JP2006236192A - Quality control system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a quality control system capable of performing quick improvement by reducing a load to cause investigation, when using a control chart for detecting abnormal state in a process, beforehand or at an early stage, and to provide a quality control system capable of grasping the type of failure that does not appear in the control chart and the inclination of a failure occurrence position or the like. <P>SOLUTION: In the quality control system, provided with a means for preparing a control chart for determining whether a process is in a stable state, on the basis of quality data and device data obtained from a manufacturing process, product imaged data obtained from the manufacturing process, failure position information or the like are displayed as visual information, together with the control chart. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a quality control system for managing a production line using a control chart or the like.

  The control chart used in the production line is for checking whether the production process is in a stable state or checking whether the process is in a stable state. It is a graph used for process management based on a statistically determined limit line, and is one of statistical methods corresponding to sampling inspection. In other words, in order to keep the process in a stable state, control limits are set above and below the control value to distinguish whether the control state is inside and stable, or whether it is outside the line and abnormal. Used for.

  The most basic, most practical and frequently used control limit uses a value that is three times the standard deviation (3 sigma). If the variation distribution is a normal distribution, 99.7% falls within this control limit.

  The quality control system using this conventional control chart is to create a control chart from time to time from quality data output from inspection machines, measuring machines, etc. Or it discovered and warned early (refer patent document 1).

JP 2003-318075 A

  However, the conventional system has a problem that even if a process / quality abnormality can be detected in advance or at an early stage, it takes time to investigate the cause. As a result, there is a problem that it takes time to take an improvement action and the production line is stopped for a while.

  Further, there is a problem in that the type of failure and the position where the failure occurs cannot be determined only by the control chart, and the tendency in the process that does not appear in the control chart cannot be grasped.

  The object of the present invention is to pursue the cause by providing visual materials for pursuing the cause, such as a defective substrate image, a characteristic value measurement image, a defect occurrence position, etc. when an abnormality is detected in advance or at an early stage. The purpose is to provide a quality control system that reduces the load and time required for the process and enables quick process improvement.

  It is another object of the present invention to provide a quality management system that always visually displays the type of failure and the tendency of the location where the failure has occurred, and makes it possible to grasp the tendency in the process that does not appear in the control chart.

  In order to solve the above-mentioned problems, the invention of claim 1 is characterized in that quality data obtained in a substrate manufacturing process, device data, and captured image data of the substrate are fetched, and whether the process is in a stable state based on the fetched data. A quality management system comprising means for creating a control chart for determining whether or not there is a means for simultaneously displaying the control chart and the captured image data.

  According to a second aspect of the present invention, there is provided the quality management system according to the first aspect, further comprising means for specifying a board from the created control chart and displaying captured image data of the specified board.

  According to a third aspect of the present invention, there is provided the quality management system according to the first or second aspect, wherein the captured image data is captured image data of a defective substrate.

  According to a fourth aspect of the present invention, there is provided the quality control system according to any one of the first to third aspects, wherein the captured image data is captured image data when the characteristic value of the substrate is measured.

  According to a fifth aspect of the present invention, there is provided the quality control system according to any one of the first to fourth aspects, further comprising means for visually displaying a defect occurrence position of the substrate simultaneously with the control chart.

  According to a sixth aspect of the present invention, a board determined to be defective is selected from the control chart, and an image of the board determined to be defective, a defect occurrence position of the board determined to be defective, and the control chart are displayed. The quality control system according to any one of claims 1 to 5 is provided.

  A seventh aspect of the invention provides the quality control system according to any one of the first to sixth aspects, wherein the substrate is an image display element transparent substrate.

  The present invention can determine at an early stage whether or not a process is in a stable state using a control chart, and when it is determined that the process is unstable, a defective substrate image or a captured image at the time of measuring a characteristic value of the substrate By providing captured image data of a board such as data, a defective position of the board, and the like as visual information, it is possible to investigate the cause and implement a quick improvement.

  In addition, it is possible to grasp trends in the process by visually displaying captured image data of the board that is not determined to be defective from the control chart, but that may be related to the control chart. Is possible. Thereby, the loss in a manufacturing process can be reduced.

  Hereinafter, the present invention will be described in detail with reference to the drawings.

  FIG. 1 shows an example of the configuration of a quality control system according to the present invention. A data input capturing unit 1 captures quality data, apparatus data, and captured image data of a substrate from a substrate manufacturing process, and a process based on each captured data. Control chart creation unit 3 for creating a control chart for determining whether or not the board is in a stable state, a board image processing unit 4 for simultaneously displaying the control chart and a captured image of the board, and a display of a defect occurrence position on the board A defect position processing unit 5 for controlling the image, a management chart, a captured image of the defective substrate identified from the management chart, and a control chart for displaying the defect occurrence position in cooperation with each other, a substrate image, and a defect position cooperation processing unit 6 ing. In addition, it has a display 7 for displaying each selected data individually or in cooperation, and a data storage DB 2 for storing each data.

  As a method of acquiring each data from the manufacturing process, a method of acquiring from a sequencer of an inspection machine, a method of acquiring from a file output by the inspection machine, a method of acquiring from a database such as a process management / apparatus management / quality control system, etc. However, it is not limited to this.

  A control chart shown in FIG. 2 is created from the acquired data. In the control chart, management is performed using a median value (CL), a management upper limit value (UCL), and a management lower limit value (LCL). Generally, each value is calculated from an average value and a standard deviation of data.

  When it is determined that the process is abnormal on this control chart, notification of abnormality due to display change such as marker color change, size change, background color change, report by sound such as alarm, report by automatic mail transmission etc. is made Improvement work is performed by operators, technicians, and the like.

  The quality control system of the present invention has a substrate image display function as shown in FIGS. 3 and 4 simultaneously with the control chart.

  The board image shown in FIG. 3 can be obtained from an apparatus in the manufacturing process such as an inspection machine, a correction machine, or a review machine. Examples of the image type include a defective image, a substrate captured image at the time of characteristic measurement, a defective position map image, and the like.

  When a process abnormality occurs, it is possible to grasp what kind of defect has occurred by using this defect image display function, and to quickly select an improvement method.

  When a process abnormality occurs, the substrate captured image at the time of characteristic data measurement shown in FIG. 4 can be used to determine whether the abnormality is due to a measurement error or a characteristic abnormality. If an abnormality is caused by a measurement error, the countermeasure is taken. If the characteristic is abnormal, the process conditions of the manufacturing process are adjusted, and the material is changed.

  The defect occurrence position is displayed based on the quality data obtained from the manufacturing process, and the imposition information as shown in FIG. 5 is displayed at the same time, so that the defect occurrence position can be displayed more clearly. The imposition information includes a method of acquiring from the inspection machine simultaneously with the quality information, a method of acquiring from the master data of the host system such as MES.

  In addition, the display of the defect occurrence position is the display of one defect occurrence position, the display of a plurality of defect occurrence positions in the same substrate, the display of all the defect occurrence positions in the same substrate, the display of the defect occurrence position in a plurality of substrates, the substrate It can be arbitrarily selected from the display of the defect occurrence position in the lot.

  When a plurality of defects are displayed as a map, necessary information can be extracted by switching display presence / absence, display color, etc. according to the type and size of the defect.

  In addition, by displaying the defect occurrence position of the plurality of substrates, it is possible to confirm whether or not the defect is repeatedly generated at the same position.

  In addition, by superimposing defect occurrence positions on a large number of substrates, it is possible to see the tendency of the defect occurrence positions. This is very useful information for investigating the cause of the failure.

The above control chart, substrate defect display, and defect occurrence position display are associated with each other, that is, linked to each other, thereby providing a more effective effect. As a method of cooperation,
a) Defect image of the board specified in the control chart, information on the position where the defect occurred b) Defect image only of the board determined to be abnormal in the process on the control chart, display of the defect occurrence position It is possible to select from the number of defective images, the display of the position where the defect occurred, and the like. For inputting the selection result, an existing input device such as a keyboard or a touch panel can be used as appropriate.

FIG. 6 shows an example of a screen that displays a plurality of information in association with each other. This is an example showing a defect image, a defect occurrence position display of a No. 14 substrate, and a plurality of defect occurrence position displays for a board determined to be defective from the control chart (here, No. 14). FIG. 6 shows an example of display. The present invention is not limited to this, and necessary information can be appropriately selected and displayed.

The figure which shows an example of embodiment of this invention Diagram showing an example of a control chart Figure showing a display example of a defective substrate image The figure which shows the example of the display of the image at the time of the characteristic value measurement of the board The figure which shows the example which displayed the defect occurrence position visually The figure which shows the example which linked and displayed the plural information

Explanation of symbols

1 ・ ・ Data input import part 2 ・ ・ Data storage DB
3 .. Control chart creation unit 4 .. Substrate image processing unit 5 .. Fault location processing unit 6 .. Control chart, board image, fault location cooperation processing unit 7.

Claims (7)

  Means for capturing quality data, device data and captured image data of the substrate obtained in the substrate manufacturing process, and means for creating a control chart for determining whether the process is in a stable state based on the captured data The quality management system further comprises means for simultaneously displaying the control chart and the captured image data.   The quality control system according to claim 1, further comprising means for specifying a board from the created control chart and displaying captured image data of the specified board.   The quality control system according to claim 1, wherein the captured image data is captured image data of a defective substrate.   The quality control system according to claim 1, wherein the captured image data is captured image data when the characteristic value of the substrate is measured.   5. The quality management system according to claim 1, further comprising means for visually displaying a defect occurrence position of the substrate simultaneously with the control chart.   A means for selecting a board determined to be defective from the control chart, and displaying an image of the board determined to be defective, a defect occurrence position of the board determined to be defective, and the control chart; The quality control system according to any one of claims 1 to 5.   The quality control system according to claim 1, wherein the substrate is a transparent substrate for an image display element.

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