JP2015045503A - Cantilever type probe - Google Patents

Cantilever type probe Download PDF

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Publication number
JP2015045503A
JP2015045503A JP2013175148A JP2013175148A JP2015045503A JP 2015045503 A JP2015045503 A JP 2015045503A JP 2013175148 A JP2013175148 A JP 2013175148A JP 2013175148 A JP2013175148 A JP 2013175148A JP 2015045503 A JP2015045503 A JP 2015045503A
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Japan
Prior art keywords
contact
support member
fulcrum
cantilever type
type probe
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JP2013175148A
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Japanese (ja)
Inventor
小林　健一
Kenichi Kobayashi
健一 小林
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TPS KK
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TPS KK
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Priority to JP2013175148A priority Critical patent/JP2015045503A/en
Priority to PCT/JP2014/072363 priority patent/WO2015030028A1/en
Publication of JP2015045503A publication Critical patent/JP2015045503A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06716—Elastic
    • G01R1/06727—Cantilever beams

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a cantilever type probe that is free from shortcomings of conventional such probes and can achieve high-level integration of measurement objects.SOLUTION: A cantilever type probe that comprises a fixed part 12 fixed to a supporting member, a spring part 14 extending for a prescribed length from the fixed part and a contact part 16 that extends in the extending direction of the spring part away from the surface of the supporting member and whose free end comes into contact with a measurement object M. On the contact part, a fulcrum part 18 that comes into contact with the surface of the supporting member is formed; the spring part can be elastically deformed; the contact part and the fulcrum part are more rigid than the base part; when a contact point 16a of the contact part comes into contact with the measurement object and the contact part turns toward the supporting member, the spring part is elastically deformed into a convex shape in a direction away from the supporting member, the supporting member slides on the surface of the supporting member and shifts toward the fixed part, and the positional variation of the contact point in the lengthwise direction due to the turning of the contact part is absorbed.

Description

本発明は、カンチレバー型プローブに関し、特に、被測定物の種々の電気的特性を測定するためのプローブカードに使用されるカンチレバー型プローブに関する。   The present invention relates to a cantilever type probe, and more particularly to a cantilever type probe used in a probe card for measuring various electrical characteristics of an object to be measured.

上記したようなカンチレバー型プローブを備えたプローブカードとしては、特許第４０８７３７８号公報に開示されたものが知られている。この特許公報に開示されたプローブカードは、基板の面上に設けられた片持ち状（カンチレバー型）の第１のプローブと、この第１のプローブと対向するように前記基板の面上に設けられた片持ち状の第２のプローブとを備えており、前記第１、第２のプローブは、弾性変形に応じて一部が当接するようになっており、この当接面に絶縁処理が施されている。   As a probe card provided with the cantilever type probe as described above, one disclosed in Japanese Patent No. 4087378 is known. The probe card disclosed in this patent publication is provided on the surface of the substrate so as to face the first probe in a cantilever shape (cantilever type) provided on the surface of the substrate. And a part of the first and second probes are brought into contact with each other according to elastic deformation, and an insulation treatment is applied to the contact surface. It has been subjected.

このように、カンチレバー型プローブにあっては、プローブの先端（接触端）と被測定物の電極との間の電気的導通を図るために必要な接触圧を得るため、プローブの上記弾性変形が必須である。   As described above, in the cantilever type probe, in order to obtain a contact pressure necessary for electrical connection between the tip (contact end) of the probe and the electrode of the object to be measured, the elastic deformation of the probe is not performed. It is essential.

この弾性変形は、基板に向かっての回動であるため、プローブの先端は円弧を描いて移動し、図８に示したように、これにより該先端がプローブの長手方向に距離Ｄ移動するので、プローブの先端が電極から外れないようにするには、どうしても上記電極の接触面の径（サイズ）を大きくせざるを得ない。したがって、電極のピッチを小さくすることができず、これが、被測定物の更なる高集積化を妨げる一因となっている。   Since this elastic deformation is rotation toward the substrate, the tip of the probe moves while drawing an arc, and as shown in FIG. 8, this tip moves by a distance D in the longitudinal direction of the probe. In order to prevent the tip of the probe from coming off the electrode, the diameter (size) of the contact surface of the electrode must be increased. Therefore, the pitch of the electrodes cannot be reduced, which is one factor that hinders further high integration of objects to be measured.

特許第４０８７３７８号公報Japanese Patent No. 4087378

そこで、本発明は、従来の片持ち状のプローブの上記欠点を解消し、ひいては、被測定物の高集積化を図ることの出来るカンチレバー型プローブを提供することを目的とする。   Accordingly, an object of the present invention is to provide a cantilever type probe that can eliminate the above-mentioned drawbacks of the conventional cantilevered probe, and can achieve high integration of objects to be measured.

前記目的は、以下の（１）〜（５）の構成の本発明のカンチレバー型プローブにより達成される。
（１）
支持部材に固定された固定部、この固定部から所定長伸びるバネ部、およびこのバネ部から該バネ部の延長上であって、前記支持部材の表面から離れる方向に斜めに伸び、自由端が被測定物への接触点を持つ接触部を備えたカンチレバー型プローブであって、前記接触部には、前記支持部材の表面に接触する支点部が形成されており、前記バネ部は弾性変形可能であり、前記接触部および支点部は剛性であり、前記接触部の接触端が被測定物に接触して該接触部が前記支持部材の方向に回動したとき、前記バネ部は、前記支持部材から離れる方向に凸状に弾性変形し、これに伴い前記支点部は、前記支持部材の表面を摺動して前記固定部の方向に移動し、これにより、前記接触部の前記回動による該接触部の接触端の長手方向位置の変動を吸収するようにしたことを特徴とするカンチレバー型プローブ。
（２）
少なくとも前記接触点が導電性材料で形成された前記（１）のカンチレバー型プローブ。
（３）
前記支点部が、前記接触部から前記支持部材に向かって凸状に湾曲した形状である前記（１）または（２）のカンチレバー型プローブ。
（４）
前記固定部、バネ部、接触部および支点部が一枚の導電性金属板により形成されたものであり、前記接触部および支点部が前記一枚の導電性金属板を折り曲げることにより形成されたものである前記（１）〜（３）のいずれかのカンチレバー型プローブ。
（５）
請求項１〜４のいずれかのカンチレバー型プローブを複数本扇形に配列してなるプローブカード。 The object is achieved by the cantilever type probe of the present invention having the following configurations (1) to (5).
(1)
A fixed portion fixed to the support member, a spring portion extending a predetermined length from the fixed portion, and an extension of the spring portion from the spring portion, extending obliquely in a direction away from the surface of the support member, and a free end A cantilever type probe having a contact portion having a contact point with a measured object, wherein the contact portion is formed with a fulcrum portion that contacts the surface of the support member, and the spring portion is elastically deformable. The contact portion and the fulcrum portion are rigid, and when the contact end of the contact portion contacts the object to be measured and the contact portion rotates in the direction of the support member, the spring portion is supported by the support member. The fulcrum portion is elastically deformed in a convex shape in a direction away from the member, and the fulcrum portion slides on the surface of the support member and moves in the direction of the fixing portion, thereby causing the rotation of the contact portion. The variation in the longitudinal position of the contact end of the contact portion is absorbed. Cantilever probe, characterized in that so as to.
(2)
The cantilever type probe according to (1), wherein at least the contact point is formed of a conductive material.
(3)
The cantilever type probe according to (1) or (2), wherein the fulcrum portion has a shape curved convexly from the contact portion toward the support member.
(4)
The fixed portion, the spring portion, the contact portion, and the fulcrum portion are formed by a single conductive metal plate, and the contact portion and the fulcrum portion are formed by bending the single conductive metal plate. The cantilever type probe according to any one of (1) to (3) above.
(5)
A probe card comprising a plurality of cantilever probes according to claim 1 arranged in a fan shape.

本発明のカンチレバー型プローブは、上記した構造であるので、前記接触部の接触端が被測定物に接触して該接触部が前記支持部材の方向に回動したとき、前記バネ部は、前記支持部材から離れる方向に凸状に弾性変形し、これに伴い前記支点部は、前記支持部材の表面を摺動して前記固定部の方向に移動し、これにより、前記接触部の前記回動による該接触部の接触点の長手方向位置の変動を吸収することができるので、これにより、前記接触点の前記長手方向位置がほぼ変化することがない。従って、被測定物の電極の接触面の大きさを極力小さくでき、よって、電極間のピッチを小さくでき、ひいては被測定物の大集積化を図ることができるようになる。   Since the cantilever type probe of the present invention has the above-described structure, when the contact end of the contact portion contacts the object to be measured and the contact portion rotates in the direction of the support member, the spring portion is Elastically deformed in a convex shape in a direction away from the support member, and accordingly, the fulcrum portion slides on the surface of the support member and moves in the direction of the fixed portion, thereby the rotation of the contact portion. Therefore, the variation in the longitudinal position of the contact point of the contact portion can be absorbed, so that the longitudinal position of the contact point does not substantially change. Accordingly, the size of the contact surface of the electrode of the object to be measured can be made as small as possible, and therefore the pitch between the electrodes can be made small, so that the object to be measured can be integrated greatly.

本発明の実施形態のカンチレバー型プローブの正面図である。It is a front view of the cantilever type probe of an embodiment of the present invention. 図１に示したカンチレバー型プローブの底面図である。It is a bottom view of the cantilever type probe shown in FIG. 図１に示したカンチレバー型プローブの斜視図である。It is a perspective view of the cantilever type probe shown in FIG. 図１に示したカンチレバー型プローブを製造するために使用される素材の一例を示す平面図である。It is a top view which shows an example of the raw material used in order to manufacture the cantilever type probe shown in FIG. 図１に示したカンチレバー型プローブの作用を説明するための正面図である。It is a front view for demonstrating the effect | action of the cantilever type probe shown in FIG. 図５に示したカンチレバー型プローブの底面図である。FIG. 6 is a bottom view of the cantilever type probe shown in FIG. 5. 図１に示したカンチレバー型プローブを複数本使用したプローブカードの一例を示す平面図である。It is a top view which shows an example of the probe card which used multiple cantilever type probes shown in FIG. 従来のカンチレバー型プローブの問題点を説明するための説明図である。It is explanatory drawing for demonstrating the problem of the conventional cantilever type | mold probe.

以下、添付図面を参照して、本発明の実施の形態によるカンチレバー型プローブについて説明する。
本発明の実施の形態によるカンチレバー型プローブ１０は、図１に示したように、支持部材Ｓに片持ち状に支持固定されている。このプローブ１０は、ベリリウム銅、タングステン合金等の金属板（弾性体であり、かつ導電性があるもの）をプレス成形等により成形されたものが好ましい。 Hereinafter, a cantilever type probe according to an embodiment of the present invention will be described with reference to the accompanying drawings.
The cantilever type probe 10 according to the embodiment of the present invention is supported and fixed in a cantilever manner on the support member S as shown in FIG. The probe 10 is preferably formed by press-molding a metal plate such as beryllium copper or tungsten alloy (elastic and conductive).

プローブ１０は、支持部材Ｓに固定された固定部１２、この固定部１２から所定長伸びるバネ部１４、およびこのバネ部１４から該バネ部１４の延長上であって、前記支持部材Ｓの表面から離れる方向に斜めに伸び、自由端が被測定物Ｍの電極Ｐへの接触点１６ａを持つ接触部１６を備えている。   The probe 10 includes a fixed portion 12 fixed to the support member S, a spring portion 14 extending from the fixed portion 12 for a predetermined length, and an extension of the spring portion 14 from the spring portion 14, and the surface of the support member S The contact portion 16 has a contact portion 16 that extends obliquely in a direction away from the contact point and has a contact point 16a with a free end of the device under test M contacting the electrode P.

前記接触部１６には、前記支持部材Ｓの表面に支点１８ａで接触する支点部１８が形成されている。この支点部１８は、図４に一点鎖線で示したように、帯状板材の接触部１６となる部分に、烏賊の耳（エンペラ）状の張り出し部１８を設けておき、それを折り曲げて形成したり、あるいは打ち抜きプレスで打ち抜きと同時に折り曲げて形成したものであってよい。この支点部１８の形成により、前記接触部１６は上下方向に剛性を持たせられ、また、支点部１８はそれ自体が上下方向に延びるものであるので、上下方向に剛性である。したがって、前記バネ部１４のみが上下方向に弾性変形可能である。前記支点部１８は、その周辺輪郭が湾曲凸状形であることが好ましい。   The contact portion 16 is formed with a fulcrum portion 18 that contacts the surface of the support member S at a fulcrum 18a. The fulcrum portion 18 is formed by providing a bandage-like overhanging portion 18 at the portion that becomes the contact portion 16 of the band-shaped plate material and bending it as shown by a one-dot chain line in FIG. Alternatively, it may be formed by bending simultaneously with punching with a punching press. Due to the formation of the fulcrum portion 18, the contact portion 16 is given rigidity in the vertical direction, and the fulcrum portion 18 itself extends in the vertical direction, so that it is rigid in the vertical direction. Therefore, only the spring portion 14 can be elastically deformed in the vertical direction. It is preferable that the fulcrum portion 18 has a curved convex shape in its peripheral contour.

なお、本実施の形態では、プローブ１０全体を導電性のものとして説明したが、少なくとも前記接触点１６ａが導電性であればよい。   In the present embodiment, the entire probe 10 is described as being conductive, but it is sufficient that at least the contact point 16a is conductive.

次に、以上説明したプローブ１０を実際に使用したときの作用について図５および図６を参照して説明する。
本プローブ１０を使用して被測定物Ｍを測定する際には、支持部材Ｓを下降して、プローブ１０の接触部１６の接触点１６ａを被測定物Ｍの電極Ｐ表面に接触させ、所定の接触圧を得るため、さらに下降する。すると、接触部１６は、図５に一点鎖線で示した位置から支点１８ａを中心として、支持部材Ｓの方向（図において、上方に回動して図５に実線で示した位置をとる。 Next, the operation when the probe 10 described above is actually used will be described with reference to FIGS.
When measuring the object M to be measured using the probe 10, the support member S is lowered to bring the contact point 16 a of the contact portion 16 of the probe 10 into contact with the surface of the electrode P of the object M to be measured. In order to obtain a contact pressure of Then, the contact portion 16 rotates from the position indicated by the alternate long and short dash line in FIG. 5 about the fulcrum 18a in the direction of the support member S (in the drawing, the position indicated by the solid line in FIG.

このとき、前記バネ部１４は、その弾性を生かして、支持部材Ｓから離れる方向（図において、下方）に凸状に弾性変形する。これにより、前記支点１８ａは、距離ｄだけ固定部１２の方向（図において、左方）に移動する。接触部１６の前記上方への回動に伴い、本来は、接触点１６ａは、図においてプローブ１０長手方向右方に移動するが、本プローブ１０においては、前記したように支点１８ａが距離ｄだけ左方に移動するので、前記の右方への移動が相殺され、前記支点１８ａのプローブ１０の長手方向の位置は変わらない。したがって、被測定物Ｍの電極Ｐの大きさを大きくする必要が無いので、被測定物の高集積化を図ることができる。
前記距離ｄを適切に設定するため、前記バネ部１４の長さを好ましい長さおよび支点の高さ（バネ部に望むような大きさの凸状の湾曲ができるように）に計算により設定しておくことが好ましい。 At this time, the spring portion 14 is elastically deformed in a convex shape in a direction away from the support member S (downward in the drawing) by utilizing its elasticity. As a result, the fulcrum 18a moves in the direction of the fixed portion 12 (leftward in the figure) by the distance d. As the contact portion 16 pivots upward, the contact point 16a originally moves to the right in the longitudinal direction of the probe 10 in the figure, but in the present probe 10, the fulcrum 18a has a distance d as described above. Since it moves to the left, the movement to the right is canceled out, and the position of the fulcrum 18a in the longitudinal direction of the probe 10 does not change. Therefore, since it is not necessary to increase the size of the electrode P of the device under test M, it is possible to achieve high integration of the device under test.
In order to appropriately set the distance d, the length of the spring portion 14 is set to a preferable length and a height of a fulcrum (so that a convex curve having a desired size can be formed in the spring portion). It is preferable to keep it.

なお、以上説明した本発明のプローブ１０は、図７に示したように、複数本扇形に配列してなるプローブカードとすることができる。   The probe 10 of the present invention described above can be a probe card that is arranged in a plurality of sectors as shown in FIG.

１０ カンチレバー型プローブ
１２ 固定部
１４ バネ部
１６ 接触部
１６ａ 接触点
１８ 支点部
１８ａ 支点
Ｍ 被測定物
Ｐ 電極 DESCRIPTION OF SYMBOLS 10 Cantilever type probe 12 Fixed part 14 Spring part 16 Contact part 16a Contact point 18 Support point part 18a Support point M Measured object P Electrode

Claims (5)

支持部材に固定された固定部、この固定部から所定長伸びるバネ部、およびこのバネ部から該バネ部の延長上であって、前記支持部材の表面から離れる方向に斜めに伸び、自由端が被測定物への接触点を持つ接触部を備えたカンチレバー型プローブであって、前記接触部には、前記支持部材の表面に接触する支点部が形成されており、前記バネ部は弾性変形可能であり、前記接触部および支点部は剛性であり、前記接触部の接触端が被測定物に接触して該接触部が前記支持部材の方向に回動したとき、前記バネ部は、前記支持部材から離れる方向に凸状に弾性変形し、これに伴い前記支点部は、前記支持部材の表面を摺動して前記固定部の方向に移動し、これにより、前記接触部の前記回動による該接触部の接触端の長手方向位置の変動を吸収するようにしたことを特徴とするカンチレバー型プローブ。   A fixed portion fixed to the support member, a spring portion extending a predetermined length from the fixed portion, and an extension of the spring portion from the spring portion, extending obliquely in a direction away from the surface of the support member, and a free end A cantilever type probe having a contact portion having a contact point with a measured object, wherein the contact portion is formed with a fulcrum portion that contacts the surface of the support member, and the spring portion is elastically deformable. The contact portion and the fulcrum portion are rigid, and when the contact end of the contact portion contacts the object to be measured and the contact portion rotates in the direction of the support member, the spring portion is supported by the support member. The fulcrum portion is elastically deformed in a convex shape in a direction away from the member, and the fulcrum portion slides on the surface of the support member and moves in the direction of the fixing portion, thereby causing the rotation of the contact portion. The variation in the longitudinal position of the contact end of the contact portion is absorbed. Cantilever probe, characterized in that so as to. 少なくとも前記接触点が導電性材料で形成された請求項１のカンチレバー型プローブ。   The cantilever type probe according to claim 1, wherein at least the contact point is formed of a conductive material. 前記支点部が、前記接触部から前記支持部材に向かって凸状に湾曲した形状である請求項１または２のカンチレバー型プローブ。   3. The cantilever type probe according to claim 1, wherein the fulcrum portion has a shape curved convexly from the contact portion toward the support member. 前記固定部、バネ部、接触部および支点部が一枚の導電性金属板により形成されたものであり、前記接触部および支点部が前記一枚の導電性金属板を折り曲げることにより形成されたものである請求項１〜３のいずれかのカンチレバー型プローブ。   The fixed portion, the spring portion, the contact portion, and the fulcrum portion are formed by a single conductive metal plate, and the contact portion and the fulcrum portion are formed by bending the single conductive metal plate. The cantilever type probe according to any one of claims 1 to 3. 請求項１〜４のいずれかのカンチレバー型プローブを複数本備えるプローブカード。   A probe card comprising a plurality of the cantilever probes according to claim 1.
JP2013175148A 2013-08-27 2013-08-27 Cantilever type probe Pending JP2015045503A (en)

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JP2013175148A JP2015045503A (en) 2013-08-27 2013-08-27 Cantilever type probe
PCT/JP2014/072363 WO2015030028A1 (en) 2013-08-27 2014-08-27 Cantilever-type probe and probe card

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JP3798651B2 (en) * 2001-05-31 2006-07-19 株式会社エンプラス Socket for electrical parts
JP4279039B2 (en) * 2003-04-22 2009-06-17 株式会社エンプラス Socket for electrical parts
JP2011153998A (en) * 2010-01-28 2011-08-11 Nhk Spring Co Ltd Contact probe and probe unit

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