JP2015153528A5 - - Google Patents

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Publication number
JP2015153528A5
JP2015153528A5 JP2014024794A JP2014024794A JP2015153528A5 JP 2015153528 A5 JP2015153528 A5 JP 2015153528A5 JP 2014024794 A JP2014024794 A JP 2014024794A JP 2014024794 A JP2014024794 A JP 2014024794A JP 2015153528 A5 JP2015153528 A5 JP 2015153528A5
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JP
Japan
Prior art keywords
image quality
processing
charged particle
area
scanning
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JP2014024794A
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English (en)
Japanese (ja)
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JP2015153528A (ja
JP6193776B2 (ja
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Priority claimed from JP2014024794A external-priority patent/JP6193776B2/ja
Priority to JP2014024794A priority Critical patent/JP6193776B2/ja
Priority to CN201480074392.4A priority patent/CN105981129B/zh
Priority to US15/115,073 priority patent/US9859093B2/en
Priority to DE112014006356.8T priority patent/DE112014006356B4/de
Priority to PCT/JP2014/082015 priority patent/WO2015122082A1/ja
Publication of JP2015153528A publication Critical patent/JP2015153528A/ja
Publication of JP2015153528A5 publication Critical patent/JP2015153528A5/ja
Publication of JP6193776B2 publication Critical patent/JP6193776B2/ja
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JP2014024794A 2014-02-12 2014-02-12 走査荷電粒子顕微鏡画像の高画質化方法および走査荷電粒子顕微鏡装置 Active JP6193776B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2014024794A JP6193776B2 (ja) 2014-02-12 2014-02-12 走査荷電粒子顕微鏡画像の高画質化方法および走査荷電粒子顕微鏡装置
PCT/JP2014/082015 WO2015122082A1 (ja) 2014-02-12 2014-12-03 走査荷電粒子顕微鏡画像の高画質化方法および走査荷電粒子顕微鏡装置
US15/115,073 US9859093B2 (en) 2014-02-12 2014-12-03 Method of improving quality of scanning charged particle microscope image, and scanning charged particle microscope apparatus
DE112014006356.8T DE112014006356B4 (de) 2014-02-12 2014-12-03 Verfahren zur Verbesserung der Bildqualität eines Ladungsträgerteilchen-Rastermikroskops und Ladungsträgerteilchen-Rastermikroskop
CN201480074392.4A CN105981129B (zh) 2014-02-12 2014-12-03 扫描带电粒子显微镜图像的高画质化方法和扫描带电粒子显微镜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014024794A JP6193776B2 (ja) 2014-02-12 2014-02-12 走査荷電粒子顕微鏡画像の高画質化方法および走査荷電粒子顕微鏡装置

Publications (3)

Publication Number Publication Date
JP2015153528A JP2015153528A (ja) 2015-08-24
JP2015153528A5 true JP2015153528A5 (enExample) 2016-12-01
JP6193776B2 JP6193776B2 (ja) 2017-09-06

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ID=53799837

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JP2014024794A Active JP6193776B2 (ja) 2014-02-12 2014-02-12 走査荷電粒子顕微鏡画像の高画質化方法および走査荷電粒子顕微鏡装置

Country Status (5)

Country Link
US (1) US9859093B2 (enExample)
JP (1) JP6193776B2 (enExample)
CN (1) CN105981129B (enExample)
DE (1) DE112014006356B4 (enExample)
WO (1) WO2015122082A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6668278B2 (ja) * 2017-02-20 2020-03-18 株式会社日立ハイテク 試料観察装置および試料観察方法
US11449979B2 (en) * 2020-10-09 2022-09-20 Applied Materials Israel Ltd. Measuring a pattern
JP2023150997A (ja) * 2022-03-31 2023-10-16 株式会社日立ハイテク 荷電粒子ビームシステム

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0782535B2 (ja) 1985-10-16 1995-09-06 株式会社日立製作所 電子顕微鏡の画像補正装置
US4907287A (en) 1985-10-16 1990-03-06 Hitachi, Ltd. Image correction system for scanning electron microscope
JP2946466B2 (ja) 1989-07-13 1999-09-06 アンリツ株式会社 顕微方法及び装置
JPH07240166A (ja) 1994-02-25 1995-09-12 Hitachi Ltd 電子顕微鏡
JPH09198498A (ja) 1996-01-22 1997-07-31 Jeol Ltd 映像信号処理方法および装置
AU3609601A (en) * 2000-03-06 2001-09-17 Olympus Optical Co., Ltd. Pattern forming member applied to sectioning image observing device and sectioning image observing device using it
JP2003132831A (ja) * 2001-10-24 2003-05-09 Shimadzu Corp 反射電子像表示装置及び反射電子像の表示方法
JP2004101871A (ja) * 2002-09-10 2004-04-02 Olympus Corp 顕微鏡画像撮影装置
JP2005061837A (ja) * 2003-08-11 2005-03-10 Jeol Ltd 走査型荷電粒子ビーム装置を用いた欠陥検査方法
JP2007107999A (ja) 2005-10-13 2007-04-26 Fujitsu Ltd 顕微鏡画像処理方法及び顕微鏡画像処理装置
JP2008177064A (ja) 2007-01-19 2008-07-31 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法
JP5030906B2 (ja) * 2008-09-11 2012-09-19 株式会社日立ハイテクノロジーズ 走査荷電粒子顕微鏡を用いたパノラマ画像合成方法およびその装置
JP5274419B2 (ja) * 2009-09-17 2013-08-28 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP5380230B2 (ja) * 2009-09-30 2014-01-08 株式会社日立ハイテクノロジーズ 荷電粒子顕微鏡装置及びこれを用いた試料の検査方法
JP5425601B2 (ja) * 2009-12-03 2014-02-26 株式会社日立ハイテクノロジーズ 荷電粒子線装置およびその画質改善方法
JP2012142299A (ja) 2012-03-19 2012-07-26 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置および走査型荷電粒子顕微鏡装置で取得した画像の処理方法
JP2014029460A (ja) * 2012-07-05 2014-02-13 Canon Inc 顕微鏡装置及びその制御方法
JP2014025763A (ja) * 2012-07-25 2014-02-06 Hitachi High-Technologies Corp 欠陥検査方法、及び欠陥検査装置

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