JP2011163821A - Head plate open-close alleviation mechanism and open-close lock mechanism - Google Patents
Head plate open-close alleviation mechanism and open-close lock mechanism Download PDFInfo
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本発明は、プローブ装置に用いられるヘッドプレートの開閉軽減機構及び開閉ロック機構に関し、更に詳しくは、ヘッドプレートの開閉軽減機構の構造を簡素化して低コスト化を進めると共にメンテナンス性を高めることができるヘッドプレートの開閉軽減機構及び開閉ロック機構に関する。 The present invention relates to an opening / closing reduction mechanism and an opening / closing lock mechanism for a head plate used in a probe device. More specifically, the structure of an opening / closing reduction mechanism for a head plate can be simplified to reduce costs and improve maintenance. The present invention relates to a head plate opening / closing reduction mechanism and an opening / closing locking mechanism.
プローブ装置は、通常、被検査体である半導体ウエハを搬送するローダ室と、半導体ウエハの電気的特性検査を行うプローバ室と、を備えている。ローダ室には半導体ウエハの搬送機構及びプリアライメント機構が配設され、ローダ室において搬送機構を介して半導体ウエハを搬送する間に半導体ウエハのプリアライメントを行い、プリアライメント後の半導体ウエハをプローバ室へ引き渡す。プローバ室には半導体ウエハの載置台、アライメント機構及びプローブカードが配設され、半導体ウエハを載置した載置台がＸ、Ｙ、Ｚ及びθ方向に移動し、この間にアライメント機構を介して半導体ウエハのアライメントを行い、アライメント後には載置台を介して半導体ウエハとプローブカードのプローブ針とを正確に電気的に接触させ、半導体ウエハの電気的特性検査を行う。 The probe device usually includes a loader chamber for transferring a semiconductor wafer as an object to be inspected, and a prober chamber for inspecting electrical characteristics of the semiconductor wafer. The loader chamber is provided with a semiconductor wafer transfer mechanism and a pre-alignment mechanism. The semiconductor wafer is pre-aligned while the semiconductor wafer is transferred via the transfer mechanism in the loader chamber, and the pre-aligned semiconductor wafer is placed in the prober chamber. Hand over to The prober chamber is provided with a semiconductor wafer mounting table, an alignment mechanism and a probe card. The mounting table on which the semiconductor wafer is mounted moves in the X, Y, Z and θ directions. After the alignment, the semiconductor wafer and the probe needle of the probe card are accurately brought into electrical contact with each other through the mounting table to inspect the electrical characteristics of the semiconductor wafer.
プローバ室の上端開口にはヘッドプレートが開閉可能に設けられ、このヘッドプレートを開閉してプローバ室内のメンテナンス等を行う。このヘッドプレートにはプローブカードが装着され、検査時にはヘッドプレートにプローブカードから大きな荷重が作用する。このような荷重に耐えるように、ヘッドプレートは機械的強度を高めるため、重く、ヘッドプレート１を開く時に大きな力を要するため、プローバ室にはヘッドプレートの開閉する時の力を軽減するヘッドプレートの開閉軽減機構（以下、単に「開閉軽減機構」と称す。）が設けられている。 A head plate can be opened and closed at the upper end opening of the prober chamber. The head plate is opened and closed to perform maintenance and the like in the prober chamber. A probe card is attached to the head plate, and a large load acts on the head plate from the probe card during inspection. In order to withstand such a load, the head plate is heavy to increase the mechanical strength and requires a large force when the head plate 1 is opened. Therefore, the head plate reduces the force when the head plate is opened and closed in the prober chamber. Open / close reduction mechanism (hereinafter simply referred to as “open / close reduction mechanism”).
従来のヘッドプレートは、例えば図３の（ａ）（ｂ）に示すように、開閉可能なヘッドプレート１(図３の（ａ）では太線で囲まれた領域)と、ヘッドプレート１の周囲に形成されたサブヘッドプレート２とで形成されている。ヘッドプレート１はサブヘッドプレート２に設けられた開閉軽減機構３によって開閉される。 For example, as shown in FIGS. 3A and 3B, the conventional head plate has a head plate 1 that can be opened and closed (a region surrounded by a thick line in FIG. 3A) and the periphery of the head plate 1. The sub head plate 2 is formed. The head plate 1 is opened and closed by an opening / closing reduction mechanism 3 provided on the sub head plate 2.
そこで、従来の開閉軽減機構３について説明する。従来の開閉軽減機構３は、図３の（ａ）、（ｂ）に示すように、ヘッドプレート１の開閉時の荷重（以下、「開閉荷重」と称す。）を軽減するガススプリング３Ａと、ヘッドプレート１を所定の開放位置に保持するラチェット機構３Ｂと、ラチェット機構３Ｂを操作するラチェット操作機構３Ｃと、を有する。 Therefore, the conventional opening / closing reduction mechanism 3 will be described. As shown in FIGS. 3A and 3B, the conventional opening / closing mitigation mechanism 3 includes a gas spring 3A that reduces a load (hereinafter referred to as “opening / closing load”) when the head plate 1 is opened and closed. It has a ratchet mechanism 3B that holds the head plate 1 in a predetermined open position, and a ratchet operation mechanism 3C that operates the ratchet mechanism 3B.
サブヘッドプレート２は、図３の（ａ）、（ｂ）に示すように矩形状の枠体として形成され、この枠体の背面側縁部（同図の右側縁部）のやや内方にヘッドプレート１の回転軸１Ａが設けられている。この回転軸１Ａはサブヘッドプレート２の左右縁部（同図の上下縁部）間に架設されており、その左右両端にガススプリング３Ａが屈曲レバー３Ａ１を介して連結されている。ガススプリング３Ａは、シリンダ側が屈曲レバー３Ａ１に連結され、ロッドがプローバ室の背面側上部に連結されている。従って、作業員がヘッドプレート１を開く時に、ガススプリング３Ａがロッドを伸ばし、屈曲レバー３Ａ１を介してヘッドプレート１を同図の（ｂ）に示すように所定の角度まで開き、ラチェット機構３Ｂによって所定の開位置を保持する。 The sub head plate 2 is formed as a rectangular frame as shown in FIGS. 3A and 3B, and is slightly inward of the rear side edge (right edge in FIG. 3) of the frame. A rotation axis 1A of the head plate 1 is provided. Gas spring 3A is connected via a bent lever 3A 1 the rotation shaft 1A is installed between the left and right edges of the sub head plate 2 (upper and lower edges of the drawing), the left and right ends. Gas spring 3A is the cylinder side is connected to the bent lever 3A 1, the rod is connected to the rear side upper portion of the prober chamber. Therefore, when the operator opens the head plate 1, the gas spring 3A is stretched rod, opening up to a predetermined angle as shown the head plate 1 in (b) of FIG via a bent lever 3A 1, ratchet mechanism 3B To hold the predetermined open position.
ヘッドプレート１の開放保持位置は二段階あり、それぞれの位置をラチェット機構３Ｂによって保持する。即ち、ラチェット機構３Ｂは、図３の（ａ）、（ｂ）及び図４に示すように、回転軸１Ａの端部に固定された反時計へ傾斜する二枚の歯を有するラチェット歯車３Ｂ１と、ラチェット歯車３Ｂ１と噛み合う回転爪３Ｂ２と、を有し、回転爪３Ｂ２が図４に示す二枚の歯の間に入り込む位置とその反時計方向の外側の位置で反時計方向へのヘッドプレート１の回転を後述のように止めてそれぞれの開放位置で保持する。 There are two stages of the holding position of the head plate 1, and each position is held by the ratchet mechanism 3B. That is, the ratchet mechanism 3B has a ratchet gear 3B 1 having two teeth inclined counterclockwise fixed to the end of the rotating shaft 1A, as shown in FIGS. And a rotating claw 3B 2 that meshes with the ratchet gear 3B 1, and the rotating claw 3B 2 is counterclockwise at a position where the rotating claw 3B 2 enters between the two teeth shown in FIG. The rotation of the head plate 1 is stopped as described later and held at the respective open positions.
ラチェット操作機構３Ｃは、図３の（ａ）、（ｂ）に示すように、ラチェット機構３Ｂを操作する操作部材３Ｃ１と、操作部材３Ｃ１と回転爪３Ｂ２を繋ぐワイヤ３Ｃ２と、回転爪３Ｂ２に時計方向の回転力を付与するスプリング３Ｃ３と、を有している。従って、ヘッドプレート１が開いて図３の（ｂ）に仮想線で示す位置にある時は、ヘッドプレート１が自重により反時計方向へ回転しようとしてもラチェット歯車３Ｂ１に噛み込む回転爪３Ｂ２の時計方向への回転が操作部材３Ｃ１によって規制されるため、ヘッドプレート１は閉じることなく所定の開放位置に保たれる。ヘッドプレート１と閉じる時には、操作部材３Ｃ１を引っ張って回転爪３Ｂ２をラチェット歯車３Ｂ１から外すことによって閉じることができる。 As shown in FIGS. 3A and 3B, the ratchet operating mechanism 3C includes an operating member 3C 1 that operates the ratchet mechanism 3B, a wire 3C 2 that connects the operating member 3C 1 and the rotating claw 3B 2 , and rotation. And a spring 3C 3 for applying a clockwise rotational force to the claw 3B 2 . Therefore, when the head plate 1 is opened and is at the position indicated by the phantom line in FIG. 3B, the rotating claw 3B 2 that engages with the ratchet gear 3B 1 even if the head plate 1 tries to rotate counterclockwise by its own weight. because of the rotation in the clockwise direction is restricted by the operation member 3C 1, the head plate 1 is maintained at a predetermined opening position without closing. When closing the head plate 1 may be closed by removing by pulling the operating member 3C 1 rotation pawl 3B 2 from the ratchet wheel 3B 1.
しかしながら、図３に示す従来の開閉軽減機構３は、ヘッドプレート１を小さな力で開くことができるが、プローバ室の天面がヘッドプレート１とサブヘッドプレート２によって構成され、ヘッドプレート１の下方は各種の機器が設置されているため、開閉軽減機構３をサブヘッドプレート２側に設置せざるを得ない。開閉軽減機構３をサブヘッドプレート２に設けると、開閉軽減機構３はサブヘッドプレート２側からヘッドプレート１を開閉するため、開閉軽減機構３のガススプリング３Ａ、屈曲レバー３Ａ１、ラチェット機構３Ｂ及びラチェット操作機構３Ｃ等の多数の部材からなり、構造が複雑になるため、開閉軽減機構３の製造コストが高く、しかもその取り付け作業や交換作業等のメンテナンス作業が煩雑になってメンテナンスコストが高くなる。 However, the conventional opening / closing mitigation mechanism 3 shown in FIG. 3 can open the head plate 1 with a small force, but the top surface of the prober chamber is constituted by the head plate 1 and the sub head plate 2. Since various devices are installed, the opening / closing mitigation mechanism 3 must be installed on the sub head plate 2 side. When the opening / closing mitigation mechanism 3 is provided on the sub head plate 2, the opening / closing mitigation mechanism 3 opens / closes the head plate 1 from the sub head plate 2 side, so that the gas spring 3A, bending lever 3A1, ratchet mechanism 3B and ratchet of the opening / closing mitigation mechanism 3 are provided. Since the structure is complicated due to a large number of members such as the operation mechanism 3C, the manufacturing cost of the opening / closing mitigation mechanism 3 is high, and the maintenance work such as the installation work and the exchange work becomes complicated and the maintenance cost becomes high.
尚、本出願人は、特許文献１、２においてもヘッドプレートの開閉軽減機構を諦観しているが、いずれも構造的に複雑であった。 In addition, although the present applicants are scrutinizing the mechanism for reducing the opening and closing of the head plate in Patent Documents 1 and 2, both are structurally complex.
本発明は、上記課題を解決するためになされたもので、サブヘッドプレートをなくして一枚のヘッドプレートによって形成して開閉軽減機構を簡素化し、プローブ装置のメンテナンス性を高め、延いては製造コスト及びメンテナンスコストを低減することができるヘッドプレートの開閉軽減機構及び開閉ロック機構を提供することを目的としている。 The present invention has been made to solve the above-mentioned problems, and is formed by a single head plate by eliminating the sub head plate, thereby simplifying the opening / closing mitigation mechanism, improving the maintainability of the probe device, and thus manufacturing. It is an object of the present invention to provide an opening / closing reduction mechanism and an opening / closing lock mechanism for a head plate that can reduce costs and maintenance costs.
本発明の請求項１に記載のヘッドプレートの開閉軽減機構は、プローバ室の上端開口を開閉するように上記上端開口の後端部に設けられた回転軸に取り付けられたヘッドプレートと、上記ヘッドプレートの開閉時の負荷を軽減するために上記プローバ室の左右の側壁に沿って設けられた一対の伸縮機構と、上記ヘッドプレートを所定の開放位置で保持するように構成された屈伸可能な開閉ロック機構と、を備え、上記伸縮機構は、一端が上記ヘッドプレートの左右両端部に揺動自在に連結され、他端が上記プローバ室の左右の側壁近傍に揺動自在に連結されていることを特徴とするものである。 According to a first aspect of the present invention, there is provided a head plate opening / closing reduction mechanism comprising: a head plate attached to a rotary shaft provided at a rear end portion of the upper end opening so as to open / close the upper end opening of the prober chamber; A pair of telescopic mechanisms provided along the left and right side walls of the prober chamber to reduce the load during opening and closing of the plate, and a retractable opening and closing configured to hold the head plate in a predetermined open position A locking mechanism, and one end of the telescopic mechanism is swingably connected to both left and right ends of the head plate, and the other end is swingably connected to the vicinity of the left and right side walls of the prober chamber. It is characterized by.
また、本発明の請求項２に記載のヘッドプレートの開閉軽減機構は、請求項１に記載の発明において、上記伸縮機構がガススプリングによって構成されていることを特徴とするものである。 According to a second aspect of the present invention, the opening / closing reduction mechanism for a head plate is characterized in that, in the first aspect of the invention, the expansion / contraction mechanism is constituted by a gas spring.
また、本発明の請求項３に記載のヘッドプレートの開閉軽減機構は、請求項１または請求項２に記載の発明において、上記開閉ロック機構は、一端が上記ヘッドプレートに揺動自在に連結された第１の部材と、一端側が上記第１の部材の他端部とピンを介して屈伸可能に結合され且つ他端が上記プローバ室に揺動自在に連結された第２の部材と、を備え、上記第１の部材は、上記ピンから上記ヘッドプレート側に偏倚して設けられた軸を有し、上記第２の部材は、一端に形成されて上記軸と係合する鉤部を有し、上記第１、第２の部材は、直線状に伸びて上記軸と上記鉤部か係合し、上記ヘッドプレートを所定の開放位置に保持することを特徴とするものである。 According to a third aspect of the present invention, in the opening / closing reduction mechanism for the head plate according to the first or second aspect, the one end of the opening / closing lock mechanism is swingably connected to the head plate. A second member having one end side coupled to the other end portion of the first member via a pin so as to be able to bend and extend, and the other end pivotally connected to the prober chamber. The first member has a shaft that is offset from the pin toward the head plate, and the second member has a flange that is formed at one end and engages the shaft. The first and second members extend in a straight line, engage with the shaft and the flange, and hold the head plate in a predetermined open position.
また、本発明の請求項４に記載のヘッドプレートの開閉軽減機構は、請求項３に記載の発明において、少なくとも上記第１の部材の他端側は上記ピンによって所定の隙間を空けて結合された一対のプレートを有し、上記第２の部材が上記一対のプレートを出入するように上記第１の部材とピン結合していることを特徴とするものである。 According to a fourth aspect of the present invention, there is provided the head plate opening / closing reduction mechanism according to the third aspect, wherein at least the other end of the first member is coupled to the pin with a predetermined gap. A pair of plates, and the second member is pin-coupled to the first member so as to enter and exit the pair of plates.
また、本発明の請求項５に記載のヘッドプレートの開閉軽減機構は、請求項３または請求項４に記載の発明において、上記第２の部材は上記ピン結合部より他端側に屈曲部と、上記屈曲部の両端から互いに反対方向に平行に延びる第１、第２直線部と、を有することを特徴とするものである。 According to a fifth aspect of the present invention, the opening / closing reduction mechanism for the head plate according to the third or fourth aspect of the invention is characterized in that the second member has a bent portion on the other end side from the pin coupling portion. And first and second straight portions extending in parallel with each other in opposite directions from both ends of the bent portion.
また、本発明の請求項６に記載の開閉ロック機構は、プローバ室の上端開口を開閉するように上記上端開口の後端部に設けられた回転軸に取り付けられたヘッドプレートを、所定の開放位置に保持するように構成された屈伸可能な開閉ロック機構であって、上記開閉ロック機構は、一端が上記ヘッドプレートに揺動自在に連結された第１の部材と、一端側が上記第１の部材の他端部とピンを介して結合され且つ他端が上記プローバ室に揺動自在に連結された第２の部材と、を備え、上記第１の部材は、上記ピンから上記ヘッドプレート側に偏倚して設けられた軸を有し、上記第第２の部材は、一端に形成されて上記軸と係合する鉤部を有し、上記第１、第２の部材は、上記軸直線状に伸びて上記軸と上記鉤部が係合し、上記ヘッドプレートを所定の開放位置に保持することを特徴とするものである。 According to a sixth aspect of the present invention, the open / close lock mechanism opens a head plate attached to a rotary shaft provided at the rear end of the upper end opening so as to open / close the upper end opening of the prober chamber. An openable / closable open / close lock mechanism configured to be held in position, wherein the open / close lock mechanism includes a first member having one end pivotably connected to the head plate, and one end side having the first lock. A second member coupled to the other end portion of the member via a pin and the other end swingably coupled to the prober chamber. The first member extends from the pin to the head plate side. And the second member has a collar portion formed at one end and engaged with the shaft, and the first and second members are linear axes. The shaft and the flange engage with each other, and the head plate It is characterized in that held in a fixed open position.
また、本発明の請求項７に記載の開閉ロック機構は、請求項６に記載の発明において、少なくとも上記第１の部材の他端側は上記ピンによって所定の隙間を空けて結合された一対のプレートを有し、上記第２の部材が上記一対のプレートを出入するように上記第１の部材とピン結合していることを特徴とするものである。 According to a seventh aspect of the present invention, there is provided the pair of opening and closing lock mechanism according to the sixth aspect, wherein at least the other end side of the first member is coupled to the pin with a predetermined gap. It has a plate, The said 2nd member is pin-coupled with the said 1st member so that the said pair of plate may enter / exit, It is characterized by the above-mentioned.
また、本発明の請求項８に記載の開閉ロック機構は、請求項６または請求項７に記載の発明において、上記第２の部材は上記ピン結合部より他端側に屈曲部を有し、上記屈曲部より上端側の直線部と上記屈曲部より端側の直線部が互いに平行して形成されていることを特徴とするものである。 In the opening / closing lock mechanism according to claim 8 of the present invention, in the invention according to claim 6 or claim 7, the second member has a bent portion on the other end side from the pin coupling portion, The straight portion on the upper end side from the bent portion and the straight portion on the end side from the bent portion are formed in parallel to each other.
本発明によれば、サブヘッドプレートをなくして一枚のヘッドプレートによって形成して開閉軽減機構を簡素化し、プローブ装置のメンテナンス性を高め、延いては製造コスト及びメンテナンスコストを低減することができるヘッドプレートの開閉軽減機構及び開閉ロック機構を提供することができる。 According to the present invention, the opening / closing mitigation mechanism can be simplified by eliminating the sub head plate and formed by a single head plate, improving the maintainability of the probe device, and thus reducing the manufacturing cost and the maintenance cost. An opening / closing reduction mechanism and an opening / closing lock mechanism for the head plate can be provided.
以下、図１及び図２に基づいて本発明の一実施形態について説明する。本実施形態のヘッドプレートの開閉軽減機構（以下、単に「開閉軽減機構」と称す。）１０は、例えば図１の（ａ）、（ｂ）に示すプローブ装置５０のプローバ室５１に適用されている。ローダ室は、従来のものに準じて構成されている。プローバ室５１には半導体ウエハを載置する移動可能な載置台５２と、載置台５２の上方に配置されたプローブカード（図示せず）と、プローブカードが装着されたヘッドプレート５３と、半導体ウエハの電極パッドとプローブカードのプローブとの位置合わせを行うアライメント機構（図示せず）と、を備え、半導体ウエハとプローブカードの位置合わせを行った後、載置台５２を介して半導体ウエハとプローブカードとを電気的に接触させて半導体ウエハの電気的特性検査を行う。 Hereinafter, an embodiment of the present invention will be described with reference to FIGS. 1 and 2. The head plate opening / closing reduction mechanism (hereinafter simply referred to as “opening / closing reduction mechanism”) 10 according to the present embodiment is applied to a prober chamber 51 of a probe device 50 shown in FIGS. 1A and 1B, for example. Yes. The loader chamber is configured according to the conventional one. The prober chamber 51 has a movable mounting table 52 on which a semiconductor wafer is mounted, a probe card (not shown) disposed above the mounting table 52, a head plate 53 on which the probe card is mounted, and a semiconductor wafer. And an alignment mechanism (not shown) for aligning the electrode pad of the probe and the probe of the probe card. After aligning the semiconductor wafer and the probe card, the semiconductor wafer and the probe card via the mounting table 52 Are in electrical contact with each other to inspect the electrical characteristics of the semiconductor wafer.
ヘッドプレート５３は、図１の（ａ）、（ｂ）に示すようにプローバ室５１の背面側（同図の左側）に架設された回転軸５４に取り付けられ、回転軸５４を中心に閉鎖位置と所定の開放位置の間で旋回してプローバ室５１の上端開口を開閉するように矩形状に形成されている。このヘッドプレート５３は、ネジ部材（図示せず）によってプローバ室５１の開口上端の四隅に固定されている。本実施形態の開閉軽減機構１０は、ヘッドプレート５３を開閉する時にヘッドプレート５３に作用して作業員の負荷を軽減すると共に、ヘッドプレート５３を所定の開放位置を保つように構成されている。 As shown in FIGS. 1A and 1B, the head plate 53 is attached to a rotary shaft 54 installed on the back side of the prober chamber 51 (left side in the figure), and is in a closed position around the rotary shaft 54. And a rectangular shape so as to turn between the predetermined open positions and open and close the upper end opening of the prober chamber 51. The head plate 53 is fixed to the four corners of the upper end of the prober chamber 51 by screw members (not shown). The opening / closing mitigation mechanism 10 of the present embodiment is configured to act on the head plate 53 when the head plate 53 is opened / closed to reduce the load on the operator and to keep the head plate 53 in a predetermined open position.
而して、開閉軽減機構１０は、図１の（ａ）、（ｂ）に示すように、ヘッドプレート５３を開閉する時に作業員の負荷を軽減する伸縮機構（例えば、ガススプリング）１１と、ヘッドプレート５３が所定の開放位置に達した時にヘッドプレート５３をその位置に保持する開閉ロック機構１２と、を備えている。 Thus, as shown in FIGS. 1A and 1B, the open / close reduction mechanism 10 includes an extension / contraction mechanism (for example, a gas spring) 11 that reduces the load on the operator when the head plate 53 is opened and closed. And an open / close lock mechanism 12 that holds the head plate 53 in that position when the head plate 53 reaches a predetermined open position.
ガススプリング１１は、同図に示すように、ロッド１１Ａの先端がヘッドプレート５３の左右両端部の背面側に偏倚させて揺動自在に連結され、シリンダ１１Ｂの下端がプローバ室５１内の左右両側面の下部に揺動自在に連結されている。ガススプリング１１をプローバ室５１に取り付ける時には、開閉ロック機構１２によってヘッドプレート５３を開いて所定の開放位置を保持した状態で、ロッド１１Ａの先端をヘッドプレート５３の所定位置に連結し、シリンダ１１Ｂの下端をプローバ室５１の所定位置に連結するだけで簡単に取り付け、交換することができる。 As shown in the figure, the gas spring 11 is pivotably coupled with the tip end of the rod 11A biased toward the back side of the left and right ends of the head plate 53, and the lower end of the cylinder 11B is on the left and right sides in the prober chamber 51. The lower part of the surface is swingably connected. When the gas spring 11 is attached to the prober chamber 51, the head plate 53 is opened by the opening / closing lock mechanism 12 and the predetermined opening position is maintained, and the tip of the rod 11A is connected to the predetermined position of the head plate 53, and the cylinder 11B By simply connecting the lower end to a predetermined position of the prober chamber 51, it can be easily attached and replaced.
開閉ロック機構１２は、図１の（ａ）（ｂ）に示すように、一端（図１の（ａ）では上端）がヘッドプレート５３の左側端部の前方に揺動自在に連結された第１の部材１２Ａと、上端側が第１の部材１２Ａの他端部（図１の（ａ）では下端部）とピン１２Ｂを介して結合され、下端がプローバ室５１の左側面の上端前方に揺動自在に連結された第２の部材１２Ｃと、を備え、プローバ室５１の少なくとも一方の側面側に取り付けられている。 As shown in FIGS. 1A and 1B, the open / close lock mechanism 12 has one end (the upper end in FIG. 1A) that is swingably connected in front of the left end of the head plate 53. 1 member 12A, the upper end side is coupled to the other end portion of the first member 12A (the lower end portion in FIG. 1A) via a pin 12B, and the lower end swings in front of the upper end of the left side surface of the prober chamber 51. And a second member 12C that is movably connected, and is attached to at least one side surface of the prober chamber 51.
第１の部材１２Ａは、例えば図２に示すように断面が矩形状の筒状に形成され、下端側が上下両面が除去された一対の細長形状のプレート部１２Ａ１によって形成されている。一対のプレート部の下端部間にピン１２Ｂが設けられ、このピン１２Ｂに第２の部材１２Ｃが屈伸自在にピン結合されている。また、第２の部材１２Ｃは、図１の（ａ）に示すように、第１直線部１２Ｃ１、第２直線部１２Ｃ２及び第１、第２直線部１２Ｃ１、１２Ｃ２を繋ぐ屈曲部１２Ｃ３からなり、第１直線部１２Ｃ１と第２直線部１２Ｃ２は屈曲部１２Ｃ３の両端から互いに反対方向へ平行に延びている。そして、第１の部材１２Ａと第２の部材の１２Ｃがピン１２Ｂを介して直線状に伸びて、図１の（ａ）に示すように第２の部材１２Ｃの第１直線部１２Ｃ１が第１の部材１２Ａの下端側の一対のプレート部１２Ａ１内に納まるようになっている。 The first member 12A is for example cross-section as shown in FIG. 2 is formed in a rectangular tubular shape, and is formed by a plate portion 12A 1 of the pair of elongated lower end side upper and lower surfaces is removed. A pin 12B is provided between the lower ends of the pair of plate portions, and the second member 12C is pin-coupled to the pin 12B so as to be able to bend and stretch. In addition, as shown in FIG. 1A, the second member 12C includes a first straight portion 12C 1 , a second straight portion 12C 2 and a bent portion that connects the first and second straight portions 12C 1 , 12C 2. consists 12C 3, the first linear portion 12C 1 and the second linear portion 12C 2 extend parallel from both ends of the bent portions 12C 3 in opposite directions. Then, extending the first member 12A and the linear 12C of the second member via a pin 12B, the first linear portion 12C 1 of the second member 12C as shown in FIG. 1 (a) first so that the fit to the first member 12A the lower end side of the pair of plate portions 12A in the first.
図１の（ａ）、（ｂ）及び図２に示すように、第１の部材１２Ａの一対のプレート部１２Ａ１間にはロック用の軸１２Ｄがピン１２Ｂから上方へ偏倚して設けられ、また、第２の部材１２Ｃの先端には軸１２Ｄに対して係合するロック用の鉤部１２Ｃ４が形成されている。ヘッドプレート５３を開いた時には第１、第２の部材１２Ａ、１２Ｃが図１の（ａ）に示すように直線状に伸び、鉤部１２Ｃ４が軸１２Ｄと係合して第１、第２の部材１２Ａ、１２Ｃの直線状態を維持し、ヘッドプレート５３を閉じた時には第１、第２の部材１２Ａ、１２Ｃが同図に（ｂ）に示すようにピン１２Ｂを介して１８０°折り曲げられ、第１の部材１２Ａと第２の部材１２Ｃの第１直線部１２Ｃ１がヘッドプレート５３内に隠れ、第２の部材１２Ｃの上側に第１の部材１２Ａが重なるようになっている。 As shown in FIGS. 1A, 1B, and 2, a locking shaft 12D is provided between the pair of plate portions 12A1 of the first member 12A so as to be biased upward from the pin 12B. Further, hook portion 12C 4 for locking engagement is formed with respect to the axis 12D the tip of the second member 12C. The first time you open the head plate 53, the second member 12A, 12C are extended in a linear shape as shown in (a) of FIG. 1, the first hook 12C 4 is engaged with the shaft 12D, the second When the head plate 53 is closed while maintaining the linear state of the members 12A and 12C, the first and second members 12A and 12C are bent 180 ° via the pins 12B as shown in FIG. first linear portion 12C 1 of the first member 12A and the second member 12C is concealed in the head plate 53, so that the first member 12A overlaps the upper side of the second member 12C.
また、図２に示すように、第１の部材１２Ａの一対のプレート部１２Ａ１にはそれぞれ互いに対応する長孔１２Ａ２が軸方向に形成されている。一対のプレート部１２Ａ１には断面矩形状の三面を被覆する摺動体１２Ｅが摺動可能に被覆されている。この摺動体１２Ｅの両側面には長孔１２Ａに沿って延びる一対のプレート部１２Ｅ１が形成され、これらのプレート部１２Ｅ１の下端に長孔１２Ａ２から第１の部材１２Ａのプレート部１２Ａ１を横切るロック用の軸１２Ｄが架設されている。 Further, as shown in FIG. 2, the long hole 12A 2 in the pair of the plate portion 12A 1 of the first member 12A corresponding to each other are formed in the axial direction. The pair of the plate portion 12A 1 slider 12E to cover the rectangular cross section of the three sides is slidably coating. This is on both sides of the sliding body 12E pair of plate portion 12E 1 extending along the long hole 12A is formed, the plate portion 12A 1 from the long hole 12A 2 at the lower end of the plates portion 12E 1 first member 12A A shaft 12D for locking crossing is installed.
次に、動作について説明する。プローブ装置５０のプローバ室５１をメンテナンスする時にはヘッドプレート５３の四隅にあるネジ部材を取り外した後、テストヘッド５３を開いて所定の開放位置に保持する。ヘッドプレート５３を開く時には作業員がヘッドプレート５３の前端を持ち上げて開放するが、この時、ヘッドプレート５３には開閉軽減機構１０のガススプリング１１が作用しているため、ヘッドプレート５３に大きな力を加えることなく簡単にヘッドプレート５３を開放することができる。 Next, the operation will be described. When the prober chamber 51 of the probe device 50 is maintained, the screw members at the four corners of the head plate 53 are removed, and then the test head 53 is opened and held at a predetermined open position. When opening the head plate 53, an operator lifts and releases the front end of the head plate 53. At this time, since the gas spring 11 of the opening / closing mitigation mechanism 10 acts on the head plate 53, a large force is applied to the head plate 53. The head plate 53 can be easily opened without adding.
ヘッドプレート５３を開く時には開閉ロック機構１２の第１、第２の部材１２Ａ、１２Ｃがピン１２Ｂを介して延び、ヘッドプレート５３が所定の開放位置に達し、第１の部材１２Ａの一対のプレート部１２Ａ１内に第２の部材１２Ｃの第１直線部１２Ｃ１が納まって第１、第２の部材１２Ａ、１２Ｃが直線状になると共に、第１の部材１２Ｃの鉤部１２Ｃ4が一対のプレート部１２Ａ１内にある軸１２Ｄと係合して第１、第２の部材１２Ａ、１２Ｃをロックし、ヘッドプレート５３を開放位置に保持する。 When the head plate 53 is opened, the first and second members 12A and 12C of the opening / closing lock mechanism 12 extend through the pins 12B, the head plate 53 reaches a predetermined open position, and a pair of plate portions of the first member 12A. first and first linear portions 12C 1 of the second member 12C is accommodated in 12A 1 1, the second member 12A, with 12C is made straight plate hook 12C 4 of the pair of first member 12C part 12A first engaged with the shaft 12D in 1, second member 12A, lock the 12C, holding the head plate 53 in the open position.
ヘッドプレート５３を所定の開放位置に保持した状態でプローバ室５１内のメンテナンスを行う。例えば、ガススプリング１１を交換する時にはガススプリング１１のみを交換するだけで済み、伸縮機構としてのコストも安く、作業も短時間で簡単に行うことができる。また、開閉ロック機構１２は、第１、第２の部材１２Ａ、１２Ｃをピン結合した簡単な構造であるため、それ自体のコストも安く、取り付け作業も短時間で簡単に行うことができる。また、開閉ロック機構１２Ｂを交換する時には第１、第２の部材１２Ａ、１２Ｃが直線状に伸びた長さに相当する支持棒（図示せず）を開閉ロック機構１２Ｂの代替として使用してヘッドプレート５３とプローバ室５１の上端に挟み込むことによってヘッドプレート５３を開放位置に保持することができる。 Maintenance in the prober chamber 51 is performed with the head plate 53 held in a predetermined open position. For example, when the gas spring 11 is replaced, only the gas spring 11 needs to be replaced, the cost of the expansion / contraction mechanism is low, and the operation can be easily performed in a short time. Further, since the open / close lock mechanism 12 has a simple structure in which the first and second members 12A and 12C are pin-coupled, the cost of the open / close lock mechanism 12 is low and the attaching operation can be easily performed in a short time. Further, when replacing the opening / closing lock mechanism 12B, a head using a support rod (not shown) corresponding to the length of the first and second members 12A, 12C extending linearly is used as an alternative to the opening / closing lock mechanism 12B. The head plate 53 can be held at the open position by being sandwiched between the upper ends of the plate 53 and the prober chamber 51.
また、本実施形態ではサブヘッドプレートが省略されているため、ヘッドプレート５３の中央にプローブカードを取り付けられているため、プローブカードからの荷重をヘッドプレート５３の中央で受けて、荷重によるヘッドプレート５３の歪みをヘッドプレート５３の中央部を基準に前後左右対称に分散し、プローブカードと半導体ウエハの接触圧のバランスをとることができ、プローブカードと半導体ウエハの接触を安定させ、検査の信頼性を高めることができる。従来のプローブ装置は、プローブカードが必ずしもヘッドプレートの中央にあるわけでなく、ヘッドプレートに不均一な歪みが生じていた。 Further, since the sub head plate is omitted in the present embodiment, the probe card is attached to the center of the head plate 53, so that the load from the probe card is received at the center of the head plate 53 and the head plate due to the load is received. The distortion of 53 is distributed symmetrically back and forth with respect to the center of the head plate 53, and the contact pressure between the probe card and the semiconductor wafer can be balanced, the contact between the probe card and the semiconductor wafer is stabilized, and the inspection reliability Can increase the sex. In the conventional probe apparatus, the probe card is not necessarily in the center of the head plate, and the head plate is distorted unevenly.
以上説明したように本実施形態によれば、開閉軽減機構１０は、プローバ室５１の左右の側壁に沿って設けられた一対のガススプリング１１と、ヘッドプレート５３を所定の開放位置で保持するように構成された屈伸可能な開閉ロック機構１２と、備え、ガススプリング１１は、上端がヘッドプレート５３の左右両端部に揺動自在に連結され、下端がプローバ室５１の左右の側壁近傍に揺動自在に連結されているため、伸縮機構がガススプリング１１のみからなり、構造が簡単でコストが安く、取り付け作業も短時間で簡単に行うことができ、交換コストを低減することができる。 As described above, according to the present embodiment, the open / close mitigation mechanism 10 holds the pair of gas springs 11 provided along the left and right side walls of the prober chamber 51 and the head plate 53 at a predetermined open position. The gas spring 11 has an upper end swingably connected to both left and right end portions of the head plate 53 and a lower end swinging near the left and right side walls of the prober chamber 51. Since they are connected freely, the expansion / contraction mechanism consists of only the gas spring 11, the structure is simple and the cost is low, the mounting work can be easily performed in a short time, and the replacement cost can be reduced.
また、開閉ロック機構１２は、第１、第２の部材１２Ａ、１３Ｃがピン１２Ｂを介して結合された簡単な構造であり、第１の部材１２Ａがピン１２Ｂからヘッドプレート５３側に偏倚して設けられた軸１２Ｄを有し、第２の部材が上端に形成されて軸１２Ｄと係合する鉤部１２Ｃ４を有るため、鉤部１２Ｃ４と軸１２Ｄが係合するだけでヘッドプレート５３を所定の開放位置にロックすることができ、しかもコストが安く、取り付け作業も短時間で簡単に行うことができ、交換コストを低減することができる。また、第１の部材１２Ａの下端側はピン１３Ｂによって所定の隙間を空けて結合された一対のプレート１２Ａ１を有すると共に、第２の部材１２Ｃはピン結合部より下端側に屈曲部１３Ｃ３を有し、屈曲部１３Ｃ４より上端側の第１直線部１３Ｃ１と屈曲部１３Ｃ３より下端側の第２直線部１３Ｃ２が互いに平行して形成されているため、開閉ロック機構１２をヘッドプレート５３に対してコンパクトに収納することができる。 The open / close lock mechanism 12 has a simple structure in which the first and second members 12A and 13C are coupled via the pin 12B. The first member 12A is biased from the pin 12B toward the head plate 53 side. has an axis 12D provided, because there the hook 12C 4 in which the second member engages the shaft 12D is formed at the upper end, the head plate 53 by simply hook 12C 4 and the shaft 12D is engaged It can be locked at a predetermined opening position, and the cost is low, the attaching operation can be easily performed in a short time, and the replacement cost can be reduced. Further, with a pair of plates 12A 1 coupled at a predetermined gap by the lower end side of the first member 12A is a pin 13B, a bent portion @ 13 C 3 to the lower side of the second member 12C is pin-connected portion has, since the bent portion @ 13 C 4 second linear portion @ 13 C 2 of the lower side of the first linear portion @ 13 C 1 and the bent portion @ 13 C 3 of the upper side of the can are formed in parallel to each other, the head plate closing lock mechanism 12 53 can be stored compactly.
尚、本発明は、上記実施形態の何等制限されるものではなく、必要に応じて各構成要素を適宜設計変更することができる。 In addition, this invention is not restrict | limited at all by the said embodiment, Each component can be design-changed suitably as needed.
１０ 開閉軽減機構
１１ ガススプリング（伸縮機構）
１２ 開閉ロック機構
１２Ａ 第１の部材
１２Ａ１ プレート部
１２Ｂ ピン
１２Ｃ 第２の部材
１２Ｃ１ 第１直線部
１２Ｃ２ 第２直線部
１２Ｃ３ 屈曲部
１２Ｃ４ 鉤部
１２Ｄ 軸
５０ プローブ装置
５１ プローバ室
５２ 載置台
５３ ヘッドプレート
10 Open / close reduction mechanism 11 Gas spring (extension mechanism)
12 Opening / closing lock mechanism 12A 1st member 12A 1 plate part 12B pin 12C 2nd member 12C 1 1st straight line part 12C 2 2nd straight line part 12C 3 bent part 12C 4 collar part 12D shaft 50 probe device 51 prober chamber 52 Stand 53 Head plate
Claims (8)
The second member has a bent portion on the other end side from the pin coupling portion, and a straight portion on the upper end side from the bent portion and a straight portion on the end side from the bent portion are formed in parallel to each other. The opening / closing lock mechanism according to claim 6 or 7, wherein
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Cited By (1)
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| WO2015076185A1 (en) * | 2013-11-21 | 2015-05-28 | 東京エレクトロン株式会社 | Lid-member opening/closing mechanism and substrate testing device |
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|---|---|---|---|---|
| JPS63190350A (en) * | 1987-02-02 | 1988-08-05 | Tokyo Electron Ltd | Probe device |
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| JPS63190350A (en) * | 1987-02-02 | 1988-08-05 | Tokyo Electron Ltd | Probe device |
| JPH02106944A (en) * | 1988-10-17 | 1990-04-19 | Tokyo Electron Ltd | Probing device |
| JPH09318661A (en) * | 1996-05-29 | 1997-12-12 | Nippon Maikuronikusu:Kk | Prober shielding device |
| JP2001053119A (en) * | 1999-08-09 | 2001-02-23 | Tokyo Electron Ltd | Probe and mechanism for making smooth open/close operation of head plate |
| JP2002340979A (en) * | 2001-05-11 | 2002-11-27 | Kawasaki Microelectronics Kk | Method of operating measuring instrument |
| JP2004036867A (en) * | 2002-07-08 | 2004-02-05 | Denso Corp | Emergency shutoff valve |
| JP2005175363A (en) * | 2003-12-15 | 2005-06-30 | Nikon Corp | Image sensor inspecting apparatus |
| JP2007046257A (en) * | 2005-08-08 | 2007-02-22 | Matsushita Electric Works Ltd | Lid plate opening and closing device of underfloor storage space |
| US7307440B2 (en) * | 2005-10-25 | 2007-12-11 | Credence Systems Corporation | Semiconductor integrated circuit tester with interchangeable tester module |
| JP3151651U (en) * | 2009-04-15 | 2009-07-02 | 慎吾 山本 | Alignment tool |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015076185A1 (en) * | 2013-11-21 | 2015-05-28 | 東京エレクトロン株式会社 | Lid-member opening/closing mechanism and substrate testing device |
| JP2015103560A (en) * | 2013-11-21 | 2015-06-04 | 東京エレクトロン株式会社 | Lid member opening/closing mechanism and substrate inspection device |
| TWI637447B (en) * | 2013-11-21 | 2018-10-01 | 日商東京威力科創股份有限公司 | Cover member opening and closing mechanism and substrate inspection device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5554581B2 (en) | 2014-07-23 |
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