JP2015065298A5 - - Google Patents
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- JP2015065298A5 JP2015065298A5 JP2013198343A JP2013198343A JP2015065298A5 JP 2015065298 A5 JP2015065298 A5 JP 2015065298A5 JP 2013198343 A JP2013198343 A JP 2013198343A JP 2013198343 A JP2013198343 A JP 2013198343A JP 2015065298 A5 JP2015065298 A5 JP 2015065298A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013198343A JP6178683B2 (ja) | 2013-09-25 | 2013-09-25 | 吸着ステージ、貼合装置、および貼合方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013198343A JP6178683B2 (ja) | 2013-09-25 | 2013-09-25 | 吸着ステージ、貼合装置、および貼合方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017137605A Division JP6426797B2 (ja) | 2017-07-14 | 2017-07-14 | 吸着ステージ、貼合装置、および貼合方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2015065298A JP2015065298A (ja) | 2015-04-09 |
JP2015065298A5 true JP2015065298A5 (zh) | 2016-11-10 |
JP6178683B2 JP6178683B2 (ja) | 2017-08-09 |
Family
ID=52832942
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013198343A Active JP6178683B2 (ja) | 2013-09-25 | 2013-09-25 | 吸着ステージ、貼合装置、および貼合方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6178683B2 (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6244188B2 (ja) * | 2013-11-27 | 2017-12-06 | 東京エレクトロン株式会社 | 接合装置、接合方法および接合システム |
TWI559410B (zh) | 2016-05-09 | 2016-11-21 | 以壓差法抑制材料翹曲的方法 | |
JP6426797B2 (ja) * | 2017-07-14 | 2018-11-21 | 芝浦メカトロニクス株式会社 | 吸着ステージ、貼合装置、および貼合方法 |
CN116403929A (zh) * | 2021-12-28 | 2023-07-07 | 拓荆键科(海宁)半导体设备有限公司 | 调整卡盘形变的系统及装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE444526B (sv) * | 1978-01-23 | 1986-04-21 | Western Electric Co | Sett att i lege och plan placera en substratbricka |
JPS61102735A (ja) * | 1984-10-26 | 1986-05-21 | Hitachi Ltd | 基板変形チャック |
JP3940823B2 (ja) * | 1994-12-26 | 2007-07-04 | 株式会社ニコン | ステージ装置及びその制御方法 |
JP2007123560A (ja) * | 2005-10-28 | 2007-05-17 | Toshiba Corp | ウェハチャック及び半導体製造方法 |
JP2010182866A (ja) * | 2009-02-05 | 2010-08-19 | Nikon Corp | 静電吸着保持装置、露光装置、露光方法及びデバイスの製造方法 |
KR20180065033A (ko) * | 2010-12-20 | 2018-06-15 | 에베 그룹 에. 탈너 게엠베하 | 웨이퍼의 장착을 위한 수용 수단 |
JP2013187393A (ja) * | 2012-03-08 | 2013-09-19 | Tokyo Electron Ltd | 貼り合わせ装置及び貼り合わせ方法 |
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2013
- 2013-09-25 JP JP2013198343A patent/JP6178683B2/ja active Active
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