CN115561610B

CN115561610B - Measuring instrument

Info

Publication number: CN115561610B
Application number: CN202211420002.7A
Authority: CN
Inventors: 杨敬; 黄永强
Original assignee: Shenzhen Seri Precision Instrument Co ltd
Current assignee: Shenzhen Seri Precision Instrument Co ltd
Priority date: 2022-11-14
Filing date: 2022-11-14
Publication date: 2023-06-23
Anticipated expiration: 2042-11-14
Also published as: CN115561610A

Abstract

The invention discloses a measuring instrument, which comprises a box body and a lifting plate, wherein the lifting plate is vertically and slidably arranged on the inner wall of the box body; the power connection assembly comprises two sliding plates which are arranged on the lifting plate, the two sliding plates can slide relatively or reversely, electrode plates are arranged on opposite surfaces of the two sliding plates, and the electrode plates are connected with a power supply; the heating plate is arranged on the inner wall of the box body and is used for regulating and controlling the temperature of the sample; an adjusting component for controlling a single change of current or temperature by adopting a mode of controlling a variable; the adjusting assembly comprises two groups of trigger assemblies which are symmetrically arranged, and the two groups of trigger assemblies are used for controlling current and temperature individually respectively; according to the invention, through the cooperation between the structures, the detection is performed by controlling the variable mode and cutting in from two angles, and then the detection results of the two angles are synthesized, so that the final result is more objective, the result is more accurate, and the measurement accuracy is improved.

Description

Measuring instrument

Technical Field

The invention relates to the technical field of semiconductor detection, in particular to a measuring instrument.

Background

A semiconductor is a material with controllable conductivity ranging from an insulator to a conductor, and has been widely used in radio, television, integrated circuits, communication systems, and the like, for example, a diode and the like, which are elements made of a semiconductor.

The common semiconductor materials include silicon, germanium, gallium arsenide and the like, silicon is one of the most influencing materials in various semiconductor material applications, a single crystal silicon rod is required to be cut, polished and polished after being produced and then used for producing electronic components, and the conductivity of the processed single crystal silicon rod is required to be detected.

Disclosure of Invention

The invention aims to provide a measuring instrument which performs detection by controlling variable and cutting in from two angles, and then synthesizes the detection results of the two, so that the final result is more objective, the result is more accurate, the measurement precision is improved, and the problems in the background technology are solved.

In order to achieve the above purpose, the present invention provides the following technical solutions: a measuring instrument comprises a box body and also comprises

The lifting plate is vertically and slidably arranged on the inner wall of the box body;

the power connection assembly comprises two sliding plates which are arranged on the lifting plate, the two sliding plates can slide relatively or reversely, electrode plates are arranged on opposite surfaces of the two sliding plates, and the electrode plates are connected with a power supply;

the heating plate is arranged on the inner wall of the box body and is used for regulating and controlling the temperature of the sample;

and the adjusting component is used for controlling a single change of current or temperature in a variable control manner.

Preferably, the adjusting component comprises two groups of trigger components which are symmetrically arranged, and the two groups of trigger components respectively control the current and the temperature;

the trigger assembly comprises a lifting rod vertically and slidably arranged at the bottom in the box body through a sleeve, a plug is arranged at the top of the lifting rod, a corresponding connector is arranged at the bottom of the lifting plate, the trigger assembly further comprises a -shaped frame fixed on the inner wall of the box body, a cylindrical screw rod is rotatably arranged on the inner wall of the -shaped frame through a rotating shaft, a torsion spring or a coil spring for resetting the cylindrical screw rod is arranged between the cylindrical screw rod and the -shaped frame, a slide rheostat is further fixed on the inner wall of the -shaped frame, and a wedge block inserted into the thread of the cylindrical screw rod is fixed on a slide sheet of the slide rheostat;

the system also comprises a switching component which can be switched and enables one group of triggering components to be started.

Preferably, the switching component comprises a V-shaped plate which is horizontally and slidably arranged on the inner wall of the box body, the V-shaped plate can be switched in a reciprocating sliding manner, sliding grooves are formed in the outer walls of two support arms of the V-shaped plate, sliding buttons are fixed on the outer walls of two lifting rods, and the two sliding buttons are respectively inserted into the two sliding grooves and are in sliding connection with the two sliding grooves;

the rotatable driving gear is installed at the top of V-arrangement board, two the driven gear that is fixed with cylinder screw rod is all installed to the bottom of shape frame, and when the V-arrangement board slides to one side, the homonymy the lifter shifts up, the driving gear meshes with the driven gear of homonymy.

Preferably, the tops of the lifting plates positioned at two sides of the two sliding plates are respectively provided with a vertical plate in a sliding manner, a spring is connected between the vertical plates and the sliding plates, a connecting rod is rotatably arranged between the opposite surfaces of the two vertical plates and the inner walls of the two sides of the box body respectively, and when the lifting plates move downwards, the two vertical plates are mutually close through the connecting rod;

the top of box rotates installs sealed lid, rotate between sealed lid and the lifter plate and be connected with the connecting rod, just still install the locking Assembly that is used for locking sealed lid on the box.

Preferably, the bottom of lifter plate is fixed with fixed montant, the interior bottom of box rotates installs the elastic telescopic link, rotate jointly between fixed montant and the elastic telescopic link and be connected with the intermediate lever, just through the round pin hub connection between intermediate lever and the elastic telescopic link, perpendicular groove has been seted up to the outer wall in the middle of the V template, just the round pin hub insertion erects inslot and sliding connection with it, works as when the lifter plate is located the top position, erect groove and elastic telescopic link and be in vertical state, just the round pin axle is in the intermediate position of two sets of trigger components through erecting the groove drive V template.

Preferably, the elastic telescopic rod is connected with the inner bottom of the box body through a hinge seat, a connecting shaft is fixed at a rotating point of the elastic telescopic rod, and a knob is fixed at one end of the connecting shaft penetrating out of the outer wall of the box body.

Preferably, a holding table for holding and supporting the sample is fixed at the top of the lifting plate, and a groove is formed at the top of the holding table.

Preferably, an insulation layer is arranged between the sealing cover and the top of the box body, and the lifting plate is also provided with the insulation layer.

Preferably, a damper is arranged between the sealing cover and the box body.

Compared with the prior art, the invention has the following beneficial effects:

according to the invention, through the cooperation between the structures, the detection is performed by controlling the variable mode and cutting in from two angles, and then the detection results of the two angles are synthesized, so that the final result is more objective, the result is more accurate, and the measurement accuracy is improved.

Drawings

FIG. 1 is a front view of the present invention;

FIG. 2 is a schematic perspective view of the present invention;

FIG. 3 is a cross-sectional view taken along line A-A of FIG. 1 in accordance with the present invention;

FIG. 4 is a cut-away perspective view of the view of FIG. 3 in accordance with the present invention;

FIG. 5 is a front cross-sectional view of the present invention;

FIG. 6 is a cut-away perspective view of the view of FIG. 5 in accordance with the present invention;

fig. 7 is a top view of the present invention.

In the figure: 1. a case; 2. sealing cover; 3. a lifting plate; 4. a slide plate; 5. a riser; 6. a spring; 7. a connecting rod; 8. a holding table; 9. an electrode sheet; 10. a heating plate; 11. fixing a vertical rod; 12. an intermediate lever; 13. an elastic telescopic rod; 14. a pin shaft; 15. a connecting shaft; 16. a knob; 17. v-shaped plates; 18. a drive gear; 19. shaped shelves; 20. a slide rheostat; 21. a sliding sheet; 22. a cylindrical screw; 23. a driven gear; 24. a connecting rod; 25. a locking assembly; 26. a chute; 27. a slide button; 28. a lifting rod; 29. a sleeve; 30. a vertical groove; 31. and (5) connecting an electric head.

Detailed Description

The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.

Specific examples are as follows:

referring to fig. 1 to 7, the present invention provides a technical solution: a measuring instrument, which comprises a box body 1 and also comprises

The lifting plate 3 is vertically and slidably arranged on the inner wall of the box body 1;

the power connection assembly comprises two sliding plates 4 arranged on the lifting plate 3, the two sliding plates 4 can slide relatively or reversely, electrode plates 9 are arranged on opposite surfaces of the two sliding plates 4, and the electrode plates 9 are connected with a power supply;

the heating plate 10 is arranged on the inner wall of the box body 1 and is used for regulating and controlling the temperature of the sample;

When the measuring instrument is used, the single crystal silicon rod is randomly sampled to select a piece to be measured, meanwhile, a standard product of the single crystal silicon rod is also taken, two single crystal silicon rods are respectively measured, and then the results are compared;

the method comprises the following steps of placing a sample between two sliding plates 4, driving the two sliding plates 4 to move relatively through an external structure, fixing the sample, and enabling two electrode plates 9 to be in electrical communication with the sample;

the temperature difference between the to-be-measured piece and the standard piece can be measured by controlling the temperature of the sample through controlling the temperature of the sample, namely, the temperature difference between the to-be-measured piece and the standard piece under the condition of the same passing current can be measured, a temperature sensor can be arranged in the box body 1 and used for recording the temperature range, the to-be-measured piece can be judged to be qualified by comparing the temperature values of the two to be the same, otherwise, the difference is disqualified, and the conductivity between the standard piece and the to-be-measured piece is further obtained;

secondly, the temperature environments of the samples are the same by controlling the temperature to be the same, namely the heating temperature of the heating plate 10 is the same, at the moment, the voltage values of the current with the same magnitude can be measured by controlling the voltage change, the voltage values of the to-be-measured piece and the standard piece can be compared, the to-be-measured piece can be judged to be qualified by the same value, and otherwise, the to-be-measured piece is judged to be unqualified by the same value;

therefore, the final result can be more objective, the result is more accurate, and the measurement accuracy is improved by controlling the variable and cutting in from two angles for detection and then integrating the detection results of the two angles.

In the further preferred embodiment, the adjusting component comprises two groups of trigger components which are symmetrically arranged, and the two groups of trigger components respectively control the current and the temperature singly;

the trigger assembly comprises a lifting rod 28 vertically and slidably arranged at the inner bottom of the box body 1 through a sleeve 29, a plug is arranged at the top of the lifting rod 28, a connector 31 corresponding to the lifting rod is arranged at the bottom of the lifting plate 3, the trigger assembly further comprises a -shaped frame 19 fixed on the inner wall of the box body 1, a cylindrical screw rod 22 is rotatably arranged on the inner wall of the -shaped frame 19 through a rotating shaft, a torsion spring or a coil spring for resetting the cylindrical screw rod 22 is arranged between the cylindrical screw rod 22 and the -shaped frame 19, a slide rheostat 20 is also fixed on the inner wall of the -shaped frame 19, and a wedge block inserted into the threads of the cylindrical screw rod 22 is fixed on a slide sheet of the slide rheostat 20;

Referring specifically to fig. 3-6, the two sets of trigger components correspond to the two control variables respectively, specifically:

the electric connector 31 of one group is connected with the electrode plate 9 of the electric connector assembly, the slide rheostat 20 is connected with a circuit for controlling the heating plate 10, when the switching assembly drives the triggering assembly to start, the lifting rod 28 moves upwards, the plug at the top end of the lifting rod contacts with the electric connector 31 and is electrically communicated, so that the current passing through the sample is ensured to be the same, meanwhile, the corresponding cylindrical screw 22 in the -shaped frame 19 rotates, and the sliding sheet of the slide rheostat 20 is driven to slide under the cooperation between the screw thread and the wedge block, so that the resistance of the circuit of the heating plate 10 is changed, the heating power is adjusted, and the process corresponds to the process;

the other trigger assembly is opposite to the other trigger assembly, namely, the connector 31 is connected with the circuit of the heating plate 10, the slide rheostat 20 is connected with the circuit of the electrode plate 9, so that when the trigger assembly is switched, the magnitude of the current passing through the sample is regulated through the slide rheostat 20, and the second process is corresponding to the second process;

in summary, the effect of controlling different variables is achieved by different connection modes of the two groups of trigger components.

In the further preferred embodiment, the switching assembly comprises a V-shaped plate 17 horizontally slidably mounted on the inner wall of the case 1, the V-shaped plate 17 can be slidably switched back and forth, the outer walls of two arms of the V-shaped plate 17 are provided with sliding grooves 26, the outer walls of two lifting rods 28 are fixed with sliding buttons 27, and the two sliding buttons 27 are respectively inserted into the two sliding grooves 26 and slidably connected with the two sliding grooves 26;

the top of the V-shaped plate 17 is provided with a rotatable driving gear 18, the bottoms of the two frames 19 are provided with driven gears 23 which are coaxially fixed with the cylindrical screw rods 22, and when the V-shaped plate 17 slides to one side, the lifting rods 28 on the same side move upwards, and the driving gears 18 are meshed with the driven gears 23 on the same side.

Referring to fig. 5 and 6 specifically, when the V-shaped plate 17 moves to one side, the two lifting rods 28 slide in opposite directions under the sliding fit of the sliding groove 26 and the sliding button 27 and the vertical limit of the sleeve 29 to the lifting rods 28, that is, the lifting rods 28 on the moving side of the V-shaped plate 17 are lifted and the other side is lowered, and at the same time, the driving gear 18 on the V-shaped plate 17 is meshed with the driven gear 23 on the moving side, so as to achieve the triggering of the triggering assembly;

similarly, when the V-shaped plate 17 moves reversely, another trigger assembly is triggered to achieve the above corresponding purpose, so that the description is omitted.

In the further preferred embodiment, the top parts of the lifting plates 3 positioned at the two sides of the two sliding plates 4 are respectively provided with a vertical plate 5 in a sliding manner, a spring 6 is connected between the vertical plates 5 and the sliding plates 4, a connecting rod 7 is rotatably arranged between the opposite surfaces of the two vertical plates 5 and the inner walls of the two sides of the box body 1 respectively, and when the lifting plates 3 move downwards, the two vertical plates 5 are mutually close to each other through the connecting rod 7;

the top of the box body 1 is rotatably provided with a sealing cover 2, a connecting rod 24 is rotatably connected between the sealing cover 2 and the lifting plate 3, and the box body 1 is also provided with a locking component 25 for locking the sealing cover 2.

Referring to fig. 3 and 5, when the sample is electrified, the sample is firstly placed between two sliding plates 4, then the sealing cover 2 is closed, the lifting plate 3 is propped against to move downwards under the action of the connecting rod 24, at the moment, under the action of the connection of the two connecting rods 7, the two vertical plates 5 relatively move on the surface of the lifting plate 3 and drive the two sliding plates 4 to relatively move, the sample is fixed and communicated with the electrode plate 9, the sample is installed before measurement, and after the sealing cover 2 is closed, the sample is locked by the locking assembly 25, so that the lifting plate 3 is limited and fixed, and the sample is kept fixed by the sliding plates 4;

it is worth mentioning that under the elastic force of the spring 6, the electrode plate 9 can be guaranteed to be closely contacted and communicated, meanwhile, hard damage to a sample can be prevented, and after the sealing cover 2 is closed, a relatively airtight space can be formed between the sealing cover and the lifting plate 3, so that the heat preservation effect is achieved, and the subsequent temperature change control of the sample is facilitated;

the locking assembly 25 may be electrically locked, or may be magnetically locked.

In the above further preferred embodiment, the bottom of the lifting plate 3 is fixed with a fixed vertical rod 11, the inner bottom of the box 1 is rotatably provided with an elastic telescopic rod 13, a middle rod 12 is rotatably connected between the fixed vertical rod 11 and the elastic telescopic rod 13, the middle rod 12 is connected with the elastic telescopic rod 13 through a pin shaft 14, a vertical groove 30 is formed in the outer wall of the middle of the V-shaped plate 17, the pin shaft 14 is inserted into the vertical groove 30 and is slidably connected with the vertical groove 30, when the lifting plate 3 is located at the upper position, the vertical groove 30 is in a vertical state with the elastic telescopic rod 13, and the pin shaft 14 drives the V-shaped plate 17 to be located at the middle position of two groups of trigger components through the vertical groove 30.

Referring specifically to fig. 5, in which the sample is not yet put in, the lifting plate 3 is also in an upper position due to the open state of the sealing plate cover, and the fixing vertical rod 11, the middle rod 12 and the elastic telescopic rod 13 are all in a nearly vertical state;

then when the lifting plate 3 moves downwards, the fixed vertical rod 11 moves downwards at the moment to enable the middle rod 12 and the elastic telescopic rod 13 to rotate, and meanwhile, the pin shaft 14 drives the V-shaped plate 17 to move horizontally to one side along with the swing of the elastic telescopic rod 13 to trigger and start one trigger component;

thus, the trigger assembly is automatically started to start only after the sample is put in and the sealing cover 2 is closed;

it should be noted that, under the action of the elastic force of the elastic telescopic rod 13, the V-shaped plate 17 can be kept in a static state when being at one side position, so as to prevent the V-shaped plate 17 from being deviated during detection to cause the breaking of the trigger assembly.

In the above further preferred embodiment, the elastic telescopic rod 13 is connected with the inner bottom of the case 1 through a hinge seat, and the rotation point of the elastic telescopic rod 13 is fixed with a connecting shaft 15, and one end of the connecting shaft 15 penetrating out of the outer wall of the case 1 is fixed with a knob 16.

When the two trigger components need to be switched, the elastic telescopic rod 13 can be driven to rotate through the connecting shaft 15 by rotating the knob 16, and the lifting plate 3 is in a limiting and fixing state, so that the elastic telescopic rod 13 can elastically stretch to enable the lifting plate to rotate to pass through a vertical state, and the V-shaped plate 17 is driven to horizontally move and switch through the pin shaft 14;

and can also judge which trigger assembly starts at this time more intuitively through the state of the knob 16, refer to fig. 1-2 specifically, and when the elastic telescopic rod 13 rotates to which side, the knob 16 rotates along with it;

it should be noted that, since the fixing vertical rod 11, the middle rod 12 and the elastic telescopic rod 13 are all in the nearly vertical state when the lifting plate 3 moves down, the clamping phenomenon may occur, so that a certain force is applied to the knob 16 to facilitate the downward movement of the lifting plate 3, and meanwhile, the triggering component can be selected in advance.

In the above further preferred embodiment, the top of the lifting plate 3 is fixed with a holding table 8 for holding and supporting the sample, and the top of the holding table 8 is provided with a groove.

In the above further preferred embodiment, an insulation layer is installed between the sealing cover 2 and the top of the case 1, and an insulation layer is also provided on the lifting plate 3.

In the above further preferred embodiment, a damper is provided between the sealing cover 2 and the case 1; by setting damping, when the sealing cover 2 is opened, the inner trigger component is not started by self under the gravity action of the lifting plate 3.

The standard components used in the present embodiment may be purchased directly from the market, and the nonstandard structural components according to the descriptions of the specification and the drawings may also be processed directly and unambiguously according to the common general knowledge in the prior art, and meanwhile, the connection manner of each component adopts the conventional means mature in the prior art, and the machinery, the components and the equipment all adopt the conventional types in the prior art, so that the specific description will not be made here.

Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A measuring instrument comprising a housing (1), characterized in that: and also comprises

The lifting plate (3) is vertically and slidably arranged on the inner wall of the box body (1);

the power connection assembly comprises two sliding plates (4) arranged on the lifting plate (3), the two sliding plates (4) can slide relatively or reversely, electrode plates (9) are arranged on opposite surfaces of the two sliding plates (4), and the electrode plates (9) are connected with a power supply;

the heating plate (10) is arranged on the inner wall of the box body (1) and is used for regulating and controlling the temperature of the sample;

an adjusting component for controlling a single change of current or temperature by adopting a mode of controlling a variable;

the adjusting assembly comprises two groups of trigger assemblies which are symmetrically arranged, and the two groups of trigger assemblies are used for controlling current and temperature individually respectively;

the trigger assembly comprises a lifting rod (28) vertically and slidably arranged at the inner bottom of the box body (1) through a sleeve (29), a plug is arranged at the top of the lifting rod (28), a connector (31) corresponding to the lifting rod is arranged at the bottom of the lifting plate (3), the trigger assembly further comprises a -shaped frame (19) fixed on the inner wall of the box body (1), a cylindrical screw (22) is rotatably arranged on the inner wall of the -shaped frame (19) through a rotating shaft, a torsion spring or a coil spring for resetting the cylindrical screw is arranged between the cylindrical screw (22) and the -shaped frame (19), a slide rheostat (20) is further fixed on the inner wall of the -shaped frame (19), and a wedge block inserted into the thread of the cylindrical screw (22) is fixed on a slide sheet of the slide rheostat (20);

the system also comprises a switching component which can be switched and enables one group of triggering components to be started;

the switching assembly comprises a V-shaped plate (17) which is horizontally and slidably arranged on the inner wall of the box body (1), the V-shaped plate (17) can be switched in a reciprocating sliding manner, sliding grooves (26) are formed in the outer walls of two support arms of the V-shaped plate (17), sliding buttons (27) are fixed on the outer walls of two lifting rods (28), and the two sliding buttons (27) are respectively inserted into the two sliding grooves (26) and are in sliding connection with the two sliding grooves;

a rotatable driving gear (18) is arranged at the top of the V-shaped plate (17), driven gears (23) coaxially fixed with the cylindrical screw rods (22) are arranged at the bottoms of the two -shaped frames (19), and when the V-shaped plate (17) slides to one side, the lifting rods (28) on the same side move upwards, and the driving gears (18) are meshed with the driven gears (23) on the same side;

the tops of lifting plates (3) positioned on two sides of the two sliding plates (4) are respectively provided with a vertical plate (5) in a sliding manner, springs (6) are connected between the vertical plates (5) and the sliding plates (4), connecting rods (7) are rotatably arranged between the opposite surfaces of the two vertical plates (5) and the inner walls of the two sides of the box body (1) respectively, and when the lifting plates (3) move downwards, the two vertical plates (5) are mutually close to each other through the connecting rods (7);

the top of the box body (1) is rotatably provided with a sealing cover (2), a connecting rod (24) is rotatably connected between the sealing cover (2) and the lifting plate (3), and the box body (1) is also provided with a locking assembly (25) for locking the sealing cover (2);

the bottom of the lifting plate (3) is fixedly provided with a fixed vertical rod (11), the inner bottom of the box body (1) is rotatably provided with an elastic telescopic rod (13), the fixed vertical rod (11) and the elastic telescopic rod (13) are connected with an intermediate rod (12) in a common rotation mode, the intermediate rod (12) and the elastic telescopic rod (13) are connected through a pin roll (14), the outer wall in the middle of the V-shaped plate (17) is provided with a vertical groove (30), the pin roll (14) is inserted into the vertical groove (30) and is in sliding connection with the vertical groove, when the lifting plate (3) is positioned at the upper position, the vertical groove (30) and the elastic telescopic rod (13) are in a vertical state, and the pin roll (14) drives the V-shaped plate (17) to be positioned at the middle positions of two groups of trigger components through the vertical groove (30);

the elastic telescopic rod (13) is connected with the inner bottom of the box body (1) through a hinge seat, a connecting shaft (15) is fixed at a rotating point of the elastic telescopic rod (13), and a knob (16) is fixed at one end of the connecting shaft (15) penetrating out of the outer wall of the box body (1).

2. The measuring instrument of claim 1, wherein: the top of lifter plate (3) is fixed with holds platform (8) that are used for holding and supporting the sample, just hold the top of platform (8) and set up flutedly.

3. The measuring instrument of claim 1, wherein: an insulating layer is arranged between the sealing cover (2) and the top of the box body (1), and the lifting plate (3) is also provided with an insulating layer.

4. The measuring instrument of claim 1, wherein: damping is arranged between the sealing cover (2) and the box body (1).