JP2015130425A - Wiring board and electronic device - Google Patents

Wiring board and electronic device Download PDF

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JP2015130425A
JP2015130425A JP2014001703A JP2014001703A JP2015130425A JP 2015130425 A JP2015130425 A JP 2015130425A JP 2014001703 A JP2014001703 A JP 2014001703A JP 2014001703 A JP2014001703 A JP 2014001703A JP 2015130425 A JP2015130425 A JP 2015130425A
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wall surface
wiring board
recess
electronic component
metal layer
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JP6189755B2 (en
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重俊 犬山
Shigetoshi Inuyama
重俊 犬山
隼人 奥野
Hayato Okuno
隼人 奥野
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Kyocera Corp
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49175Parallel arrangements

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Abstract

PROBLEM TO BE SOLVED: To provide a wiring board in which the characteristics and reliability of an electronic component mounted thereon are improved, and to provide an electronic device.SOLUTION: A wiring board 1 of the invention includes: a mounting metal layer 3 which has an insulation base material 2 having a recessed part 2a and an outer wall surface 2b and is provided on a bottom surface of the recessed part 2a, the mounting metal layer 3 on which an electronic component 11 is mounted; a connection layer 4 which is connected with the mounting metal layer 3 and extends to an inner wall surface of the recessed part; and a via which is connected with the connection layer 4, the via where a width increases from the inner wall surface of the recessed part 2a toward the outer wall surface 2b facing the inner wall surface on a longitudinal section.

Description

本発明は、例えば電子部品が搭載される配線基板およびそれを用いた電子装置に関するものである。   The present invention relates to, for example, a wiring board on which electronic components are mounted and an electronic device using the wiring board.

例えば加速度センサ素子等のセンサ素子,半導体素子,撮像素子,発光素子,容量素子,コイル,抵抗および振動子等の電子部品を搭載するための配線基板として、酸化アルミニウム質焼結体等のセラミック焼結体からなる複数の絶縁層が積層されてなる四角板状(直方体状)の絶縁基体と、絶縁基体の主面から対向する他の主面にかけて設けられた配線導体と、絶縁基体の他の主面に設けられ、配線導体と電気的に接続された外部電極とを備える配線基板が広く用いられている。   For example, as a wiring board for mounting electronic components such as a sensor element such as an acceleration sensor element, a semiconductor element, an imaging element, a light emitting element, a capacitor element, a coil, a resistor, and a vibrator, a ceramic ceramic such as an aluminum oxide sintered body is used. A rectangular plate-like (cuboid) insulating base formed by laminating a plurality of insulating layers made of a bonded body, a wiring conductor provided from the main surface of the insulating base to the other main surface facing the other, and other insulating bases A wiring board provided with an external electrode provided on the main surface and electrically connected to the wiring conductor is widely used.

この配線基板について、絶縁基体の凹部底面に電子部品を搭載した後、電子部品の電極を絶縁基体の配線導体とボンディングワイヤ等を介して電気的に接続し、必要に応じて電子部品を樹脂等で封止すれば、例えばコンピュータまたは携帯電話等の電子機器を構成する外部電気回路に部品として実装される電子装置が形成される。この電子装置について、外部電極を外部電気回路(プリント回路基板等の実装基板に形成されている電気回路)に対向させて接続すれば、配線導体を介して電子部品の電極と外部電気回路とが電気的に接続される。   About this wiring board, after mounting an electronic component on the bottom surface of the concave portion of the insulating base, the electrode of the electronic component is electrically connected to the wiring conductor of the insulating base via a bonding wire, etc. In this way, an electronic device that is mounted as a component on an external electric circuit constituting an electronic device such as a computer or a mobile phone is formed. In this electronic device, if the external electrode is connected to face an external electric circuit (an electric circuit formed on a mounting board such as a printed circuit board), the electrode of the electronic component and the external electric circuit are connected via the wiring conductor. Electrically connected.

近年、配線基板に搭載される電子部品の機能を有効に活用するために、凹部底面に電子部品を搭載し、絶縁基体の外壁面が実装基板に接合されて使用される、いわゆる縦型の配線基板がある。   In recent years, in order to effectively use the functions of electronic components mounted on a wiring board, so-called vertical wiring is used in which electronic components are mounted on the bottom surface of a recess and the outer wall surface of an insulating substrate is bonded to a mounting board. There is a substrate.

特開平5−206324号公報JP-A-5-206324

例えば、電子部品が加速度センサ素子の場合であれば、水平な方向(横方向)における加速度を有効に検知するために、上記のような縦型の配線基板の実装が行なわれる。このような場合に、電子部品が搭載される凹部底面から絶縁基体の裏面にかけて、絶縁基体を貫くようにしてサーマルビア等の導体部が設けられており、電子部品から発生する熱を導体部を介して外部へ放散させるようにしている。   For example, if the electronic component is an acceleration sensor element, the vertical wiring board as described above is mounted in order to effectively detect acceleration in the horizontal direction (lateral direction). In such a case, a conductor portion such as a thermal via is provided so as to penetrate the insulating substrate from the bottom surface of the recess where the electronic component is mounted to the back surface of the insulating substrate, and heat generated from the electronic component is transferred to the conductor portion. To dissipate outside.

しかしながら、電子部品から発生する熱を導体部から実装基板等に伝えるために、導体部の露出した部分から実装基板側にわたって金属層等を設ける必要があり、金属層等の長さが長く、電子部品から発生する熱が実装基板等へ十分伝わりにくいものとなっていた。すなわち、電子部品から発生する熱が外部等へ十分伝わりにくいと、電子部品が正常に動作しにくいものとなるために、特性や信頼性が低下する。また、金属層が絶縁基体の裏面に設けられているため、取り扱い時に短絡等を起こす可能性があった。   However, in order to transfer the heat generated from the electronic component from the conductor part to the mounting board, etc., it is necessary to provide a metal layer, etc. from the exposed part of the conductor part to the mounting board side. The heat generated from the components is not easily transmitted to the mounting board or the like. That is, if the heat generated from the electronic component is not sufficiently transmitted to the outside or the like, the electronic component is difficult to operate normally, and the characteristics and reliability are reduced. Further, since the metal layer is provided on the back surface of the insulating base, there is a possibility of causing a short circuit or the like during handling.

本発明の一つの態様による配線基板は、凹部および外壁面を有する絶縁基体を備えており、前記凹部底面に設けられ電子部品が搭載される搭載用金属層と、該搭載用金属層に接続され、前記凹部の内壁面に延出された接続層と、該接続層に接続されており、縦断面に
おいて、前記凹部の内壁面から該内壁面に対向する前記外壁面に向かって幅が大きくなっているビアを有している。
A wiring board according to one aspect of the present invention includes an insulating base having a recess and an outer wall surface, and is mounted on the bottom surface of the recess and mounted with an electronic component, and connected to the mounting metal layer. A connection layer extending to the inner wall surface of the recess, and connected to the connection layer, and in a longitudinal section, the width increases from the inner wall surface of the recess to the outer wall surface facing the inner wall surface. Have vias.

本発明の他の態様によれば、電子装置は、上記構成の配線基板と、配線基板に搭載された電子部品とを備えている。   According to another aspect of the present invention, an electronic device includes the wiring board having the above-described configuration and an electronic component mounted on the wiring board.

本発明の一つの態様による配線基板において、凹部底面に設けられ電子部品が搭載される搭載用金属層と、搭載用金属層に接続され、凹部の内壁面に延出された接続層と、接続層に接続されており、縦断面において、凹部の内壁面から内壁面に対向する外壁面に向かって幅が大きくなっているビアを有していることによって、電子部品が搭載される搭載用金属層から実装基板への熱伝導が直線的になり、熱伝導の経路が短いものとなるので電子部品から発生する熱が実装基板等へ伝わりやすいものとなる。また、縦断面において、凹部の内壁面から内壁面に対向する外壁面に向かって幅が大きくなっているビアを有しているため、電子部品から発生する熱が横方向へも拡散しながら凹部の内側から外側へ伝わるものとなるので電子部品から発生する熱が広範囲に実装基板等へ伝わりやすいものとなる。   In the wiring substrate according to one aspect of the present invention, a mounting metal layer provided on the bottom surface of the recess and on which an electronic component is mounted, a connection layer connected to the mounting metal layer and extending to the inner wall surface of the recess, and a connection A mounting metal on which an electronic component is mounted by having a via that is connected to the layer and has a width that increases from the inner wall surface of the recess toward the outer wall surface facing the inner wall surface in the longitudinal section. The heat conduction from the layer to the mounting board becomes linear and the heat conduction path becomes short, so that heat generated from the electronic component is easily transferred to the mounting board and the like. In addition, in the longitudinal section, since the via has a width that increases from the inner wall surface of the recess to the outer wall surface facing the inner wall surface, the heat generated from the electronic component is diffused in the lateral direction while being recessed. Since heat is transmitted from the inside to the outside, heat generated from the electronic component is easily transmitted to a mounting substrate or the like over a wide range.

本発明の他の態様によれば、電子装置は、上記構成の配線基板を有していることによって、電子部品の特性、信頼性が向上されたものとすることができる。   According to another aspect of the present invention, the electronic device includes the wiring board having the above-described configuration, whereby the characteristics and reliability of the electronic component can be improved.

(a)は本発明の実施形態における電子装置を示す平面透視図であり、(b)は(a)に示された電子装置のA−A線における縦断面図である。(A) is a plane perspective view which shows the electronic device in embodiment of this invention, (b) is a longitudinal cross-sectional view in the AA line of the electronic device shown by (a). 本発明の実施形態における電子装置の他の例を示す縦断面図である。It is a longitudinal cross-sectional view which shows the other example of the electronic device in embodiment of this invention.

以下、本発明の例示的な実施形態について図面を参照して説明する。   Hereinafter, exemplary embodiments of the present invention will be described with reference to the drawings.

図1、図2を参照して本発明の実施形態における電子装置について説明する。
本実施形態における電子装置は、配線基板1と、配線基板1に搭載された電子部品11とを有している。配線基板1は、絶縁基体2と、搭載用金属層3と、接続層4と、ビア5とを有している。なお、図1、図2において、電子装置は仮想のXYZ空間内に設けられており、以下、便宜的に「上方向」とは仮想のZ軸の正方向のことをいう。
An electronic device according to an embodiment of the present invention will be described with reference to FIGS.
The electronic device according to this embodiment includes a wiring board 1 and an electronic component 11 mounted on the wiring board 1. The wiring substrate 1 has an insulating base 2, a mounting metal layer 3, a connection layer 4, and a via 5. 1 and 2, the electronic device is provided in a virtual XYZ space. Hereinafter, for convenience, the “upward direction” refers to the positive direction of the virtual Z axis.

絶縁基体2は、凹部2aおよび外壁面2bを有している。   The insulating base 2 has a recess 2a and an outer wall surface 2b.

また、絶縁基体2は、凹部2aの底面に加速度センサ素子等のセンサ素子,半導体素子,撮像素子,発光素子,容量素子,コイル,抵抗および振動子等の電子部品11が搭載される搭載用金属層3を有し、例えば、酸化アルミニウム質焼結体,ムライト質焼結体,炭化珪素質焼結体,窒化アルミニウム質焼結体,窒化珪素質焼結体,ガラスセラミックス焼結体等のセラミック焼結体によって形成されている。絶縁基体2は、このようなセラミック焼結体からなる複数の絶縁層(図示せず)が積層されて形成されていてもよいし、所定の形状に成形できるような金型を用いて、セラミックグリーンシートを加圧することによって成形されていてもよい。   The insulating base 2 is a mounting metal on which electronic parts 11 such as a sensor element such as an acceleration sensor element, a semiconductor element, an imaging element, a light emitting element, a capacitor element, a coil, a resistor, and a vibrator are mounted on the bottom surface of the recess 2a. For example, a ceramic such as an aluminum oxide sintered body, a mullite sintered body, a silicon carbide sintered body, an aluminum nitride sintered body, a silicon nitride sintered body, or a glass ceramic sintered body. It is formed of a sintered body. The insulating base 2 may be formed by laminating a plurality of insulating layers (not shown) made of such a ceramic sintered body, or by using a mold that can be molded into a predetermined shape. You may shape | mold by pressurizing a green sheet.

絶縁基体2は、例えば、酸化アルミニウム質焼結体からなる複数の絶縁層が積層されて形成されている場合であれば、以下の方法で製作することができる。まず、酸化アルミニウムの粉末に酸化珪素、酸化マグネシウムおよび酸化カルシウム等の焼結助剤を添加し、さらに適当な有機バインダーおよび溶剤等を添加混合して泥漿状を作るとともに、この泥
漿物をドクターブレード法やカレンダーロール法等によってシート状に成形してセラミックグリーンシートを得て、セラミックグリーンシートに適当な打ち抜き加工を施すとともにこれを必要に応じて複数枚積層し、高温(約1600℃)で焼成することによって製作される。また、所定の形状に成形できるような金型を用いて、セラミックグリーンシートを加圧することによって成形し、上述と同様に高温で焼成することによって製作してもよい。
If the insulating base 2 is formed by laminating a plurality of insulating layers made of an aluminum oxide sintered body, for example, it can be manufactured by the following method. First, a sintering aid such as silicon oxide, magnesium oxide and calcium oxide is added to the aluminum oxide powder, and an appropriate organic binder and solvent are added and mixed to form a slurry. A ceramic green sheet is obtained by molding into a sheet shape by the calendering method or calender roll method, etc., and appropriate punching is performed on the ceramic green sheet, and if necessary, multiple sheets are laminated and fired at a high temperature (about 1600 ° C) It is manufactured by doing. Alternatively, the ceramic green sheet may be molded by pressurization using a mold that can be molded into a predetermined shape, and fired at a high temperature as described above.

搭載用金属層3は、凹部2a底面に設けられており、電子部品11が搭載されるものとなる。   The mounting metal layer 3 is provided on the bottom surface of the recess 2a, and the electronic component 11 is mounted thereon.

接続層4は、搭載用金属層3に接続され、凹部2aの内壁面に延出されている。   The connection layer 4 is connected to the mounting metal layer 3 and extends to the inner wall surface of the recess 2a.

この絶縁基体2において、外壁面2bに外部電極が設けられており、また電子部品11が搭載される凹部2aの底面から外壁面2bの外部電極にかけてビアホール導体、スルーホール導体等の貫通導体を含む配線導体が被着形成されている。外部電極は、半田等のろう材を介して実装基板に形成されている外部電気回路の電極パッドに電気的に接続されている。   In this insulating substrate 2, an external electrode is provided on the outer wall surface 2b, and includes a through-hole conductor such as a via-hole conductor or a through-hole conductor from the bottom surface of the recess 2a in which the electronic component 11 is mounted to the outer electrode of the outer wall surface 2b. A wiring conductor is deposited. The external electrode is electrically connected to an electrode pad of an external electric circuit formed on the mounting substrate via a brazing material such as solder.

搭載用金属層3、接続層4、外部電極および配線導体は、絶縁基体2がセラミックスから成る場合は、タングステン(W),モリブデン(Mo),マンガン(Mn),銀(Ag),銅(Cu)等の金属粉末メタライズから成り、絶縁基体2用のセラミックグリーンシートに搭載用金属層3、接続層4、外部電極および配線導体用の導体ペーストをスクリーン印刷法等によって所定形状で印刷して、セラミックグリーンシートと同時に焼成することによって、絶縁基体2の所定位置に形成される。内部導体のうち、セラミックグリーンシートを貫通する貫通導体は、導体ペーストを印刷することによってセラミックグリーンシートに形成した貫通孔を充填しておけばよい。このような導体ペーストは、タングステン(W),モリブデン(Mo),マンガン(Mn),銀(Ag),銅(Cu)等の金属粉末に適当な溶剤およびバインダーを加えて混練することによって、適度な粘度に調整して作製される。なお、絶縁基体2との接合強度を高めるために、ガラス、セラミックスを含んでいても構わない。   When the insulating base 2 is made of ceramic, the mounting metal layer 3, the connection layer 4, the external electrode, and the wiring conductor are tungsten (W), molybdenum (Mo), manganese (Mn), silver (Ag), copper (Cu ) And the like, and the mounting metal layer 3, the connection layer 4, the external electrodes and the conductor paste for the wiring conductor are printed in a predetermined shape on the ceramic green sheet for the insulating substrate 2 by a screen printing method or the like, By firing at the same time as the ceramic green sheet, the insulating base 2 is formed at a predetermined position. Of the internal conductors, the through conductors penetrating the ceramic green sheet may be filled with through holes formed in the ceramic green sheet by printing a conductor paste. Such a conductor paste can be appropriately obtained by adding an appropriate solvent and a binder to a metal powder such as tungsten (W), molybdenum (Mo), manganese (Mn), silver (Ag), copper (Cu), and kneading them. It is produced by adjusting to a proper viscosity. In order to increase the bonding strength with the insulating substrate 2, glass or ceramics may be included.

ビア5は、接続層4に接続されており、縦断面において、凹部2aの内壁面から内壁面に対向する外壁面2bに向かって設けられている。このような構成とすることにより、電子部品11が搭載される搭載用金属層3から実装基板への熱伝導が直線的になり、熱伝導の経路が短いものとなるので電子部品11から発生する熱が実装基板等へ伝わりやすいものとなる。また、縦断面において、凹部2aの内壁面から内壁面に対向する外壁面2bに向かって幅が大きくなっているビア5を有していることから、電子部品11から発生する熱が横方向へも拡散しながら凹部2aの内側から外側へ伝わるものとなるので電子部品11から発生する熱が広範囲に実装基板等へ伝わりやすいものとなる。なお、ビア5は例えば凹部2aの内壁面から内壁面に対向する外壁面2bに向かって径が大きくなっている。また、外壁面2bにはビア5に接続されるパッド5aが設けられている。   The via 5 is connected to the connection layer 4 and is provided in the longitudinal section from the inner wall surface of the recess 2a toward the outer wall surface 2b facing the inner wall surface. With such a configuration, heat conduction from the mounting metal layer 3 on which the electronic component 11 is mounted to the mounting substrate becomes linear, and the heat conduction path is short, so that the heat is generated from the electronic component 11. Heat is easily transferred to the mounting substrate and the like. Further, in the longitudinal section, since the via 5 has a width increasing from the inner wall surface of the recess 2a toward the outer wall surface 2b facing the inner wall surface, heat generated from the electronic component 11 is laterally generated. Therefore, the heat generated from the electronic component 11 is easily transmitted over a wide range to the mounting substrate or the like. The via 5 has a diameter that increases from the inner wall surface of the recess 2a toward the outer wall surface 2b facing the inner wall surface, for example. The outer wall surface 2b is provided with a pad 5a connected to the via 5.

ビア5は、図1に示されるように、凹部2aの内壁面から内壁面に対向する外壁面2bにかけて複数(図1では3つ)配置されていると、電子部品11から発生する熱が実装基板等へより伝わりやすいものとなり、好ましいものとなる。   As shown in FIG. 1, when a plurality of vias 5 (three in FIG. 1) are arranged from the inner wall surface of the recess 2a to the outer wall surface 2b facing the inner wall surface, the heat generated from the electronic component 11 is mounted. It becomes easier to be transmitted to the substrate and the like, which is preferable.

ビア5およびパッド5aは、上述の搭載用金属層3、接続層4、外部電極および配線導体と同様な方法によって絶縁基体2の所定位置に形成されている。   The via 5 and the pad 5a are formed at predetermined positions on the insulating base 2 by the same method as the mounting metal layer 3, the connection layer 4, the external electrode, and the wiring conductor.

ビア5は、縦断面において、凹部2aの内壁面から外壁面2bに向かって幅が漸次大きくなっている。このような構成とすることによって、電子部品11から発生する熱が凹部2
aの内側から外側にかけて放射状にかつ直線的に伝導して実装基板等へ広範囲にかつ速やかに伝わりやすいものとなり、好ましいものとなる。
In the longitudinal section, the via 5 gradually increases in width from the inner wall surface of the recess 2a toward the outer wall surface 2b. With such a configuration, the heat generated from the electronic component 11 is transferred to the recess 2.
This is preferable because it conducts radially and linearly from the inner side to the outer side of a and easily propagates to a mounting substrate or the like over a wide area.

ビア5は、縦断面において、凹部2aの内壁面から外壁面2bに向かって幅が階段状に大きくなっている。このような構成とすることによって、電子部品11から発生する熱が実装基板等へ放射状に広範囲に伝わりやすいものとなるとともに、凹部2aの内壁面から外壁面2bに向かって幅が漸次大きくなっている場合に比べて、ビア5と絶縁基体2との熱膨張差により横方向に応力が発生したとしても、絶縁基体2の絶縁層が傾斜していないので、ビア5が絶縁基体2から抜ける方向に応力が働きにくいものとなり、好ましい。   The via 5 has a stepwise increase in width from the inner wall surface of the recess 2a toward the outer wall surface 2b in the longitudinal section. With such a configuration, heat generated from the electronic component 11 is easily transmitted in a wide range to the mounting substrate and the like, and the width gradually increases from the inner wall surface of the recess 2a toward the outer wall surface 2b. Even if stress is generated in the lateral direction due to the difference in thermal expansion between the via 5 and the insulating base 2, the insulating layer of the insulating base 2 is not inclined, so that the via 5 comes out of the insulating base 2. It is preferable that stress is difficult to work on.

パッド5aは、半田等のろう材を介して実装基板に形成されている外部電気回路の電極パッドに接続されている。   The pad 5a is connected to an electrode pad of an external electric circuit formed on the mounting substrate via a brazing material such as solder.

電子部品11は、配線基板1の凹部2a底面に設けられた搭載用金属層3に搭載されている。なお、電子部品11の搭載方法は、ワイヤボンディングまたはフリップチップ接続等である。   The electronic component 11 is mounted on the mounting metal layer 3 provided on the bottom surface of the recess 2 a of the wiring board 1. The electronic component 11 is mounted by wire bonding or flip chip connection.

また、縦断面において、パッド5aが外壁面2bに全体的に設けられていると、電子部品11から発生する熱が実装基板等へより効果的に伝わりやすいものとなり、好ましい。   In addition, it is preferable that the pad 5a is provided on the outer wall surface 2b as a whole in the longitudinal section because heat generated from the electronic component 11 can be more effectively transferred to the mounting substrate and the like.

次に、本実施形態の配線基板1の製造方法について説明する。   Next, the manufacturing method of the wiring board 1 of this embodiment is demonstrated.

絶縁基体2は、例えば酸化アルミニウム(Al)質焼結体からなり、その底面に設けられた搭載用金属層3に電子部品11が搭載される凹部2aを有している。この絶縁基体2は、主成分が酸化アルミニウム(Al)である酸化アルミニウム質焼結体から成る場合、Alの粉末に焼結助材としてシリカ(SiO),マグネシア(MgO),カルシア(CaO)等の粉末を添加し、さらに適当なバインダ、溶剤および可塑剤を添加し、次にこれらの混合物を混錬してスラリー状となす。その後、従来周知のドクターブレード法等の成形方法によって多数個取り用のセラミックグリーンシートを得る。 The insulating base 2 is made of, for example, an aluminum oxide (Al 2 O 3 ) -based sintered body, and has a recess 2 a in which the electronic component 11 is mounted on the mounting metal layer 3 provided on the bottom surface. When the insulating base 2 is made of an aluminum oxide sintered body whose main component is aluminum oxide (Al 2 O 3 ), silica (SiO 2 ), magnesia (MgO) is used as a sintering aid for Al 2 O 3 powder. ), Calcia (CaO), etc. are added, and an appropriate binder, solvent and plasticizer are added, and then the mixture is kneaded to form a slurry. Thereafter, a ceramic green sheet for obtaining a large number of pieces is obtained by a conventionally known molding method such as a doctor blade method.

このセラミックグリーンシートを用いて、以下の(1)〜(5)の工程により配線基板1が作製される。   Using this ceramic green sheet, the wiring substrate 1 is manufactured by the following steps (1) to (5).

(1)凹部2aとなる部位の打ち抜き金型を用いた打ち抜き工程および傾斜部、階段部を有する金型やゴム等の弾性体を押し当てるビア5の傾斜状および階段状の形成工程。   (1) A punching process using a punching die at a portion to be the recess 2a and a sloped and stepped formation process of the via 5 for pressing an inclined body, an elastic body such as a mold having a staircase or rubber, or rubber.

(2)凹部2a底面に搭載用金属層3、凹部2aの内壁面に接続層4、絶縁基体2の外壁面2bに外部電極、ビア5、パッド5a、凹部2aの底面から外壁面2bの外部電極にかけてビアホール導体、スルーホール導体等の貫通導体を含む配線導体をそれぞれ形成するための導体ペーストの印刷塗布工程。   (2) The mounting metal layer 3 on the bottom surface of the recess 2a, the connection layer 4 on the inner wall surface of the recess 2a, the external electrode, the via 5, the pad 5a on the outer wall surface 2b of the insulating base 2, and the outside of the outer wall surface 2b from the bottom surface of the recess 2a. A process of applying and applying a conductor paste for forming wiring conductors including through-hole conductors such as via-hole conductors and through-hole conductors over the electrodes.

(3)各絶縁層となるセラミックグリーンシートを積層してセラミックグリーンシート積層体を作製する工程、または凹部2aおよび外壁面2bとなる形状に成形可能な金型を用いてセラミックグリーンシートを加圧し、成型体を作成する工程。   (3) The process of producing a ceramic green sheet laminate by laminating ceramic green sheets to be the respective insulating layers, or pressurizing the ceramic green sheet using a mold that can be formed into a shape to form the recess 2a and the outer wall surface 2b. The process of creating a molded body.

(4)このセラミックグリーンシート積層体または成型体を個々の絶縁基体2となる積層体または成型体に切断分離し、これらを焼成して外部電極、パッド5aを有する焼結体を得る工程。   (4) A step of cutting and separating the ceramic green sheet laminated body or molded body into a laminated body or molded body to be an individual insulating substrate 2 and firing them to obtain a sintered body having external electrodes and pads 5a.

(5)外部電極、パッド5aを保護して酸化防止するとともにろう付けを容易にするた
めの金属メッキ層を外部電極、パッド5aの表面に被着する工程。
(5) A step of depositing a metal plating layer on the surface of the external electrode and pad 5a for protecting the external electrode and pad 5a to prevent oxidation and facilitating brazing.

この配線基板1は、これを多数個取りで一括して作製できることから、セラミックスからなる基板上に金属製の枠体を設けたタイプの半導体パッケージに比べて低コストで製造でき高い汎用性を有する。この場合、焼成して得られた多数個取り形成の配線基板1の外縁となる箇所に沿って分割溝を形成しておき、この分割溝に沿って破断させて分割する方法、またはスライシング法等により配線基板1の外縁となる箇所に沿って切断する方法等を用いることができる。なお、分割溝は、焼成後にスライシング装置により多数個取りで形成する配線基板1の厚みより小さく切り込むことによって形成することができるが、多数個取りで形成する配線基板1用のセラミックグリーンシート積層体または成型体にカッター刃を押し当てたり、スライシング装置により積層体または成型体の厚みより小さく切り込んだりすることによって形成してもよい。   Since this wiring board 1 can be produced in a lump by collecting many of them, it can be manufactured at a lower cost than a semiconductor package of a type in which a metal frame is provided on a ceramic substrate, and has high versatility. . In this case, a dividing groove is formed along a portion serving as the outer edge of the multi-cavity wiring board 1 obtained by firing, a method of breaking along the dividing groove and dividing, a slicing method, or the like Thus, it is possible to use a method of cutting along a portion that becomes the outer edge of the wiring board 1. In addition, although a division | segmentation groove | channel can be formed by cutting smaller than the thickness of the wiring board 1 formed by multi-slicing with a slicing apparatus after baking, the ceramic green sheet laminated body for wiring boards 1 formed by multi-slicing Alternatively, it may be formed by pressing a cutter blade against the molded body or by cutting with a slicing device smaller than the thickness of the laminated body or molded body.

また、セラミックグリーンシート積層体または成型体から切り出した個々の積層体または成型体、もしくは配線基板1を多数個取りとするセラミックグリーンシート積層体または成型体を焼成することにより、各外部電極、パッド5aが焼成されて被着形成される。すなわち、外部電極、パッド5aは5〜30μmの厚さで形成され、また、電子部品11が電気的に接続される入出力端子の配線導体が、5〜25μmの厚さで形成される。   In addition, by firing individual laminates or molded bodies cut out from ceramic green sheet laminates or molded bodies, or ceramic green sheet laminates or molded bodies having a large number of wiring boards 1, each external electrode, pad 5a is fired and deposited. That is, the external electrode and the pad 5a are formed with a thickness of 5 to 30 μm, and the wiring conductor of the input / output terminal to which the electronic component 11 is electrically connected is formed with a thickness of 5 to 25 μm.

さらに、搭載用金属層3、接続層4、パッド5a、各外部電極、および配線導体の絶縁基体2の表面に露出した箇所を保護するとともに酸化防止し、また電子部品11や実装基板の電極パッドとの接合強度を高めるために、搭載用金属層3、接続層4、パッド5a、外部電極の表面、配線導体の絶縁基体2の表面に露出した箇所に、厚さ0.5〜10μmのNi
メッキ層を被着させるか、またはこのNiメッキ層および厚さ0.5〜3μmの金(Au)
メッキ層を順次被着させるのがよい。
Further, the mounting metal layer 3, the connection layer 4, the pad 5 a, the external electrodes, and the portions exposed on the surface of the insulating base 2 of the wiring conductor are protected and oxidized, and the electrode pads of the electronic component 11 and the mounting substrate are used. In order to increase the bonding strength with the metal layer 3, the mounting metal layer 3, the connection layer 4, the pad 5a, the surface of the external electrode, and the portion exposed on the surface of the insulating base 2 of the wiring conductor, Ni having a thickness of 0.5 to 10 μm
A plating layer is applied, or this Ni plating layer and gold (Au) having a thickness of 0.5 to 3 μm
It is preferable to deposit the plating layers sequentially.

このようにして形成された配線基板1に、電子部品11を搭載する。凹部2aの底面に設けられた搭載用金属層3に電子部品11を搭載した電子装置を実装基板に半田等のろう材を介して接合することで、凹部2aの搭載用金属層3に搭載した電子部品11が配線導体、外部電極を介して実装基板の電極パッドに電気的に接続される。電子部品11は例えば、加速度センサ素子等のセンサ素子、半導体素子、撮像素子、発光素子、容量素子、コイル、抵抗および振動子等である。電子部品11は、配線基板1の配線導体とワイヤーボンディングまたはフリップチップ接続され、電子部品11の各電極が金バンプ、はんだ等またはボンディングワイヤーにより電気的に接続される。さらに、いわゆるアンダーフィルとして例えばエポキシ樹脂等の接合材である樹脂を配線基板1の外壁面2bと実装基板との間に設けて接合される。なお、電子部品11の各電極と複数の配線導体との電気的な接続に、上述の金バンプまたは半田を用いる代わりに導電性樹脂(異方性導電樹脂等)から成る接続部材を用いてもよい。   The electronic component 11 is mounted on the wiring board 1 formed in this way. The electronic device having the electronic component 11 mounted on the mounting metal layer 3 provided on the bottom surface of the recess 2a is mounted on the mounting metal layer 3 of the recess 2a by joining the mounting substrate with a soldering material such as solder. The electronic component 11 is electrically connected to the electrode pad of the mounting board via the wiring conductor and the external electrode. The electronic component 11 is, for example, a sensor element such as an acceleration sensor element, a semiconductor element, an imaging element, a light emitting element, a capacitive element, a coil, a resistor, a vibrator, and the like. The electronic component 11 is wire-bonded or flip-chip connected to the wiring conductor of the wiring board 1, and each electrode of the electronic component 11 is electrically connected by a gold bump, solder, or the like or a bonding wire. Furthermore, as a so-called underfill, for example, a resin as a bonding material such as an epoxy resin is provided between the outer wall surface 2b of the wiring board 1 and the mounting board and bonded. Note that, instead of using the gold bumps or solder described above, a connection member made of a conductive resin (anisotropic conductive resin or the like) may be used for electrical connection between each electrode of the electronic component 11 and the plurality of wiring conductors. Good.

また、電子装置は、上述の半田等のろう材を用いる代わりに導電性樹脂から成る接合部材を用いて、外部電極と実装基板の電極パッドとを接続させても構わない。また、異方性導電樹脂等の接合部材を実装基板上に配置した後圧着させることで、配線基板1の外部電極と実装基板の電極パッドとを電気的に接続させるとともに、異方性導電樹脂等の接合部材を配線基板1の外壁面2bと実装基板との間に設けるようにしてもよい。この場合、製造工程が簡略化できるとともに、配線基板1の外部電極と実装基板の電極パッドとの接続のための接合部材と、配線基板1の外壁面2bと実装基板との間に設ける接合部材とが同一の材料となり、配線基板1と実装基板との接合箇所全体における接合強度を均一にすることができるため、電子装置に外力が加わったとしても、外力が局所的に集中しにくいものとなり、応力が分散されやすくなるため、好ましい。   In addition, the electronic device may connect the external electrode and the electrode pad of the mounting substrate using a bonding member made of a conductive resin instead of using the brazing material such as solder described above. In addition, the bonding member such as an anisotropic conductive resin is placed on the mounting substrate and then subjected to pressure bonding so that the external electrode of the wiring substrate 1 and the electrode pad of the mounting substrate are electrically connected, and the anisotropic conductive resin. A bonding member such as the above may be provided between the outer wall surface 2b of the wiring board 1 and the mounting board. In this case, the manufacturing process can be simplified, a bonding member for connecting the external electrode of the wiring board 1 and the electrode pad of the mounting board, and a bonding member provided between the outer wall surface 2b of the wiring board 1 and the mounting board. Are made of the same material, and the bonding strength at the entire bonding portion between the wiring board 1 and the mounting board can be made uniform, so even if an external force is applied to the electronic device, the external force is not easily concentrated locally. , Because stress is easily dispersed.

本実施形態の配線基板1は、凹部2aおよび外壁面2bを有する絶縁基体2を有しており、凹部2a底面に設けられ電子部品11が搭載される搭載用金属層3と、搭載用金属層3に接続され、凹部の内壁面に延出された接続層4と、接続層4に接続されており、縦断面において、凹部2aの内壁面から内壁面に対向する外壁面2bに向かって幅が大きくなっている。このような構成とすることにより、搭載用金属層3、接続層4の長さが短く、また縦断面において、凹部2aの内壁面から内壁面に対向する外壁面2bに向かって幅が大きくなっているビア5を有しているため、電子部品11から発生する熱が実装基板等へより伝わりやすいものとなる。また、搭載用金属層3と接続層4とが配線基板1の凹部2a内に設けられているため、取り扱い時に短絡等を起こす可能性を抑制することが可能となる。   The wiring board 1 of the present embodiment includes an insulating base 2 having a recess 2a and an outer wall surface 2b. The mounting metal layer 3 is provided on the bottom surface of the recess 2a and on which an electronic component 11 is mounted, and the mounting metal layer. 3 and connected to the connection layer 4 extending to the inner wall surface of the recess, and in the longitudinal section, the width from the inner wall surface of the recess 2a toward the outer wall surface 2b facing the inner wall surface Is getting bigger. With such a configuration, the length of the mounting metal layer 3 and the connection layer 4 is short, and in the longitudinal section, the width increases from the inner wall surface of the recess 2a toward the outer wall surface 2b facing the inner wall surface. Since the via 5 is provided, the heat generated from the electronic component 11 is more easily transmitted to the mounting substrate or the like. In addition, since the mounting metal layer 3 and the connection layer 4 are provided in the recess 2a of the wiring board 1, it is possible to suppress the possibility of causing a short circuit or the like during handling.

本実施形態の電子装置は、上記構成の配線基板を有していることによって、電子部品の特性、信頼性が向上されたものとすることができる。   The electronic device according to the present embodiment includes the wiring board having the above-described configuration, so that the characteristics and reliability of the electronic component can be improved.

1・・・・・配線基板
2・・・・・絶縁基体
2a・・・・凹部
2b・・・・外壁面
3・・・・・搭載用金属層
4・・・・・接続層
5・・・・・ビア
5a・・・・パッド
11・・・・・電子部品
DESCRIPTION OF SYMBOLS 1 ... Wiring board 2 ... Insulation base | substrate 2a ...... Recessed part 2b ... Outer wall surface 3 ... Mounting metal layer 4 ... Connection layer 5 ... ... Via 5a ... Pad
11 ・ ・ ・ ・ ・ Electronic parts

Claims (4)

凹部および外壁面を有する絶縁基体を備えており、
前記凹部底面に設けられ電子部品が搭載される搭載用金属層と、
該搭載用金属層に接続され、前記凹部の内壁面に延出された接続層と、
該接続層に接続されており、縦断面において、前記凹部の内壁面から該内壁面に対向する前記外壁面に向かって幅が大きくなっているビアを有していることを特徴とする配線基板。
An insulating base having a recess and an outer wall surface,
A mounting metal layer provided on the bottom surface of the recess and on which an electronic component is mounted;
A connection layer connected to the mounting metal layer and extending to the inner wall surface of the recess;
A wiring board having a via which is connected to the connection layer and has a width increasing from an inner wall surface of the recess to the outer wall surface facing the inner wall surface in a longitudinal section. .
前記ビアは、縦断面において、前記凹部の内壁面から前記外壁面に向かって幅が漸次大きくなっていることを特徴とする請求項1に記載の配線基板。   The wiring board according to claim 1, wherein a width of the via gradually increases from an inner wall surface of the concave portion toward the outer wall surface in a longitudinal section. 前記ビアは、縦断面において、前記凹部の内壁面から前記外壁面に向かって幅が階段状に大きくなっていることを特徴とする請求項1に記載の配線基板。   2. The wiring board according to claim 1, wherein the via has a stepwise increase in width from an inner wall surface of the recess to the outer wall surface in a longitudinal section. 請求項1に記載された配線基板と、
該配線基板に搭載された電子部品とを備えていることを特徴とする電子装置。
A wiring board according to claim 1;
An electronic device comprising: an electronic component mounted on the wiring board.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362364A (en) * 1986-09-03 1988-03-18 Nec Corp Package of semiconductor integrated circuit
JP2003110044A (en) * 2001-07-25 2003-04-11 Kyocera Corp Package for containing semiconductor element
JP2008503895A (en) * 2004-06-22 2008-02-07 インテル コーポレイション Thermoelectric module
JP2009099791A (en) * 2007-10-17 2009-05-07 Denso Corp Semiconductor device, and semiconductor device unit
JP2010129661A (en) * 2008-11-26 2010-06-10 Kyocera Corp Mounting structure of electronic device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6362364A (en) * 1986-09-03 1988-03-18 Nec Corp Package of semiconductor integrated circuit
JP2003110044A (en) * 2001-07-25 2003-04-11 Kyocera Corp Package for containing semiconductor element
JP2008503895A (en) * 2004-06-22 2008-02-07 インテル コーポレイション Thermoelectric module
JP2009099791A (en) * 2007-10-17 2009-05-07 Denso Corp Semiconductor device, and semiconductor device unit
JP2010129661A (en) * 2008-11-26 2010-06-10 Kyocera Corp Mounting structure of electronic device

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