JP2015171733A - Polishing device of plate-like body and polishing method of plate-like body - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a polishing device of a plate-like body which eliminates unnecessary resources and costs in a unit sheet formed by a film body, an intermediate sheet, and an adsorption sheet, and to provide a polishing method of the plate-like body which uses the polishing device.SOLUTION: In a unit sheet 230 of a polishing device 10 of the invention, a lower surface of an intermediate sheet 210 is bonded to an upper surface of an adsorption sheet 200 and an entire upper surface of the intermediate sheet 210 is detachably attached to a lower surface of a film body 38 through a hook-and-loop fastener 220. Thus, when the adsorption sheet 200 or the intermediate sheet 210 to which the adsorption sheet 200 is bonded is damaged, the hook-and-loop fastener 220 is peeled to remove the intermediate sheet 210 from the film body 38 and a new adsorption sheet 200 and a new intermediate sheet 210 are attached to the film body 38 by the hook-and-loop fastener 220. Similarly, when the film body 38 is damaged, the hook-and-loop fastener 220 is peeled to remove the film body 38 from the intermediate sheet 210, and a new film body 38 is attached to the intermediate sheet 210 by the hook-and-loop fastener 220.

Description

  The present invention relates to a plate-like body polishing apparatus and a plate-like body polishing method.

  A plate-like body, particularly a glass plate for a flat panel display such as a liquid crystal display, is known as a production method using a molding method called a float method as an example of the production method. The manufacturing method includes a step of manufacturing a molten glass into a strip-shaped glass plate by the float method, a step of cutting the strip-shaped glass plate into a rectangular glass plate of a predetermined size, and a surface of the rectangular glass plate by a polishing apparatus. It includes a step of polishing and removing minute irregularities and undulations. Thereby, a rectangular glass plate is manufactured into a glass plate having a thickness of 0.05 to 2.0 mm suitable for a flat panel display.

  In the patent document 1, the applicant of the present application has proposed a polishing apparatus particularly for glass plates for flat panel displays. This polishing apparatus includes a unit sheet including an adsorption sheet that adsorbs and holds a glass plate and a film body to which the adsorption sheet is attached. According to this polishing apparatus, a pressurized fluid is supplied between the film body and a carrier to which the film body is attached, and the glass plate adsorbed and held on the adsorption sheet is pressed against the polishing pad by the pressure of the pressurized fluid. Grind.

  Further, the film body disclosed in Patent Document 1 has a three-layer structure including an airtight holding layer, a strength holding layer, and a smooth layer, and the adsorbing sheet is constituted by a porous foamed polyurethane sheet having a self-adsorbing force. Has been.

  However, the polishing apparatus disclosed in Patent Document 1 has a problem in that during the polishing of the glass plate, the adsorption sheet peels off from the film body due to the polishing resistance, and the glass plate is damaged.

  Accordingly, the applicant of the present application discloses a polishing apparatus that solves the above-described problem of Patent Document 1 in Patent Document 2.

  The polishing apparatus of Patent Document 2 is a unit formed by interposing an intermediate sheet between the film body and the suction sheet having a higher rigidity in the pulling direction than the rigidity in the pulling direction of the suction sheet to the film body and the suction sheet. It has a seat.

  According to the unit sheet of the polishing apparatus of Patent Document 2, peeling may occur between the intermediate sheet and the film body having lower rigidity than the intermediate sheet by the expansion and contraction operation of the film body due to the polishing resistance. There is no relative shift between the intermediate sheet and the suction sheet. That is, since the suction sheet adsorbs the glass plate, expansion and contraction is restricted, and the intermediate sheet has higher rigidity in the pulling direction than the suction sheet and does not expand and contract in the pulling direction. As a result, since the suction sheet is not peeled off from the intermediate sheet, it is possible to prevent the suction sheet from peeling off and rising, and to prevent the glass plate from being damaged.

  Patent Document 2 discloses that the adsorbing sheet is made of polyurethane foam and that the intermediate sheet is made of hard polycarbonate. Further, the film body has a double structure composed of an airtight holding layer made of rubber and a strength holding layer made of aramid fiber, and has a lower rigidity than the intermediate sheet.

JP 2004-122351 A WO2007 / 020858 Publication

  By the way, the polishing apparatus of Patent Document 2 must replace the entire unit sheet when the suction sheet or the intermediate sheet to which the suction sheet is bonded is damaged, or the film body having lower rigidity than the intermediate sheet is damaged. . In particular, since the aramid fibers constituting the film body are expensive, it is resource-wise to replace the entire unit sheet due to damage to the sheet other than the film body, even though the film body is not damaged. There was also waste in terms of cost.

  The present invention has been made in view of the above problems, and is a plate-like polishing apparatus that eliminates waste in terms of resources and costs in a unit sheet composed of a film body, an intermediate sheet, and an adsorption sheet, and It aims at providing the grinding | polishing method of the plate-shaped body using this grinding | polishing apparatus.

  To achieve the above object, the present invention comprises an adsorption sheet that adsorbs and holds a plate-like body, a film body to which the adsorption sheet is attached, a carrier to which the film body is attached, and a polishing pad, A polishing apparatus that supplies a pressurized fluid between a film body and the carrier, and presses and polishes a plate-like body adsorbed and held by the adsorption sheet against the polishing pad by the pressure of the pressurized fluid. In the polishing apparatus for a plate-like body in which an intermediate sheet having a higher rigidity in the pulling direction than that in the pulling direction of the suction sheet is interposed between the film body and the suction sheet, one surface of the intermediate sheet is There is provided a polishing apparatus for a plate-like body, which is adhered to the suction sheet and the other surface of the intermediate sheet is detachably attached to the film body via a surface fastener.

  First, in the present invention, since the intermediate sheet is bonded between the film body and the adsorption sheet, the adsorption sheet can be prevented from peeling off and rising, and the glass plate can be prevented from being damaged.

  In such a polishing apparatus, according to the present invention, one surface of the intermediate sheet is bonded to the suction sheet, and the entire other surface of the intermediate sheet is detachably attached to the film body via a surface fastener. Therefore, if the suction sheet or the intermediate sheet to which the suction sheet is bonded is damaged, the surface fastener is peeled off, the intermediate sheet is removed from the film body, and a new suction sheet and intermediate sheet are attached to the film body by the surface fastener and replaced. To do. Similarly, when the film body is damaged, the surface fastener is peeled off to remove the film body from the intermediate sheet, and a new film body is attached to the intermediate sheet by the surface fastener and replaced.

  Thus, according to the present invention, since only the damaged sheet needs to be replaced, waste in terms of resources and costs can be eliminated in the unit sheet including the film body, the intermediate sheet, and the suction sheet.

  In the present invention, the entire other surface of the intermediate sheet is detachably attached to the film body via a surface fastener. In the present invention, for example, when only a part of the other surface of the intermediate sheet is attached to the film body via the surface fastener, the intermediate sheet has a highly rigid part attached to the film body via the surface fastener, and There are other parts with low rigidity. That is, since the rigidity can be distributed on the surface of the intermediate sheet, there is a problem that unevenness of polishing occurs in the plate-like body and the polishing quality of the plate-like body is deteriorated.

  In the present invention, since the entire other surface of the intermediate sheet is detachably attached to the film body via the surface fastener, the rigidity on the surface of the intermediate sheet becomes uniform, and hence unevenness of the plate-like body occurs. Without improving the polishing quality of the plate-like body.

  In a preferred embodiment of the present invention, the adsorbing sheet is made of polyurethane foam, and the intermediate sheet is made of polycarbonate, acrylic, aluminum, iron, stainless steel, glass, or carbon fiber reinforced plastic (CFRP). it can. By manufacturing the intermediate sheet with these materials, it is possible to provide a highly rigid intermediate sheet that does not expand or contract in the pulling direction during polishing of the plate-like body. More preferably, the intermediate sheet is made of aluminum. In addition to these materials, ABS (Acrylonitrile Butadiene Styrene) and fiber reinforced plastics (FRP) can be exemplified.

  Further, in a preferred embodiment of the present invention, the film body is configured in a double structure including an airtight holding layer and an aramid fiber strength holding layer, and an intermediate sheet is interposed between the strength fastener and the surface fastener. And are preferably detachably attached.

  According to the present invention, since the membrane body has an expensive aramid fiber, it is very advantageous in terms of cost when it is not necessary to replace the membrane body.

  The present invention also provides a method for polishing a plate-like body, comprising polishing the plate-like body using the polishing apparatus.

  As a result, according to the present invention, it is possible to eliminate waste in terms of resources and costs in the knit sheet, and uneven polishing does not occur in the plate-like body, and the polishing quality of the plate-like body is improved.

  According to the plate-like body polishing apparatus and the plate-like body polishing method according to the present invention, it is only necessary to replace a damaged sheet. It is possible to eliminate waste.

The top view which shows the whole structure of the polishing apparatus of the plate-shaped object of embodiment Assembly perspective view of membrane frame and unit sheet Side view of first polishing stage and second polishing stage Cross section of the main part showing the configuration of the unit sheet Side view showing the configuration of the unit seat Expanded cross-sectional view of the main part of the carrier with a membrane frame Explanatory drawing which separates a film body and an intermediate sheet using a hook-and-loop fastener

  Hereinafter, preferred embodiments of a plate-like polishing apparatus and a plate-like polishing method according to the present invention will be described in detail with reference to the drawings.

  FIG. 1 is a plan view showing an overall configuration of a plate-like polishing apparatus 10 according to an embodiment.

  The polishing apparatus 10 shown in FIG. 1 polishes a large glass plate G (for example, one side of 1000 mm or more) to a thickness (for example, 0.05 to 2.0 mm) required for a glass plate for a liquid crystal display, This is a polishing apparatus for polishing one surface (polishing surface) of the glass plate G to the flatness required for the glass plate for liquid crystal display.

  The polishing apparatus 10 includes a conveyor 12 that conveys the glass plate G before polishing, a stage 16 that adheres the glass plate G to the film frame 14, a first polishing stage 18, a second polishing stage 20, and a glass plate that has been polished. A stage 22 for removing G from the membrane frame 14, a glass plate carry-out conveyor 24, a membrane frame cleaning stage 26, a membrane frame drying stage 28, and a membrane frame return conveyor 30 are configured as main elements.

  The polishing apparatus 10 also includes a transfer device 150 that transfers the film frame 14 from the stage 16 to the first polishing stage 18, and a transfer device that transfers the film frame 14 from the first polishing stage 18 to the second polishing stage 20. 152 and a transfer device 154 for transferring the film frame 14 from the second polishing stage 20 to the stage 22.

  The unpolished glass plate G conveyed by the conveyor 12 is sucked and held by a suction pad 34 provided on the arm 33 of the robot 32. Then, it is transferred from the conveyor 12 to the conveyor 36 by the rotation operation of the arm 33, and conveyed toward the stage 16 by the conveyor 36.

  In the stage 16, first, the glass plate G is held on the film frame 14. Hereinafter, a method for holding the glass plate G with respect to the film frame 14 will be described.

  The film frame 14 is held by a lifting mechanism (not shown) on the stage 16. When the glass plate G is positioned below the film frame 14, the film frame 14 is moved downward by the lifting mechanism and is stretched on the film frame 14. The lower surface of the suction sheet 200 of the unit sheet 230 in FIG. 2 is pressed against the upper surface (non-polished surface) of the glass plate G. FIG. 2 is an assembled perspective view of the membrane frame 14 and the unit sheet 230.

  The unit sheet 230 includes a film body 38, a suction sheet 200, an intermediate sheet 210, and a hook-and-loop fastener 220 that are stretched on the film frame 14.

  That is, according to the unit sheet 230, the porous foamed polyurethane adsorption sheet 200 that self-adsorbs the glass plate G is disposed on the lower surface of the film body 38, and between the adsorption sheet 200 and the film body 38. Further, an intermediate sheet 210 is interposed. Further, the lower surface of the intermediate sheet 210 is bonded to the upper surface of the suction sheet 200, and the entire upper surface of the intermediate sheet 210 is detachably attached to the film body 38 via the surface fastener 220. That is, a hook-and-loop fastener 220 having a surface area equal to the surface area of the intermediate sheet 210 is attached to the upper surface of the intermediate sheet 210.

  Further, the intermediate sheet 210 is made of a material whose rigidity in the pulling direction is higher than that of the suction sheet 200 in the pulling direction. The intermediate sheet 210 may be made of polycarbonate, acrylic, aluminum, iron, stainless steel, glass, or carbon fiber reinforced plastic (CFRP). By manufacturing the intermediate sheet 210 with these materials, it is possible to provide a highly rigid intermediate sheet 210 that does not expand or contract in the pulling direction during polishing of the glass plate G. In addition to these materials, ABS (Acrylonitrile Butadiene Styrene) and fiber reinforced plastics (FRP) can be exemplified. The operation and function of the unit sheet 230 will be described later.

  The lower surface of the suction sheet 200 is pressed against the upper surface of the glass plate G by the pressing force by the lifting mechanism described above. As a result, the glass plate G is adsorbed on the lower surface of the adsorbing sheet 200 and held on the film frame 14. Thereafter, the film frame 14 is held by the transfer device 150 of FIG. 1 and transferred along the guide rail 170 to the first polishing stage 18 of FIG. 3, where the film frame 14 is the carrier of the first polishing stage 18. 52 is attached. The film frame 14 (film frame 14 holding the glass plate G) that has been polished by the first polishing stage 18 is removed from the carrier 52 of the first polishing stage 18 and then held by the transfer device 152. The The film frame 14 is held by the transfer device 152 and transferred to the second polishing stage 20 along the guide rail 170, where the film frame 14 is attached to the carrier 52 of the second polishing stage 20. Further, the film frame 14 that has been polished by the second polishing stage 20 is removed from the carrier 52 of the second polishing stage 20 and then held by the transfer device 154. The film frame 14 is held by the transfer device 154 and transferred to the stage 22 along the guide rail 170. FIG. 3 is a side view of the first polishing stage 18 and the second polishing stage 20.

  As shown in FIG. 2, the film frame 14 includes a rectangular upper frame 40 and a lower frame 42. The rectangular film body 38 is stretched between the upper frame 40 and the lower frame 42 and then fixed to the film frame 14 by fastening the upper frame 40 and the lower frame 42 with bolts (not shown). The film frame 14 and the film body 38 are not limited to rectangles, and may be circular.

  FIG. 4 is an enlarged cross-sectional view of a main part of the unit sheet 230. FIG. 5 is a side view showing the configuration of the unit sheet 230. FIG. 6 is an enlarged cross-sectional view of a main part of the carrier 52 to which the membrane frame 14 is attached.

  As shown in FIG. 4, the film body 38 has a two-layer structure including an airtight holding layer 44 and a strength holding layer 46. As shown in FIGS. 2 and 6, the airtight holding layer 44 is a sheet material whose outer peripheral portion is in close contact with the lower outer peripheral frame portion 53 of the carrier 52 and maintains airtightness with the air chamber 54 of the carrier 52. Examples of the material of the hermetic holding layer 44 include rubbers, silicons, fluororesins, vinyl chlorides such as vinyl chloride (PVC), nylons, urethanes, and the like.

  Further, the strength holding layer 46 of FIG. 4 is a sheet material having a predetermined tensile strength that can withstand the tension that holds the airtight holding layer 44 and stretches the entire film body 38. The material of the strength retaining layer 46 is aramid fiber, stainless steel wire mesh, steel wire mesh, carbon fiber, glass fiber, nylon fiber, metal sheet, resin sheet, etc., because aramid fiber has very little elongation with respect to tensile force. preferable.

  On the lower surface of the strength retaining layer 46, one fastener 222 (for example, a fastener in which a large number of hooks are raised together) constituting the surface fastener (for example, Velcro tape: registered trademark) 220 is adhered by an adhesive. Yes. In addition, the lower surface of the other fastener (for example, a fastener in which a large number of loops are raised) 224 is bonded to the upper surface of the intermediate sheet 210 with an adhesive, and the lower surface of the intermediate sheet 210 is attached to the lower surface of the intermediate sheet 210. Are bonded by an adhesive. As the adhesive, for example, urethane adhesive or epoxy adhesive can be preferably used.

  Next, the polishing head 50 shown in FIG. 3 will be described. Since the polishing head 50 of the first polishing stage 18 and the polishing head 50 of the second polishing stage 20 have the same structure, they will be described with the same reference numerals. .

  The polishing head 50 is configured such that a motor is built in a main body casing 51 and an output shaft of the motor is connected to a spindle 56 that is suspended in a vertical direction. A carrier 52 is connected to the spindle 56. The main body casing 51 is connected to the slider 158 via the lifting mechanism 156. The main body casing 51 is moved up and down with respect to the slider 158 by the lifting mechanism 156, so that the carrier 52 moves forward and backward with respect to the polishing pad 58 of the first polishing stage 18 and the polishing pad 60 of the second polishing stage 20. Is done. Therefore, when the carrier 52 moves forward, the lower surface (one surface: polishing surface) of the glass plate G on which the upper surface is sucked and held comes into contact with the polishing pads 58 and 60 on the lower surface of the suction sheet 200.

  The polishing pad 58 is attached to the upper surface of the polishing surface plate 62, and a rotating shaft 64 that is rotated by a motor (not shown) is connected to the lower portion of the polishing surface plate 62. The polishing pad 60 is affixed to the upper surface of the polishing surface plate 66, and a rotating shaft 68 that is rotated by a motor (not shown) is connected to the lower portion of the polishing surface plate 66.

  Further, the main casing 51 is connected to a revolving drive mechanism (not shown) and has a function of revolving at a predetermined revolving radius. This revolution drive mechanism can also be configured by incorporating a planetary gear mechanism in the main body casing 51 and connecting the output shaft of the planetary gear mechanism to the spindle 56. The above is the configuration of each polishing stage 18, 20, and the lower surface of the glass plate G is polished by these polishing stages 18, 20, and minute irregularities and undulations on the surface of the glass plate G are removed.

  On the other hand, linear guides 70 and 70 are attached to the slider 158 of the first polishing stage 18. The linear motion guides 70, 70 are fitted to the guide rails 72, 72. As shown in FIG. 1, the guide rails 72 and 72 are arranged toward a maintenance stage 74 that maintains the spindle 56 and the carrier 52 of the first polishing stage 18.

  Further, as shown in FIG. 3, the linear motion guides 70 and 70 are similarly attached to the slider 158 of the second polishing stage 20, and the linear motion guides 70 and 70 are fitted to the guide rails 160 and 160. As shown in FIG. 1, the guide rails 160 and 160 are disposed toward a maintenance stage 76 for maintaining the spindle 56 and the carrier 52 of the second polishing stage 20.

  As shown in FIG. 2, the carrier 52 has a lifting frame 78 fixed to the upper outer periphery of the carrier 52 by bolts (not shown). A plurality of through holes 80, 80... Are formed at equal intervals in the flange portion protruding from the outer peripheral portion of the carrier 52 of the lifting frame 78, and a slide frame (slide-contact) is formed in these through holes 80, 80. A hanger 84 projecting from the upper surface of the frame 82 is penetrated from below as shown in FIG. The lifting tool 84 is penetrated by a lifting spring 88 disposed between the lifting frame 78 and the lifting disk spring 86, and is also passed through the through hole 90 of the lifting disk spring 86, thereby screwing the screw. It is connected to a jack 92.

  Therefore, when the screw jack 92 is operated and the lifting tool 84 is pulled upward against the urging force of the lifting spring 88, the sliding frame 82 is lifted with respect to the carrier 52. Thereby, the membrane frame 14 detachably attached to the sliding frame 82 is pulled up, and a predetermined tension is applied to the membrane body 38.

  The carrier 52 is formed with a plurality of ejection ports 98, 98... For ejecting compressed air (pressurized fluid) into the air chamber 54 of FIG. These injection ports 98, 98... Communicate with an air supply path 102 indicated by a broken line in FIG. 3 through an air chamber 100 formed on the upper surface of the carrier 52. The air supply path 102 extends to the outside of the polishing head 50 via a rotary joint (not shown) attached to the polishing head 50, and is connected to an air pump 106 via a valve 104. Therefore, when the valve 104 is opened, compressed air from the air pump 106 is supplied to the air chamber 54 via the air supply path 102, the air chamber 100, and the injection port 98. Thereby, the pressure of compressed air is transmitted to the glass plate G through the unit sheet 230, and the lower surface of the glass plate G is pressed against the polishing pads 58 and 60 by this pressure and polished.

  On the other hand, as shown in FIG. 2, a plurality of pins 108, 108... Are projected at equal intervals on the upper frame 40 of the film frame 14, and the circular head shown in FIG. The part 110 is engaged with a hook 112 fixed to the lower part of the sliding frame 82. Thereby, the membrane frame 14 is attached to the sliding frame 82. The engaging force between the head portion 110 and the hook 112 is strengthened by the reaction force of the film body 38 when the film body 38 is lifted by the screw jack 92, and the polishing resistance received from the film body 38 during polishing causes the head portion from the hook 112. 110 does not come off.

  When the polishing of the glass plate G is completed at the second polishing stage 20 shown in FIG. 1, the film frame 14 is removed from the carrier 52 and transferred to the stage 22 by the transfer device 154.

  In order to remove the film frame 14 from the carrier 52, first, the screw jack 92 shown in FIG. Next, the film frame 14 is rotated by a predetermined angle with respect to the carrier 52 to remove the head portion 110 from the hook 112. Thereby, the film frame 14 is removed from the carrier 52.

  In the stage 22 shown in FIG. 1, the polished glass sheet G is peeled off from the unit sheet 230 of the film frame 14 conveyed by the conveying device 154. The peeled glass plate G is transported by the conveyor 138 and sucked by the suction head 144 attached to the arm 142 of the robot 140. Then, the glass plate G is transferred to the glass plate carry-out conveyor 24 by the operation of the robot 140 and is carried out of the polishing apparatus 10 by the glass plate carry-out conveyor 24.

  The film frame 14 (including the unit sheet 230) from which the glass plate G has been peeled off is transported to the film frame cleaning stage 26 by the conveyor 146, where it is washed with water. The washed film frame 14 is conveyed to the film frame drying stage 28 by the conveyor 148, where it is heated and dried. Then, the dried film frame 14 is transported to the stage 16 by the film frame return conveyor 30 and reused for adsorbing and holding the glass plate G before polishing. The above is the overall configuration of the polishing apparatus 10.

  Next, the operation and function of the unit sheet 230 of the polishing apparatus 10 configured as described above will be described.

  First, in this polishing apparatus 10, an intermediate sheet 210 having a tensile direction rigidity higher than the tensile direction rigidity of the suction sheet 200 is bonded between the film body 38 and the suction sheet 200. It can be prevented that the glass plate G is peeled off and broken, and damage to the glass plate G can be prevented.

  In such a polishing apparatus 10, the lower surface of the intermediate sheet 210 is bonded to the upper surface of the suction sheet 200 as shown in FIG. 5, and the entire upper surface of the intermediate sheet 210 is detachably attached to the film body 38 via the surface fastener 220. ing.

  Therefore, when the suction sheet 200 or the intermediate sheet 210 to which the suction sheet 200 is bonded is damaged, the surface fastener 220 is peeled off, the intermediate sheet 210 is removed from the film body 38, and a new suction sheet 200 is bonded. The intermediate sheet 210 is attached to the film body 38 by the surface fastener 220 and replaced. Similarly, when the film body 38 is broken as shown in FIG. 7, the surface fastener 220 is peeled off, the film body 38 is removed from the intermediate sheet 210, and a new film body 38 is attached to the intermediate sheet 210 by the surface fastener 220 and replaced. To do.

  As a result, according to the polishing apparatus 10 of the embodiment, only the damaged sheet needs to be replaced, and therefore the unit sheet 230 including the film body 38, the intermediate sheet 210, and the suction sheet 200 is wasteful in terms of resources and costs. Can be eliminated.

  In the polishing apparatus 10 of the embodiment, the entire upper surface of the intermediate sheet 210 is detachably attached to the film body 38 via the surface fastener 220. In the polishing apparatus 10 according to the embodiment, for example, when only a part of the upper surface of the intermediate sheet 210 is attached to the film body 38 via the surface fastener, the intermediate sheet 210 is attached to the film body 38 via the surface fastener. There are a part with high rigidity and a part with low rigidity other than that. That is, since the rigidity can be distributed on the surface of the intermediate sheet 210, there is a problem that uneven polishing occurs in the glass plate G and the polishing quality of the glass plate G deteriorates.

  On the other hand, in the polishing apparatus 10 according to the embodiment, since the entire upper surface of the intermediate sheet 210 is detachably attached to the film body 38 via the surface fastener 220, the rigidity on the surface of the intermediate sheet 210 is low. Thus, the glass plate G is not evenly polished and the polishing quality of the glass plate G is improved.

  Further, in the polishing apparatus 10 of the preferred embodiment, the film body 38 is configured in a double structure including the airtight holding layer 44 and the strength holding layer 46 made of aramid fiber, and the intermediate sheet 210 serves as the strength holding layer 46. It is detachably attached via the hook-and-loop fastener 220. According to the polishing apparatus 10 of the embodiment, since the film body 38 has an expensive aramid fiber, it is very advantageous in terms of cost when it is not necessary to replace the film body 38.

  In addition, as shown in FIGS. 2 and 5 to 7, a rectangular auxiliary plate 232 surrounding the glass plate G is held by suction on the suction sheet 200 of the embodiment.

  The auxiliary plate 232 relaxes the high pressure generated at the end of the glass plate G due to the polishing pressure applied to the glass plate G through the polishing pad 58 during polishing, that is, prevents the polishing pressure from being applied to the glass plate G. And the suction sheet 200 are arranged to prevent the suction sheet 200 from rising.

  As shown in FIG. 5, the distance S between the auxiliary plate 232 and the glass plate G is preferably 5 mm or more. If the distance S is 5 mm or more, even if the arrangement position of the glass plate G or the auxiliary plate 232 is shifted during polishing, the glass plate G and the auxiliary plate 232 are difficult to contact, and there is no possibility that the glass plate G is damaged. Further, the thickness t of the auxiliary plate 232 is preferably equal to or less than the thickness of the glass plate G. Specifically, the difference between the thickness t of the auxiliary plate 170 and the thickness of the glass plate G is −0.1 mm. It is preferably ˜0 mm. If the difference between the thickness t of the auxiliary plate 232 and the thickness of the glass plate G is −0.1 mm to 0 mm, uneven polishing pressure applied to the glass plate G can be prevented. Further, the material of the auxiliary plate 232 is a material having high wear resistance such as a fluororesin such as ultra high molecular weight polyethylene (UPE), stainless steel (SUS), polytetrafluoroethylene (Teflon (registered trademark)), or glass epoxy. Is preferred. When the D hardness (according to ISO 7619) of the auxiliary plate 232 is higher than the D hardness of the polishing pad 58, even if the polishing pad 58 contacts the auxiliary plate 232, the auxiliary plate 232 is hardly worn.

  In this way, by holding the auxiliary plate 232 with the suction sheet 200 so as to surround the glass plate G, the suction sheet 200 generated during polishing can be prevented from rising, so that the suction sheet 200 contacts the polishing pad 58. Can prevent tearing.

  In the embodiment, the thin plate glass used for the flat panel display or the like is exemplified as the plate-like object to be polished. However, the present invention is not limited to this, and any glass plate that requires surface polishing may be used. It is not limited to glass, and may be a metal or resin plate that requires surface polishing.

  G ... Glass plate, 10 ... Polishing device, 12 ... Conveyor, 14 ... Film frame, 16 ... Stage, 18 ... First polishing stage, 20 ... Second polishing stage, 22 ... Stage, 24 ... Glass plate carry-out conveyor, 26 ... Film frame cleaning stage, 28 ... Film frame drying stage, 30 ... Film frame return conveyor, 32 ... Robot, 33 ... Arm, 34 ... Suction pad, 36 ... Conveyor, 38 ... Film body, 40 ... Upper frame, 42 ... Lower frame, 44 ... Airtight holding layer, 46 ... Strength holding layer, 50 ... Polishing head, 51 ... Main body casing, 52 ... Carrier, 53 ... Lower outer peripheral frame part, 54 ... Air chamber, 56 ... Spindle, 58 ... Polishing pad, 60 ... Polishing pad, 62 ... Polishing platen, 64 ... Rotating shaft, 66 ... Polishing platen, 68 ... Rotating shaft, 70 ... Linear guide, 72 ... Guide rail, 74 ... Maintenance stage, 76 ... Maintenance Stage, 78 ... lifting frame, 80 ... through hole, 82 ... sliding frame, 84 ... lifting tool, 86 ... lifting disk spring, 88 ... lifting spring, 90 ... through hole, 92 ... screw jack, 98 DESCRIPTION OF SYMBOLS ... Injection port, 100 ... Air chamber, 102 ... Air supply path, 104 ... Valve, 106 ... Air pump, 108 ... Pin, 110 ... Head part, 112 ... Hook, 138 ... Conveyor, 140 ... Robot, 142 ... Arm, 144 ... Adsorption head, 146 ... conveyor, 150, 152, 154 ... conveying device, 160 ... guide rail, 170 ... guide rail, 200 ... adsorption sheet, 210 ... intermediate sheet, 220 ... surface fastener, 222 ... one surface fastener, 224 ... The other surface fastener, 230 ... unit sheet, 232 ... auxiliary plate

Claims (4)

An adsorbing sheet that adsorbs and holds a plate-like body, a film body to which the adsorbing sheet is attached, a carrier to which the film body is attached, and a polishing pad, and pressurizing between the film body and the carrier A polishing apparatus that supplies fluid and polishes a plate-like body that is adsorbed and held by the adsorbing sheet against the polishing pad by the pressure of the pressurized fluid, and is between the film body and the adsorbing sheet In addition, in the polishing apparatus for a plate-like body in which an intermediate sheet having a higher rigidity in the pulling direction than the rigidity in the pulling direction of the suction sheet is interposed,
One side of the intermediate sheet is bonded to the adsorption sheet,
A polishing apparatus for a plate-like body, wherein the other surface of the intermediate sheet is detachably attached to the film body via a surface fastener. The adsorption sheet is made of polyurethane foam,
The plate-like body polishing apparatus according to claim 1, wherein the intermediate sheet is made of polycarbonate, acrylic, aluminum, stainless steel, glass, or carbon fiber reinforced plastic.   The film body has a double structure composed of an airtight holding layer and an aramid fiber strength holding layer, and an intermediate sheet is detachably attached to the strength holding layer via the hook-and-loop fastener. Item 3. The polishing apparatus for a plate-like body according to Item 1 or 2.   A plate-like body polishing method comprising polishing the plate-like body using the plate-like body polishing apparatus according to claim 1.

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