JP2015103560A - Lid member opening/closing mechanism and substrate inspection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lid member opening/closing mechanism which inhibits cost increase and enables a lid member to be effortlessly opened and closed.SOLUTION: A prober 10 includes: a head plate 15 which is provided at an upper part of a housing shaped body part 12 so as to open and close; a rod 18 which is disposed between the body 12 and the head plate 15 and has a guide 21 at a body 12 side end part; and a guide groove 20 which is provided in the body 12 and engages with the guide 21. The guide groove 20 includes: a restriction groove 23 which restricts a position of the rod 18 to maintain the head plate 15 in an open lid state; and a housing groove 22 which causes the rod 18 to be housed in the body 12 to shift the head plate 15 into a closed lid state. The guide groove 20 is divided into the restriction groove 23 and the housing groove 22 at an upper part. The restriction groove 23 has a stopper part 23a which exists on an extension direction of the rod 18 in the open lid state and contacts with the guide 21.

Description

  The present invention relates to a lid member opening / closing mechanism and a substrate inspection apparatus that maintain the state of a lid member of a substrate inspection apparatus having a casing-like main body in an open state and a closed state, respectively.

  A prober is known as an apparatus for inspecting electrical characteristics of a semiconductor device such as a power device or a memory formed on a semiconductor wafer (hereinafter simply referred to as “wafer”) as a substrate.

  The prober includes a disk-shaped probe card having a large number of probe needles, a stage on which a wafer is placed and moved freely up and down, left and right, and a casing-like main body containing the stage. Each probe needle of the probe card is brought into contact with an electrode pad or solder bump of the semiconductor device inside, and an electrical current is passed from each probe needle to the electrode pad or solder bump to inspect the electrical characteristics of the semiconductor device (for example, (See Patent Document 1).

  The stage must be moved precisely to accurately align each probe needle to the electrode pads and solder bumps of the semiconductor device formed on the wafer to be placed. Maintenance is required.

  Correspondingly, a head plate that can be opened and closed is provided at the top of the main body so that the operator can easily handle the stage when maintaining the stage. The stage is exposed.

  Normally, one end of the head plate is connected to a hinge mechanism provided on the upper part of the main body, and the head plate is opened by rotating around the hinge mechanism. In order to maintain the opened state, FIG. As shown, a rod-shaped support member 62 is interposed between the head plate 60 and the main body 61.

  A lock mechanism 70 for the support member 62 is provided on the upper portion of the main body 61 (FIG. 7A), the head plate 60 is opened, and a rod-shaped support member 62 is interposed between the head plate 60 and the main body 61. In this case, the protrusion 71 protruding from the lock mechanism 70 is fitted into the recess 63 provided in the support member 62, so that the movement of the support member 62 is prevented and the support member 62 is in the open state of the head plate 60. Is maintained (FIG. 7B).

  Further, a support member 62a having a foldable structure is proposed so that the support member 62 does not protrude into the main body 61 when the head plate 60 is closed (FIG. 8A) (for example, a patent) Reference 2).

  The support member 62a is divided into an upper member 62c and a lower member 62d with a bend point 62b as a boundary, and a lock mechanism 62e is provided at the bend point 62b. The lock mechanism 62e includes a hook 62f provided at the upper end of the lower member 62d and a slidable shaft 62g provided at the lower end of the upper member 62c (FIG. 8B). The hook 62f is engaged with the shaft 62g. After the fitting, the shaft 62g is slid and pressed against the hook 62f, thereby fixing the hook 62f to the shaft 62g.

JP-A-7-297242 JP 2011-163821 A

  However, since both of the support members 62 and 62a described above require the lock mechanisms 70 and 62e, the structure becomes complicated and the cost increases. Further, when opening and closing the head plate 60, the operator needs to operate the lock mechanisms 70 and 62e as well as holding the support members 62 and 62a.

  An object of the present invention is to provide a lid member opening / closing mechanism and a substrate inspection apparatus capable of opening and closing a lid member without suppressing an increase in cost and without bothering.

  In order to achieve the above object, the present invention comprises a casing-shaped main body and an openable / closable lid member provided on an upper portion of the main body, and the substrate is accommodated in the main body to inspect the substrate. In the lid member opening and closing mechanism in the substrate inspection apparatus for performing the above, a rod-like support member that is interposed between the main body and the lid member when the lid member is in the open state, and has a protrusion on the main body side, and A guide groove that is provided on the main body and engages with the protrusion, and the protrusion moves along the guide groove, whereby the position of the lid member is adjusted via the support member, and the guide The groove accommodates the support member inside the main body for restricting the position of the support member to maintain the lid member in the open state, and the control member for shifting the lid member to the closed state. And the guide groove is on the top. Branching into the restricting groove and the receiving groove, the restricting groove being shorter than the containing groove, the restricting groove being in the extending direction of the support member in the opened state and contacting the protruding portion It has a contact part.

  According to the present invention, the guide groove includes the restriction groove for restricting the position of the support member to maintain the lid member in the open state, and the support member to the inside of the main body for shifting the lid member to the closed state. The regulating groove has a contact portion that is present on the extending direction of the support member in the opened state and contacts the protruding portion. The abutting portion abuts on the protruding portion, and the support member can be prevented from moving through the protruding portion. That is, since it is not necessary to provide a new mechanism for preventing the movement of the support member, an increase in cost can be suppressed. Further, the operator can keep the lid member open by simply moving the protruding portion of the support member to the restriction groove, and the operator can move the lid by simply moving the protruding portion of the support member to the receiving groove. Since the member can be shifted to the closed state, the lid member can be opened and closed without inconvenience.

1 is a perspective view schematically illustrating a configuration of a prober as a substrate inspection apparatus to which a lid member opening / closing mechanism according to a first embodiment of the present invention is applied. It is a side view which shows roughly the structure of the opening / closing mechanism of the head plate in FIG. FIG. 3 is a partially enlarged side view showing a guide plate in FIG. 2. It is a side view which shows roughly the structure of the cover member opening-closing mechanism which concerns on the 2nd Embodiment of this invention. It is a partial expanded side view which shows the guide plate in FIG. It is a perspective view which shows roughly the structure of the cover member opening / closing mechanism in the conventional board | substrate inspection apparatus. It is process drawing for demonstrating the action | operation of the lock mechanism in the conventional lid member opening / closing mechanism. It is a figure which shows roughly the structure of the modification of the conventional lid member opening / closing mechanism, FIG. 8 (A) is a side view, FIG.8 (B) is an expansion partial perspective view of a locking mechanism.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  First, the lid member opening / closing mechanism according to the first embodiment of the present invention will be described.

  FIG. 1 is a perspective view schematically illustrating a configuration of a prober as a substrate inspection apparatus to which a lid member opening / closing mechanism according to the present embodiment is applied.

  In FIG. 1, a prober 10 includes a main body 12 containing a stage 11 on which a wafer W is placed, a loader 13 disposed adjacent to the main body 12, and a test head 14 disposed so as to cover the main body 12. The electrical characteristics of the semiconductor device formed on the wafer W having a large diameter, for example, a diameter of 300 mm or 450 mm, are inspected.

  The main body 12 has a hollow casing shape, and a head plate 15 that exposes the stage 11 by opening the test head 14 when the test head 14 is removed from the main body 12 is provided above the main body 12. The head plate 15 is formed of a substantially rectangular flat plate member, and an opening 15a that opens above the wafer W placed on the stage 11 when the head plate 15 is closed is provided at a substantially central portion of the head plate 15. A disk-shaped probe card is fitted into the portion 15a via a substantially disk-shaped probe card holder (none of which is shown). As a result, the probe card faces the wafer W. Further, the wafer W is attracted to the stage 11 so that the relative position with respect to the stage 11 does not shift.

  The test head 14 has a rectangular shape and is configured to be rotatable upward by a hinge mechanism 16 provided on the main body 12. When the test head 14 covers the main body 12, the test head 14 is electrically connected to the probe card via a contact ring (not shown). In addition, the test head 14 stores an electrical signal indicating electrical characteristics of the semiconductor device transmitted from the probe card as measurement data and the electrical of the semiconductor device of the wafer W to be inspected based on the measurement data. It has the determination part (all are not shown) which determines the presence or absence of a defect.

  The loader 13 takes out a wafer W on which a semiconductor device is formed, which is housed in a FOUP (not shown), which is a transfer container, and places the wafer W on the stage 11 of the main body 12. In addition, the electrical characteristics of the semiconductor device are inspected. The finished wafer W is removed from the stage 11 and stored in the FOUP.

  A number of probe needles are arranged on the surface of the probe card facing the wafer W so as to correspond to the electrode pads and solder bumps of the semiconductor device formed on the wafer W. The stage 11 adjusts the relative positions of the probe card and the wafer W to bring the electrode pads of the semiconductor device into contact with the probe needles.

  FIG. 2 is a side view schematically showing the configuration of the opening and closing mechanism of the head plate in FIG. In FIG. 2, in order to explain the lid member opening / closing mechanism, a part of the main body 12 is shown in a transparent manner, the head plate 15 in the closed state is shown by a solid line, and the head plate 15 in the opened state is shown by a broken line. It is.

  In FIG. 2, one end of the head plate 15 is connected to a hinge mechanism 17 provided on the upper portion of the main body 12, and the head plate 15 is opened by rotating around the hinge mechanism 17.

  Also, in the vicinity of the other end opposite to one end of the head plate 15 (hereinafter simply referred to as “the other end”), one end of a rod-shaped rod 18 as a support member is rotated on the lower surface side of the head plate 15. Connected movably. In the open state of the head plate 15, the rod 18 is interposed between the head plate 15 and the main body 12, and supports the head plate 15 with respect to the main body 12 so as to maintain the open state of the head plate 15.

  Inside the main body 12, a guide plate 19 is erected along the vertical direction of the main body 12 so as to face the other end of the closed head plate 15. A guide groove 20 is provided in the guide plate 19, and a protruding guide 21 (protrusion) provided at the other end of the rod 18 and protruding to the side of the rod 18 is engaged with the guide groove 20.

  In the guide plate 19, the guide groove 20 is formed along the vertical direction of the main body 12, is formed substantially parallel to the housing groove 22, and is formed substantially parallel to the housing groove 22. For example, it has a regulation groove 23 formed in about half of the accommodation groove 22. Further, the guide groove 20 has a communication groove 24 that connects the accommodation groove 22 and the regulation groove 23 to each other at the upper part thereof.

  The restriction groove 23 is formed closer to the hinge mechanism 17 than the accommodation groove 22, and the communication groove 24 extends obliquely downward from the upper part of the restriction groove 23 toward the upper part of the accommodation groove 22. That is, the communication groove 24 is inclined so as to descend as it is away from the hinge mechanism 17.

  In this embodiment, the rod 18 and the guide groove 20 constitute a lid member opening / closing mechanism.

  FIG. 3 is a partially enlarged side view showing the guide plate in FIG.

  In FIG. 3, the lower end of the restriction groove 23 is formed in a semicircular shape, and the lower end is in contact with the cylindrical shaft portion 21 a of the guide 21 of the rod 18 in the opened state (hereinafter referred to as “stopper portion”). 23a. The stopper portion 23 a supports the head plate 15 via the guide 21 and the rod 18. Here, since the regulation groove 23 is shorter than the accommodation groove 22 and the stopper portion 23a is located above the lower end of the accommodation groove 22 with respect to the main body 12, the stopper portion 23a maintains the lid open state of the head plate 15 (FIG. (See “State A” in the middle.)

  In the guide groove 20, all the widths of the accommodation groove 22, the regulation groove 23, and the communication groove 24 are set to be larger than the diameter of the shaft 21 a of the guide 21, so that the operator holds the guide 21 with a relatively light force. , And can be moved along the regulation groove 23 and the communication groove 24.

  When the head plate 15 is shifted from the open state to the closed state, the operator holds the rod 18 and moves the guide 21 away from the stopper portion 23a of the restriction groove 23 to connect the restriction groove 23 and the connection groove 24. Pull up.

  Next, the operator moves the guide 21 along the communication groove 24 toward the accommodation groove 22. As described above, the communication groove 24 is formed obliquely downward and is substantially parallel to the extending direction of the rod 18, so that the load from the rod 18 due to the weight of the head plate 15 and the rod 18 is almost equal to that of the communication groove 24. It does not act on the side wall or the like (see “State B” in the figure). As a result, the operator can smoothly move the guide 21 in the communication groove 24.

  Next, the operator pulls the guide 21 into the accommodation groove 22 (see “state C” in the figure), and further lowers the guide 21 to the lower end of the accommodation groove 22. Here, as described above, since the accommodation groove 22 is formed almost to the vicinity of the lower end of the guide plate 19, when the guide 21 is lowered to the lower end of the accommodation groove 22, the entire rod 18 is accommodated inside the main body 12. The head plate 15 is shifted to the closed state (see “state D” in the figure).

  When shifting the head plate 15 from the closed state to the open state, the operator pulls up the guide 21 from the lower end of the accommodation groove 22 to the upper portion of the restriction groove 23 via the communication groove 24, and then the restriction groove 23. Lower to the stopper 23a.

  According to the lid member opening / closing mechanism according to the present embodiment, the guide groove 20 includes the regulation groove 23 that regulates the position of the rod 18 in order to maintain the head plate 15 in the open state, and the head plate 15 in the closed state. And the restriction groove 23 exists in the extending direction of the rod 18 in the opened state, and is in contact with the shaft portion 21a of the guide 21. It has a stopper portion 23a in contact therewith. The stopper portion 23 a abuts on the shaft portion 21 a of the guide 21 and can prevent the rod 18 from moving through the guide 21. That is, since it is not necessary to provide a new mechanism for preventing the movement of the rod 18, an increase in cost can be suppressed. Further, the operator can maintain the head plate 15 in the open state only by moving the guide 21 of the rod 18 from the receiving groove 22 to the restricting groove 23. Further, the operator can hold the guide 21 of the rod 18 in the restricting groove. Since the head plate 15 can be shifted to the closed state simply by moving from 23 to the accommodation groove 22, the head plate 15 can be opened and closed without any inconvenience.

  Next, a lid member opening / closing mechanism according to a second embodiment of the present invention will be described.

  This embodiment is basically the same in configuration and operation as the first embodiment described above, and only the shape of the guide groove 26 in the guide plate 25 is different from the above-described first embodiment. Therefore, the description of the duplicated configuration and operation is omitted, and the description of the different configuration and operation is given below.

  FIG. 4 is a side view schematically showing the configuration of the lid member opening / closing mechanism according to the present embodiment. Also in FIG. 4, in order to explain the lid member opening / closing mechanism, a part of the main body 12 is shown in a transparent manner, the head plate 15 in the closed state is shown by a solid line, and the head plate 15 in the opened state is shown by a broken line. It is.

  In FIG. 4, a guide groove 26 is provided in a guide plate 25 erected inside the main body 12 like the guide plate 19, and a guide 21 of the rod 18 engages with the guide groove 26. In the guide plate 25, the guide groove 26 is formed along the vertical direction of the main body 12, and is formed closer to the hinge mechanism 17 than the accommodation groove 27, and the accommodation groove 27 formed almost to the vicinity of the lower end of the guide plate 25. And a regulating groove 28 directly connected to the accommodation groove 27 at the upper part. The restriction groove 28 extends obliquely upward toward the upper part of the accommodation groove 27. That is, the regulation groove 28 is inclined so as to rise as it is separated from the hinge mechanism 17.

  In the present embodiment, the rod 18 and the guide groove 26 constitute a lid member opening / closing mechanism.

  FIG. 5 is a partially enlarged side view showing the guide plate in FIG.

  In FIG. 5, the lower end of the regulation groove 28 has a U-shape with rounded corners, and the lower end has a stopper portion 28a that comes into contact with the shaft portion 21a of the guide 21 of the rod 18 in the opened state. Similarly to the stopper portion 23a, the stopper portion 28a also supports the head plate 15 via the guide 21 and the rod 18, and maintains the open state of the head plate 15 (see “state A” in the figure).

  The upper extension angle of the restriction groove 28 is, for example, such that the extension direction of the rod 18 and the extension direction of the restriction groove 28 form a narrow angle in the open state (see “state A” in the figure). The intersection angle is set to be 70 ° or less.

  In the guide groove 26, since the widths of both the accommodation groove 27 and the regulation groove 28 are set larger than the diameter of the shaft 21 a of the guide 21, the operator can remove the guide 21 with the accommodation groove 27 and the regulation groove 28 with a relatively light force. And can be moved along the communication groove 24. In particular, the regulation groove 28 is capable of rotating around the one end of the rod 18 by the guide 21 pulled up from the stopper portion 28a inside the regulation groove 28 (the locus is indicated by a one-dot chain line in the figure). The width is, for example, twice or more the diameter of the shaft portion 21a of the guide 21.

  When shifting the head plate 15 from the open state to the closed state, the operator pulls up the guide 21 from the stopper portion 28 a of the restriction groove 28 while holding the rod 18, and rotates around the one end of the rod 18. To move the guide 21 to the upper part of the accommodation groove 27 (see “state B” in the figure). As described above, since the regulation groove 28 has a width that allows the guide 21 to rotate around the one end of the rod 18, the operator smoothly moves the guide 21 from the stopper portion 28 a to the upper portion of the accommodation groove 27. Can be made.

  Next, the operator pulls the guide 21 into the accommodation groove 27 (see “state C” in the figure), and further lowers the guide 21 to the lower end of the accommodation groove 27, thereby bringing the rod 18 into the main body 12. The head plate 15 is accommodated and the head plate 15 is moved to the closed state (see “state D” in the figure).

  When the head plate 15 is moved from the closed state to the open state, the operator pulls up the guide 21 from the lower end of the receiving groove 27 to the upper portion of the receiving groove 27, and rotates the guide 21 inside the regulating groove 28. Thereafter, the guide 21 is lowered to the stopper portion 28a.

  According to the lid member opening / closing mechanism according to the present embodiment, the regulation groove 28 and the accommodation groove 27 are directly connected to each other at the upper portion thereof, so that the operator can connect the guide 21 of the rod 18 to each of the regulation groove 28 and the accommodation groove 27. Can be easily moved to.

  Further, according to the lid member opening / closing mechanism according to the present embodiment, the extending direction of the rod 18 in the opened state and the extending direction of the restricting groove 28 form a narrow angle, so that the guide 21 of the rod 18 serves as the head plate 15. Further, it is possible to prevent the rod 18 from moving along the restriction groove 28 due to its own weight.

  Although the present invention has been described using the above embodiment, the present invention is not limited to the above embodiment.

W wafer 11 stage 12 main body 15 head plate 18 rod 20, 26 guide groove 21 guide 22, 27 receiving groove 23 regulating groove 23a stopper part 24, 28 connecting groove

Claims (7)

In a lid member opening / closing mechanism in a substrate inspection apparatus that includes a casing-shaped main body and an openable / closable lid member provided on the upper portion of the main body, accommodates the substrate inside the main body and inspects the substrate,
A rod-like support member interposed between the main body and the lid member when the lid member is in an open state, and having a protruding portion at an end on the main body side;
A guide groove provided on the main body and engaged with the protruding portion;
When the protrusion moves along the guide groove, the position of the lid member is adjusted via the support member,
The guide groove includes a restriction groove for restricting a position of the support member to maintain the lid member in the open state, and a support groove for moving the cover member to the closed state. And a receiving groove for receiving
The guide groove branches into the restriction groove and the accommodation groove at the top, and the restriction groove is shorter than the accommodation groove,
The lid member opening / closing mechanism is characterized in that the restriction groove has a contact portion that exists on the extending direction of the support member in the opened state and contacts the protruding portion. The restriction groove and the accommodation groove extend below the main body,
The lid member opening / closing mechanism according to claim 1, wherein the guide groove includes a communication groove that connects the restriction groove and the accommodation groove to each other at an upper portion thereof. The restriction groove and the accommodation groove extend below the main body,
The lid member opening / closing mechanism according to claim 1, wherein the restriction groove and the accommodation groove are directly connected to each other at an upper portion thereof.   The lid member opening / closing mechanism according to claim 3, wherein an extending direction of the support member in the opened state and an extending direction of the restriction groove form a narrow angle.   5. The lid member opening and closing according to claim 3, wherein the restricting groove has a width that allows the projecting portion to move in a circular arc when the support member rotates about a portion connected to the lid member. mechanism.   6. The lid member opening / closing mechanism according to claim 5, wherein the protruding portion is formed of a cylindrical member, and the width of the restriction groove is twice or more the diameter of the protruding portion. A casing-shaped main body, an openable / closable lid member provided on the upper portion of the main body, and a lid member opening / closing mechanism for opening / closing the lid member, and storing the substrate inside the main body to inspect the substrate In the board inspection apparatus that performs
The lid member opening / closing mechanism is provided between the main body and the lid member when the lid member is in the open state, and is provided on the main body with a rod-like support member having a protrusion on the main body side, A guide groove that engages with the protrusion,
When the protrusion moves along the guide groove, the position of the lid member is adjusted via the support member,
The guide groove includes a restriction groove for restricting a position of the support member to maintain the lid member in the open state, and a support groove for moving the cover member to the closed state. And a receiving groove for receiving
The guide groove branches into the restriction groove and the accommodation groove at the top, and the restriction groove is shorter than the accommodation groove,
The said board | substrate inspection apparatus which has the contact part which exists in the extending | stretching direction of the said supporting member in the said open state, and contact | abuts the said protrusion part.

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