JP2015066611A5 - - Google Patents
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- JP2015066611A5 JP2015066611A5 JP2013201046A JP2013201046A JP2015066611A5 JP 2015066611 A5 JP2015066611 A5 JP 2015066611A5 JP 2013201046 A JP2013201046 A JP 2013201046A JP 2013201046 A JP2013201046 A JP 2013201046A JP 2015066611 A5 JP2015066611 A5 JP 2015066611A5
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- 238000001514 detection method Methods 0.000 claims 4
- 238000000034 method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Description
本発明の一態様のアクチュエーターの駆動システムは、複数のアクチュエーターと、前記複数のアクチュエーターのそれぞれに駆動電圧を印加する電圧制御部と、を具備し、前記電圧制御部は、前記複数のアクチュエーターを駆動するための複数桁の駆動用変数を、少なくとも1以上の桁単位であり、前記複数のアクチュエーターのそれぞれに対応した個別駆動用変数に分割する変数分割手段と、前記個別駆動用変数に基づいて、前記駆動電圧に対応する駆動電圧信号を発生させる信号発生手段と、を備えたことを特徴とする。
上記の本発明に係るアクチュエーターの駆動システムは、駆動電圧に応じた駆動量で駆動する複数のアクチュエーターと、前記複数のアクチュエーターのそれぞれに前記駆動電圧を印加する電圧制御部と、を具備し、前記電圧制御部は、前記複数のアクチュエーターによる全駆動量に対応した複数桁の駆動用変数を、少なくとも1以上の桁単位であり、前記複数のアクチュエーターのそれぞれに対応した個別駆動用変数に分割する変数分割手段と、前記複数のアクチュエーターのそれぞれに対して設けられ、前記個別駆動用変数に基づいて、前記駆動電圧に対応する駆動電圧信号を発生させる信号発生手段と、を備えたことを特徴とする。
An actuator drive system according to an aspect of the present invention includes a plurality of actuators and a voltage control unit that applies a drive voltage to each of the plurality of actuators, and the voltage control unit drives the plurality of actuators. Based on the individual driving variables, variable dividing means for dividing the plurality of driving variables for at least one digit unit into individual driving variables corresponding to each of the plurality of actuators, Signal generating means for generating a drive voltage signal corresponding to the drive voltage.
The actuator drive system according to the present invention includes a plurality of actuators that are driven with a drive amount corresponding to a drive voltage, and a voltage controller that applies the drive voltage to each of the plurality of actuators, The voltage control unit is a variable that divides a plurality of digits of driving variables corresponding to the total driving amount by the plurality of actuators into individual driving variables corresponding to each of the plurality of actuators in at least one digit unit. Dividing means and signal generating means provided for each of the plurality of actuators and generating a driving voltage signal corresponding to the driving voltage based on the individual driving variables are provided. .
Claims (13)
前記複数のアクチュエーターのそれぞれに駆動電圧を印加する電圧制御部と、
を具備し、
前記電圧制御部は、
前記複数のアクチュエーターを駆動するための複数桁の駆動用変数を、少なくとも1以上の桁単位であり、前記複数のアクチュエーターのそれぞれに対応した個別駆動用変数に分割する変数分割手段と、
前記個別駆動用変数に基づいて、前記駆動電圧に対応する駆動電圧信号を発生させる信号発生手段と、
を備えたことを特徴とするアクチュエーターの駆動システム。 And a double the number of actuators,
A voltage control unit for applying a dynamic voltage drive to each of the plurality of actuators,
Comprising
The voltage controller is
A variable dividing means for dividing a plurality of digits of driving variables for driving the plurality of actuators into at least one digit unit and dividing into individual driving variables corresponding to each of the plurality of actuators;
Based on the previous SL individual driving variables, and signal generating means for generating a drive voltage signal corresponding to the driving voltage,
An actuator drive system characterized by comprising:
前記複数のアクチュエーターは、前記駆動電圧に対する駆動量がそれぞれ異なることを特徴とするアクチュエーターの駆動システム。 The actuator drive system according to claim 1,
Wherein the plurality of actuators, the drive system of the actuator, wherein the momentum wheel drive with respect to the drive voltage is different.
前記個別駆動用変数は、前記駆動用変数の上位の桁から下位の桁に向かうように該駆動用変数を分割したものであり、
前記複数のアクチュエーターは、前記駆動電圧に対する前記駆動量が小さい前記アクチュエーターほど、前記駆動用変数のより下位の桁を含む前記個別駆動用変数が対応づけられたことを特徴とするアクチュエーターの駆動システム。 The actuator drive system according to claim 2,
The pieces by driving variable is obtained by dividing the driving variable toward the lower digit from the upper digit of the driving variable,
The actuator driving system, wherein the plurality of actuators are associated with the individual driving variables including lower digits of the driving variables as the actuator having a smaller driving amount with respect to the driving voltage.
前記電圧制御部は、前記個別駆動用変数に対応する前記駆動電圧の各々が、同じ値であることを特徴とするアクチュエーターの駆動システム。 In the actuator drive system according to claim 2 or 3,
In the voltage control unit, each of the driving voltages corresponding to the individual driving variables has the same value.
前記アクチュエーターは、対向して設けられた一対の駆動電極を備える静電アクチュエーターであり、
前記複数のアクチュエーターは、前記一対の駆動電極の対向領域の面積がそれぞれ異なることを特徴とするアクチュエーターの駆動システム。 The actuator drive system according to claim 4,
The actuator is an electrostatic actuator comprising a pair of drive electrodes provided facing each other,
The actuator driving system, wherein the plurality of actuators have different areas of opposing regions of the pair of driving electrodes.
前記複数のアクチュエーターのうち、前記駆動電圧に対する前記駆動量が最も近い2つのアクチュエーターのうちの一方のアクチュエーターにおいて、対応した前記個別駆動用変数を1ステップ分変化させた際の前記駆動量が、前記駆動電圧に対する前記駆動量が最も近い2つのアクチュエーターのうちの他方のアクチュエーターにおいて、前記1ステップ分変化させた際の前記駆動量と最大駆動電圧印加時の前記駆動量との和となることを特徴とするアクチュエーターの駆動システム。 In the actuator drive system according to any one of claims 2 to 5,
Among the plurality of actuators, in one Position actuator of the two actuators the driving amount closest to said driving voltage, the driving amount at the time of a corresponding said separate driving variable is changed by one step is , the sum of the other in Position actuator, the driving amount and the maximum driving voltage the drive amount during application of when the varying one step of said driving amount closest two actuators for the drive voltage An actuator drive system characterized by comprising:
前記信号発生手段は、デジタル‐アナログ変換器であることを特徴とするアクチュエーターの駆動システム。 In the actuator drive system according to any one of claims 1 to 6,
The actuator driving system, wherein the signal generating means is a digital-analog converter.
前記信号発生手段は、定電圧に対してパルス幅変調処理を施して前記駆動電圧信号を発生させるパルス幅変調器であることを特徴とするアクチュエーターの駆動システム。 In the actuator drive system according to any one of claims 1 to 6,
The actuator driving system according to claim 1, wherein the signal generating means is a pulse width modulator that generates a driving voltage signal by performing a pulse width modulation process on a constant voltage.
前記複数のアクチュエーターの全駆動量を検出する駆動量検出部を備え、
前記電圧制御部は、前記駆動量検出部による前記全駆動量の検出結果に基づいて、前記駆動電圧を制御することを特徴とするアクチュエーターの駆動システム。 In the actuator drive system according to any one of claims 1 to 8,
A drive amount detector for detecting the total drive amount of the plurality of actuators ;
The actuator control system, wherein the voltage controller controls the drive voltage based on a detection result of the total drive amount by the drive amount detector.
前記駆動量検出部は、互いに対向する一対の容量検出電極を備え、前記容量検出電極間の静電容量を検出することを特徴とするアクチュエーターの駆動システム。 The actuator drive system according to claim 9,
The drive amount detection unit includes a pair of capacitance detection electrodes facing each other, and detects a capacitance between the capacitance detection electrodes.
前記一対の反射膜間のギャップの寸法を変更する複数のアクチュエーターと、
前記複数のアクチュエーターのそれぞれに駆動電圧を印加する電圧制御部と、
を具備し、
前記電圧制御部は、
前記複数のアクチュエーターを駆動するための複数桁の駆動用変数を、少なくとも1以上の桁単位であり、前記複数のアクチュエーターのそれぞれに対応した個別駆動用変数に分割する変数分割手段と、
前記個別駆動用変数に基づいて、前記駆動電圧に対応する駆動電圧信号を発生させる信号発生手段と、を備えたことを特徴とする光学モジュール。 A pair of reflective films facing each other;
A plurality of actuators for changing the size of the gap between the pair of reflective films;
A voltage controller for applying a driving voltage to each of the plurality of actuators;
Comprising
The voltage controller is
A variable dividing means for dividing a plurality of digits of driving variables for driving the plurality of actuators into at least one digit unit and dividing into individual driving variables corresponding to each of the plurality of actuators;
Based on the previous SL individual driving variables, the optical module characterized in that and a signal generating means for generating a drive voltage signal corresponding to the driving voltage.
前記複数の個別駆動用変数に基づいて、前記複数のアクチュエーターの各々を駆動する駆動電圧信号を発生させる信号発生手段と、Signal generating means for generating a driving voltage signal for driving each of the plurality of actuators based on the plurality of individual driving variables;
を含み、Including
前記複数の個別駆動用変数は、少なくとも1以上の桁を有することを特徴とするアクチュエーターの駆動システム。The actuator drive system according to claim 1, wherein the plurality of individual drive variables have at least one digit.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013201046A JP2015066611A (en) | 2013-09-27 | 2013-09-27 | Actuator drive system, optical module, and electronic equipment |
CN201410488590.7A CN104516100B (en) | 2013-09-27 | 2014-09-23 | Drive system, optical module and the electronic equipment of actuator |
US14/494,996 US9891424B2 (en) | 2013-09-27 | 2014-09-24 | Actuator drive system, optical module, and electronic apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2013201046A JP2015066611A (en) | 2013-09-27 | 2013-09-27 | Actuator drive system, optical module, and electronic equipment |
Publications (2)
Publication Number | Publication Date |
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JP2015066611A JP2015066611A (en) | 2015-04-13 |
JP2015066611A5 true JP2015066611A5 (en) | 2016-11-04 |
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JP2013201046A Withdrawn JP2015066611A (en) | 2013-09-27 | 2013-09-27 | Actuator drive system, optical module, and electronic equipment |
Country Status (3)
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US (1) | US9891424B2 (en) |
JP (1) | JP2015066611A (en) |
CN (1) | CN104516100B (en) |
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JP6010275B2 (en) * | 2010-03-15 | 2016-10-19 | セイコーエプソン株式会社 | Optical filter and analytical instrument and optical instrument using the same |
CN106289514A (en) * | 2016-07-25 | 2017-01-04 | 四川新健康成生物股份有限公司 | Multi-wavelength beam light-intensity test method, photoelectric switching circuit and biochemistry analyzer |
DE102016214565A1 (en) * | 2016-08-05 | 2018-02-08 | Robert Bosch Gmbh | Interferometer and method of operating the same |
GB201805301D0 (en) * | 2018-03-29 | 2018-05-16 | Adlens Ltd | Improvements In Or Relating To Variable Focusing Power Optical Devices |
JP7110081B2 (en) * | 2018-12-18 | 2022-08-01 | 浜松ホトニクス株式会社 | Control device, optical filter system, control method |
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JPH0766982B2 (en) * | 1989-03-29 | 1995-07-19 | シャープ株式会社 | Wavelength selective light receiving element |
JP3497359B2 (en) * | 1997-10-31 | 2004-02-16 | シャープ株式会社 | Probe control device |
CN100504496C (en) | 2001-01-30 | 2009-06-24 | 松下电器产业株式会社 | Deformable mirror and information apparatus comprising the deformable mirror |
JP2002350749A (en) * | 2001-05-23 | 2002-12-04 | Sony Corp | Drive system for optical modulation element and its driving device, and projection system |
WO2003065103A1 (en) * | 2002-01-29 | 2003-08-07 | Matsushita Electric Industrial Co., Ltd. | Shape-variable mirror and light control device having the shape-variable mirror |
JP4210245B2 (en) * | 2004-07-09 | 2009-01-14 | セイコーエプソン株式会社 | Wavelength tunable filter and detection device |
US7733553B2 (en) * | 2005-09-21 | 2010-06-08 | Hewlett-Packard Development Company, L.P. | Light modulator with tunable optical state |
JP2008197362A (en) * | 2007-02-13 | 2008-08-28 | Olympus Corp | Variable spectroscopic element |
US20100201291A1 (en) * | 2009-01-13 | 2010-08-12 | Cheiky Michael C | Multi-element piezoelectric actuator driver |
JP5589459B2 (en) | 2010-03-15 | 2014-09-17 | セイコーエプソン株式会社 | Optical filter, optical filter module, analytical instrument and optical instrument |
JP6010275B2 (en) * | 2010-03-15 | 2016-10-19 | セイコーエプソン株式会社 | Optical filter and analytical instrument and optical instrument using the same |
JP5724557B2 (en) * | 2011-04-07 | 2015-05-27 | セイコーエプソン株式会社 | Tunable interference filter, optical module, and optical analyzer |
JP5874271B2 (en) | 2011-09-27 | 2016-03-02 | セイコーエプソン株式会社 | Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus |
JP5879910B2 (en) | 2011-10-18 | 2016-03-08 | セイコーエプソン株式会社 | Optical filter, optical filter module, analytical instrument, and optical instrument |
JP5888080B2 (en) | 2012-04-11 | 2016-03-16 | セイコーエプソン株式会社 | Wavelength variable interference filter, optical filter device, optical module, electronic apparatus, and wavelength variable interference filter driving method |
JP6015090B2 (en) | 2012-04-18 | 2016-10-26 | セイコーエプソン株式会社 | Wavelength variable interference filter, optical filter device, optical module, and electronic apparatus |
JP2013238755A (en) | 2012-05-16 | 2013-11-28 | Seiko Epson Corp | Optical module, electronic equipment, food analyzer, spectroscopic camera, and method for driving wavelength variable interference filter |
JP2014059497A (en) | 2012-09-19 | 2014-04-03 | Seiko Epson Corp | Variable wavelength interference filter, optical filter device, optical module, electronic equipment, and mems device |
-
2013
- 2013-09-27 JP JP2013201046A patent/JP2015066611A/en not_active Withdrawn
-
2014
- 2014-09-23 CN CN201410488590.7A patent/CN104516100B/en active Active
- 2014-09-24 US US14/494,996 patent/US9891424B2/en active Active
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