JP2015206069A - Film forming method, film forming apparatus, and method for manufacturing resin film with a metal thin film using the apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film forming method that prevents the deposition of sputter particles on both edges of an outer peripheral surface of a can roll while continuously and stably forming a film on both ends in the width direction of a substrate so as to have the same thickness as that at a central part of the substrate.SOLUTION: In a film forming method where a long resin film F conveyed by a roll-to-roll method is wound on an outer peripheral surface of a can roll 56 having the outer peripheral surface wider than the width of the film F and provided with a cooling mechanism to form a metal thin film on the surface of the resin film F by a dry plating method while cooling the resin film F, a pair of long thin film materials 71a, 71b are conveyed parallel to the conveyance direction of the resin film F by a roll-to-roll method so as to cover both edges of the outer peripheral surface not wound by the resin film F and to be respectively interposed between the resin film F and the outer peripheral surface on both edges in the width direction of the resin film F.

Description

  The present invention relates to a technique for forming a metal thin film on a resin film under reduced pressure.

  COF (Chip on Film) used for mounting a driver IC of a liquid crystal display, for example, forms a thin metal film by dry plating such as sputtering on one side of a resin film typified by, for example, a polyimide film. A metal layer made of copper is laminated thereon by a wet plating method such as electroplating, and the metal layer portion of the obtained resin film with a metal film is patterned to form a wiring. Since the resin film with a metal film produced by the above method has high adhesion between the metal layer and the resin film, highly reliable COF can be produced.

  However, since film formation by sputtering places a large heat load on the resin film, wrinkles may occur in the resin film. Therefore, a sputtering web coater in which a rotating cylindrical can roll having a cooling function is mounted in a vacuum chamber is generally used for an apparatus for film formation by sputtering. As for this can roll, the outer peripheral surface becomes the conveyance path | route of the resin film, and the resin film in sputtering processing is cooled from the back side by winding the long resin film conveyed by roll to roll around there. be able to.

  In the above can roll, in order to increase its cooling capacity, the width of the outer peripheral surface of the can roll is generally made wider than the width of the resin film. Therefore, when forming a film by sputtering, the sputtered particles that have entered slightly outside the widthwise end of the resin film are formed at the edge of the outer peripheral surface of the can roll around which the resin film is not wound. Thus, when the film-forming layer formed on the edge of the can roll peels off, it may adhere to the metal thin film of the resin film as a foreign substance, which may impair the quality of COF.

  As a countermeasure, Patent Document 1 discloses a long anti-adhesive material that covers both edges of the outer peripheral surface of the can roll exposed from both ends of the resin film during sputtering and both ends of the resin film. A method of running in a roll-to-roll manner with a film has been proposed. As another countermeasure, Patent Document 2 includes a shielding plate for blocking the incidence of sputtered particles outside both ends of the resin film, and both edges of the outer surface of the can roll not covered with the resin film. A method of winding a covering sheet around the part has been proposed.

JP 2000-54132 A JP 2006-77286 A

  Although the method of Patent Document 1 can prevent the formation of sputtered particles on both edges of the outer peripheral surface of the can roll, roll-to-roll has a winding position deviation or eccentricity caused by a winding roll or a winding roll. In some cases, when the resin film or the adhesion-preventing material is conveyed while meandering, the metal thin film formation surface may be displaced in the width direction of the resin film.

  Moreover, since the adhesion preventing material is run so as to cover both ends of the resin film, portions where no metal thin film is formed are formed at both ends of the resin film. That is, the conventional method cannot be used as a product because a metal thin film is not formed on both ends in the width direction of the resin film or only a metal thin film less than a predetermined film thickness is formed. It is necessary to slit these both ends in the process. For this reason, the effective use efficiency of the raw materials is lowered, which causes an increase in cost.

  Further, in the method of Patent Document 2, when the metal thin film attached to the covering sheet becomes thick, it is easy to peel off, and the inside of the apparatus may be contaminated or the peeled off piece may adhere to the film formation surface of the resin film. Furthermore, when the covering sheet is thermally deformed after long-term use, the resin film may be deformed. Therefore, in Patent Document 2, there is a limit to the thickness of the layer formed on the covering sheet and the time during which the film can be continuously formed on the resin film, and it is necessary to manage them.

  The present invention has been made in view of the above-described problems. When a metal thin film is continuously formed under reduced pressure on a long flexible substrate conveyed by roll-to-roll, the width of the substrate. An object of the present invention is to prevent the deposition of sputtered particles on both edges of the outer peripheral surface of the can roll while continuously forming a film having the same thickness as that of the central portion at both end portions in the direction.

  In order to achieve the above object, a film forming method according to the present invention is a cylinder having an outer peripheral surface wider than the width of a long base material conveyed by a roll-to-roll method and a cooling mechanism. A film forming method for forming a metal thin film on the surface of the base material by a dry plating method while being wound around the outer peripheral surface of the cylindrical member and cooling, both edges of the outer peripheral surface where the base material is not wound A pair of long thin film materials are conveyed between the base material and the outer peripheral surface so as to be interposed between the base material and the outer peripheral surface at both ends in the width direction of the base material that covers the respective portions and are wound around the outer peripheral surface. It is characterized by being conveyed in a roll-to-roll manner in parallel with the direction.

  In addition, the film forming apparatus of the present invention cools an unwinding roll and a winding roll that convey a long base material in a roll-to-roll manner, and the base material wound around an outer peripheral surface wider than its width. A film forming apparatus comprising a cylindrical member provided with a cooling mechanism, a metal supply source for forming a metal thin film on a base material wound around the cylindrical member, and a vacuum chamber for housing these metal members, A pair of thin film materials covering both edges of the surface around which the base material is not wound and interposed between the base material and the outer peripheral surface at both ends in the width direction of the base material wound around the outer peripheral surface It is characterized by having a pair of unwinding rolls and winding rolls for the thin film material for transporting the film in a roll-to-roll manner in parallel with the transport direction of the base material.

  According to the present invention, it is possible to form a metal thin film having a substantially uniform thickness from one end to the other in the width direction of a long substrate, and the substrate is wound around the outer surface of the can roll. It is possible to prevent the sputtered particles from being deposited on both edges. This makes it possible to provide an extremely high quality resin film with a metal film.

It is a front view which shows one specific example of the film-forming apparatus of this invention. It is a fragmentary sectional view which shows the outer peripheral part of the can roll which opposes the sputtering target in the film-forming apparatus of FIG. 1 with a shielding material, a pair of thin film material, and a resin film. It is a front view which shows the other specific example of the film-forming apparatus of this invention. It is a fragmentary sectional view which shows the outer peripheral part of the can roll which opposes the sputtering target in the other specific example of the film-forming apparatus of this invention with a shielding material, a pair of thin film material, and a resin film.

  Hereinafter, a specific example of the film forming method of the present invention will be described by taking up a vacuum film forming apparatus (sputtering web coater) 50 capable of suitably performing the film forming method of the present invention shown in FIG. This vacuum film-forming apparatus 50 includes a cooling mechanism in which a resin film F as a long film-forming substrate to be transported by roll-to-roll from an unwinding roll 52 to a winding roll 64 in a vacuum chamber 51 is provided. And a film forming apparatus for continuously forming a metal thin film on the front side by sputtering while being wound around the outer peripheral surface of a cylindrical can roll 56 which is wider than the width of the resin film F and cooled from the back side.

Specifically, the vacuum chamber 51 that accommodates main equipment includes various devices such as a dry pump, a turbo molecular pump, and a cryocoil (not shown), and the ultimate pressure of 10 ⁻⁴ in the vacuum chamber is thereby achieved. After the pressure is reduced to about Pa, a pressure of about 0.1 to 10 Pa can be adjusted by introducing a sputtering gas such as argon gas or oxygen gas added according to the purpose. The shape and material of the vacuum chamber 51 are not particularly limited as long as they can withstand the above-described reduced pressure state, and general ones can be used.

  Various rolls that define the transport path of the resin film F are provided in the vacuum chamber 51, and among them, the transport path from the unwind roll 52 to the can roll 56 is unwound from the unwind roll 52. A free roll 53 that guides the resin film F, a tension sensor roll 54 that measures the tension of the resin film F, and a motor-driven feed roll 55 that introduces the resin film F fed from the tension sensor roll 54 into the can roll 56. Are arranged in this order.

  Also in the transport path from the can roll 56 to the take-up roll 64, similarly to the above, a motor-driven feed roll 61 that adjusts the peripheral speed of the can roll 56, a tension sensor roll 62 that measures the tension of the resin film F, And the free roll 63 which guides the resin film F is arrange | positioned in this order.

  In the unwinding roll 52 and the winding roll 64, torque control is performed by a powder clutch or the like, and the tension balance of the resin film F is maintained in combination with the feed rolls 55 and 61. The can roll 56 that is rotationally driven by a motor is provided with a refrigerant flow path inside to cool the resin film F that is heated by a sputtering process with a heat load, and is shown outside the vacuum chamber 51. The refrigerant is circulated with the refrigerant supply device that does not. The rotational speeds of the feed rolls 55 and 61 are adjusted with respect to the peripheral speed of the can roll 56, whereby the resin film F can be brought into close contact with the outer peripheral surface of the can roll 56 and conveyed.

  Four magnetron sputtering cathodes 57, 58, 59, and 60, which are metal thin film metal supply sources, are provided in this order along the transport path of the resin film F at a position facing the outer peripheral surface of the can roll 56. . Each of the magnetron sputtering cathodes 57 to 60 has a target (not shown) attached to the surface facing the outer peripheral surface of the can roll 56, and sputtered particles sputtered from these targets are on the surface of the resin film F. A metal thin film is deposited on top of the film.

  Can rolls can be disposed at positions closer to the can roll 56 than the sputtering cathodes 57 to 60 except for a front portion of the target that is sputtered from the target and serves as a travel path of sputtered particles toward the resin film on the outer peripheral surface of the can roll. Five plate-shaped shielding plates 81, 82, 83, 84, and 85 are detachably attached along the transport path of the resin film F in this order so as to cover the outer peripheral surface of 56. Two adjacent shielding plates are arranged so as to contact each other in the vicinity of a substantially central portion of each target surface, and each shielding plate is formed with a rectangular cutout at a position corresponding to the front portion of the target. . Note that the number of shielding plates is not limited to five, and the number of shielding plates may be larger or smaller in consideration of the size of the can roll 56 and workability when the shielding plates are attached and detached. Further, the shielding plate may be configured by a curved surface along the outer peripheral surface of the can roll 56.

  As described above, one opening formed by each notch between the adjacent shielding plates has a width direction of the resin film F in which the sputtered particles knocked out from the target are wound around the outer peripheral surface of the can roll 56. It is a size that does not block reaching the end. Thereby, it becomes possible to form a metal thin film with a substantially constant film thickness from end to end in the width direction of the resin film F, and it is necessary to slit both ends in the width direction of the resin film in the post-sputter film forming step. Disappear.

  However, the amount of sputtered particles deposited on both edges of the outer peripheral surface of the can roll 56 that are not covered with the resin film F by forming a metal thin film having a substantially constant film thickness on the entire surface of the resin film in this way. However, it will increase compared with the conventional film-forming apparatus which does not form into a film in the width direction both ends of the resin film F. Therefore, when the method of winding the covering sheet around both edges not covered with the resin film on the outer peripheral surface of the can roll as shown in Patent Document 1 described above, the amount of film formation on the covering sheet per unit time increases. For this reason, the replacement frequency of the covering sheet is increased, or the thickness of the film to be formed on the resin film and the time for continuously forming the film are restricted, resulting in a decrease in productivity.

  Therefore, in the vacuum film forming apparatus of one specific example of the present invention, a pair of long thin film materials are transported in a roll-to-roll manner in parallel with the transport direction of the resin film, and thereby the resin film of the outer peripheral surface of the can roll By covering both edges not wound with a pair of thin film materials, deposition at both edges is prevented. Referring to FIG. 1, the pair of thin film materials 71 a and 71 b unwound in parallel with the transport direction of the resin film F from the thin film material unwinding roll 72 has one end in the width direction of the feed roll 55. After being superposed on the non-deposition surface side of both end portions in the width direction of the resin film F on the outer peripheral surface, the resin film F is wound around the outer peripheral surface of the can roll 56 as it is.

  As a result, the pair of thin film materials 71 a and 71 b covers both edge portions around which the resin film F is not wound on the outer peripheral surface of the can roll 56, and the outer peripheral surfaces of the resin film F and the can roll 56 at both ends in the width direction of the resin film F. Is wound around the can roll 56 so as to be interposed between the two. The resin film F and the pair of thin film materials 71 a and 71 b are then moved away from the outer peripheral surface of the can roll 56 toward the feed roll 61 while being overlapped. The resin film F passes through the feed roll 61 and goes to the tension sensor roll 62, while the pair of thin film materials 71a and 71b leave the resin film F and go to the thin film material take-up roll 73.

  As a result, both edge portions of the outer peripheral surface of the can roll 56 are constantly updated by the pair of thin film materials 71a and 71b, so that the deposit has a film thickness enough to peel off naturally on the surfaces of the pair of thin film materials 71a and 71b. Does not form a film. Moreover, since only the both ends of the resin film F overlap with each other using the pair of thin film materials 71 a and 71 b, the central portion in the width direction of the resin film F can be directly adhered to the outer peripheral surface of the can roll 56. Further, the thermal conductivity is not lowered, and the consumption cost of the thin film material can be suppressed.

  The width at which one end of each of the thin film materials 71a and 71b overlaps the resin film F is preferably 1 to 30 mm. When the overlapping width is less than 1 mm, the thin film materials 71a and 71b and the resin film F respectively conveyed by the roll-to-roll method travel while meandering separately, and the thin film materials 71a and 71b and the resin film F are in the width direction. There is a possibility that the outer peripheral surface of the can roll 56 is exposed to be spaced apart and the sputtered particles are deposited there. On the other hand, when the overlap width exceeds 30 mm, the cooling efficiency of the overlap portion due to the can roll 56 decreases as described above, and thus wrinkles may occur at the end of the resin film F.

  In each thin film material 71a, 71b, the other end opposite to the one end overlapping with the resin film F reaches the end in the width direction of the outer peripheral surface of the can roll 56 as shown in FIG. The outer surface of the can roll may be covered so as not to be exposed at all. However, the end portion of the can roll 56 has little or no deposit of sputter particles due to the action of the shielding plate described above. However, it is not always necessary to cover the end portion of the can roll 56 as long as the influence is negligible.

  As described above, since the pair of thin film materials 71a and 71b and the resin film F are separately conveyed by the roll-to-roll method, the conveyance speed may be different. Since this speed difference can cause scratches and wrinkles in the resin film F, the thin film material unwinding roll 72 and the thin film material windup roll 73 are controlled by torque control with a powder clutch or the like to suppress the speed difference. preferable. When it is desired to further reduce the occurrence of scratches and wrinkles on the resin film F, the thin film material unwinding roll 72 and the feed roll 55 and the feed roll 61 It is desirable to provide an auxiliary feed roll 74 and a free roll 75 with a tension meter, respectively, between the thin film material take-up roll 73. By controlling the rotation speed of the auxiliary feed roll 74 in synchronization with the rotation speed of the can roll 56, the thin film materials 71 a and 71 b can be prevented from “sliding” with respect to the resin film F and the can roll 56. By controlling the torque of the powder clutch of the unwinding roll 72 for the thin film material and the winding roll 73 for the thin film material so as to keep the tension of the free roll 75 at a constant value, the thin film materials 71a and 71b can be stably conveyed. I can do it.

  Each of the thin film material unwinding roll 72 and the thin film material winding roll 73 may be composed of two rolls that are driven separately corresponding to the pair of thin film materials 71a and 71ba. Since the material 71a and the thin film material 71b are separately conveyed by the roll-to-roll method, the conveyance speed may be different between the thin film material 71a and the thin film material 71b. Therefore, the thin film material 71a and the thin film material 71b are arranged via a common axis (core axis), and the core axis serves as a friction shaft to absorb the speed difference between the thin film materials 71a and 71b. preferable.

  Since the thin film materials 71a and 71b are transported by roll tools, a flexible member such as a resin film or metal foil is used as the material. In particular, as described above, the thin film materials 71a and 71b and the resin film F Those that do not cause scratches or wrinkles on the resin film F side when a speed difference is present are preferred. An example of such a member is a PET film.

  The thickness of the thin film material is preferably 100 μm or less. When the thickness of the thin film material exceeds 100 μm, a prominent inclined portion is formed between the overlapping portion and the non-overlapping portion due to the thin film materials 71a and 71b at both end portions in the width direction of the resin film F. Since the laminated surface is inclined with respect to the traveling direction, the deposition rate per unit area is reduced, and the thickness of the metal thin film in the width direction of the resin film F becomes nonuniform. The lower limit of the thickness of the thin film materials 71a and 71b is not particularly limited, but is preferably about 5 μm in consideration of handling property in conveyance by a roll-to-roll method.

  By the way, since the outer peripheral surface of the can roll is not flat when viewed microscopically, the resin film wound around the outer peripheral surface is not completely in close contact with the outer peripheral surface. There is a gap (gap) that is separated through a vacuum space between the resin film being conveyed. Therefore, when the thermal load of the resin film and the thin film material generated with the sputtering process is increased for reasons such as increasing the deposition rate, wrinkles due to heat are likely to occur. In order to suppress this, a gas introduction mechanism may be provided in the can roll, and gas may be introduced into the gap portion formed by the can roll and the resin film. Thereby, since the heat transfer coefficient in the space of the gap portion can be increased, the cooling efficiency is improved, and the generation of wrinkles can be suppressed more reliably.

  For example, as shown in FIG. 4, the gas introduction mechanism has a plurality of gas introduction paths 91 parallel to the rotation axis direction of the can roll 156 over the entire circumference of the thick portion of the can roll 156 formed of a cylindrical member. A plurality of gas discharge holes 92 opened on the outer peripheral surface side of the can roll 156 may be formed in each gas introduction path 91 at substantially equal intervals along the rotation line direction of the can roll 156. Although FIG. 4 shows an example in which ten gas discharge holes 92 are provided in the region where the resin film F is wound, the number is not limited to this. Moreover, you may provide a gas discharge | release hole in the area | region where a pair of thin film materials 71a and 71b are wound. The inner diameter of each gas discharge hole 92 is not particularly limited as long as the gas can be satisfactorily introduced into the gap formed between the surface of the can roll 156 and the resin film F to be wound. It can be about 500 μm.

  A gas is supplied from the outside of the vacuum chamber 51 to the above-described plurality of gas introduction paths 91 through, for example, a rotary joint. The pressure of the supplied gas is preferably 10 to 1000 Pa. If this pressure is less than 10 Pa, the difference between the pressure of the sputtering gas in the vacuum chamber 51 is small, the distance between the outer peripheral surface of the can roll 156 and the resin film F wound around it becomes unstable, and the cooling efficiency is improved. There is a risk of wrinkling. On the other hand, when this pressure exceeds 1000 Pa, exhaust from the vacuum chamber 51 by a dry pump or the like cannot catch up, the pressure in the vacuum chamber 51 becomes unstable, and stable film formation may not be performed.

  When a resin film with a metal thin film is produced using the film forming method of the present invention, a heat resistant resin film such as a polyimide film or a liquid crystal polymer film, or a resin film such as a polyethylene terephthalate (PET) film is used as the resin film. Can be used. Examples of the metal thin film to be formed include a laminate in which a seed layer made of a Ni-based alloy or the like and a Cu film thereon are laminated. Specifically, various known alloys such as Ni—Cr alloy, Inconel, Constantan, and Monel can be used as the material of the seed layer. The composition is selected according to desired characteristics such as electrical insulation and migration resistance of the resin film with metal thin film. The metal thin film may be formed only on one side of the resin film, or may be formed on both sides. In any case, the film can be formed between the metal thin film and the resin film without using an adhesive.

  The metal film with a metal thin film thus obtained can be further thickened using a wet plating method. In this case, the wet plating method may be performed by combining electroless plating treatment as primary plating and electrolytic plating treatment as secondary plating in addition to the case of laminating a metal film only by electroplating treatment. Specific operating conditions of these wet plating processes are not particularly limited, and various conditions of a general wet plating method can be employed. A COF can be obtained by patterning a wiring on the metal film thus formed by, for example, a subtractive method. Here, the subtractive method is a method of manufacturing a flexible wiring board by removing a metal film (for example, the Cu film) not covered with a resist by etching.

  As described above, the film forming method of the present invention has been described by exemplifying the case where the film forming process is performed on the resin film as the long base material by sputtering. However, the present invention is not limited to this. As a scale-like base material, it can be applied to a metal thin plate or foil that can be conveyed by a roll-to-roll method, a flexible glassy substrate, or the like. In addition to film formation by sputtering, it can also be applied to ion plating, vacuum deposition, chemical vapor deposition (CVD), and the like.

(Example)
Using a sputtering web coater as shown in FIG. 1, an alloy layer of Ni-20 mass% Cr is formed as a seed layer on the surface of a long polyimide film having a thickness of 38 μm as a resin film F conveyed by roll-to-roll. Further, a Cu layer was formed thereon. Specifically, a roll in which a polyimide film is wound is mounted on the unwinding roll 52, a Ni-20 mass% Cr alloy target is mounted on the magnetron sputtering cathode 57, and a Cu target is mounted on the magnetron sputtering cathodes 58-60. Attached. Further, two rolls each having a long PET film having a width of 20 mm and a thickness of 12 μm were prepared as the pair of thin film materials 71 a and 71 b, and these were mounted on the unwinding roll 72 for the thin film material. At that time, one end in the width direction of one thin film material overlaps with one end portion in the width direction of the polyimide film, and one end in the width direction of another thin film material overlaps with the other end portion in the width direction of the polyimide film. Arranged.

  Further, shield plates 81 to 85 having openings adjusted so that the sputtered particles struck out from the targets of the magnetron sputtering cathodes 57 to 60 reach the ends of the polyimide film in the width direction were attached. For the can roll, a can roll 156 provided with a gas introduction mechanism including a gas introduction path 91 and a gas discharge hole 92 as shown in FIG. 4 was used, and a refrigerant was circulated through the flow path inside the can roll 156. First, in order to form a 3.5 nm thick Ni-20 mass% Cr alloy layer and a 100 nm thick Cu layer on one side of the polyimide film under the condition that no gas is supplied to the gas introduction path 90, the polyimide film The PET film was transported 1000 m at a transport speed of 1 m / min, and vacuum film formation was performed.

  When the film thickness of the obtained film formation surface was measured, the film thickness difference between the width direction center part and the width direction both ends of the polyimide film was within 10% based on the film thickness of the center part, and it was almost uniform. It was filmed. In addition, the polyimide film after film formation had slight wrinkles due to heat load, but this was not a practically problematic level.

  Next, a film was formed under the same conditions as above while supplying 500 Pa of argon gas to the gas introduction path 90. When the film thickness of the obtained film formation surface was measured, the difference in film thickness between the central portion in the width direction and both end portions in the width direction of the polyimide film was within 10% based on the film thickness in the central portion, and the film was formed almost uniformly. It had been. In addition, the polyimide film after film formation was not wrinkled due to heat load. This is because the cooling efficiency is improved by introducing argon gas into the gap between the outer peripheral surface of the can roll 156 and the polyimide film wound around the can roll 156 via the gas introduction mechanism, This is probably because the temperature decreased.

(Comparative example)
Instead of running a PET film having a thickness of 12 μm in a roll-to-roll manner, the PET film having a thickness of 12 μm was previously attached to a portion where the polyimide film was not wound on the outer peripheral surface of the can roll. A film was formed in the same manner as when no gas was introduced. When the film thickness of the obtained film formation surface was measured, the film thickness difference between the width direction center part and the width direction both ends of the polyimide film was within 10% based on the film thickness of the center part, and it was almost uniform. It was filmed. However, the metal thin film formed on the PET film adhered to the outer peripheral surface of the can roll has many peeling marks, and the metal film formed on the polyimide film has a large number of metal flakes. Foreign matter was observed.

F Resin film 50, 150 Vacuum film forming apparatus 51 Vacuum chamber 52 Unwinding roll 53, 63 Free roll 54, 62 Tension sensor roll 55, 61 Feed roll 56, 156 Can roll 57, 58, 59, 60 Magnetron sputtering cathode 64 winding Take-up rolls 71a, 71b Thin film material 72 Unwind roll for thin film material 73 Take-up roll for thin film material 81, 82, 83, 84, 85 Shield plate 91 Gas introduction path 92 Gas discharge hole

Claims (9)

A long base material conveyed by a roll-to-roll method is wound around the outer peripheral surface of a cylindrical member having an outer peripheral surface wider than its width and provided with a cooling mechanism while cooling the base material. A film forming method for forming a metal thin film on the surface of the substrate by dry plating,
Covering both edges of the outer peripheral surface around which the base material is not wound, and being interposed between the base material and the outer peripheral surface at both ends in the width direction of the base material wound around the outer peripheral surface, respectively. A film forming method characterized by transporting a pair of long thin film materials in a roll-to-roll manner in parallel with the transport direction of the substrate.   The film forming method according to claim 1, wherein the metal thin film is formed from end to end in the width direction of the base material.   The film forming method according to claim 2, wherein the thin film material has a thickness of 100 μm or less.   The length of the part where the said thin film material overlaps among the length of the width direction of the said base material is 1-30 mm per one end part, The film-forming of Claim 2 or Claim 3 characterized by the above-mentioned. Method.   The cylindrical member has a plurality of gas discharge holes on an outer peripheral surface thereof, and gas is introduced from the plurality of gas discharge holes between the outer peripheral surface and the base material wound around the outer peripheral surface. The film-forming method in any one of Claims 2-4.   A metal thin film is formed by using the film forming method according to claim 1 to form a metal thin film on at least one surface of the resin film as the substrate without using an adhesive. A method for producing a resin film. A winding roll and a take-up roll that convey a long base material in a roll-to-roll manner, and a cylindrical member that includes a cooling mechanism that winds and cools the base material around an outer peripheral surface wider than its width; A film forming apparatus comprising a metal supply source for forming a metal thin film on a base material wound around the cylindrical member, and a vacuum chamber for housing them.
A pair of the outer peripheral surfaces that cover both edges of the base material that are not wound and are interposed between the base material and the outer peripheral surface at both ends in the width direction of the base material that is wound around the outer peripheral surface. A film forming apparatus comprising: a pair of thin film material unwinding rolls and winding rolls for transporting a thin film material in a roll-to-roll manner in parallel with the transport direction of the base material.   8. The gas discharge hole for introducing gas is provided on the outer peripheral surface of the cylindrical member between the outer peripheral surface and a long base material wound around the outer peripheral surface. Film forming equipment.   A sputtering web coater, wherein the metal supply source according to claim 7 or 8 is a magnetron sputtering target, and the cylindrical member is a can roll.

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