JP2015073039A5 - - Google Patents

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Publication number
JP2015073039A5
JP2015073039A5 JP2013208710A JP2013208710A JP2015073039A5 JP 2015073039 A5 JP2015073039 A5 JP 2015073039A5 JP 2013208710 A JP2013208710 A JP 2013208710A JP 2013208710 A JP2013208710 A JP 2013208710A JP 2015073039 A5 JP2015073039 A5 JP 2015073039A5
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JP
Japan
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semiconductor
semiconductor layer
semiconductor device
oxide layer
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Application number
JP2013208710A
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English (en)
Japanese (ja)
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JP2015073039A (ja
JP6126509B2 (ja
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Priority to JP2013208710A priority Critical patent/JP6126509B2/ja
Priority claimed from JP2013208710A external-priority patent/JP6126509B2/ja
Publication of JP2015073039A publication Critical patent/JP2015073039A/ja
Publication of JP2015073039A5 publication Critical patent/JP2015073039A5/ja
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Publication of JP6126509B2 publication Critical patent/JP6126509B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013208710A 2013-10-04 2013-10-04 半導体装置 Expired - Fee Related JP6126509B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013208710A JP6126509B2 (ja) 2013-10-04 2013-10-04 半導体装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013208710A JP6126509B2 (ja) 2013-10-04 2013-10-04 半導体装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017076453A Division JP6386126B2 (ja) 2017-04-07 2017-04-07 半導体装置

Publications (3)

Publication Number Publication Date
JP2015073039A JP2015073039A (ja) 2015-04-16
JP2015073039A5 true JP2015073039A5 (OSRAM) 2016-08-18
JP6126509B2 JP6126509B2 (ja) 2017-05-10

Family

ID=53015206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013208710A Expired - Fee Related JP6126509B2 (ja) 2013-10-04 2013-10-04 半導体装置

Country Status (1)

Country Link
JP (1) JP6126509B2 (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020115595A1 (ja) * 2018-12-07 2020-06-11 株式会社半導体エネルギー研究所 半導体装置、および半導体装置の作製方法
WO2020217400A1 (ja) * 2019-04-25 2020-10-29 株式会社ソシオネクスト 半導体装置
CN113767466B (zh) 2019-04-25 2024-08-02 株式会社索思未来 半导体装置
KR20250093510A (ko) * 2022-10-21 2025-06-24 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 기억 장치
KR20250107830A (ko) * 2022-11-03 2025-07-14 가부시키가이샤 한도오따이 에네루기 켄큐쇼 반도체 장치 및 기억 장치
WO2025149872A1 (ja) * 2024-01-12 2025-07-17 株式会社半導体エネルギー研究所 半導体装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006128494A (ja) * 2004-10-29 2006-05-18 Toshiba Corp 半導体集積回路装置及びその製造方法
TWI582999B (zh) * 2011-03-25 2017-05-11 半導體能源研究所股份有限公司 場效電晶體及包含該場效電晶體之記憶體與半導體電路
JP6116149B2 (ja) * 2011-08-24 2017-04-19 株式会社半導体エネルギー研究所 半導体装置

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