TWI648497B - Plug valve, method of supplying liquid, liquid supplying device, and coating applicator - Google Patents

Abstract

The present invention provides a plug valve, a liquid supply method, a liquid supply device, and a coating device that can suppress the flow of foreign matter. Further, the present invention relates to a plug valve that can close a supply path of a liquid by a turning operation of a plug member attached to a valve body. The cock member includes a cock side groove formed on the outside. The valve body includes a liquid inflow port through which the liquid flows into the inside, a liquid outflow port through which the liquid flows out, and a body side groove portion opposed to the outer surface of the plug member. Further, according to the turning operation of the plug member, the plug valve is switched between the liquid inflow port, the first state in which the liquid inflow port and the main body side groove are bypassed by the plug side groove portion, and the liquid inflow port and the liquid outflow port. The second state is not bypassed by the cock side groove portion with the body side groove portion.

Description

Plug valve, liquid supply method, liquid supply device, and coating device

The present invention relates to a plug valve, a liquid supply method, a liquid supply device, and a coating device.

The present application claims priority based on Japanese Patent Application No. 2014-088191, filed on Jan.

Pressing, high viscosity liquid such as liquid medicine must have high pressure when it is discharged. Therefore, as a valve for supplying such a high-viscosity liquid, a plug valve excellent in pressure resistance has been known in the prior art (for example, see Patent Document 1). The plug valve includes a valve body and a cock member rotatably mounted relative to the valve body. Further, the plug valve is configured such that the through hole formed in the plug member communicates with the liquid supply path provided in the valve body by rotating the plug member, whereby the liquid can be supplied.

[Advanced technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2004-132469

However, the previous plug valve system has a structure in which a foreign matter (liquid sediment or the like) is accumulated in the gap between the plug member and the valve body. Therefore, when the liquid supply path is opened by the rotation of the plug member, the foreign matter flows to the downstream of the valve. The side of the side.

The present invention has been developed in view of such a problem, and an object thereof is to provide a plug valve, a liquid supply method, a liquid supply device, and a coating device capable of suppressing the inflow of foreign matter.

The present invention provides a plug valve which can prevent the occurrence of residual liquid in the gap between the plug member and the valve body, thereby preventing the foreign matter accumulated in the gap from flowing out of the liquid outflow port. Further, the present invention provides a liquid supply method capable of suppressing high-reliability of a foreign matter into a liquid supply target by using the above-described plug valve, and a liquid supply device having the above-described plug valve capable of suppressing high-reliability into a liquid supply target And a highly reliable coating device which can suppress the occurrence of a problem caused by the inflow of foreign matter using the above-described plug valve and can coat the liquid well with the object to be coated.

Specifically, the present invention has the following modes.

[1] A plug valve which is attached to a cock part of a valve body The swaying member includes a plug-side groove portion formed on the outer surface, and the valve body includes a liquid inflow port through which the liquid flows into the liquid, a liquid outflow port for allowing the liquid to flow out to the outside, and a body-side groove portion opposite to the outer surface of the plug member; wherein the plug valve is switched between the liquid inflow port and the liquid outflow port and the body-side groove portion by the rotating operation of the plug member The first state in which the plug side groove portion is bypassed, and the second state in which the liquid inflow port and the liquid outflow port and the main body side groove portion are not bypassed by the plug side groove portion.

[2] The plug valve according to [1], wherein the main body side groove portion and the cock side groove portion are arranged to intersect each other in the first state, and in the second state, the main body side groove portion and the cock side groove The departments are configured to be parallel to each other.

[3] The plug valve according to [1] or [2], wherein at least the liquid inflow port and the vicinity of the liquid outflow port of the valve body are made of a resin material.

[4] The plug valve according to [3], wherein a vicinity of the liquid inflow port and the liquid outflow port of the valve body is pressable with respect to a surface of the plug member.

[5] The plug valve according to any one of [1] to [4] wherein the plug member includes a cylindrical member in which the plug side groove portion is formed, and the valve body has a curved surface in a cross section of the body side groove portion, and the cylindrical member The outer circumferential surface has a larger radius of curvature than the main body side groove portion.

[6] A liquid supply method which is provided by liquid opening and closing The valve is supplied to the liquid supply target from the liquid supply source, and the plug valve of any one of [1] to [5] is used as the valve system.

[7] A liquid supply device that supplies a liquid to a liquid supply target from a liquid supply source by opening and closing a valve provided in a liquid supply path, and a cock of any one of [1] to [5] as the valve system. valve.

[8] A coating apparatus comprising: a coating unit that applies a liquid to an object to be coated; a liquid supply path that supplies the liquid to the coating unit; and a valve that is provided in the liquid supply path; A plug valve of any one of [1] to [5] is used.

According to a first aspect of the present invention, a plug valve is provided which is capable of closing a liquid supply path by a turning operation of a plug member attached to a valve body, wherein the plug member includes a plug side groove formed on an outer surface, and the valve body a liquid inflow port for allowing the liquid to flow into the inside, a liquid outflow port for allowing the liquid to flow to the outside, and a main body side groove portion facing the outer surface of the plug member; and switching according to the turning operation of the plug member: The first state in which the liquid inflow port and the liquid outflow port and the main body side groove are bypassed by the plug side groove portion, and the liquid inflow port and the liquid outflow port and the main body side groove portion are not used by The second state in which the cock-side groove portion bypasses.

According to the plug valve of the first aspect, the liquid held between the main body side groove portion and the plug side groove portion in the second state is introduced into the liquid outflow port through the main body side groove portion and the plug side groove portion in the first state. Therefore, the liquid remaining in the gap between the plug member and the valve body can be prevented, so that the foreign matter accumulated in the gap can be prevented from flowing out from the liquid outflow port. The occurrence of a bad condition.

In the first aspect, in the first state, the main body side groove portion and the cock side groove portion are arranged to intersect each other; and in the second state, the main body side groove portion and the cock side groove portion are The systems are configured to be parallel to each other.

According to this configuration, the first state and the second state can be switched by rotating the cock member by 90 degrees.

In the first aspect, it is preferable that at least the liquid inflow port and the vicinity of the liquid outflow port of the valve body are made of a resin material.

According to this configuration, the vicinity of the liquid inflow port and the liquid outflow port can be easily pressed and deformed by, for example, a nut or the like.

In the above-described first aspect, it is possible that the vicinity of the liquid inflow port and the liquid outflow port of the valve body are pressable with respect to the outer surface of the plug member.

According to this configuration, the contact state between the valve body and the plug member can be easily adjusted by pressing and pressing the vicinity of the liquid inflow port and the liquid outflow port.

In the above-described first aspect, the cock member includes a cylindrical member in which the cock-side groove portion is formed, and the valve body has a curved surface in a cross section of the main body-side groove portion, and the outer circumferential surface of the cylindrical member is larger than the main body-side groove portion The radius of curvature is large.

According to this configuration, in the first state, a gap side is formed between the outer circumferential surface of the cylindrical member and the cock-side groove portion, so that the cock-side groove portion can be used as The liquid flow path functions.

According to a second aspect of the present invention, a liquid supply method is provided in which a liquid is supplied from a liquid supply source to a liquid supply target by opening and closing a valve provided in a liquid supply path, and a plug valve according to the first aspect is used as the valve system.

According to the liquid supply method of the second aspect, since the liquid supply path is opened and closed by using the plug valve of the first aspect, it is possible to provide a liquid supply method capable of suppressing the reliability of the foreign matter flowing into the liquid supply target.

According to a third aspect of the present invention, there is provided a liquid supply device that supplies a liquid to a liquid supply target from a liquid supply source by opening and closing a valve provided in a liquid supply path, and a plug valve according to the first aspect as the valve system.

According to the liquid supply device of the third aspect, since the liquid supply path is opened and closed by using the plug valve of the first aspect, it is possible to provide a liquid supply device capable of suppressing high reliability of the flow of the foreign matter into the liquid supply target.

According to a fourth aspect of the present invention, there is provided a coating apparatus comprising: a coating unit that applies a liquid to an object to be coated; a liquid supply path that supplies the liquid to the coating unit; and a liquid supply path that is provided in the liquid supply path A valve of the first aspect is used as the valve system.

According to the coating apparatus of the fourth aspect, since the liquid supply path is opened and closed by using the plug valve of the first aspect, the inflow of foreign matter to the coating portion can be suppressed. Therefore, it is possible to suppress the occurrence of defects caused by the heterogeneous flow, and it is possible to provide a highly reliable coating device which can apply a liquid to the object to be coated.

According to the present invention, the inflow of foreign matter toward the downstream side can be suppressed.

1‧‧‧Semiconductor substrate (coated material)

10‧‧‧Liquid supply

11‧‧‧Liquid supply path

20, 20A, 20B, 20C, 120‧‧‧ valves (plug valves)

21, 121‧‧‧ cock parts

21a, 121a‧‧‧ outer perimeter

22‧‧‧ valve body

24, 25, 124‧‧ ‧ cocking side ditch

26‧‧‧ Sealing parts

34, 35‧‧‧ body side ditch

36‧‧‧Liquid inflow path

36a‧‧‧Liquid flow inlet

37‧‧‧Liquid outflow path

37a‧‧‧Liquid outlet

40‧‧‧ Coating Department

100‧‧‧ Coating device

Fig. 1 is a view showing a schematic configuration of a coating device.

Fig. 2 is a side cross-sectional view showing a schematic configuration of a valve.

Fig. 3 (a) and (b) are cross-sectional views showing the essential parts of the valve and a view showing the operation thereof.

Fig. 4 is a perspective view showing a schematic configuration of a cock member.

Fig. 5 (a) to (c) are views showing the configuration of a valve according to a modification of the present invention.

Fig. 6 (a) to (c) are views showing the configuration of a plug member according to a modification of the present invention.

Fig. 7 (a) and (b) are views showing the configuration and operation of a valve according to a modification of the present invention.

Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. In the present embodiment, a coating device having a plug valve in a liquid supply path will be described as an example. The coating device of the present embodiment is used to apply a chemical solution (liquid) such as a photoresist having a high viscosity and having a foreign matter to a semiconductor substrate (wafer).

Moreover, in the drawings used in the following description, in order to make the features easy to understand, In order to facilitate the calculation, the part of the feature is sometimes enlarged, and the size ratio of each component or the like is not necessarily the same as the actual one.

Fig. 1 is a view showing a schematic configuration of a coating device.

As shown in Fig. 1, the coating apparatus 100 of the present embodiment includes a liquid supply source 10, a liquid supply path 11, and a valve 20 that can close (open and close) the liquid supply path 11, and is used as a coated object. The semiconductor substrate 1 is coated with a liquid application portion 40 and a holding table 50 for holding the semiconductor substrate 1.

The liquid supply source 10 includes a storage tank for storing the liquid, and a transfer pump that transfers the liquid from the storage tank. The liquid supply path 11 connects the liquid supply source 10 and the application unit 40, and supplies the liquid to the application unit 40 from the liquid supply source 10 side. The valve 20 is provided in the middle of the liquid supply path 11. The liquid supply path 11 includes an upstream supply path 11a between the connection valve 20 and the liquid supply source 10, and a downstream supply path 11b between the connection valve 20 and the coating unit 40. The coating unit 40 may, for example, be a shower head or a slit nozzle.

Fig. 2 is a side cross-sectional view showing a schematic configuration of the valve 20. Fig. 3 is a cross-sectional view of the main part of the valve 20, and Fig. 3(a) shows a state in which the valve 20 closes the liquid supply path, that is, a second state, and Fig. 3(b) shows a state in which the valve 20 opens the liquid supply path. That is, the first state.

As shown in Fig. 2, the valve 20 is a so-called plug valve type valve having a plug member 21 and a valve body 22. A driving device 30 for rotating the cock member 21 against the valve body 22 is attached to the cock member 21. As the drive device 30, for example, an actuator or a motor device or the like can be employed. Previously known. The drive unit 30 has a rotating shaft 31 for rotating the cock member 21.

Fig. 4 is a perspective view showing a schematic configuration of the cock member 21. As shown in Fig. 4, the plug member 21 is composed of a cylindrical member made of metal. One end face side of the plug member 21 is formed with a mounting hole 19 for mounting the rotating shaft 31 of the driving device 30. The cock member 21 has a smaller outer diameter on the side of the other end face 21B than the outer diameter on the one end face 21A side.

A pair of cock-side groove portions 24, 25 are formed on the outer peripheral surface 21a of the cock member 21.

The pair of cock side groove portions 24, 25 are formed at positions spaced apart from each other by 180 degrees with respect to the outer peripheral surface 21a. The pair of cock side groove portions 24, 25 have the same shape, respectively.

The pair of cock-side groove portions 24 and 25 are formed in a direction intersecting the axial direction of the cock member 21, and are formed, for example, in an orthogonal direction in the present embodiment. The depth of the pair of cock-side groove portions 24, 25 is appropriately set in accordance with the design requirements of the valve 20 (the supply capacity of the liquid).

As shown in Figs. 2 and 3, the valve body 22 is composed of a cylindrical member. In the present embodiment, the valve body 22 is made of a resin material such as polyacetal or UPE (Ultra High Molecular Weight Polyethylene).

An insertion hole 32 into which the plug member 21 is inserted, a liquid inflow path 36, and a liquid outflow path 37 are formed in the valve body 22. The liquid inflow path 36 and the liquid outflow path 37 are formed side by side in a direction orthogonal to the axial direction of the valve body 22 (radial shape of the cross-sectional shape) so that the outer peripheral surface 22a of the valve body 22 communicates with the insertion hole 32. .

The liquid inflow path 36 is a path for introducing liquid from the liquid supply source 10 into the inside of the valve by being connected to the upstream supply path 11a. The liquid outflow path 37 is a path leading from the inside of the valve to the coating portion 40 by being connected to the downstream supply path 11b.

The liquid inflow path 36 and the opening that communicates with the insertion hole 32 constitute a liquid inflow port 36a. The opening of the liquid outflow path 37 that communicates with the insertion hole 32 constitutes a liquid outflow port 37a.

The valve body 22 holds the cock member 21 via the bearing member 33 provided on the inner wall surface of the insertion hole 32. Thereby, the cock member 21 can be easily rotated with respect to the valve body 22 by the driving device 30.

Further, a pair of sealing members 26, 27 are provided on the inner wall surface of the insertion hole 32 of the valve body 22. The pair of sealing members 26 and 27 are disposed between the inner wall surface of the valve body 22 and the outer circumferential surface of the plug member 21, and may be, for example, an O-ring or the like.

Further, a pair of tubular screws 38, 39 are attached to the outer peripheral surface 22a of the valve body 22. The inner surface of the tubular screw 38 forms part of the liquid inflow path 36, and the inner surface of the tubular screw 39 forms part of the liquid outflow path 37.

On the inner wall surface of the insertion hole 32 of the valve body 22, one pair of the body side groove portions 34, 35 corresponding to the plug side groove portions 24, 25 are formed. The pair of body side groove portions 34, 35 are formed to have substantially the same height as the plug side groove portions 24, 25 of the plug member 21 inserted into the insertion hole 32 (see Fig. 2). Further, the main body side groove portions 34 and 35 and the cock side groove portions 24 and 25 are formed to have substantially the same height, and refer to the body side groove portions 34 and 35. The cocking side groove portions 24 and 25 are at least partially overlapped in the height direction and are connectable to each other.

The formation regions of the plug side groove portions 24, 25 and the body side groove portions 34, 35 are sealed by the pair of sealing members 26, 27. That is, the leakage of the liquid flowing between the cock-side groove portions 24, 25 of the valve 20 and the body-side groove portions 34, 35 is prevented by the sealing members 26, 27.

In Fig. 3(a), the plug side groove portions 24, 25 and the body side groove portions 34, 35 are arranged in parallel with each other. At this time, the liquid inflow port 36a and the liquid outflow port 37a are closed by the outer peripheral surface 21a of the tap member 21. Therefore, the liquid inflow port 36a and the liquid outflow port 37a and the main body side groove portions 34 and 35 are in a state of being bypassed (connected) by the plug side groove portions 24 and 25 (second state).

In the present embodiment, the threaded portions formed at the respective base portions 38a, 39a of the tubular screws 38, 39 are respectively fitted with nuts 28, 29. The nuts 28 and 29 are in contact with the abutting surface 22a1 formed on the outer peripheral surface 22a.

In the present embodiment, the valve body 22 is made of a resin material as described above. Therefore, when the nuts 28 and 29 are locked into the screw portions (the base portions 38a and 39a), the nut 28, 29 abuts the surface 22a1. Will be pressed so as to shift towards the inside. On the other hand, if the nuts 28 and 29 are locked and loosened, the displacement of the abutting surface 22a1 toward the inner side will be small.

In the present embodiment, by adjusting the amount of locking of the nuts 28 and 29, the abutting surface 22a1 is pressed and displaced inward by a specific amount. Thereby, the outer peripheral surface 21a of the plug member 21 and the liquid inflow port 36a can be easily adjusted. And the contact state (sealed state) of the liquid outflow port 37a. Further, since the valve body 22 is made of a resin material, even if the abutting surface 22a1 is displaced inward, the increase in contact resistance with respect to the metal plug member 21 (insertion hole 32) can be suppressed.

Based on this configuration, the valve 20 can smoothly rotate the cock member 21 of the insertion hole 32 (see Fig. 2). Further, since the outer peripheral surface 21a is in close contact with the liquid inflow port 36a and the liquid outflow port 37a, the space S formed by the plug side groove portions 24 and 25 and the main body side groove portions 34 and 35 can be reliably sealed. Therefore, the liquid held in the space S does not flow into the liquid outflow path 37. Further, no liquid flows into the space S from the liquid inflow path 36.

In this way, in order to realize the second state, the valve 20 can close the liquid supply path 11 by rotating the cock member 21 as shown in Fig. 3(a). Therefore, the flow of the liquid from the upstream supply path 11a side toward the downstream supply path 11b side can be blocked.

Here, return to FIG. 3(b) for explanation. Fig. 3(b) is a view showing a state in which the position of the plug member 21 shown in Fig. 3(a) is rotated by 90 degrees. Further, as shown in Fig. 3(b), by rotating the cock member 21 at a 90-degree counterclockwise direction, the cock-side groove portion 24 is opposed to the liquid inflow port 36a, and the cock-side groove portion 25 is formed. The case of the liquid outflow port 37a.

As shown in Fig. 3(b), when the position of the plug member 21 is rotated by 90 degrees in the counterclockwise direction, the plug side groove portions 24, 25 and the body side groove portions 34, 35 are arranged to cross each other, and the cock side groove unit 24 and 25 move to a position facing the liquid inflow port 36a and the liquid outflow port 37a, respectively, and the closed state of the liquid inflow port 36a and the liquid outflow port 37a by the outer peripheral surface 21a of the plug member 21 is released. Therefore, the liquid inflow port 36a and the liquid outflow port 37a and the main body side groove portions 34 and 35 are in a state of being bypassed (connected) by the plug side groove portions 24 and 25 (first state).

The main body side groove portions 34 and 35 have a cross-sectional shape formed into a curved surface. In the present embodiment, the outer peripheral surface 21a of the plug member 21 composed of the cylindrical member has a larger curved radius than the main body side grooves 34 and 35. As a result, in the first state, a gap is formed between the outer circumferential surface 21a of the cock member 21 and the main body side grooves 34 and 35. Therefore, the cock-side groove portions 24 and 25 can function as a liquid flow path.

Therefore, the liquid supplied from the upstream supply path 11a flows into the cock-side groove portion 24 through the liquid inflow port 36a of the liquid inflow path 36. The liquid that has flowed into the cock-side groove portion 24 flows into the cock-side groove portion 25 through the body-side groove portions 34 and 35. The liquid that has flowed into the cock-side groove portion 25 flows into the liquid outflow path 37 from the liquid outflow port 37a. The liquid that has flowed into the liquid outflow path 37 is supplied to the coating unit 40 via the downstream supply path 11b.

As described above, the valve 20 and the liquid supply method using the valve 20 can hold the liquid in the space S formed by the plug side groove portions 24 and 25 and the body side groove portions 34 and 35 in the second state. In the first state, the liquid outlets 37a are flowed through the main body side grooves 34 and 35 and the cock side grooves 24 and 25.

In other words, the valve 20 constitutes the main body side groove portions 34 and 35 and the cock side groove portions 24 and 25 which constitute the liquid holding space (the space S) in the second state in which the liquid supply path 11 is closed, and opens the liquid supply path 11 In the first state, the liquid flow paths that are the bypass liquid inflow path 36 and the liquid outflow path 37 function.

Therefore, in the second state, the liquid remaining in the gap (the space S) between the cock member 21 and the valve body 22 for a long period of time can be prevented. In this way, the occurrence of foreign matter caused by the residual liquid in the gap can be suppressed, and the occurrence of a problem in which the foreign matter flows out from the liquid outflow port 37a to the application portion 40 side (liquid supply target) can be caused by the opening and closing of the valve 20. Obtained inhibition.

The present invention is not limited to the above-described embodiments, and may be appropriately modified within the scope of the gist of the invention and the scope of the invention as set forth in the appended claims. For example, in the above embodiment, the case where the entire valve body 22 is made of a resin material is taken as an example, but the present invention is not limited thereto, and only a part of the valve body 22 may be made of a resin material. For example, the valve body 22 may be made of a resin material which is at least partially deformed by pressing (the vicinity of the liquid inflow port and the liquid outflow port), and the other portion is made of a metal material.

Further, in the above-described embodiment, the case where the plug valve of the present invention is applied to the coating device 100 that supplies the liquid to the application unit 40 via the liquid supply path 11 is taken as an example, but the present invention does not. Subject to this restriction.

For example, as a production facility for a factory (liquid supply) The plug valve of the present invention can also be applied to a liquid supply device that supplies a specific liquid from a liquid supply source and a valve that blocks the liquid supply path. According to this, by using the plug valve of the present invention to open and close the liquid supply path, the liquid supply target can supply the liquid, and therefore, it is possible to provide a highly reliable liquid supply method for suppressing the different flow of the liquid supply target. Further, it is also possible to provide a highly reliable liquid supply device which suppresses the different flow of the liquid supply target.

In this case, the type of the liquid to be supplied to the liquid supply target is not particularly limited, and the liquid having a high viscosity and having a foreign matter may be used as a valve for opening and closing the liquid supply path. The plug valve can be said to be appropriate.

Further, in the above-described embodiment, the contact surface 22a1 is pressed by adjusting the amount of locking of the nuts 28 and 29, and the contact state between the outer peripheral surface 21a of the plug member 21 and the liquid inflow port 36a and the liquid outflow port 37a is adjusted. However, the invention is not limited by this.

Here, as a modification of the valve, another aspect in which the contact state between the outer peripheral surface 21a of the plug member 21 and the liquid inflow port 36a and the liquid outflow port 37a is adjusted will be described.

Fig. 5 is a view showing a schematic configuration of a valve according to a modification, Fig. 5(a) is a valve according to a first modification, Fig. 5(b) is a valve according to a second modification, and Fig. 5(c) is a The valve of the third modification. In the fifth embodiment, the same components and configurations as those of the above-described embodiment are denoted by the same reference numerals, and the detailed description thereof will be omitted.

As shown in Fig. 5(a), the valve 20A of the first modification The tubular screws 38, 39 are mounted by screwing in (spinning into) the valve body 22. In the present modification, the bolts 41 and 42 are attached to the valve body 22 at positions corresponding to the body-side groove portions 34 and 35. The bolts 41, 42 are screwed into the screw holes formed in the valve body 22.

Since the valve body 22 is made of a resin material as described above, when the bolts 41 and 42 are screwed into the screw holes (not shown), the valve bodies 22 are pressed by the bolts 41 and 42 and are displaced inward. On the other hand, when the screwing bolts 41 and 42 are screwed in, the displacement toward the inner side of the valve body 22 is reduced.

According to the present modification, the valve body 22 is displaced by the screwing of the bolts 41 and 42 to the valve body 22, and the outer peripheral surface 21a of the plug member 21 and the liquid inflow port 36a and the liquid outflow port 37a can be easily adjusted. Contact state (closed state).

Further, the valve 20B according to the second modification is attached to the valve body 22 by the tubular screws 38 and 39 as shown in Fig. 5(b). Further, the valve 20B further has a ring member 43 disposed to surround the outer circumference of the valve body 22. The ring member 43 is formed by bending a plate-like member into a ring shape, and is fixed by a screw member 44 in a state where a gap is formed at both end portions. The ring member 43 is tightened by the screw member 44 to reduce the inner diameter of the ring member 43, and the inner diameter of the ring member 43 is increased by loosening the screw member 44.

The valve body 22 is made of a resin material as described above. Therefore, the valve body 22 is tightened by the screw member 44 to reduce the inner diameter of the ring member 43, and is thereby pressed toward the inner side to be displaced. On the other hand, the valve The body 22 is such that the inner diameter of the ring member 43 is increased by the loosening of the screw member 44, so that the displacement is reduced.

According to the present modification, the valve body 22 is displaced by the screw member 44 screwed into the ring member 43, and the contact state between the outer peripheral surface 21a of the plug member 21 and the liquid inflow port 36a and the liquid outflow port 37a can be easily adjusted. (closed state).

Further, in the valve 20C according to the third modification, as shown in Fig. 5(c), the tubular screws 38 and 39 are attached by screwing into the valve body 22. Further, the valve body 22 is screwed to the screw portions (not shown) provided on the outer surfaces of the tubular screws 38 and 39 via the O-rings 45 via the nuts 46 and 47.

When the nuts 46 and 47 are screwed in, the O-rings 45 are pressed by the nuts 46 and 47 and the valve body 22. Thereby, the valve body 22 is pressed inward by the pressed O-ring 45 and displaced therefrom. On the other hand, the valve body 22 is locked by the loosening nuts 46, 47, so that the pressing amount of the O-ring 45 is reduced, so that the displacement is reduced.

As described above, according to the present modification, the valve body 22 is displaced by screwing the nuts 46 and 47, and the contact state between the outer peripheral surface 21a of the plug member 21 and the liquid inflow port 36a and the liquid outflow port 37a can be easily adjusted ( Closed state).

Further, the shape of the pair of cock-side groove portions 24, 25 formed on the outer circumferential surface 21a of the cock member 21 is not limited to the shape shown in Fig. 4. Fig. 6 (a) to (c) are views showing a cross-sectional configuration of a modification of the cock-side groove portion.

For example, a pair of cock side grooves 24, 25, in the cock part The axial section of 21 may be a curved shape as shown in Fig. 6(a), or may be a triangular shape as shown in Fig. 6(b), or may be a sixth figure (c). Show the shape of the four corners.

In the above-described embodiment, the pair of cock-side groove portions 24 and 25 are formed on the outer circumferential surface 21a of the cock member 21, but the number of the cock-side groove portions is not limited thereto, and may be one, for example.

Fig. 7 is a cross-sectional view of a principal part of a valve 120 according to a modification, and Fig. 7(a) shows a state in which the valve 120 closes the liquid supply path, and Fig. 7(b) shows a state in which the valve 120 opens the liquid supply path.

In the valve 120 of the present modification, only the cock-side groove portion 124 (corresponding to the cock-side groove portion 24) is formed on the outer circumferential surface 121a of the cock member 121.

In Fig. 7(a), the plug side groove portion 24 and the body side groove portions 34, 35 are disposed so as to intersect each other at a specific angle. At this time, the liquid outflow port 37a communicates with the main body side groove portion 34 via the plug side groove portion 124, but the liquid inflow port 36a is closed by the outer peripheral surface 121a of the tap member 121. Therefore, the liquid inflow port 36a and the liquid outflow port 37a and the main body side groove portion 34 are in a state of being bypassed (connected) by the plug side groove portion 124 (second state).

On the other hand, by rotating the cock member 121 at a specific angle, the state in which the liquid inlet 36a and the liquid outlet 37a and the main body groove 34 are bypassed (connected) by the cock side groove portion 124 can be used. (1st state).

As shown in Fig. 7(b), if the position of the cock member 121 is When the counterclockwise direction is rotated at a specific angle, the plug side groove portion 124 and the body side groove portions 34, 35 are arranged to be parallel to each other, and the closed state of the liquid inflow port 36a caused by the outer peripheral surface 121a of the tap member 121 is released. The liquid inflow port 36a and the liquid outflow port 37a are in communication by the cock side groove portion 124. Therefore, the liquid inflow port 36a and the liquid outflow port 37a and the main body side groove portion 34 are in a state of being bypassed (connected) by the plug side groove portion 124 (first state).

According to the present modification shown in FIGS. 7(a) and 7(b), only the cock member 121 of the cock-side groove portion 124 can be formed using the outer peripheral surface 121a. Therefore, the processing of the cock member 121 becomes easy, and the cost of the valve 120 can be reduced.

Further, in the present modification, the case where the pair of main body side groove portions 34 and 35 are formed in the valve body 22 is exemplified, but only one of the main body side groove portions 34 and 35 may be formed. In this case, for example, when only the main body side groove portion 35 is formed, the rotation operation of the cock member 21 is changed from the position shown in FIGS. 7(a) and 7(b) to a position rotated by 180 degrees. Just fine.

Claims (10)

A plug valve capable of occluding a supply path of a liquid by a rotating action of a plug member attached to a valve body; the plug member includes a pair of cocking side grooves formed at a position spaced apart from each other by 180 degrees from the outer peripheral surface The valve body includes a liquid inflow port through which the liquid flows into the liquid, a liquid outflow port through which the liquid flows out to the outside, and a pair of main body side grooves facing the outer surface of the plug member; In the above-described turning operation, the plug valve is switched between a first state in which the liquid inflow port and the liquid outflow port and the pair of main body side grooves are bypassed by the pair of plug side grooves, and the liquid inflow port And a second state in which the liquid outlet port and the pair of body-side groove portions are not bypassed by the pair of cock-side groove portions. The plug valve according to claim 1, wherein in the first state, the pair of main body side groove portions and the pair of plug side groove portions are arranged to intersect each other, and in the second state, the pair of bodies The side groove portion and the pair of cock side groove portions are disposed in parallel to each other. A plug valve according to claim 1 or 2, wherein at least the liquid inflow port and the vicinity of the liquid outflow port of the valve body are made of a resin material. The plug valve of claim 3, wherein the liquid inlet of the valve body and the liquid outlet are adjacent to each other The outer surface of the plug component can be pressed. The plug valve according to claim 1 or 2, wherein the pair of plug members include a cylindrical member in which the plug side groove portion is formed, and the valve body has a curved surface in a cross section of the pair of body side grooves, and the outer circumference of the cylindrical member The surface has a larger radius of curvature than the pair of body side grooves. The plug valve of claim 3, wherein the pair of plug members include a cylindrical member formed with the plug side groove portion, wherein the valve body has a curved surface in a cross section of the pair of body side grooves, and the outer peripheral surface of the cylindrical member is The pair of body side groove portions have a large radius of curvature. A plug valve according to claim 4, wherein the pair of plug members include a cylindrical member formed with the plug side groove portion, and the valve body has a curved surface in a cross section of the pair of body side grooves, and the outer peripheral surface of the cylindrical member is The pair of body side groove portions have a large radius of curvature. A liquid supply method for supplying a liquid to a liquid supply target from a liquid supply source by opening and closing a valve provided in a liquid supply path; and using the plug valve according to any one of claims 1 to 7 as the valve system. A liquid supply device that supplies a liquid to a liquid supply target from a liquid supply source by opening and closing a valve provided in a liquid supply path, and a plug valve according to any one of claims 1 to 7 as the valve system. A coating apparatus comprising: a coating unit that applies a liquid to an object to be coated; a liquid supply path that supplies the liquid to the coating unit; and a valve that is provided in the liquid supply path; and the application as the valve system A plug valve according to any one of claims 1 to 7.