JP2015187072A - エピタキシャル構造体 - Google Patents
エピタキシャル構造体 Download PDFInfo
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- JP2015187072A JP2015187072A JP2015063889A JP2015063889A JP2015187072A JP 2015187072 A JP2015187072 A JP 2015187072A JP 2015063889 A JP2015063889 A JP 2015063889A JP 2015063889 A JP2015063889 A JP 2015063889A JP 2015187072 A JP2015187072 A JP 2015187072A
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- nanotube film
- carbon nanotube
- carbon
- epitaxial
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- 239000002238 carbon nanotube film Substances 0.000 claims abstract description 184
- 239000002071 nanotube Substances 0.000 claims abstract description 154
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 149
- 239000002041 carbon nanotube Substances 0.000 claims abstract description 132
- 229910021393 carbon nanotube Inorganic materials 0.000 claims abstract description 132
- 239000000758 substrate Substances 0.000 claims abstract description 85
- 238000000034 method Methods 0.000 claims abstract description 42
- 239000002086 nanomaterial Substances 0.000 claims abstract description 35
- 238000000231 atomic layer deposition Methods 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 150000004767 nitrides Chemical class 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 122
- 239000003960 organic solvent Substances 0.000 description 38
- 239000013078 crystal Substances 0.000 description 34
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 22
- 238000004519 manufacturing process Methods 0.000 description 21
- 229910052799 carbon Inorganic materials 0.000 description 17
- 239000007789 gas Substances 0.000 description 16
- 230000007547 defect Effects 0.000 description 13
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 11
- 239000003595 mist Substances 0.000 description 11
- 238000001878 scanning electron micrograph Methods 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 229910002601 GaN Inorganic materials 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 9
- 229910052594 sapphire Inorganic materials 0.000 description 9
- 239000010980 sapphire Substances 0.000 description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 239000012159 carrier gas Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 239000002109 single walled nanotube Substances 0.000 description 6
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical group C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 239000002079 double walled nanotube Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 4
- 238000003917 TEM image Methods 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 239000003054 catalyst Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 239000011777 magnesium Substances 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005507 spraying Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 238000000889 atomisation Methods 0.000 description 2
- 238000004871 chemical beam epitaxy Methods 0.000 description 2
- 238000004581 coalescence Methods 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 238000000407 epitaxy Methods 0.000 description 2
- 238000002248 hydride vapour-phase epitaxy Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004943 liquid phase epitaxy Methods 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- 238000000038 ultrahigh vacuum chemical vapour deposition Methods 0.000 description 2
- 238000000927 vapour-phase epitaxy Methods 0.000 description 2
- SCYULBFZEHDVBN-UHFFFAOYSA-N 1,1-Dichloroethane Chemical compound CC(Cl)Cl SCYULBFZEHDVBN-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 1
- 229910010093 LiAlO Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- KTWOOEGAPBSYNW-UHFFFAOYSA-N ferrocene Chemical compound [Fe+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 KTWOOEGAPBSYNW-UHFFFAOYSA-N 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000009987 spinning Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
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- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
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- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
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Abstract
【解決手段】基板120と、エピタキシャル層130と、ナノチューブフィルム114と、を含むエピタキシャル構造体10であって、基板120は成長表面を有し、エピタキシャル層130は基板120の前記成長表面に設置され、ナノチューブフィルム114は基板120とエピタキシャル層130との間に設置され、ナノチューブフィルム114は自立構造体であり、同じ方向に沿って配列された複数のナノチューブを含み、ドローン構造カーボンナノチューブフィルムにおける複数のカーボンナノチューブの表面全体に原子層堆積法によってナノ材料層を形成した後、ドローン構造カーボンナノチューブフィルムを除去して形成される、複数の前記ナノチューブは間隔を開けて設置され、相互に前記ナノチューブが接触されている箇所ではイオン結合しているナノチューブフィルム114を含有するエピタキシャル構造体10。
【選択図】図20
Description
図1を参照すると、本発明の実施形態1は、エピタキシャル構造体10の製造方法を提供する。エピタキシャル構造体10の製造方法は、カーボンナノチューブフィルム100を提供するステップ(S10)であって、カーボンナノチューブフィルム100は自立構造体であり、分子間力で端と端とが接続された複数のカーボンナノチューブ104を含み、該複数のカーボンナノチューブ104は同じ方向に沿って配列され、隣接するカーボンナノチューブ104の間には第一間隙105を有するステップ(S10)と、カーボンナノチューブフィルム100を懸架させて、カーボンナノチューブフィルム100を表面処理して、カーボンナノチューブ104の表面に欠陥を形成するステップ(S11)と、原子層堆積法(ALD)によって、カーボンナノチューブフィルム100における複数のカーボンナノチューブ104の表面にナノ材料層110を成長させるステップ(S12)と、ナノ材料層110が成長したカーボンナノチューブフィルム100をアニーリングして、カーボンナノチューブフィルム100を除去し、複数のナノチューブ112を形成し、複数のナノチューブ112は同じ方向に沿って配列され、且つ相互に連接してナノチューブフィルム114を形成し、該ナノチューブフィルム114は自立構造体であるステップ(S13)と、ナノチューブフィルム114を基板120の成長表面122に設置するステップ(S14)と、基板120の成長表面122にエピタキシャル層130を成長させるステップ(S15)と、を含む。
図20を参照すると、本発明の実施形態2はエピタキシャル構造体10を提供する。エピタキシャル構造体10は、基板120と、ナノチューブフィルム114と、エピタキシャル層130と、を含む。基板120は成長表面122を有する。ナノチューブフィルム114は基板120の成長表面122に設置される。ナノチューブフィルム114は複数の第二間隙116を有する。複数の第二間隙116と対応する成長表面122の表面は露出される。エピタキシャル層130は基板120の成長表面122に設置され、且つナノチューブフィルム114を被覆する。ナノチューブフィルム114は、基板120とエピタキシャル層130との間に設置される。
図21を参照すると、本発明の実施形態3はエピタキシャル構造体20の製造方法を提供する。エピタキシャル構造体20の製造方法は、カーボンナノチューブフィルム100を提供するステップ(S20)であって、カーボンナノチューブフィルム100は自立構造体であり、分子間力で端と端とが接続された複数のカーボンナノチューブ104を含み、複数のカーボンナノチューブ104は同じ方向に沿って配列され、隣接するカーボンナノチューブ104の間には第一間隙105を有するステップ(S20)と、カーボンナノチューブフィルム100を懸架させて、カーボンナノチューブフィルム100を表面処理して、カーボンナノチューブ104の表面に欠陥を形成するステップ(S21)と、原子層堆積法(ALD)によって、カーボンナノチューブフィルム100における複数のカーボンナノチューブ104の表面にナノ材料層110を成長させるステップ(S22)と、ナノ材料層110を成長させたカーボンナノチューブフィルム100をアニーリングして、カーボンナノチューブフィルム100を除去し、複数のナノチューブ112を形成し、複数のナノチューブ112は同じ方向に沿って配列され、且つ相互に連接してナノチューブフィルム114を形成し、該ナノチューブフィルム114は自立構造体であるステップ(S23)と、ナノチューブフィルム114を基板120の成長表面122の上方に懸架して設置するステップ(S24)と、基板120の成長表面122にエピタキシャル層130を成長させるステップ(S25)と、を含む。
図22を参照すると、本発明の実施形態4はエピタキシャル構造体20を提供する。エピタキシャル構造体20は、基板120と、ナノチューブフィルム114と、エピタキシャル層130と、を含む。
100 カーボンナノチューブフィルム
102 カーボンナノチューブフィルムワイヤ
104、106 カーボンナノチューブ
105 第一間隙
108 カーボンナノチューブセグメント
110 ナノ材料層
112 ナノチューブ
114 ナノチューブフィルム
116 第二間隙
120 基板
122 成長表面
130 エピタキシャル層
132 エピタキシャル結晶粒
134 エピタキシャル膜
200 弾性支持体
Claims (2)
- 基板と、エピタキシャル層と、ナノチューブフィルムと、を含むエピタキシャル構造体であって、
前記基板は成長表面を有し、
前記エピタキシャル層は前記基板の前記成長表面に設置され、
前記ナノチューブフィルムは前記基板と前記エピタキシャル層との間に設置され、
前記ナノチューブフィルムは自立構造体であり、同じ方向に沿って配列された複数のナノチューブを含み、
前記ナノチューブフィルムは、ドローン構造カーボンナノチューブフィルムにおける複数のカーボンナノチューブの表面全体に原子層堆積法によってナノ材料層を形成した後、ドローン構造カーボンナノチューブフィルムを除去して形成され、
複数の前記ナノチューブは間隔をあけて設置されて複数の間隙を形成し、且つ複数の前記ナノチューブが相互に接触する箇所は、イオン結合によって結合していることを特徴とするエピタキシャル構造体。 - 前記ナノ材料層の材料は、金属酸化物、金属窒化物、金属炭化物、酸化ケイ素、窒化ケイ素、炭化ケイ素の何れか一種又は多種であることを特徴とする、請求項1に記載のエピタキシャル構造体。
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