JP2015141899A5 - - Google Patents
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- JP2015141899A5 JP2015141899A5 JP2015012456A JP2015012456A JP2015141899A5 JP 2015141899 A5 JP2015141899 A5 JP 2015141899A5 JP 2015012456 A JP2015012456 A JP 2015012456A JP 2015012456 A JP2015012456 A JP 2015012456A JP 2015141899 A5 JP2015141899 A5 JP 2015141899A5
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- sample
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- particle
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- 230000003287 optical effect Effects 0.000 claims description 109
- 239000002245 particle Substances 0.000 claims description 72
- 238000000034 method Methods 0.000 claims description 15
- 238000003384 imaging method Methods 0.000 claims description 8
- 239000007787 solid Substances 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 5
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 238000000399 optical microscopy Methods 0.000 claims description 2
- 230000009466 transformation Effects 0.000 claims 1
- 239000000523 sample Substances 0.000 description 86
- 230000035945 sensitivity Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 239000012472 biological sample Substances 0.000 description 3
- 239000003550 marker Substances 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical class [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910001385 heavy metal Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical class [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 238000000080 cathodoluminescence detection Methods 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000002073 fluorescence micrograph Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 150000002632 lipids Chemical class 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052709 silver Chemical class 0.000 description 1
- 239000004332 silver Chemical class 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000003325 tomography Methods 0.000 description 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14152582.4 | 2014-01-27 | ||
| EP14152582.4A EP2899743B1 (en) | 2014-01-27 | 2014-01-27 | Correlative optical and charged particle microscope |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015141899A JP2015141899A (ja) | 2015-08-03 |
| JP2015141899A5 true JP2015141899A5 (OSRAM) | 2016-05-19 |
| JP6047592B2 JP6047592B2 (ja) | 2016-12-21 |
Family
ID=49998160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015012456A Expired - Fee Related JP6047592B2 (ja) | 2014-01-27 | 2015-01-26 | 相関光学及び荷電粒子顕微鏡 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9293297B2 (OSRAM) |
| EP (1) | EP2899743B1 (OSRAM) |
| JP (1) | JP6047592B2 (OSRAM) |
| CN (1) | CN104810230B (OSRAM) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9564291B1 (en) * | 2014-01-27 | 2017-02-07 | Mochii, Inc. | Hybrid charged-particle beam and light beam microscopy |
| DE102014103360A1 (de) | 2014-03-12 | 2015-09-17 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gmbh | Vorrichtung für die korrelative Raster-Transmissionselektronenmikroskopie (STEM) und Lichtmikroskopie |
| DE102014108331A1 (de) | 2014-06-13 | 2015-12-17 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung | Spezifische Proteinmarkierung sowie Verfahren zur Identifizierung der statistischen Verteilung der Proteinstöchiometrie |
| DE102014108825A1 (de) * | 2014-06-24 | 2015-12-24 | Leibniz-Institut Für Neue Materialien Gemeinnützige Gesellschaft Mit Beschränkter Haftung | Vorrichtung und Verfahren für die stöchiometrische Analyse von Proben |
| US10176567B2 (en) * | 2015-12-21 | 2019-01-08 | Canon Kabushiki Kaisha | Physical registration of images acquired by Fourier Ptychography |
| WO2017216941A1 (ja) | 2016-06-17 | 2017-12-21 | 株式会社 日立ハイテクノロジーズ | 荷電粒子線装置 |
| US10176963B2 (en) | 2016-12-09 | 2019-01-08 | Waviks, Inc. | Method and apparatus for alignment of optical and charged-particle beams in an electron microscope |
| JP6739668B2 (ja) * | 2017-04-27 | 2020-08-12 | キング・アブドゥッラー・ユニバーシティ・オブ・サイエンス・アンド・テクノロジー | 画像系列整列システム及び方法 |
| JP6775003B2 (ja) * | 2018-12-26 | 2020-10-28 | 株式会社日立ハイテク | 荷電粒子線装置 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6373070B1 (en) | 1999-10-12 | 2002-04-16 | Fei Company | Method apparatus for a coaxial optical microscope with focused ion beam |
| TW200703409A (en) * | 2005-03-03 | 2007-01-16 | Ebara Corp | Mapping projection type electron beam apparatus and defects inspection system using such apparatus |
| EP1724809A1 (en) * | 2005-05-18 | 2006-11-22 | FEI Company | Particle-optical apparatus for the irradiation of a sample |
| EP1953791A1 (en) | 2007-02-05 | 2008-08-06 | FEI Company | Apparatus for observing a sample with a particle beam and an optical microscope |
| US7781733B2 (en) * | 2007-05-16 | 2010-08-24 | International Business Machines Corporation | In-situ high-resolution light-optical channel for optical viewing and surface processing in parallel with charged particle (FIB and SEM) techniques |
| JP2008300354A (ja) | 2007-05-31 | 2008-12-11 | Fei Co | 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置 |
| JP5276860B2 (ja) * | 2008-03-13 | 2013-08-28 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
| JP5842308B2 (ja) * | 2010-04-06 | 2016-01-13 | 大学共同利用機関法人自然科学研究機構 | 複合顕微鏡装置 |
| US8698098B2 (en) * | 2010-07-30 | 2014-04-15 | E.A. Fischione Instruments, Inc. | In situ holder assembly |
| JP5814741B2 (ja) * | 2011-10-20 | 2015-11-17 | 株式会社日立ハイテクノロジーズ | 走査電子顕微鏡 |
-
2014
- 2014-01-27 EP EP14152582.4A patent/EP2899743B1/en not_active Not-in-force
-
2015
- 2015-01-26 JP JP2015012456A patent/JP6047592B2/ja not_active Expired - Fee Related
- 2015-01-27 US US14/606,850 patent/US9293297B2/en active Active
- 2015-01-27 CN CN201510040069.1A patent/CN104810230B/zh not_active Expired - Fee Related
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