JP2015201587A - semiconductor laser drive circuit - Google Patents

semiconductor laser drive circuit Download PDF

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JP2015201587A
JP2015201587A JP2014080797A JP2014080797A JP2015201587A JP 2015201587 A JP2015201587 A JP 2015201587A JP 2014080797 A JP2014080797 A JP 2014080797A JP 2014080797 A JP2014080797 A JP 2014080797A JP 2015201587 A JP2015201587 A JP 2015201587A
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current
semiconductor lasers
semiconductor laser
semiconductor
current source
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進吾 宇野
Shingo Uno
進吾 宇野
東條 公資
Kimitada Tojo
公資 東條
直也 石垣
Naoya Ishigaki
直也 石垣
次郎 齊川
Jiro Saikawa
次郎 齊川
廣木 知之
Tomoyuki Hiroki
知之 廣木
一郎 福士
Ichiro Fukushi
一郎 福士
章之 門谷
Akiyuki Kadoya
章之 門谷
隼規 坂本
Junki Sakamoto
隼規 坂本
一馬 渡辺
Kazuma Watanabe
一馬 渡辺
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Shimadzu Corp
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Shimadzu Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor laser drive circuit capable of performing APC control at high speed.SOLUTION: The semiconductor laser drive circuit includes: a plurality of semiconductor lasers LD-LDconnected in series; a current source 2 from which currents flow to the plurality of semiconductor lasers; a current source drive circuit 3 which drives the current source to control the currents of the current source; detection means 5 for detecting laser lights from the plurality of semiconductor lasers; a current control element 4 connected from the final semiconductor laser LDamong the plurality of semiconductor lasers to one or more semiconductor lasers including the final semiconductor laser; and a current quantity control circuit 6 which controls the current control element on the basis of output of the detection means to control current quantities of one or more semiconductor lasers.

Description

本発明は、複数の半導体レーザを駆動する半導体レーザ駆動回路に関する。   The present invention relates to a semiconductor laser driving circuit for driving a plurality of semiconductor lasers.

複数の半導体レーザを駆動する半導体レーザ駆動回路において、特許文献1は、各々の半導体レーザに対してAPC(オートパワーコントロール)回路を設け、このAPC回路により、各々の半導体レーザの出力を所定値に制御することにより独立に安定化させている。   In a semiconductor laser driving circuit for driving a plurality of semiconductor lasers, Patent Document 1 provides an APC (auto power control) circuit for each semiconductor laser, and the output of each semiconductor laser is set to a predetermined value by this APC circuit. It is stabilized independently by controlling.

特開2007−49051号公報JP 2007-49051 A

しかしながら、特許文献1では、APC回路が半導体レーザと同数だけ必要となり、構成が複雑化する。また、複数の半導体レーザを直列に接続した場合には、駆動電流が共通となるため、上述した手法を用いることはできない。1つの半導体レーザの出力に基づきAPC回路で光量調整を行うと、その他の半導体レーザの出力を安定化することはできない。   However, Patent Document 1 requires the same number of APC circuits as the number of semiconductor lasers, and the configuration becomes complicated. In addition, when a plurality of semiconductor lasers are connected in series, the drive current is common, so the above-described method cannot be used. If the light amount is adjusted by the APC circuit based on the output of one semiconductor laser, the outputs of the other semiconductor lasers cannot be stabilized.

また、全ての半導体レーザの合成出力に対してAPC制御することはできるが、直列に接続された半導体レーザは、駆動回路の浮遊成分(例えば浮遊容量)が大きくなるため、高周波成分が減衰して、高速にAPC制御できない。   In addition, although APC control can be performed on the combined output of all semiconductor lasers, the semiconductor lasers connected in series have a large floating component (for example, stray capacitance) in the drive circuit. APC cannot be controlled at high speed.

また、並列に接続された半導体レーザにおいても、例えば浮遊成分が並列に接続されて大きくなるため、高周波成分が減衰し、高速にAPC制御できない。   Also, in the semiconductor lasers connected in parallel, for example, floating components are connected and increased in parallel, so that high frequency components are attenuated and APC control cannot be performed at high speed.

本発明の課題は、高速にAPC制御することができる半導体レーザ駆動回路を提供することにある。   An object of the present invention is to provide a semiconductor laser driving circuit capable of performing APC control at high speed.

上記の課題を解決するために、本発明に係る半導体レーザ駆動回路は、直列に接続された複数の半導体レーザと、前記複数の半導体レーザに電流を流す電流源と、前記電流源を駆動して前記電流源の電流を制御する電流源駆動回路と、前記複数の半導体レーザからのレーザ光を検出する検出手段と、前記複数の半導体レーザの内の最後の半導体レーザから最後の半導体レーザを含む1個以上の半導体レーザに接続された電流制御素子と、前記検出手段の出力に基づき前記電流制御素子を制御することにより前記1個以上の半導体レーザの電流量を制御する電流量制御回路とを備えることを特徴とする。   In order to solve the above-described problems, a semiconductor laser driving circuit according to the present invention includes a plurality of semiconductor lasers connected in series, a current source for passing a current through the plurality of semiconductor lasers, and driving the current source. 1 includes a current source driving circuit for controlling the current of the current source, detection means for detecting laser light from the plurality of semiconductor lasers, and a last semiconductor laser to a last semiconductor laser of the plurality of semiconductor lasers. A current control element connected to one or more semiconductor lasers, and a current amount control circuit for controlling a current amount of the one or more semiconductor lasers by controlling the current control element based on an output of the detection means. It is characterized by that.

また、半導体レーザ駆動回路は、並列に接続された複数の半導体レーザと、前記複数の半導体レーザに接続される電圧源と、前記複数の半導体レーザに対応して設けられ、前記半導体レーザに直列に接続された複数の電流制御素子と、前記複数の半導体レーザからのレーザ光を検出する検出手段と、前記検出手段の出力に基づき前記複数の電流制御素子の内の1つの電流制御素子を除く残りの電流制御素子を駆動することにより前記残りの半導体レーザに電流を流す駆動回路と、前記検出手段の出力に基づき前記1つの電流制御素子を制御することにより前記検出手段の出力を所定値に制御するパワー制御回路とを備えることを特徴とする。   The semiconductor laser driving circuit is provided corresponding to the plurality of semiconductor lasers connected in parallel, the voltage source connected to the plurality of semiconductor lasers, and the plurality of semiconductor lasers, and connected in series to the semiconductor lasers. A plurality of connected current control elements, detection means for detecting laser light from the plurality of semiconductor lasers, and the rest excluding one current control element among the plurality of current control elements based on the output of the detection means A drive circuit for supplying current to the remaining semiconductor lasers by driving the current control element, and controlling the one current control element based on the output of the detection means to control the output of the detection means to a predetermined value And a power control circuit.

本発明に係る半導体レーザ駆動回路によれば、複数の半導体レーザを直列に又は並列に接続した場合でも高速にAPC制御することができる半導体レーザ駆動回路を提供できる。   The semiconductor laser drive circuit according to the present invention can provide a semiconductor laser drive circuit capable of performing APC control at high speed even when a plurality of semiconductor lasers are connected in series or in parallel.

本発明の実施例1に係る半導体レーザ駆動回路の構成を示すブロック図である。1 is a block diagram showing a configuration of a semiconductor laser drive circuit according to Example 1 of the present invention. 本発明の実施例1の変形例に係る半導体レーザ駆動回路の構成を示すブロック図である。It is a block diagram which shows the structure of the semiconductor laser drive circuit which concerns on the modification of Example 1 of this invention. 本発明の実施例2に係る半導体レーザ駆動回路の構成を示すブロック図である。It is a block diagram which shows the structure of the semiconductor laser drive circuit which concerns on Example 2 of this invention. 本発明の実施例2の変形例に係る半導体レーザ駆動回路の構成を示すブロック図である。It is a block diagram which shows the structure of the semiconductor laser drive circuit which concerns on the modification of Example 2 of this invention. 本発明の実施例3に係る半導体レーザ駆動回路の構成を示すブロック図である。It is a block diagram which shows the structure of the semiconductor laser drive circuit which concerns on Example 3 of this invention.

以下、本発明の半導体レーザ駆動回路の実施の形態について、図面を参照しながら詳細に説明する。   Hereinafter, embodiments of a semiconductor laser driving circuit of the present invention will be described in detail with reference to the drawings.

図1は、本発明の実施例1に係る半導体レーザ駆動回路の構成を示す回路図である。この半導体レーザ駆動回路は、定電流源2、電流源駆動回路3、複数の半導体レーザLD〜LD、MOSFET4、フォトダイオード(PD)5、電流量制御回路6aを有している。 FIG. 1 is a circuit diagram showing a configuration of a semiconductor laser driving circuit according to Embodiment 1 of the present invention. This semiconductor laser driving circuit includes a constant current source 2, a current source driving circuit 3, a plurality of semiconductor lasers LD 1 to LD N , a MOSFET 4, a photodiode (PD) 5, and a current amount control circuit 6a.

複数の半導体レーザLD〜LDは、直列に接続され、最初の半導体レーザのLDのアノード(一端)に電流源2が接続されている。電流源2は、複数の半導体レーザLD〜LDに定電流を流す。 The plurality of semiconductor lasers LD 1 to LD N are connected in series, and the current source 2 is connected to the anode (one end) of the LD 1 of the first semiconductor laser. The current source 2 supplies a constant current to the plurality of semiconductor lasers LD 1 to LD N.

電流源駆動回路3は、電流源2を駆動して電流源2の電流を制御する。フォトダイオード5は、本発明の検出手段に対応し、複数の半導体レーザLD〜LDからの合成レーザ光を検出する。 The current source drive circuit 3 controls the current of the current source 2 by driving the current source 2. The photodiode 5 corresponds to the detection means of the present invention, and detects the combined laser light from the plurality of semiconductor lasers LD 1 to LD N.

MOSFET4は、本発明の電流制御素子に対応し、複数の半導体レーザLD〜LDの内の最後の半導体レーザLDのアノードにドレインが接続されている。MOSFET4のソースは基準電位、例えばグランドに接続される。MOSFET4のゲートは電流量制御回路6aに接続される。 MOSFET4 corresponds to the current control device of the present invention, the drain to the anode of the last of the semiconductor laser LD N of the plurality of semiconductor lasers LD 1 to Ld N are connected. The source of the MOSFET 4 is connected to a reference potential, for example, ground. The gate of the MOSFET 4 is connected to the current amount control circuit 6a.

電流量制御回路6aは、フォトダイオード5の出力に基づきMOSFET4を制御することにより半導体レーザLDの電流量を制御する。また、電流量制御回路6aは、フォトダイオード5の出力が所定値になるように制御することにより半導体レーザLDの電流量を制御する。 Current control circuit 6a controls the current amount of the semiconductor laser LD N by controlling the MOSFET4 based on the output of the photodiode 5. Further, the current control circuit 6a controls the current amount of the semiconductor laser LD N by the output of the photodiode 5 is controlled to be a predetermined value.

次にこのように構成された実施例1の半導体レーザ駆動回路の動作を図1を参照しながら説明する。   Next, the operation of the semiconductor laser drive circuit according to the first embodiment configured as described above will be described with reference to FIG.

まず、複数の半導体レーザLD〜LDには、電流源2からの電流Iが流れる。この電流Iは、並列に接続されたMOSFET4と半導体レーザLDとに分岐する。MOSFET4に電流Iが流れ、半導体レーザLDに電流(I−I)が流れる。 First, the current I 2 from the current source 2 flows through the plurality of semiconductor lasers LD 1 to LD N. The current I 2 is branched into a MOSFET4 connected in parallel with the semiconductor laser LD N. MOSFET4 current I 4 flows in, a current flows (I 2 -I 4) on the semiconductor laser LD N.

電流Iは、フォトダイオード5からの出力に基づき、電流量制御回路6aによりMOSFET4を制御することにより決定される。電流源2の電流値制御は、全ての半導体レーザLD〜LDや配線の浮遊成分が影響するため、高速に制御することはできない。 The current I 4 is determined by controlling the MOSFET 4 by the current amount control circuit 6 a based on the output from the photodiode 5. The current value control of the current source 2 cannot be controlled at high speed because all the semiconductor lasers LD 1 to LD N and the floating components of the wiring are affected.

これに対して、電流量制御回路6aによる制御対象は、半導体レーザLDとMOSFET4とによる小さな回路で閉じており、浮遊成分は小さいため、高速なAPC制御が可能となる。 In contrast, the object of control by the current control circuit 6a, is closed by a small circuit of the semiconductor laser LD N and MOSFET 4, because the floating component is small, thereby enabling high-speed APC control.

このように実施例1の半導体レーザ駆動回路によれば、複数の半導体レーザLD〜LDの全体の出力は電流源2を用いて制御することができる。また、直列に接続された複数の半導体レーザLD〜LDの浮遊成分の影響を受けず、半導体レーザLDとMOSFET4とによる小さい回路でAPC回路が閉じているため、浮遊成分は小さくなり、高速にAPC制御が可能となる。また、1つの半導体レーザLD分の光量の範囲で、APC制御することができる。 As described above, according to the semiconductor laser drive circuit of the first embodiment, the entire outputs of the plurality of semiconductor lasers LD 1 to LD N can be controlled using the current source 2. Further, without being affected by stray components of a plurality of semiconductor lasers LD 1 to Ld N connected in series, because the APC circuit is closed by a small circuit of the semiconductor laser LD N and MOSFET 4, the floating component is reduced, APC control can be performed at high speed. Further, in the range of one semiconductor laser LD N content of the light amount can be APC control.

さらに、フォトダイオード5から電流量制御回路6aに高速でフィードバックがかかるため、低速なノイズを除去することができる。   Further, since feedback is applied at high speed from the photodiode 5 to the current amount control circuit 6a, low-speed noise can be removed.

図2は、本発明の実施例1の変形例に係る半導体レーザ駆動回路の構成を示すブロック図である。図1に示す実施例1では、半導体レーザLDのみMOSFET4を用いて光量を調整した。 FIG. 2 is a block diagram showing a configuration of a semiconductor laser drive circuit according to a modification of the first embodiment of the present invention. In Example 1 shown in FIG. 1, to adjust the amount of light using a semiconductor laser LD N only MOSFET 4.

これに対して、実施例1の変形例は、最後の半導体レーザLDから最後の半導体レーザLDを含む2個目の半導体レーザLDN−1のアノードにMOSFET4のドレインを接続したものである。 On the other hand, in the modification of the first embodiment, the drain of the MOSFET 4 is connected to the anode of the second semiconductor laser LD N-1 including the last semiconductor laser LD N from the last semiconductor laser LD N. .

実施例1の変形例によれば、複数の半導体レーザLD〜LDN−2に電流Iが流れ、MOSFET4に電流Iが流れ、半導体レーザLDN−1,LDに電流(I−I)が流れる。これにより、半導体レーザLDN−1,LDの2個分の光量範囲で高速にAPC制御が可能となる。 According to a variant of the first embodiment, current I 2 flows through the plurality of semiconductor lasers LD 1 to Ld N-2, the current I 4 flows in MOSFET 4, the semiconductor laser LD N-1, LD N current (I 2 -I 4) flows. As a result, APC control can be performed at high speed in the light quantity range corresponding to the two semiconductor lasers LD N-1 and LD N.

また、電流源2からの電流を分岐させるポイントにより、電流量制御回路6bによる制御対象の浮遊成分が変わってくる。このため、所望の帯域でAPC制御が実現できる分岐ポイントを選ぶことにより、最大の光量調整幅でAPC制御することが可能となる。   Further, the floating component to be controlled by the current amount control circuit 6b changes depending on the point at which the current from the current source 2 is branched. For this reason, it is possible to perform APC control with the maximum light amount adjustment width by selecting a branch point capable of realizing APC control in a desired band.

なお、実施例1の変形例では、最後の半導体レーザLDから2個目の半導体レーザLDN−1のアノードで電流を分岐させたが、最後の半導体レーザLDから3個目以上の半導体レーザのアノードで電流を分岐させても良い。 In the modification of the first embodiment, the end of the semiconductor laser LD is N and diverts the current in the two second semiconductor laser LD N-1 of the anode from the semiconductor of 3 or more counted from the end of the semiconductor laser LD N The current may be branched at the anode of the laser.

図3は、本発明の実施例2に係る半導体レーザ駆動回路の構成を示す回路図である。図3に示す半導体レーザ駆動回路は、図1に示す半導体レーザ駆動回路に対して、電流源駆動回路3aがフォトダイオード5からのレーザ光に基づき電流源2の電流を制御することを特徴とする。   FIG. 3 is a circuit diagram showing a configuration of the semiconductor laser drive circuit according to the second embodiment of the present invention. The semiconductor laser drive circuit shown in FIG. 3 is characterized in that the current source drive circuit 3a controls the current of the current source 2 based on the laser light from the photodiode 5 as compared to the semiconductor laser drive circuit shown in FIG. .

電流源駆動回路3aは、電流源2の電流を低速処理し、光量の範囲を大きくすることができる。また、電流量制御回路6cにより、1つの半導体レーザLD分の光量の範囲で、高速にAPC制御することができる。 The current source driving circuit 3a can process the current of the current source 2 at a low speed to increase the range of the amount of light. Further, the current control circuit 6c, a range of one semiconductor laser LD N content of the light amount can be APC control at high speed.

図4は、本発明の実施例2の変形例に係る半導体レーザ駆動回路の構成を示す回路図である。図4に示す半導体レーザ駆動回路は、図2に示す半導体レーザ駆動回路に対して、電流源駆動回路3aがフォトダイオード5からのレーザ光に基づき電流源2の電流を制御することを特徴とする。   FIG. 4 is a circuit diagram showing a configuration of a semiconductor laser driving circuit according to a modification of the second embodiment of the present invention. The semiconductor laser drive circuit shown in FIG. 4 is characterized in that the current source drive circuit 3a controls the current of the current source 2 based on the laser light from the photodiode 5 as compared with the semiconductor laser drive circuit shown in FIG. .

電流源駆動回路3aは、電流源2の電流を低速処理し、光量の範囲を大きくすることができる。また、電流量制御回路6dにより、半導体レーザLDN−1,LDの2個分の光量範囲で高速にAPC制御が可能となる。 The current source driving circuit 3a can process the current of the current source 2 at a low speed to increase the range of the amount of light. Further, the current amount control circuit 6d enables APC control at high speed in the light amount range corresponding to the two semiconductor lasers LD N-1 and LD N.

図5は、本発明の実施例3に係る半導体レーザ駆動回路の構成を示す回路図である。この半導体レーザ駆動回路は、複数の半導体レーザLD〜LD、複数のMOSFETQ〜Q、LD駆動回路10、アンプ11,12、APC回路13、電圧源Vccを有している。 FIG. 5 is a circuit diagram showing a configuration of a semiconductor laser driving circuit according to Embodiment 3 of the present invention. This semiconductor laser driving circuit has a plurality of semiconductor lasers LD 1 to LD N , a plurality of MOSFETs Q 1 to Q N , an LD driving circuit 10, amplifiers 11 and 12, an APC circuit 13, and a voltage source Vcc.

複数の半導体レーザLD〜LDは、並列に接続され、複数の半導体レーザLD〜LDのアノードには、電圧源Vccが接続されている。複数のMOSFETQ〜Qは、本発明の電流制御素子に対応し、複数の半導体レーザLD〜LDに対応して設けられ、対応する半導体レーザに直列に接続されている。 The plurality of semiconductor lasers LD 1 to LD N are connected in parallel, and a voltage source Vcc is connected to the anodes of the plurality of semiconductor lasers LD 1 to LD N. The plurality of MOSFETs Q 1 to Q N correspond to the current control element of the present invention, are provided corresponding to the plurality of semiconductor lasers LD 1 to LD N , and are connected in series to the corresponding semiconductor lasers.

フォトダイオード5は、本発明の検出手段に対応し、複数の半導体レーザLD〜LDからのレーザ光を検出する。LD駆動回路10は、フォトダイオード5の出力に基づきアンプ11を介してMOSFETQ〜QN−1を駆動することにより複数の半導体レーザLD〜LDN−1に電流を流す。 The photodiode 5 corresponds to the detection means of the present invention, and detects laser light from the plurality of semiconductor lasers LD 1 to LD N. The LD driving circuit 10 drives the MOSFETs Q 1 to Q N-1 via the amplifier 11 based on the output of the photodiode 5, thereby causing a current to flow through the plurality of semiconductor lasers LD 1 to LD N−1 .

APC回路13は、フォトダイオード5の出力に基づきアンプ12を介してMOSFETQを駆動することによりフォトダイオード5の出力を所定値に制御する。 APC circuit 13 controls the output of the photodiode 5 to the predetermined value by driving the MOSFET Q N via the amplifier 12 based on the output of the photodiode 5.

このように実施例3の半導体レーザ駆動回路によれば、1つのAPC回路13により1つのMOSFETQをオンオフ制御するのみで、高速にAPC制御が可能となる。 According to the semiconductor laser driving circuit of Example 3, by one of the APC circuit 13 only for turning on and off the one MOSFET Q N, APC control can be faster.

本発明は、レーザ装置、レーザ加工装置などに利用できる。   The present invention can be used for laser devices, laser processing devices, and the like.

2 定電流源
3 電流源駆動回路
4,Q〜Q MOSFET
5 フォトダイオード(PD)
6a〜6d 電流量制御回路
10 LD駆動回路
11,12 アンプ
13 APC回路
Vcc 電圧源
LD〜LD 半導体レーザ
2 Constant current source 3 Current source drive circuit 4, Q 1 to Q N MOSFET
5 Photodiode (PD)
6a~6d current control circuit 10 LD driving circuit 11, 12 amplifier 13 APC circuit Vcc voltage source LD 1 to Ld N semiconductor laser

Claims (4)

直列に接続された複数の半導体レーザと、
前記複数の半導体レーザに電流を流す電流源と、
前記電流源を駆動して前記電流源の電流を制御する電流源駆動回路と、
前記複数の半導体レーザからのレーザ光を検出する検出手段と、
前記複数の半導体レーザの内の最後の半導体レーザから最後の半導体レーザを含む1個以上の半導体レーザに接続された電流制御素子と、
前記検出手段の出力に基づき前記電流制御素子を制御することにより前記1個以上の半導体レーザの電流量を制御する電流量制御回路と、
を備えることを特徴とする半導体レーザ駆動回路。
A plurality of semiconductor lasers connected in series;
A current source for passing a current through the plurality of semiconductor lasers;
A current source driving circuit for controlling the current of the current source by driving the current source;
Detecting means for detecting laser light from the plurality of semiconductor lasers;
A current control element connected to one or more semiconductor lasers including the last semiconductor laser from the last semiconductor laser of the plurality of semiconductor lasers;
A current amount control circuit for controlling a current amount of the one or more semiconductor lasers by controlling the current control element based on an output of the detection means;
A semiconductor laser driving circuit comprising:
前記電流量制御回路は、前記検出手段の出力を所定値に制御することを特徴とする請求項1記載の半導体レーザ駆動回路。   2. The semiconductor laser driving circuit according to claim 1, wherein the current amount control circuit controls the output of the detecting means to a predetermined value. 前記電流源駆動回路は、前記検出手段の出力に基づき前記電流源の電流を一定値に制御することを特徴とする請求項1又は請求項2記載の半導体レーザ駆動回路。   3. The semiconductor laser driving circuit according to claim 1, wherein the current source driving circuit controls the current of the current source to a constant value based on the output of the detecting means. 並列に接続された複数の半導体レーザと、
前記複数の半導体レーザに接続される電圧源と、
前記複数の半導体レーザに対応して設けられ、前記半導体レーザに直列に接続された複数の電流制御素子と、
前記複数の半導体レーザからのレーザ光を検出する検出手段と、
前記検出手段の出力に基づき前記複数の電流制御素子の内の1つの電流制御素子を除く残りの電流制御素子を駆動することにより前記残りの半導体レーザに電流を流す駆動回路と、
前記検出手段の出力に基づき前記1つの電流制御素子を制御することにより前記検出手段の出力を所定値に制御するパワー制御回路と、
を備えることを特徴とする半導体レーザ駆動回路。
A plurality of semiconductor lasers connected in parallel;
A voltage source connected to the plurality of semiconductor lasers;
A plurality of current control elements provided corresponding to the plurality of semiconductor lasers and connected in series to the semiconductor lasers;
Detecting means for detecting laser light from the plurality of semiconductor lasers;
A drive circuit for causing a current to flow through the remaining semiconductor laser by driving the remaining current control elements excluding one of the plurality of current control elements based on the output of the detection means;
A power control circuit for controlling the output of the detection means to a predetermined value by controlling the one current control element based on the output of the detection means;
A semiconductor laser driving circuit comprising:
JP2014080797A 2014-04-10 2014-04-10 semiconductor laser drive circuit Pending JP2015201587A (en)

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