JP2015060497A - Pattern inspection sheet, and pattern inspection method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pattern inspection sheet for performing visual inspection of a pattern without an error in a short time.SOLUTION: In order to perform visual inspection of the size such as the remaining line width of a defective portion of a pattern, a pattern inspection sheet 7 is used, which has scales 71a, 71b, and 71c and a mark 75 for calibration formed on a transparent sheet. When an operator performs visual inspection, the operator displays a pattern on a display unit first, sets the magnification ratio of the display image so that the size of a mark on a display image coincides with the size of the mark 75, and overlaps the scales 71a, 71b, and 71c on the pattern to measure the size of the pattern.

Description

  The present invention relates to a pattern inspection sheet used for visual inspection of patterns such as wiring.

  In the manufacturing process of a transparent electrode film or the like, an appearance inspection of a wiring pattern on the film is performed. In the appearance inspection, the line width or chipping of a pattern is inspected by image processing. If the inspection result is defective, the defective portion may be confirmed again by visual inspection. For example, even if there is a chip in the pattern, there is no problem as a product if a sufficient line width is ensured.

  As an example of the visual inspection of the pattern, Patent Document 1 discloses, in the manufacturing process of a color filter or the like, image data of defective portions of the substrate determined to be defective by the visual inspection is stored in units of work, In another process, a defect classification system has been proposed in which image data is sequentially displayed on a monitor screen and a defect classification input operation is performed.

JP 2006-220528 A

  However, it is difficult to accurately determine the pattern line width, type of defect, etc. in a short time from the image displayed on the screen, and there is a problem that an error is likely to occur in the determination result due to the difference in workers. .

  The present invention has been made in view of the above-described problems, and an object thereof is to provide a pattern inspection sheet or the like for performing a visual inspection of a pattern in a short time without error.

  1st invention for achieving the objective mentioned above is a pattern inspection sheet for carrying out the visual inspection of the said pattern superimposed on the display image of a pattern, Comprising: The scale for size inspection was formed on the transparent sheet This is a pattern inspection sheet.

  According to the first invention, the line width of the pattern and the size of the defect can be measured by overlaying the pattern inspection sheet on the pattern displayed on the screen and comparing the pattern with the scale formed on the pattern inspection sheet. Visual inspection can be easily performed in a short time. Further, the same determination result can be obtained even by different workers.

It is desirable that a mark similar in shape to the mark displayed on the display image is further formed on the transparent sheet.
Thus, calibration can be performed by setting the magnification of the display image so that the size of the mark on the display image matches the size of the mark on the pattern inspection sheet, and accurate inspection can be performed.

The scale preferably includes a plurality of straight lines arranged in parallel at predetermined intervals.
As a result, the line width of the linear portion of the pattern can be quickly measured.

The scale preferably includes a plurality of straight lines having different widths arranged in parallel.
Thereby, it can be quickly determined whether or not the linear portion of the pattern has a predetermined line width.

The scale preferably includes a plurality of pairs of arrows arranged with the tips opposed to each other, with a plurality of the intervals between the tips changed.
Thereby, the size of defects such as chipping and missing patterns can be easily measured.

  A second invention is a pattern inspection method characterized in that a pattern inspection sheet in which a scale for size inspection is formed on a transparent sheet is superimposed on a display image of a pattern, and the pattern is visually inspected.

  Further, on the transparent sheet, a mark similar in shape to the mark displayed on the display image is formed, and the size of the mark on the display image matches the size of the mark on the transparent sheet. It is desirable to set the magnification of the display image.

  According to the present invention, it is possible to provide a pattern inspection sheet or the like for performing a visual inspection of a pattern in a short time without error.

The figure which shows the pattern inspection apparatus 1 The figure which shows the hardware constitutions of the image process part 17. The figure which shows the example of the display image of the display part 36. The figure which shows the pattern inspection sheet 7 Flow chart showing procedure of pattern inspection method The figure which shows the pattern inspection sheet 7a

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[First Embodiment]
As shown in FIG. 1, the pattern inspection sheet 7 according to the first embodiment of the present invention captures a substrate 11 on which a pattern is formed, and in the pattern inspection apparatus 1 that performs an appearance inspection of the pattern based on the image. It is used when visual inspection of patterns is performed.

  The base material 11 is a transparent film for transparent electrodes, for example, and is formed of a resin such as PET (polyethylene terephthalate). A wiring pattern made of a conductive metal thin film or the like is formed on the substrate 11. However, it is not limited to this, and there is no particular limitation as long as it is a base material on which a pattern is formed.

  The pattern inspection apparatus 1 includes an irradiation unit 13, an imaging unit 15, an image processing unit 17, and the like.

  The irradiation unit 13 irradiates the base 11 with inspection light, and for example, a light source such as an LED light source is used.

  The imaging unit 15 performs imaging of the inspection light transmitted through the base material 11 and includes an imaging device such as a CCD (Charge Coupled Device) camera. The imaging unit 15 is connected to the image processing unit 17, and the captured image is transmitted to the image processing unit 17.

  The image processing unit 17 performs image processing on the image captured by the imaging unit 15 and determines whether the pattern is good or bad. For this determination, for example, the pattern line width is calculated and compared with a reference value, or pattern omission or chipping is detected to determine whether the pattern is good or bad. These inspections can be performed using known image processing techniques. Moreover, you may perform quality determination by whether it corresponds with a predetermined template image.

  FIG. 2 is a diagram illustrating a hardware configuration of the image processing unit 17. As shown in FIG. 2, the image processing unit 17 includes, for example, a control unit 31, a storage unit 32, a media input / output unit 33, a communication control unit 34, an input unit 35, a display unit 36, and a peripheral device I / F (interface). The unit 37 and the like can be realized by a computer connected via a bus 38.

The control unit 31 includes a CPU, a ROM, a RAM, and the like.
The CPU calls a program stored in the storage unit 32, ROM, recording medium, or the like to a work memory area on the RAM and executes it, and drives and controls each unit connected via the bus 38 to execute processing. The ROM is a non-volatile memory and permanently holds programs such as a boot program and BIOS, data, and the like. The RAM is a volatile memory, and temporarily stores a program, data, and the like loaded from the storage unit 32, ROM, recording medium, and the like, and includes a work area used by the control unit 31 for performing various processes.

  The storage unit 32 is a hard disk drive or the like, and stores a program executed by the control unit 31, data necessary for program execution, an OS, and the like. These programs and data are read by the control unit 31 as necessary, transferred to the RAM, and executed.

The media input / output unit 33 inputs and outputs data, and includes a media input / output device such as a CD drive or a DVD drive.
The communication control unit 34 includes a communication control device, a communication port, and the like, and performs communication control with other devices via a network.
The input unit 35 includes, for example, a keyboard, a pointing device such as a mouse, and an input device such as a numeric keypad.

The display unit 36 is a display device such as a CRT monitor or a liquid crystal panel.
The peripheral device I / F unit 37 is a port for connecting peripheral devices. The connection form with the peripheral device may be wired or wireless.
The bus 38 is a path that mediates transmission / reception of control signals, data signals, and the like between the respective units.

  In the present embodiment, the image processing unit 17 displays on the display unit 36 the location of the pattern determined to be defective by the above determination. FIG. 3 is a diagram showing this display image.

  As shown in the figure, the display unit 36 displays a defective portion of the pattern 51 and a calibration mark 53.

  The example in the figure shows a case where a defect such as a chipped portion 51a (a portion where the pattern is cut from the side of the pattern 51) or a gap 51b (a portion where no pattern is formed in the pattern 51) occurs as a defective portion. ing. Even when such a defect 51a or the like has occurred, if a sufficient remaining line width is secured in the pattern 51, there may be no problem as a product (not a defective product).

  The mark 53 is a figure for setting the enlargement ratio of the image, and has a rectangular shape in the illustrated example. The setting of the enlargement ratio will be described later.

  In the present embodiment, the operator displays the image as described above on the display unit 36, superimposes the pattern inspection sheet 7 on the display image, and performs a visual inspection of the pattern 51.

  FIG. 4 is a diagram showing an example of the pattern inspection sheet 7. The pattern inspection sheet 7 is obtained by forming scales 71a, 71b, 71c, a determination standard 73, and a calibration mark 75 on a transparent sheet by printing or the like.

  The scales 71a, 71b, 71c are scales for size inspection of the pattern 51.

  The scale 71a is composed of a plurality of straight lines arranged in parallel at a predetermined interval, and the size of the interval on the sheet and the actual size of the pattern 51 and the like are associated with each other as 6 μm per interval. For example, it is possible to quickly measure the line width of the linear portion of the pattern 51 by superimposing the longitudinal direction of the straight line of the scale 71 a along the longitudinal direction of the linear portion of the pattern 51.

  The scale 71b is formed by forming a plurality of pairs of arrows arranged such that the tips are opposed to each other, and the intervals between the tips of the arrows are different in each set. As described above, the size of the interval on the sheet is associated with the actual size. For example, by arranging the tips of a pair of arrows along the vertical direction and the horizontal direction of the chip 51a and the gap 51b of the pattern 51, the size of the chip 51a and the gap 51b can be easily measured by the scale 71b.

  The scale 71c is a parallel arrangement of a plurality of straight lines having different widths. As described above, the width of the straight line on the sheet is associated with the actual size of the pattern 51 and the like. For example, by arranging the longitudinal direction of the straight line of the scale 71c along the longitudinal direction of the linear part of the pattern 51, it can be quickly determined whether or not the linear part of the pattern 51 has a predetermined line width.

  The determination standard 73 includes an item “reference width” that defines a line width range of the pattern 51 and an item “determination” that defines a defect type according to the reference width. Accordingly, it is possible to quickly determine the type of defect such as chipping, missing, or disconnection.

  4, for example, if the remaining line width of the defective portion pattern 51 is equal to or greater than a predetermined width C (μm), it can be determined that the defect does not have to be regarded as “OK”. Moreover, when the remaining line width of a defective location is less than predetermined width A (micrometer), it can determine with a disconnection.

  The mark 75 calibrates the enlargement ratio of the display image on the display unit 36 so that the pattern inspection sheet 7 can perform size inspection, and has a shape similar to the mark 53.

  That is, by setting the enlargement ratio of the display image so that the mark 53 displayed on the display unit 36 has the same size as the mark 75, the ratio between the size on the image such as the pattern 51 and the actual size can be increased. The ratio between the size on the sheet and the actual size of the pattern 51, such as the distance between the straight lines of the scale 71a, the distance between the tips of the arrows of the scale 71b, the line width of the scale 71c, and the like. Therefore, the size inspection by the pattern inspection sheet 7 can be suitably performed.

  Next, the procedure of the pattern inspection method using the pattern inspection sheet 7 will be described with reference to FIG. FIG. 5 is a flowchart showing the procedure of the pattern inspection method.

  In the present embodiment, first, the control unit 31 of the image processing unit 17 displays the image of the pattern 51 on the display unit 36 as described with reference to FIG. 3 (S1). Here, it is assumed that an image of a portion determined to be defective by the image processing unit 17 is displayed.

  The operator overlays the pattern inspection sheet 7 on the display image, sets the magnification of the display image so that the size of the mark 53 matches the mark 75 of the pattern inspection sheet 7, and performs calibration (S2).

  Then, any of the scales 71a to 71c of the pattern inspection sheet 7 is superimposed on the pattern 51 of the display image, and the line width of the pattern 51, the remaining line width of the defective portion, the size of the chipping 51a and the missing 51b, etc. are measured as described above. The pattern is visually inspected (S3).

  For example, the operator measures the size of the remaining line width of the defective portion where the defect such as the chip 51a or the gap 51b is generated in the pattern 51, and refers to the determination standard 73 to “break” or “chip” according to the line width. ”Etc. are recorded. The inspection result can be recorded, for example, by selecting a defect displayed on the display unit 36 and inputting the inspection result such as “disconnection” or “chip” via the input unit 35 and storing it in the storage unit 32 or the like. it can.

  As described above, in the present embodiment, the pattern inspection sheet 7 is overlaid on the pattern 51 displayed on the screen, and the scales 71a to 71b and the pattern 51 are compared with each other. Size can be measured and visual inspection can be easily performed in a short time. Further, the same determination result can be obtained even by different workers.

  Further, since the pattern inspection sheet 7 is formed with a mark 75 similar in shape to the mark 53 displayed on the display image, the size of the mark 53 on the display image is equal to the size of the mark 75 on the pattern inspection sheet 7. Calibration can be performed by setting the enlargement ratio of the display image so as to match, and accurate inspection can be performed.

  Further, since a plurality of straight lines are arranged in parallel at a predetermined interval on the scale 71a, the line width of the straight line portion of the pattern 51 can be quickly measured.

  Further, in the scale 71b, a plurality of pairs of arrows arranged with their tips opposed to each other are formed at different intervals between the tips, thereby reducing the size of defects such as the chip 51a and the gap 51b of the pattern 51. Easy to measure.

  In addition, since a plurality of straight lines having different widths are arranged in parallel on the scale 71c, it can be quickly determined whether or not the straight line portion of the pattern 51 has a predetermined line width.

  In the present embodiment, the example in which the defective portion of the pattern 51 is displayed on the display unit 36 after the quality of the pattern 51 is determined by image processing or the like is shown, but the present invention is not limited to this. For example, the visual inspection can be performed by directly displaying the image of the base material 11 captured by the imaging unit 15 on the display unit 36.

  Furthermore, in this embodiment, the example which images the base material 11 with a transmission optical system as shown in FIG. 1 etc. was shown, However, it is not restricted to this, What is necessary is just to image | photograph the pattern of the base material 11. FIG. For example, the base material 11 may be imaged by a reflection optical system that receives reflected light from the base material 11 by the imaging unit 15 and performs imaging.

[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to FIG. The second embodiment will be described with respect to differences from the first embodiment, and description of similar points will be omitted.

  FIG. 6 is a diagram showing a pattern inspection sheet 7a according to the second embodiment. This pattern inspection sheet 7a differs from the pattern inspection sheet 7 in that the scales 71b and 71c and the determination reference 73 are omitted.

  Thus, the pattern inspection sheet may be provided with a scale corresponding to the contents of the visual inspection, and it is not necessary to provide all the scales 71a, 71b, 71c and the determination standard 73. Further, the shape of the scale is not limited to that described above, and various shapes can be adopted. When the number of scales is reduced as shown in FIG. 6, the pattern inspection sheet 7a can be reduced in size and can be easily carried and moved on the screen.

  As mentioned above, although embodiment of this invention was described referring an accompanying drawing, the technical scope of this invention is not influenced by embodiment mentioned above. It is obvious for those skilled in the art that various modifications or modifications can be conceived within the scope of the technical idea described in the claims. It is understood that it belongs.

7, 7a ... Pattern inspection sheet 51 ... Pattern 53, 75 ... Mark 71a, 71b, 71c ... Scale 73 ... Determination criteria

Claims (7)

A pattern inspection sheet for performing a visual inspection of the pattern superimposed on a display image of a pattern,
A pattern inspection sheet, wherein a scale for size inspection is formed on a transparent sheet.   The pattern inspection sheet according to claim 1, wherein a mark similar in shape to the mark displayed on the display image is further formed on the transparent sheet.   The pattern inspection sheet according to claim 1, wherein the scale includes a plurality of straight lines arranged in parallel at predetermined intervals.   The pattern inspection sheet according to any one of claims 1 to 3, wherein the scale includes a plurality of straight lines having different widths arranged in parallel.   5. The scale according to claim 1, wherein the scale includes a plurality of pairs of arrows arranged with the tips opposed to each other, with a plurality of the intervals between the tips changed. Pattern inspection sheet.   A pattern inspection method, wherein a pattern inspection sheet in which a scale for size inspection is formed on a transparent sheet is superimposed on a display image of a pattern, and the pattern is visually inspected. On the transparent sheet, a mark similar in shape to the mark displayed on the display image is further formed,
The pattern inspection method according to claim 6, wherein an enlargement ratio of the display image is set so that a size of the mark on the display image matches a size of the mark on the transparent sheet.

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