JP2015111611A5 - - Google Patents

Download PDF

Info

Publication number
JP2015111611A5
JP2015111611A5 JP2013252844A JP2013252844A JP2015111611A5 JP 2015111611 A5 JP2015111611 A5 JP 2015111611A5 JP 2013252844 A JP2013252844 A JP 2013252844A JP 2013252844 A JP2013252844 A JP 2013252844A JP 2015111611 A5 JP2015111611 A5 JP 2015111611A5
Authority
JP
Japan
Prior art keywords
gap
processing gas
processed
transmission window
light transmission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013252844A
Other languages
English (en)
Japanese (ja)
Other versions
JP5987815B2 (ja
JP2015111611A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013252844A priority Critical patent/JP5987815B2/ja
Priority claimed from JP2013252844A external-priority patent/JP5987815B2/ja
Priority to PCT/JP2014/076881 priority patent/WO2015083435A1/ja
Publication of JP2015111611A publication Critical patent/JP2015111611A/ja
Publication of JP2015111611A5 publication Critical patent/JP2015111611A5/ja
Application granted granted Critical
Publication of JP5987815B2 publication Critical patent/JP5987815B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013252844A 2013-12-06 2013-12-06 アッシング方法およびアッシング装置 Active JP5987815B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2013252844A JP5987815B2 (ja) 2013-12-06 2013-12-06 アッシング方法およびアッシング装置
PCT/JP2014/076881 WO2015083435A1 (ja) 2013-12-06 2014-10-08 アッシング方法およびアッシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013252844A JP5987815B2 (ja) 2013-12-06 2013-12-06 アッシング方法およびアッシング装置

Publications (3)

Publication Number Publication Date
JP2015111611A JP2015111611A (ja) 2015-06-18
JP2015111611A5 true JP2015111611A5 (https=) 2016-02-25
JP5987815B2 JP5987815B2 (ja) 2016-09-07

Family

ID=53273212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013252844A Active JP5987815B2 (ja) 2013-12-06 2013-12-06 アッシング方法およびアッシング装置

Country Status (2)

Country Link
JP (1) JP5987815B2 (https=)
WO (1) WO2015083435A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6550964B2 (ja) * 2015-06-26 2019-07-31 ウシオ電機株式会社 光処理装置およびその製造方法
JP6763243B2 (ja) * 2016-09-07 2020-09-30 ウシオ電機株式会社 光照射器
JP6828493B2 (ja) * 2017-02-15 2021-02-10 ウシオ電機株式会社 光照射装置および光照射方法
JP6780531B2 (ja) * 2017-02-15 2020-11-04 ウシオ電機株式会社 光照射装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0628254B2 (ja) * 1985-07-19 1994-04-13 フュージョン・システムズ・コーポレーション フオトレジストの剥離装置
JPH0864542A (ja) * 1994-08-25 1996-03-08 Plasma Syst:Kk 半導体処理装置用真空チャンバーおよびその製造方法
JP2000323455A (ja) * 1999-05-07 2000-11-24 Hitachi Ltd アッシング装置
US6897162B2 (en) * 2003-10-20 2005-05-24 Wafermasters, Inc. Integrated ashing and implant annealing method
JP2011014696A (ja) * 2009-07-01 2011-01-20 Mitsubishi Chemicals Corp 有機質物除去方法

Similar Documents

Publication Publication Date Title
WO2016049143A3 (en) Room decontamination apparatus and method
MX2015010134A (es) Aparato medico, sistema y metodo.
SG10201900780QA (en) A method, system and apparatus for treatment of fluids
WO2016210399A3 (en) Decontamination system and decontamination unit housing equipped with remote control
WO2016070006A3 (en) Object decontamination apparatus and method
WO2019084264A3 (en) Illuminator with ultraviolet and blue-ultraviolet light source
JP2015111611A5 (https=)
TW201613769A (en) Gas enclosure systems and methods utilizing multi-zone circulation & filtration
TW201614348A (en) Apparatus and method for irradiating polarized light for light alignment
TW201611908A (en) Substrate processing method, substrate processing apparatus, substrate processing system and recording medium
BR112015032263A8 (pt) material de tratamento de ar e método para operar um sistema de emanação
MX372902B (es) Dispositivo de procesamiento y método de procesamiento.
WO2015186051A3 (en) An anatomical drape device
MX359483B (es) Diferenciacion de conjunto de parametros edca para diferentes tipos de dispositivo.
WO2014187860A3 (en) Device and method for the decontamination of hollow objects such as container caps using uv radiations
FI20175639A7 (fi) Järjestelmä ja menetelmä mikro-organismien kasvun kontrolloimiseksi
EP3444856A4 (en) HOUSING FOR LIGHT-EMITTING DEVICE AND LIGHT SOURCE APPARATUS
MX2018000115A (es) Dispositivo, sistema y metodo para emision de frecuencia de biorresonancia.
WO2015123720A8 (en) Plasma hydrogel therapy
TW201613433A (en) Desmearing apparatus and desmearing method
SG11201901520QA (en) Laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device
TW201612966A (en) Substrate processing apparatus deposit removing method of substrate processing apparatus and recording medium
MX2016004039A (es) Sistemas y metodos de tratamiento de agua para acuicultura.
CO2019008820A2 (es) Sistemas y métodos para utilizar recetas de presión para un receptáculo de crecimiento
JP2016027604A5 (https=)