply apparatus, and coating apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104999797A true CN104999797A (en) | 2015-10-28 |
| CN104999797B CN104999797B (en) | 2018-05-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510133642.3A Active CN104999797B (en) | 2014-04-22 | 2015-03-25 | Plug valve, liquid supply method, fluid Supplying apparatus and applying device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6277051B2 (en) |
| CN (1) | CN104999797B (en) |
| TW (1) | TWI648497B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107282365A (en) * | 2016-04-01 | 2017-10-24 | 亚克先进科技股份有限公司 | Mechanical glue spreading apparatus |
| CN107883008A (en) * | 2016-09-30 | 2018-04-06 | 东京应化工业株式会社 | Plug valve, liquid supply method, fluid Supplying apparatus and apparatus for coating |
| CN108426058A (en) * | 2018-06-19 | 2018-08-21 | 张丽聪 | A kind of natural gas line connection control valve |
| CN108474485A (en) * | 2016-01-28 | 2018-08-31 | 株式会社电装 | Valve gear |
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| US3314643A (en) * | 1963-11-27 | 1967-04-18 | Texsteam Corp | Throttling valve |
| US4881718A (en) * | 1987-11-27 | 1989-11-21 | Jamesbury Corporation | Ball control valve |
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| CN107883008A (en) * | 2016-09-30 | 2018-04-06 | 东京应化工业株式会社 | Plug valve, liquid supply method, fluid Supplying apparatus and apparatus for coating |
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| CN108426058A (en) * | 2018-06-19 | 2018-08-21 | 张丽聪 | A kind of natural gas line connection control valve |
| CN108426058B (en) * | 2018-06-19 | 2020-11-06 | 安徽智时代科技有限公司 | Natural gas line connection control valve |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI648497B (en) | 2019-01-21 |
| JP6277051B2 (en) | 2018-02-07 |
| CN104999797B (en) | 2018-05-29 |
| TW201604460A (en) | 2016-02-01 |
| JP2015206431A (en) | 2015-11-19 |
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