JP2015075506A - Optical scanner, manufacturing method therefor, image display device, and head-mounted display - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical scanner and a manufacturing method therefor which facilitate a process of bonding a permanent magnet and a frame body portion together with less man-hour and fewer costs, and to provide an image display device and head-mounted display.SOLUTION: A scanner 4 has a frame body portion 43 whose bottom surface has a base layer 432 having better wettability to a metallic brazing material 47a than the frame body portion 43. A permanent magnet 48 is covered with a base layer 481 having better wettability to the metallic brazing material 47a than the permanent magnet 48, and the base layer 481 is provided on top thereof with a cover layer 482 having less wettability to the metallic brazing material 47a than the base layer 481. Portions of the base layer 481 are exposed from the cover layer 482, and the exposed portions 481a and the base layer 432 are bonded together by a bonding layer 47.

Description

  The present invention relates to an optical scanner, an optical scanner manufacturing method, an image display device, and a head mounted display.

  For example, as an image display device that displays an image on a screen, a configuration having a light source and an optical scanner that scans light from the light source is known (see, for example, Patent Document 1). The image display device described in Patent Literature 1 includes three laser light sources, a combining unit that combines laser beams from the three laser light sources, and an optical scanner that scans the laser beams combined by the combining unit. Yes.

  Further, the optical scanner described in the cited document 1 includes a movable part having a light reflecting part, a frame-like frame part provided around the movable part, and a frame-like support provided around the frame part. A first shaft portion that connects the movable portion to the frame body portion so as to be swingable about the first axis, and the frame body portion and the support portion. A second shaft portion connected to the support portion so as to be swingable about a second axis intersecting the first axis with respect to the support portion, and fixed to the frame portion by solder, A line segment connecting the N poles has a permanent magnet inclined with respect to both the first and second axes. In addition, a first ground layer having higher wettability with respect to the solder than the frame body portion is formed between the frame body portion and the solder (the surface of the frame body portion on the permanent magnet side). A second underlayer having higher wettability with respect to solder than the permanent magnet is formed in the space (the surface on the frame side of the permanent magnet). These first underlayer and second underlayer are: They have the same shape. Therefore, it is possible to join the permanent magnet and the frame portion with high positional accuracy using solder.

  However, a general permanent magnet used in this technical field has a rust preventive plating on the surface in advance, and this rust preventive plating generally has higher wettability to solder than a permanent magnet. Therefore, when trying to apply such a permanent magnet to the optical scanner of Patent Document 1, a base layer having lower wettability with respect to solder than rust-proof plating is formed on the rust-proof plating. 2 underlayers must be formed, resulting in increased manufacturing steps and complications.

JP 2013-104880 A

  An object of the present invention is to provide an optical scanner, an optical scanner manufacturing method, an image display device, and a head-mounted display that can easily join a permanent magnet and a frame body portion while reducing manufacturing man-hours and manufacturing costs. There is.

Such an object is achieved by the following application examples.
The optical scanner of the present invention includes a movable part including a light reflecting part that reflects light,
A frame part;
A first shaft portion that connects the movable portion and the frame body portion, and supports the movable portion so as to be swingable about a first axis with respect to the frame body portion;
A second shaft portion that slidably supports the frame body portion around a second axis that intersects the first axis;
Permanently fixed to the frame body through a bonding layer made of a metal brazing material, and a line segment connecting one magnetic pole and the other magnetic pole is inclined with respect to the first axis and the second axis. Magnets,
A first base layer provided on a surface of the frame body portion facing the permanent magnet, and having higher wettability to the metal brazing material than the frame body portion;
A second underlayer provided on a surface of the permanent magnet facing the frame portion, and having higher wettability to the metal brazing material than the permanent magnet;
Provided on the second underlayer so as to expose a portion of the second underlayer facing the first underlayer, and wettability to the metal brazing material more than the second underlayer. And a low coating layer,
The bonding layer is characterized in that the first base layer and an exposed portion of the second base layer exposed from the coating layer are bonded.
Thereby, for example, the rust-proof plating previously applied to the permanent magnet can be used as the second underlayer, so that the permanent magnet and the frame body portion can be easily joined while reducing the number of manufacturing steps and the manufacturing cost. It becomes an optical scanner that can do.

In the optical scanner according to the aspect of the invention, it is preferable that the first base layer and the exposed portion have the same planar view shape.
Thereby, a frame part and a permanent magnet can be positioned with high precision by the self-alignment effect of a metal brazing material.
In the optical scanner of the present invention, the frame body portion has a rib on a surface of the frame body portion facing the permanent magnet,
It is preferable that the first underlayer is provided on a surface of the rib facing the permanent magnet.
Accordingly, the rib functions as a reinforcing material that increases the rigidity of the frame body portion, and also functions as a spacer that prevents contact between the movable portion and the permanent magnet. Therefore, the optical scanner exhibits excellent vibration characteristics.

In the optical scanner according to the aspect of the invention, it is preferable that the coating layer is in contact with a side surface of the rib.
Thereby, positioning with a frame part and a permanent magnet can be performed still more accurately.
In the optical scanner of the present invention, it is preferable that the metal brazing material is solder.
Thereby, it becomes a joining layer with easy handling.

In the optical scanner according to the aspect of the invention, it is preferable that the coating layer has a light reflectance lower than that of the second underlayer.
Thereby, generation | occurrence | production of a stray light can be suppressed.
In the optical scanner of the present invention, it is preferable that the coating layer is made of chromium.
Thereby, generation | occurrence | production of a stray light can be suppressed with a simple structure.
In the optical scanner of the present invention, it is preferable that the coating layer is made of aluminum or titanium.
Thereby, the coating layer of a simple structure is obtained.

In the optical scanner of the present invention, the second underlayer is further provided on a side surface of the permanent magnet,
The covering layer is preferably provided on a portion of the second underlayer provided on the side surface of the permanent magnet that is connected to the outer edge of the exposed portion.
Thereby, since it can prevent that a metal brazing material spreads to the side surface of a permanent magnet, positioning of a frame part and a permanent magnet can be performed more accurately.

The method of manufacturing an optical scanner according to the present invention includes a movable part having a light reflecting part that reflects light, a frame part, the movable part and the frame part being connected, and the movable part being connected to the frame part. A first shaft portion that is swingably supported around a first axis, a second shaft portion that is swingably supported around a second axis that intersects the first axis, and a metal; A permanent magnet fixed to the frame body part via a bonding layer made of brazing material, and a line segment connecting one magnetic pole and the other magnetic pole is inclined with respect to the first axis and the second axis A method for manufacturing an optical scanner, comprising:
A first lower portion that is provided on the movable portion, the frame body portion, the first shaft portion, the second shaft portion, and the frame body portion and has higher wettability with respect to the metal brazing material than the frame body portion. While obtaining a mirror structure having a formation,
The permanent magnet, the second underlayer having higher wettability with respect to the metal brazing material than the permanent magnet, and a part of the second underlayer are provided to be exposed, than the second underlayer. Obtaining a magnet structure having a coating layer with low wettability to the metal brazing material;
The exposed portion exposed from the covering portion of the first underlayer and the second underlayer faces each other, and the metal brazing material is interposed between the first underlayer and the exposed portion. The mirror structure and the magnet structure are superposed in an arranged state, and the metal brazing material is melted to join the mirror structure and the magnet structure. .
Thereby, for example, the rust-proof plating previously applied to the permanent magnet can be used as the second underlayer, so that the permanent magnet and the frame body portion can be easily joined while reducing the number of manufacturing steps and the manufacturing cost. can do.

The image display device of the present invention includes a movable part including a light reflecting part that reflects light,
A frame part;
A first shaft portion that connects the movable portion and the frame body portion, and supports the movable portion so as to be swingable about a first axis with respect to the frame body portion;
A second shaft portion that slidably supports the frame body portion around a second axis that intersects the first axis;
Permanently fixed to the frame body through a bonding layer made of a metal brazing material, and a line segment connecting one magnetic pole and the other magnetic pole is inclined with respect to the first axis and the second axis. A magnet,
A first base layer provided on a surface of the frame body portion facing the permanent magnet, and having higher wettability to the metal brazing material than the frame body portion;
A second underlayer provided on a surface of the permanent magnet facing the frame portion, and having higher wettability to the metal brazing material than the permanent magnet;
Provided on the second underlayer so as to expose a portion of the second underlayer facing the first underlayer, and wettability to the metal brazing material more than the second underlayer. And a low coating layer,
The bonding layer bonds the first underlayer and the exposed portion of the second underlayer exposed from the coating layer.
Thereby, for example, the rust-proof plating previously applied to the permanent magnet can be used as the second underlayer, so that the permanent magnet and the frame body portion can be easily joined while reducing the number of manufacturing steps and the manufacturing cost. It becomes an image display device that can do.

The head-mounted display of the present invention includes a frame attached to the observer's head,
A head-mounted display comprising an optical scanner provided on the frame,
The optical scanner includes a movable part including a light reflecting part that reflects light;
A frame part;
A first shaft portion that connects the movable portion and the frame body portion, and supports the movable portion so as to be swingable about a first axis with respect to the frame body portion;
A second shaft portion that slidably supports the frame body portion around a second axis that intersects the first axis;
Permanently fixed to the frame body through a bonding layer made of a metal brazing material, and a line segment connecting one magnetic pole and the other magnetic pole is inclined with respect to the first axis and the second axis. A magnet,
A first base layer provided on a surface of the frame body portion facing the permanent magnet, and having higher wettability to the metal brazing material than the frame body portion;
A second underlayer provided on a surface of the permanent magnet facing the frame portion, and having higher wettability to the metal brazing material than the permanent magnet;
Provided on the second underlayer so as to expose a portion of the second underlayer facing the first underlayer, and wettability to the metal brazing material more than the second underlayer. And a low coating layer,
The bonding layer bonds the first underlayer and the exposed portion of the second underlayer exposed from the coating layer.
Thereby, a highly reliable head mounted display is obtained.

It is a block diagram which shows 1st Embodiment of the image display apparatus of this invention. It is a top view of the optical scanner with which the image display apparatus shown in FIG. 1 is provided. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. FIG. 3 is a bottom view of a frame body part and a top view of a permanent magnet included in the optical scanner shown in FIG. 2. It is sectional drawing which shows the modification of the optical scanner shown in FIG. It is a block diagram of the voltage application means which the optical scanner shown in FIG. 2 has. It is a figure which shows an example of the voltage generated in the 1st voltage generation part shown in FIG. 7, and a 2nd voltage generation part. It is sectional drawing of the optical scanner with which the image display apparatus concerning 2nd Embodiment of this invention is provided. It is sectional drawing of the optical scanner with which the image display apparatus concerning 3rd Embodiment of this invention is provided. It is sectional drawing for demonstrating the manufacturing method of the optical scanner shown in FIG. It is sectional drawing for demonstrating the manufacturing method of the optical scanner shown in FIG. It is sectional drawing for demonstrating the manufacturing method of the optical scanner shown in FIG. It is a perspective view which shows the head-up display which applied the image display apparatus of this invention. It is a perspective view which shows the head mounted display of this invention.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of an optical scanner, a manufacturing method of an optical scanner, an image display device, and a head mounted display of the invention will be described with reference to the accompanying drawings.
1. Image Display Device <First Embodiment>
First, a first embodiment of an image display device (an image display device of the present invention) to which an optical scanner of the present invention is applied will be described.

  FIG. 1 is a configuration diagram showing a first embodiment of an image display device of the present invention. FIG. 2 is a top view of the optical scanner provided in the image display apparatus shown in FIG. 3 is a cross-sectional view taken along line AA in FIG. 4 is a cross-sectional view taken along line BB in FIG. FIG. 5 is a bottom view of a frame body part and a top view of a permanent magnet included in the optical scanner shown in FIG. 6 is a cross-sectional view showing a modification of the optical scanner shown in FIG. FIG. 7 is a block diagram of voltage applying means included in the optical scanner shown in FIG. FIG. 8 is a diagram illustrating an example of a voltage generated in the first voltage generation unit and the second voltage generation unit illustrated in FIG. 7. In the following, for convenience of explanation, the front side of the sheet of FIG. 2 and the upper side of FIG. 3 are referred to as “up”, and the back side of the sheet of FIG. 2 and the lower side of FIG.

An image display apparatus 1 shown in FIG. 1 is an apparatus that displays an image by two-dimensionally scanning a drawing laser beam LL on an object 10 such as a screen or a wall surface.
As shown in FIGS. 1 and 4, the image display apparatus 1 scans with a drawing light source unit 2 that emits a drawing laser beam LL, an optical scanner 4 that scans the drawing laser beam LL, and the optical scanner 4. And a mirror 11 that reflects the drawing laser beam LL. The mirror 11 may be provided as necessary and may be omitted.

≪Light source unit for drawing≫
As shown in FIG. 1, the drawing light source unit 2 includes red, green, blue, and laser light sources (light source units) 21R, 21G, and 21B for each color and collimators provided corresponding to the laser light sources 21R, 21G, and 21B. Meter lenses 22R, 22G, and 22B and dichroic mirrors 23R, 23G, and 23B.

  Each of the laser light sources 21R, 21G, and 21B has a light source and a drive circuit (not shown). The laser light source 21R emits red laser light RR, the laser light source 21G emits green laser light GG, and the laser light source 21B emits blue laser light BB. The laser beams RR, GG, and BB are emitted in response to drive signals transmitted from a control unit (not shown), and are converted into parallel light or substantially parallel light by the collimator lenses 22R, 22G, and 22B. As the laser light sources 21R, 21G, and 21B, for example, a semiconductor laser such as an edge emitting semiconductor laser or a surface emitting semiconductor laser can be used. By using a semiconductor laser, the laser light sources 21R, 21G, and 21B can be downsized.

  Dichroic mirrors 23R, 23G, and 23B are arranged following the arrangement of the laser light sources 21R, 21G, and 21B. The dichroic mirror 23R has a characteristic of reflecting the laser light RR. The dichroic mirror 23G has a characteristic of reflecting the laser beam GG and transmitting the laser beam RR. The dichroic mirror 23B has a characteristic of reflecting the laser beam BB and transmitting the laser beams RR and GG. By these dichroic mirrors 23R, 23G, and 23B, the laser beams RR, GG, and BB of the respective colors are combined to become a drawing laser beam LL.

≪Optical scanner≫
The optical scanner 4 has a function of two-dimensionally scanning the drawing laser beam LL emitted from the drawing light source unit 2.
As shown in FIGS. 2 to 5, the optical scanner 4 includes a structure 40, a permanent magnet 48, a coil 491, and a voltage application unit 492.

  The structure 40 includes a movable portion 41, a pair of first shaft portions 421 and 422, a frame body portion 43, a pair of second shaft portions 441 and 442, and a support portion 45. doing. Among these portions, the movable portion 41 and the first shaft portions 421 and 422 constitute a first vibration system that swings around the first axis J1 about the first shaft portions 421 and 422. In addition, the movable portion 41, the first shaft portions 421 and 422, the frame body portion 43, the second shaft portions 441 and 442, and the permanent magnet 48 are the second axis J2 that is orthogonal to (intersects) the first axis J1. A second vibration system that swings around is configured. In addition, the permanent magnet 48, the coil 491, and the voltage application unit 492 constitute a driving unit that drives the first and second vibration systems.

  The movable portion 41 includes a base 411, a spacer 412 provided on the upper surface of the base 411, and a light reflecting portion 413 having light reflectivity provided on the upper surface of the spacer 412. The drawing laser beam LL is incident on the movable unit 41, and the incident drawing laser beam LL is reflected by the light reflecting unit 413 and scanned in a direction according to the posture of the light reflecting unit 413. The light reflecting portion 413 can be formed, for example, by depositing a metal material such as aluminum on the upper surface of the spacer 412.

  The spacer 412 is separated from the first shaft portions 421 and 422 in the plate thickness direction, and as shown in FIGS. 2 and 3, the structure 40 is viewed in plan (the plate of the support portion 45 and the light reflecting portion 413. In the direction viewed from the thickness direction (hereinafter simply referred to as a plan view), the first shaft portions 421 and 422 are provided so as to overlap the entire region. Therefore, the area of the upper surface of the spacer 412 (the area of the light reflecting portion 413) can be increased while shortening the distance between the first shaft portions 421 and 422. In addition, since the distance between the first shaft portions 421 and 422 can be shortened, the size of the frame body portion 43 can be reduced. Furthermore, since the size of the frame body portion 43 can be reduced, the distance between the second shaft portions 441 and 442 can be shortened. For this reason, the optical scanner 4 can be downsized even if the area of the plate surface of the light reflecting portion 413 is increased.

The frame body portion 43 has a frame shape and is provided so as to surround the base portion 411 of the movable portion 41 in a plan view of the structure body 40. That is, the base portion 411 is located inside the frame body portion 43.
The support portion 45 has a frame shape and is provided so as to surround the frame body portion 43. That is, the frame part 43 is located inside the support part 45.
The first shaft portions 421 and 422 are disposed so as to face each other via the base portion 411 of the movable portion 41. Further, the first shaft portions 421 and 422 each have a longitudinal shape extending in a direction along the first axis J1. Each of the first shaft portions 421 and 422 has one end connected to the base 411 and the other end connected to the frame body 43. In addition, the first shaft portions 421 and 422 are arranged so that the central axis coincides with the first axis J1. Such first shaft portions 421 and 422 are torsionally deformed as the movable portion 41 swings around the first axis J1.

  On the other hand, the second shaft portions 441 and 442 are arranged to face each other with the frame body portion 43 interposed therebetween. The second shaft portions 441 and 442 each have a longitudinal shape extending in the direction along the second axis J2. Each of the second shaft portions 441 and 442 has one end connected to the frame body portion 43 and the other end connected to the support portion 45. The second shaft portions 441 and 442 are arranged so that the central axis thereof coincides with the second axis J2. Such second shaft portions 441 and 442 are torsionally deformed as the frame body portion 43 swings around the second axis J2.

Note that the shapes of the first shaft portions 421 and 422 and the second shaft portions 441 and 442 are not limited to those described above, for example, a bent or bent portion or a branched portion at at least one place in the middle. You may have. Further, the first shaft portions 421 and 422 and the second shaft portions 441 and 442 may be divided into two shaft portions.
In such a structure 40, the movable part 41 can be swung around the first axis J1, and the frame part 43 can be swung around the second axis J2. The light reflecting portion 413) can be swung around the two axes of the first and second axes J1 and J2 orthogonal to each other.

In the structure 40 configured as described above, the base 411, the first shaft portions 421 and 422, the frame body portion 43, the second shaft portions 441 and 442, and the support portion 45 include the first Si layer (device layer). ), An SiO ₂ layer (box layer), and a second Si layer (handle layer) are integrally formed by etching an SOI substrate laminated in this order. Thereby, the vibration characteristics of the first vibration system and the second vibration system can be made excellent. Further, since the SOI substrate can be finely processed by etching, the base 411, the first shaft portions 421 and 422, the frame body portion 43, the second shaft portions 441 and 442, and the support portion are used by using the SOI substrate. By forming 45, these dimensional accuracy can be made excellent, and the size of the optical scanner 4 can be reduced.

The base 411, the first shaft portions 421 and 422, and the second shaft portions 441 and 442 are each configured by a first Si layer of an SOI substrate. Thereby, the elasticity of the first shaft portions 421 and 422 and the second shaft portions 441 and 442 can be made excellent. Further, the thickness of the base portion 411 can be reduced, and the base portion 411 can be prevented from coming into contact with the frame body portion 43 when swinging around the first axis J1. Further, frame 43 and the support portion 45, respectively, a first Si layer of the SOI substrate, and a stack of the SiO ₂ layer and the second Si layer. Thereby, the rigidity of the frame part 43 and the support part 45 can be made excellent. Further, the SiO ₂ layer and the second Si layer of the frame part 43 not only function as ribs 431 that increase the rigidity of the frame part 43, but also serve as spacers that prevent the base part 411 from contacting the permanent magnet 48. It also has the function. It can also be said that the rib 431 is provided on a surface of the frame body portion 43 that faces the permanent magnet 48.
Similarly, the spacer 412 of the movable portion 41 is also formed by etching the SOI substrate. The spacer 412 is bonded with, for example, various epoxy, acrylic, and silicone adhesives. However, the spacer 412 can also be formed by etching a glass substrate, for example.

As shown in FIG. 3, a permanent magnet 48 is joined to the frame body portion 43 (rib 431). The permanent magnet 48 is arranged such that a line segment connecting the S pole (one magnetic pole) and the N pole (the other magnetic pole) is inclined with respect to the first and second axes J1 and J2 in plan view. Yes. In addition, the permanent magnet 48 of the present embodiment has a rod shape extending along the line segment. The inclination angle θ of the permanent magnet 48 (the line segment) with respect to the second axis J2 is not particularly limited, but is preferably 30 ° or more and 60 ° or less, and more preferably 45 ° or more and 60 ° or less. Preferably, it is 45 °. Thereby, the movable part 41 can be rock | fluctuated around the 1st, 2nd axis | shafts J1 and J2 smoothly and reliably.
As the permanent magnet 48, for example, a neodymium magnet, a ferrite magnet, a samarium cobalt magnet, an alnico magnet, a bond magnet, or the like can be suitably used.

  Such a permanent magnet 48 is joined to the frame part 43 by a joining layer 47 made of a metal brazing material 47a. The metal brazing material 47a is not particularly limited as long as the permanent magnet 48 and the frame body portion 43 can be joined. For example, a metal such as Au or Cu, silver brazing, copper brazing, phosphor copper brazing, solder or the like Furthermore, as solder, Sn-Pb-based lead solder, Au-Sn-based, Sn-Ag-Cu-based, Sn-Zn-Bi-based, Sn-Cu-based, Sn-Ag-In-Bi-based Sn-Zn-Al-based various lead-free solders. Among these, as the metal brazing material 47a, it is preferable to use solder from the viewpoint of handleability and bondability. Note that the bonding layer 47 may contain, for example, a compound having flux activity in addition to the metal brazing material 47a described above.

Further, as shown in FIG. 4, a base layer (second base layer) 481 is provided on the surface of the permanent magnet 48 (the surface facing the frame body portion 43 or the rib 431). The entire area of the permanent magnet 48 is covered. The underlayer 481 is configured so that the wettability with respect to the metal brazing material 47 a is higher than that of the permanent magnet 48.
Further, a coating layer 482 is provided on the base layer 481. The covering layer 482 is configured such that the wettability with respect to the metal brazing material 47a is lower than that of the base layer 481. Further, the coating layer 482 is provided on a part of the base layer 481, and thus a part of the base layer 481 is exposed from the coating layer 482 to the outside. The covering layer 482 is provided so as to expose a portion of the base layer 481 that faces a base layer 432 described later. Specifically, the covering layer 482 is provided in the central portion excluding both ends of the base layer 481 (481 ′) located on the upper surface of the permanent magnet 48, and the base layer located on the upper surface of the permanent magnet 48. Both end portions of 481 (481 ′) are exposed from the coating layer 482. The exposed portion 481a, which is the exposed portion, is located between the permanent magnet 48 and the bonding layer 47, and the permanent magnet 48 is bonded to the bonding layer 47 at the exposed portion 481a.

  As described above, the exposed portion 481a has high wettability with respect to the metal brazing material 47a, and therefore the adhesion between the exposed portion 481a and the metal brazing material 47a is high. Therefore, the bonding layer 47 and the permanent magnet 48 can be bonded more firmly. In addition, since the wettability of the coating layer 482 to the metal brazing material 47a is set low, it is possible to prevent the metal brazing material 47a from spreading over the coating layer 482 when the metal brazing material 47a is melted. The brazing material 47a can be fastened on the exposed portion 481a. That is, the wet spreading area of the metal brazing material 47a can be accurately controlled.

  Here, the thickness of the coating layer 482 is not particularly limited, but is preferably 5 μm or more. Thereby, a sufficiently high step can be formed between the upper surface of the exposed portion 481a and the upper surface of the coating layer 482, and this step effectively functions as a stopper for the metal brazing material 47a spreading when wet. . Therefore, the control of the wet spreading area of the metal brazing material 47a as described above can be performed with higher accuracy.

  The constituent material of the underlayer 481 is not particularly limited as long as the wettability to the metal brazing material 47a is higher than that of the permanent magnet 48. For example, when the metal brazing material 47a is solder, a metal such as Au or Pd, An alloy such as a Ni—Cr—Au alloy, a Cr—Ni alloy, a Ti—Ni alloy can be used. Among these, it is preferable to use an alloy such as a Ni—Cr—Au alloy, a Cr—Ni alloy, or a Ti—Ni alloy that is widely used for rust prevention plating as the constituent material of the base layer 481. Thereby, the antirust plating layer previously coated on the permanent magnet 48 can be effectively used as the base layer 481. Therefore, the manufacture of the optical scanner 4 can be simplified.

  Note that the base layer 481 may have a single-layer structure or a stacked structure. When the base layer 481 has a three-layer structure, for example, a structure in which a Cr layer composed of Cr, a Ni layer composed of Ni, and an Au layer composed of Au are sequentially stacked from the permanent magnet 48 side. It can be. The Cr layer is a layer that improves the adhesion between the Ni layer and the permanent magnet 48. The Ni layer is a layer that prevents the diffusion of the metal brazing material 47a while enhancing the adhesion between the Cr layer and the Au layer. The layer is a layer that prevents the oxidation of the Ni layer and the Cr layer while improving the wettability of the metal brazing material 47a and improving the adhesion to the metal brazing material 47a. However, instead of the Cr layer, a layer made of Ti, Ta, or a Ni—Cr alloy may be used. Instead of the Ni layer, it may be made of a Ni—Cr alloy, Cr, Ti, Ta, or the like. A layer may be used, and a layer made of Pd may be used instead of the Au layer.

In addition, when the underlayer 481 has a two-layer structure, for example, a structure in which a Cr layer composed of Cr and an Au layer composed of Au are sequentially stacked from the permanent magnet 48 side, or a structure composed of Cr Cr layer and Ni layer composed of Ni are sequentially laminated, Ni layer composed of Ni, Au layer composed of Au, or Ti layer composed of Ti A structure in which an Au layer composed of layers and Au are sequentially stacked, or a structure in which a W layer composed of W and an Au layer composed of Au are sequentially stacked can be employed.
The constituent material of the coating layer 482 is not particularly limited as long as the wettability to the metal brazing material 47a is lower than that of the base layer 481. For example, when the metal brazing material 47a is solder, Al, Ti, Cr, etc. These metals can be used. According to these metals, the coating layer is sufficiently lower in wettability to the metal brazing material 47a than the base layer 481.

Note that the covering layer 482 preferably has a lower light reflectance than the base layer 481. Thereby, in addition to the above effects, the generation of stray light (unnecessary light reflected by other than the light reflecting portion 413) can be reduced. Therefore, the optical scanner 4 having more excellent reflection characteristics can be obtained. In the case where the coating layer 482 having a lower light reflectance than the base layer 481 is obtained, Cr is preferably used as a constituent material of the coating layer 482. Thereby, the coating layer 482 which has the said effect can be obtained easily.
In addition to the metal material described above, a resin material may be used as a constituent material of the covering layer 482.
Note that the cover layer 482 is not limited to a single layer structure, and may have a stacked structure in which a plurality of layers are stacked.

  On the other hand, between the frame body portion 43 and the bonding layer 47, specifically, on the lower surface of the frame body portion 43 (the lower surface of the rib 431, that is, the surface facing the permanent magnet 48 of the frame body portion 43 or the rib 431). A base layer (first base layer) 432 is provided. The foundation layer 432 is configured so that the wettability with respect to the metal brazing material 47 a is higher than that of the frame body portion 43. Therefore, the adhesive force between the base layer 432 and the metal brazing material 47a is high, and the bonding layer 47 and the frame body portion 43 can be bonded more firmly.

The constituent material of the base layer 432 is not particularly limited as long as the wettability to the metal brazing material 47a is higher than that of the frame body portion 43 (rib 431). For example, when the metal brazing material 47a is solder, Au, Pd Or a metal such as Ni—Cr—Au alloy, Cr—Ni alloy, Ti—Ni alloy or the like can be used.
Note that the base layer 432 may have a single-layer structure or a stacked structure. In the case where the base layer 432 has a stacked structure, for example, a structure similar to that of the base layer 481 described above can be employed.

  Although the underlayers 432 and 481 have been described above, the underlayer 432 and the exposed portion 481a of the underlayer 481 are opposed to each other in the plate thickness direction of the structure 40 and are bonded by the bonding layer 47. Here, in this embodiment, as shown in FIG. 5, the shape in plan view (including the size) when the base layer 432 and the exposed portion 481 a face each other is the same. Thus, the contours of the base layer 432 and the exposed portion 481a substantially overlap each other. By making the shape of the underlayer 432 and the exposed portion 481a the same, the self-alignment effect due to the surface tension generated in the metal brazing material 47a at the time of melting is exhibited. Are naturally positioned so that the contours of the exposed portion 481a overlap each other. That is, by making the ground layer 432 and the exposed portion 481a have the same shape in plan view, the frame body portion 43 and the permanent magnet 48 can be positioned with high accuracy, and desired vibration characteristics can be exhibited. An optical scanner 4 is obtained.

  As a modification of this embodiment, as shown in FIG. 6, the bonding layer 47 (metal brazing material 47 a) is on the side surface of the permanent magnet 48 (that is, on the surface connected to the surface facing the frame body portion 43). The base layer 481 positioned at () may be spread. According to this configuration, since the contact area between the bonding layer 47 and the base layer 481 is increased as compared with the present embodiment, the bonding layer 47 and the permanent magnet 48 can be bonded more firmly.

A coil 491 is provided immediately below the permanent magnet 48. Thereby, the magnetic field generated from the coil 491 can be efficiently applied to the permanent magnet 48. Thereby, power saving and size reduction of the optical scanner 4 can be achieved. The coil 491 is provided by being wound around a magnetic core 493. Thereby, the magnetic field generated by the coil 491 can be efficiently applied to the permanent magnet 48. Note that the magnetic core 493 may be omitted.
Such a coil 491 is electrically connected to the voltage application unit 492. Then, when a voltage is applied to the coil 491 by the voltage application unit 492, a magnetic field having a magnetic flux perpendicular to the first and second axes J1 and J2 is generated from the coil 491.

  As shown in FIG. 7, the voltage application unit 492 includes a first voltage generation unit 492a that generates a first voltage V1 for swinging the movable unit 41 around the first axis J1, and a movable unit 41. A second voltage generator 492b for generating a second voltage V2 for swinging around the second axis J2, and a voltage superimposing unit 492c for superimposing the first voltage V1 and the second voltage V2. The voltage superimposed by the voltage superimposing unit 492c is applied to the coil 491.

  As shown in FIG. 8A, the first voltage generator 492a generates a first voltage V1 (main scanning voltage) that periodically changes at a cycle T1. The first voltage V1 has a waveform like a sine wave. The frequency (1 / T1) of the first voltage V1 is preferably 10 to 40 kHz, for example. The frequency of the first voltage V1 is set to be equal to the torsional resonance frequency of the first vibration system. Thereby, the rocking | swiveling angle around the 1st axis | shaft J1 of the movable part 41 can be enlarged.

On the other hand, as shown in FIG. 8B, the second voltage generator 492b generates a second voltage V2 (sub-scanning voltage) that periodically changes at a period T2 different from the period T1. . The second voltage V2 has a sawtooth waveform. The frequency (1 / T2) of the second voltage V2 may be different from the frequency (1 / T1) of the first voltage V1, and is preferably 30 to 120 Hz (about 60 Hz), for example. The frequency of the second voltage V2 is adjusted to be different from the torsional resonance frequency of the second vibration system.
The frequency of the second voltage V2 is preferably smaller than the frequency of the first voltage V1. As a result, the movable part 41 is swung around the first axis J1 at the frequency of the first voltage V1, while swinging around the second axis J2 at the frequency of the second voltage V2, more reliably and smoothly. Can be moved.

  Further, when the torsional resonance frequency of the first vibration system is f1 [Hz] and the torsional resonance frequency of the second vibration system is f2 [Hz], f1 and f2 satisfy the relationship of f2 <f1. Is preferable, and it is more preferable to satisfy the relationship of 10f2 ≦ f1. As a result, the movable portion 41 is more smoothly swung around the first axis J1 at the frequency of the first voltage V1, while being swung around the second axis J2 at the frequency of the second voltage V2. be able to. On the other hand, if f1 ≦ f2, the vibration of the first vibration system may occur due to the frequency of the second voltage V2.

The first voltage generation unit 492a and the second voltage generation unit 492b are each connected to the control unit 6 and driven based on a signal from the control unit 6. The voltage superimposing unit 492c is connected to the first voltage generating unit 492a and the second voltage generating unit 492b.
The voltage superimposing unit 492c includes an adder 492d for applying a voltage to the coil 491. The adder 492d receives the first voltage V1 from the first voltage generator 492a and receives the second voltage V2 from the second voltage generator 492b, and superimposes these voltages and applies them to the coil 491. It has become.

  Next, a method for driving the optical scanner 4 will be described. The frequency of the first voltage V1 is set equal to the torsional resonance frequency of the first vibration system, and the frequency of the second voltage V2 is different from the torsional resonance frequency of the second vibration system. In addition, the frequency is set to be lower than the frequency of the first voltage V1 (for example, the frequency of the first voltage V1 is set to 18 kHz and the frequency of the second voltage V2 is set to 60 Hz). .

  For example, the first voltage V1 illustrated in FIG. 8A and the second voltage V2 illustrated in FIG. 8B are superimposed by the voltage superimposing unit 492c, and the superimposed voltage is applied to the coil 491. Then, the first voltage V <b> 1 tries to attract one end (N pole) of the permanent magnet 48 to the coil 491, and the magnetic field tries to separate the other end (S pole) of the permanent magnet 48 from the coil 491. (This magnetic field is referred to as “magnetic field A1”) and one end (N pole) of the permanent magnet 48 is to be separated from the coil 491, and the other end (S pole) of the permanent magnet 48 is attracted to the coil 491. (The magnetic field is referred to as “magnetic field A2”) alternately.

  By alternately switching the magnetic fields A1 and A2, vibration having a torsional vibration component around the first axis J1 is excited in the frame part 43, and the first shaft parts 421 and 422 are twisted along with the vibration. While being deformed, the movable portion 41 swings around the first axis J1 at the frequency of the first voltage V1. Since the frequency of the first voltage V1 is equal to the torsional resonance frequency of the first vibration system, the movable portion 41 can be largely swung by resonance vibration.

  On the other hand, the second voltage V <b> 2 attempts to attract one end (N pole) of the permanent magnet 48 to the coil 491 and to magnetically separate the other end (S pole) of the permanent magnet 48 from the coil 491. (This magnetic field is referred to as “magnetic field B1”) and one end (N pole) of the permanent magnet 48 is to be separated from the coil 491, and the other end (S pole) of the permanent magnet 48 is attracted to the coil 491. (The magnetic field is referred to as “magnetic field B2”) alternately.

  By alternately switching the magnetic fields B1 and B2, the frame portion 43 together with the movable portion 41 is rotated around the second axis J2 at the frequency of the second voltage V2 while the second shaft portions 441 and 442 are torsionally deformed. Rocks. As described above, the frequency of the second voltage V2 is set to be extremely lower than the frequency of the first voltage V1, and the torsional resonance frequency of the second vibration system is higher than the torsional resonance frequency of the first vibration system. Therefore, the movable portion 41 can be prevented from swinging around the first axis J1 at the frequency of the second voltage V2.

  As described above, in the optical scanner 4, by applying a voltage obtained by superimposing the first voltage V <b> 1 and the second voltage V <b> 2 to the coil 491, the movable portion 41 is moved around the first axis J <b> 1 in the first direction. While oscillating at the frequency of the voltage V1, it is possible to oscillate at the frequency of the second voltage V2 around the second axis J2. Thereby, since light can be scanned two-dimensionally with one optical scanner, the cost and size of the apparatus can be reduced. Further, by adopting an electromagnetic drive system (moving magnet system), the movable part 41 is efficiently swung around the first and second axes J1 and J2, and reflected by the light reflecting part 413. The drawing laser beam LL can be scanned two-dimensionally. In addition, since the number of parts (permanent magnets and coils) constituting the drive source can be reduced, a simple and small configuration can be achieved. Further, since the coil 491 is separated from the vibration system of the optical scanner 4, it is possible to prevent an adverse effect of the heat generated by the coil 491 on the vibration system.

  The optical scanner 4 has been described in detail above. According to the two-dimensional scanning type optical scanner 4 having a gimbal type as in the present embodiment, the drawing laser beam LL can be two-dimensionally scanned with one apparatus, and thus, for example, a one-dimensional scanning type optical scanner. Compared with a configuration in which two of these are combined and the drawing laser beam LL is two-dimensionally scanned, the apparatus can be reduced in size and alignment can be easily adjusted.

Second Embodiment
Next, a second embodiment of the image display device of the present invention will be described.
FIG. 9 is a cross-sectional view of an optical scanner provided in the image display apparatus according to the second embodiment of the present invention.
Hereinafter, the image display apparatus according to the second embodiment will be described focusing on the differences from the above-described embodiment, and description of similar matters will be omitted.
The image display apparatus according to the second embodiment of the present invention is the same as that of the first embodiment described above except that the configuration of the coating layer provided on the permanent magnet is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.

≪Optical scanner≫
As shown in FIG. 9, in the optical scanner 4 </ b> A of the present embodiment, a base layer 481 is provided so as to cover the entire area of the permanent magnet 48, and further, a coating layer 482 is provided so as to cover the base layer 481. Yes. In addition, the covering layer 482 is provided so as to cover the remaining entire area so as to expose a portion of the base layer 481 that faces the base layer 432. With such a configuration, it is possible to prevent the molten metal brazing material 47a from spreading to the side surface of the base layer 481. Therefore, the positioning of the frame body portion 43 and the permanent magnet 48 can be performed with higher accuracy. The covering layer 482 is provided at least on a portion of the base layer 481 provided on the side surface of the permanent magnet 48 and connected to the outer edge of the exposed portion 481a, in other words, from the exposed portion 481a. If the metal brazing material 47a is provided on the side surface of the base layer 481 so as not to get wet and spread, the arrangement on the other part (for example, the lower surface of the base layer 481 or the central portion of the side surface of the base layer 481) may be performed. It may be omitted. As a result, the above effects can be exhibited, and the weight of the second vibration system can be reduced.
Also according to the second embodiment, the same effects as those of the first embodiment described above can be obtained.

<Third Embodiment>
Next, a third embodiment of the image display device of the present invention will be described.
FIG. 10 is a cross-sectional view of an optical scanner provided in an image display apparatus according to the third embodiment of the present invention.
Hereinafter, the image display apparatus according to the third embodiment will be described focusing on the differences from the above-described embodiment, and description of similar matters will be omitted.
The image display apparatus according to the third embodiment of the present invention is the same as that of the above-described first embodiment except that the configuration of the coating layer provided on the permanent magnet is different. In addition, the same code | symbol is attached | subjected to the structure similar to 1st Embodiment mentioned above.

≪Optical scanner≫
As shown in FIG. 10, in the optical scanner 4B of the present embodiment, the coating layer 482 provided on the permanent magnet 48 is on the side surface of the rib 431 (that is, the surface connected to the surface of the rib 431 facing the permanent magnet 48). It is in contact. That is, the coating layer 482 is inserted into the frame-shaped rib 431, and both end portions thereof are in contact with the inner peripheral surface of the rib 431. By adopting such a configuration, in addition to the self-alignment effect of the metal brazing material 47a as described above, the permanent magnet 48 and the frame body portion 43 can be positioned by the contact between the coating layer 482 and the rib 431. It can be carried out. Therefore, the permanent magnet 48 and the frame body portion 43 can be positioned with higher accuracy.
According to the third embodiment, the same effect as that of the first embodiment described above can be obtained.

2. Manufacturing Method of Optical Scanner Next, a manufacturing method of the above-described optical scanner 4 will be described with reference to FIGS. 11 to 13 are cross-sectional views corresponding to the cross section shown in FIG. In addition, in FIGS. 11 to 13, the first shaft portions 421 and 422 and the second shaft portions 441 and 442 are not shown because of the cross section.
The manufacturing method of the optical scanner 4 includes a step of obtaining a structure (mirror structure) 40, a step of bonding a permanent magnet (magnet structure) 48 to the structure 40, and a step of arranging a coil 491. .

[1] Step of Obtaining Structure 40 First, as shown in FIG. 11A, an SOI substrate 400 is prepared. Next, by patterning the SOI substrate 400 using a photolithography technique and an etching technique, as shown in FIG. 11B, the base 411, the first shaft parts 421 and 422, the frame body part 43, the second The shaft portions 441 and 442 and the support portion 45 are integrally formed.

On the other hand, an SOI substrate 410 is prepared as shown in FIG. Next, the spacer 412 is formed by patterning the SOI substrate 410 using a photolithography technique and an etching technique. Next, for example, an aluminum film is formed on the upper surface of the spacer 412, thereby forming a light reflecting portion 413 on the spacer 412 as shown in FIG.
Next, as shown in FIG. 12A, the structure 40 is obtained by joining the spacer 412 to the base 411.

[2] Joining Step of Permanent Magnet 48 First, as shown in FIG. 12B, the base layer 432 is formed on the lower surface of the rib 431 and on the portion overlapping the permanent magnet 48. The formation of the underlayer is obtained, for example, by forming a metal film on the lower surface of the rib 431 by vapor deposition or the like, and patterning the metal film using a photolithography technique and an etching technique.

Next, as shown in FIG. 12 (c), a permanent magnet 48 that has been subjected to rust prevention plating as an underlayer 481 is prepared in advance. Next, as shown in FIG. 13A, a coating layer 482 is formed on the base layer 481 located on the upper surface of the permanent magnet 48. Next, as shown in FIG. 13B, by patterning using a photolithography technique and an etching technique, both ends of the covering layer 482 are removed, and the base layer 481 is exposed from the removed portion to expose the exposed portion 481a. Form. The exposed portion 481 a has the same shape as the base layer 432.
In addition, when the rust preventive plating as the base layer 481 is not performed on the permanent magnet 48 in advance, the base layer 481 may be formed on the surface of the permanent magnet 48 by vapor deposition or the like.

  Next, by placing a solder ball (or solder paste) made of the metal brazing material 47a on the exposed portion 481a and reflowing the solder ball, as shown in FIG. 13C, the exposed portion 481a is placed on the exposed portion 481a. A bonding layer 47 is provided. Next, the base layer 432 and the exposed portion 481a are faced (opposed), and the structure 40 and the permanent magnet 48 are overlaid so that the bonding layer 47 is positioned therebetween, and in this state, the bonding layer 47 is melted. The melted bonding layer 47 (metal brazing material 47a) spreads on the base layer 432, whereby the permanent magnet 48 is bonded to the rib 431 as shown in FIG. 13 (d). At this time, the permanent magnet 48 is naturally attached to the frame body portion 43 so that the contours of the base layer 432 and the exposed portion 481a coincide with each other due to the self-alignment effect due to the surface tension of the molten bonding layer 47 (metal brazing material 47a). And positioning with high accuracy.

[3] Arrangement Step of Coil 491 Finally, the optical scanner 4 is obtained by arranging the coil 491 so as to face the permanent magnet 48.
According to such a method for manufacturing an optical scanner, it is possible to use rust-proof plating applied in advance as the base layer 481, so that the manufacturing process of the optical scanner can be simplified. Moreover, since the frame body portion 43 and the permanent magnet 48 can be positioned with high accuracy by the self-alignment effect of the metal brazing material 47a, the optical scanner 4 having high vibration characteristics can be easily manufactured.

3. Head-up Display Next, a head-up display that is an example of the image display device of the present invention will be described.
FIG. 14 is a perspective view showing a head-up display to which the image display device of the present invention is applied.

  As shown in FIG. 14, in the head-up display system 200, the image display device 1 is mounted on the dashboard of the automobile so as to constitute a head-up display 210. With this head-up display 210, a predetermined image such as a guidance display to the destination can be displayed on the windshield 220, for example. Note that the head-up display system 200 can be applied not only to automobiles but also to aircrafts, ships, and the like.

4). Next, the head mounted display of the present invention will be described.
FIG. 15 is a perspective view showing the head mounted display of the present invention.
As shown in FIG. 15, the head-mounted display 300 includes a frame 310 that is mounted on the observer's head and the image display device 1 that is mounted on the frame 310. Then, the image display device 1 displays a predetermined image visually recognized by one eye on a display unit (light reflecting layer material) 320 provided in a portion that is originally a lens of the frame 310.

The display unit 320 may be transparent or opaque. When the display unit 320 is transparent, information from the image display device 1 can be used by being superimposed on information from the real world. The display unit 320 only needs to reflect at least part of the incident light, and for example, a half mirror can be used.
Note that the head-mounted display 300 may be provided with two image display devices 1 so that images viewed with both eyes may be displayed on the two display units.

As described above, the optical scanner, the manufacturing method of the optical scanner, the image display device, and the head mounted display of the present invention have been described based on the illustrated embodiment, but the present invention is not limited to this, and the configuration of each part is It can be replaced with any configuration having a similar function. In addition, any other component may be added to the present invention.
Further, in the above-described embodiment, the movable part is composed of the base, the spacer provided on the base, and the light reflecting part provided on the upper surface of the spacer. For example, the spacer may be omitted, and the base portion and a light reflecting portion provided on the upper surface of the base portion may be included.
In the above-described embodiment, the underlayer (first underlayer) is provided directly on the lower surface of the rib. However, even if an intermediate layer is interposed between the lower surface of the rib and the underlayer. Good. Similarly, in the embodiment described above, the coating layer is provided directly on the foundation layer (second foundation layer), but an intermediate layer may be interposed between the foundation layer and the coating layer. .

  DESCRIPTION OF SYMBOLS 1 ... Image display apparatus 10 ... Object 11 ... Mirror 2 ... Drawing light source unit 21B, 21G, 21R ... Laser light source 22R, 22G, 22B ... Collimator lens 23B, 23G, 23R ... Dichroic mirror 4, 4A, 4B ... Optical scanner 40 ... Structure 400, 410 ... SOI substrate 41 ... Movable part 411 ... Base part 412 ... Spacer 413 ... Light reflecting part 421, 422 ... First shaft part 43 …… Frame body portion 431 …… Rib 432 …… Underlayer 441, 442 …… Second shaft portion 45 …… Supporting portion 47 …… Junction layer 47a …… Metal brazing material 48 …… Permanent magnet 481 …… Bottom Base layer 481 ′ …… Underlayer 481a …… Exposed portion 482 …… Coating layer 491 …… Coil 492 …… Voltage applying portion 492a …… First voltage generation Raw part 492b …… Second voltage generation part 492c …… Voltage superposition part 492d …… Adder 493 …… Magnetic core 6 …… Control part 200 …… Head-up display system 210 …… Head-up display 220 …… Front glass 300 …… Head mounted display 310 …… Frame 320 …… Display unit RR, BB, GG …… Laser beam LL …… Drawing laser beam J1 …… First axis J2 …… Second axis T1, T2 …… Period V1 …… First voltage V2 …… Second voltage θ …… Inclination angle

Claims (12)

A movable part including a light reflecting part for reflecting light;
A frame part;
A first shaft portion that connects the movable portion and the frame body portion, and supports the movable portion so as to be swingable about a first axis with respect to the frame body portion;
A second shaft portion that slidably supports the frame body portion around a second axis that intersects the first axis;
Permanently fixed to the frame body through a bonding layer made of a metal brazing material, and a line segment connecting one magnetic pole and the other magnetic pole is inclined with respect to the first axis and the second axis. A magnet,
A first base layer provided on a surface of the frame body portion facing the permanent magnet, and having higher wettability to the metal brazing material than the frame body portion;
A second underlayer provided on a surface of the permanent magnet facing the frame portion, and having higher wettability to the metal brazing material than the permanent magnet;
Provided on the second underlayer so as to expose a portion of the second underlayer facing the first underlayer, and wettability to the metal brazing material more than the second underlayer. And a low coating layer,
The optical scanner according to claim 1, wherein the bonding layer bonds the first underlayer and the exposed portion of the second underlayer exposed from the coating layer.   The optical scanner according to claim 1, wherein the first base layer and the exposed portion have the same planar view shape. The frame body portion has a rib on the surface of the frame body portion facing the permanent magnet,
The optical scanner according to claim 1, wherein the first underlayer is provided on a surface of the rib facing the permanent magnet.   The optical scanner according to claim 3, wherein the coating layer is in contact with a side surface of the rib.   The optical scanner according to claim 1, wherein the metal brazing material is solder.   The optical scanner according to claim 1, wherein the coating layer has a light reflectance lower than that of the second base layer.   The optical scanner according to claim 6, wherein the coating layer is made of chromium.   The optical scanner according to claim 1, wherein the coating layer is made of aluminum or titanium. The second underlayer is further provided on a side surface of the permanent magnet,
The said coating layer is provided on the part connected with the outer edge of the said exposed part of the said 2nd foundation | substrate layer provided on the side surface of the said permanent magnet. The optical scanner described in 1. A movable part having a light reflecting part for reflecting light, a frame body part, the movable part and the frame body part are connected, and the movable part can swing around a first axis with respect to the frame body part. A first shaft portion to be supported, a second shaft portion to swingably support the frame body portion around a second shaft intersecting the first axis, and the bonding layer made of a metal brazing material A method of manufacturing an optical scanner having a permanent magnet fixed to a frame body and having a line segment connecting one magnetic pole and the other magnetic pole inclined with respect to the first axis and the second axis. And
A first lower portion that is provided on the movable portion, the frame body portion, the first shaft portion, the second shaft portion, and the frame body portion and has higher wettability with respect to the metal brazing material than the frame body portion. While obtaining a mirror structure having a formation,
The permanent magnet, the second underlayer having higher wettability with respect to the metal brazing material than the permanent magnet, and a part of the second underlayer are provided to be exposed, than the second underlayer. Obtaining a magnet structure having a coating layer with low wettability to the metal brazing material;
The exposed portion exposed from the covering portion of the first underlayer and the second underlayer faces each other, and the metal brazing material is interposed between the first underlayer and the exposed portion. The mirror structure and the magnet structure are superposed in an arranged state, and the metal brazing material is melted to join the mirror structure and the magnet structure. Manufacturing method of optical scanner. A movable part including a light reflecting part for reflecting light;
A frame part;
A first shaft portion that connects the movable portion and the frame body portion, and supports the movable portion so as to be swingable about a first axis with respect to the frame body portion;
A second shaft portion that slidably supports the frame body portion around a second axis that intersects the first axis;
Permanently fixed to the frame body through a bonding layer made of a metal brazing material, and a line segment connecting one magnetic pole and the other magnetic pole is inclined with respect to the first axis and the second axis. Magnets,
A first base layer provided on a surface of the frame body portion facing the permanent magnet, and having higher wettability to the metal brazing material than the frame body portion;
A second underlayer provided on a surface of the permanent magnet facing the frame portion, and having higher wettability to the metal brazing material than the permanent magnet;
Provided on the second underlayer so as to expose a portion of the second underlayer facing the first underlayer, and wettability to the metal brazing material more than the second underlayer. And a low coating layer,
The image display apparatus, wherein the bonding layer bonds the first underlayer and the exposed portion of the second underlayer exposed from the coating layer. A frame attached to the observer's head;
A head-mounted display comprising an optical scanner provided on the frame,
The optical scanner includes a movable part including a light reflecting part that reflects light;
A frame part;
A first shaft portion that connects the movable portion and the frame body portion, and supports the movable portion so as to be swingable about a first axis with respect to the frame body portion;
A second shaft portion that slidably supports the frame body portion around a second axis that intersects the first axis;
Permanently fixed to the frame body through a bonding layer made of a metal brazing material, and a line segment connecting one magnetic pole and the other magnetic pole is inclined with respect to the first axis and the second axis. Magnets,
A first base layer provided on a surface of the frame body portion facing the permanent magnet, and having higher wettability to the metal brazing material than the frame body portion;
A second underlayer provided on a surface of the permanent magnet facing the frame portion, and having higher wettability to the metal brazing material than the permanent magnet;
Provided on the second underlayer so as to expose a portion of the second underlayer facing the first underlayer, and wettability to the metal brazing material more than the second underlayer. And a low coating layer,
The head-mounted display, wherein the bonding layer bonds the first underlayer and the exposed portion of the second underlayer exposed from the coating layer.

Images