JP2015031904A - Optical module, electronic equipment, and wavelength variable interference filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical module in which an interval between reflection films can be accurately controlled.SOLUTION: The optical module includes: a fixed substrate 14; a movable part 15c disposed opposing to the fixed substrate 14; a first reflection film 17 disposed on the fixed substrate 14 and reflecting a part of incident light and transmitting a part of the incident light; a second reflection film 18 disposed on the movable part 15c to oppose to the first reflection film 17 and reflecting a part of incident light and transmitting a part of the incident light; a first lead wire 23 disposed on the fixed substrate 14; a second lead wire 24 disposed on the movable part 15c and located at a position opposing to the first lead wire 23; a connecting part 15c connecting the fixed substrate 14 and the movable part 15c so as to vary an interval between the first reflection film 17 and the second reflection film 18 and an interval between the first lead wire 23 and the second lead wire 24; and an interval control unit that controls the interval between the first reflection film 17 and the second reflection film 18 by energizing the first lead wire 23 and the second lead wire 24.

Description

  The present invention relates to an optical module, an electronic apparatus, and a wavelength tunable interference filter.

  2. Description of the Related Art Conventionally, there is known a wavelength variable interference filter that has a pair of reflective films facing each other and changes the gap dimension between the reflective films to extract light having a predetermined wavelength from light to be measured.

  Patent Document 1 discloses a variable wavelength interference filter. According to this, the variable wavelength interference filter (optical resonator) includes a first substrate and a second substrate facing each other. The wavelength tunable interference filter includes reflective films that face each other via a gap between the reflective films arranged on each substrate, and electrodes that are arranged on each substrate and face each other. In such a tunable interference filter, an electrostatic force is generated by applying a voltage between the electrodes to deform the diaphragm provided on the second substrate. Thereby, the wavelength variable interference filter adjusts the gap between the reflection films.

Japanese Patent Laid-Open No. 7-243963

  In the wavelength tunable interference filter of Patent Document 1, a voltage is applied between opposing electrodes, and the gap size is changed by electrostatic force. The electrostatic force is inversely proportional to the square of the distance between the electrodes. Therefore, the electrostatic force changes rapidly as the distance between the electrodes changes. As a result, there is a problem that it is difficult to accurately control the interval between the reflective films.

  The present invention has been made to solve the above-described problems, and can be realized as the following forms or application examples.

[Application Example 1]
In the optical module according to this application example, a fixed substrate, a movable portion disposed to face the fixed substrate, and a first portion that is provided on the fixed substrate and reflects a part of incident light and transmits a part thereof. A reflective film, a second reflective film provided on the movable portion, facing the first reflective film, reflecting a part of incident light and transmitting a part thereof, and a first conductor provided on the fixed substrate, A distance between the first reflective film and the second reflective film by energizing the second conductive line provided in the movable portion and located at a location facing the first conductive line, and the first conductive line and the second conductive line. And an interval controller for controlling.

  According to this application example, the optical module includes the fixed substrate and the movable portion. A first reflective film and a first conductor are installed on the fixed substrate. The movable part is provided with a second reflective film and a second conductor. The first reflective film and the second reflective film are arranged to face each other. The 1st conducting wire and the 2nd conducting wire are arranged facing. The distance between the first reflective film and the second reflective film can be changed, and the distance between the first conductive wire and the second conductive wire can also be changed. The interval control unit energizes the first conductor and the second conductor. Thereby, the ampere force acts on the first conductor and the second conductor. And the space | interval of a 1st reflective film and a 2nd reflective film is controlled.

  The first reflection film and the second reflection film reflect a part of incident light and transmit a part thereof. Multiple reflections occur between the first reflective film and the second reflective film, and the light in phase is transmitted and travels in the direction in which the incident light travels. The optical module can transmit light of a predetermined wavelength by the interval controller controlling the interval between the first reflective film and the second reflective film. In the conventional method in which the first reflective film and the second reflective film are controlled using electrostatic force, a pair of electrodes interlocking with the first reflective film and the second reflective film are arranged, respectively, and a voltage is applied between the electrodes. Applied. At this time, the attractive force acting between the electrodes is inversely proportional to the square of the distance between the electrodes. Therefore, the attractive force changes greatly when the distance between the electrodes is changed. On the other hand, the ampere force of this application example is inversely proportional to the distance between the first conductor and the second conductor. Therefore, it is possible to reduce the change in attractive force or repulsive force when changing the distance between the first conducting wire and the second conducting wire than when using electrostatic force. Therefore, the interval control unit can easily and accurately control the interval between the first reflective film and the second reflective film.

[Application Example 2]
In the optical module according to the application example, an interval between the first reflective film and the second reflective film when the first conductive wire and the second conductive wire are not energized is an initial interval, and the first conductive wire and the second conductive wire are used. When the interval when the interval between the first reflection film and the second reflection film is stabilized by energizing the conducting wire is defined as the operation interval, the operation interval is a distance apart from the initial interval. .

  According to this application example, the operation interval is a distance apart from the initial interval. The interval control unit controls the interval between the first reflection film and the second reflection film in a direction away from the initial interval. When the first reflecting film and the second reflecting film are inclined with respect to each other, a place where the distance between the first reflecting film and the second reflecting film is close and a place where they are apart from each other are formed. A place where the distance is close is subjected to a greater repulsive force than a place where the distance is long. Accordingly, a force acts between the first conducting wire and the second conducting wire so that the first reflecting film and the second reflecting film approach parallel. As a result, it is possible to suppress the first reflective film and the second reflective film from being inclined with respect to each other.

[Application Example 3]
In the optical module according to the application example described above, the interval control unit switches the repulsive force and the attractive force between the first conductive wire and the second conductive wire, thereby causing the first reflective film and the second reflective film to act. The interval is shifted to the operation interval.

  According to this application example, the interval control unit shifts the interval between the first reflection film and the second reflection film to the operation interval. When the interval control unit supplies a current corresponding to the operation interval to the first conductor and the second conductor, the interval between the first reflection film and the second reflection film oscillates after exceeding the operation interval. Therefore, first, the interval control unit causes a repulsive force to act on the first conducting wire and the second conducting wire when the interval between the first reflecting film and the second reflecting film is away from the operation interval. Next, when the distance between the first reflection film and the second reflection film approaches the operation interval, the distance control unit applies an attractive force to the first conductor and the second conductor. Thereby, the moving speed of a movable part is reduced. The interval control unit applies a predetermined force when the interval between the first reflecting film and the second reflecting film becomes the operation interval. Thus, since the space | interval control part switches and works a repulsive force and an attractive force between a 1st conducting wire and a 2nd conducting wire, it can suppress the vibration of a movable part. As a result, the interval control unit can shift the interval between the first reflection film and the second reflection film to the operation interval in a short time.

[Application Example 4]
In the optical module according to the application example, the first reflective film is a part of the first conductive wire, and the second reflective film is a part of the second conductive wire.

  According to this application example, the first reflective film is a part of the first conductor. Therefore, the area occupied by the first conductive wire and the first reflective film on the fixed substrate can be made smaller than when the first conductive wire is arranged separately from the first reflective film. Further, the second reflective film is a part of the second conducting wire. Therefore, the area occupied by the second conductive wire and the second reflective film in the movable portion can be made smaller than when the second conductive wire is arranged separately from the second reflective film. As a result, the optical module can be made small.

[Application Example 5]
In the optical module according to the application example described above, the first conducting wire and the second conducting wire are each disposed with a turning point.

  According to this application example, the first conducting wire and the second conducting wire each have a turning point. Therefore, the distance of the line along a 1st conducting wire can be lengthened compared with when a 1st conducting wire does not have a turning point between one end and the other end. Similarly, the distance of the line along a 2nd conducting wire can be lengthened compared with when a 2nd conducting wire does not have a turning point between one end and the other end. Since the ampere force acting on the pair of conductors is proportional to the length of the conductor, the force acting between the first conductor and the second conductor can be increased.

[Application Example 6]
In the optical module according to the application example, each of the first conductor and the second conductor has a plurality of small conductors connected to the interval controller, and the interval controller is energized for each small conductor. Features.

  According to this application example, the first conducting wire and the second conducting wire each have a plurality of small conducting wire portions. And a space | interval control part supplies with electricity for every small conducting wire part. Therefore, when the first reflective film and the second reflective film are inclined with respect to each other, the repulsive force acting on the conductors in the distant locations is weakened, and the repulsive force acting on the nearby conductor wires is increased, thereby increasing the first reflective film and the second reflective film. The film can be brought close to parallel. Accordingly, it is possible to reduce variations in the wavelength of light passing between the first reflective film and the second reflective film with the first reflective film and the second reflective film being parallel.

[Application Example 7]
In the optical module according to the application example, the optical module includes an interval restricting portion that is located between the fixed substrate and the movable portion and restricts an interval between the first reflecting film and the second reflecting film.

  According to this application example, the interval regulating unit regulates the interval between the first reflective film and the second reflective film. Accordingly, it is possible to prevent the first reflective film and the second reflective film from being damaged due to contact between the first reflective film and the second reflective film.

[Application Example 8]
The optical module according to the application example includes a protective film that protects the first reflective film and the second reflective film.

  According to this application example, the protective film is provided on the first reflective film and the second reflective film. Therefore, even if the first reflective film and the second reflective film approach each other, the protective films come into contact with each other to protect the first reflective film and the second reflective film. Accordingly, it is possible to prevent the first reflective film and the second reflective film from being damaged due to contact between the first reflective film and the second reflective film.

[Application Example 9]
In the optical module according to the application example, the first reflective film and the first conducting wire are installed on the same plane.

  According to this application example, the first reflective film and the first conductor are on the same plane. Since the ampere force acts on the first conductor and the second conductor, a force inversely proportional to the distance between the first conductor and the second conductor acts. Therefore, the distance between the first conductor and the second conductor does not need to be particularly close as compared with the distance between the first reflective film and the second reflective film, and can be made substantially the same distance. Accordingly, it is not necessary to provide a step at a place where the first reflective film and the first conductive wire are arranged, so that the fixed substrate can be easily manufactured.

[Application Example 10]
In the optical module according to the application example, the second reflective film and the second conducting wire are installed on the same plane.

  According to this application example, the second reflective film and the second conductor are in the same plane. Since the ampere force acts on the first conductor and the second conductor, a force inversely proportional to the distance between the first conductor and the second conductor acts. Therefore, the distance between the first conductor and the second conductor does not need to be particularly close as compared with the distance between the first reflective film and the second reflective film, and can be made substantially the same distance. Therefore, since there is no need to install a step at a place where the second reflective film and the second conductive wire are arranged, the movable part can be easily manufactured.

[Application Example 11]
In the electronic device according to this application example, a fixed substrate, a movable portion disposed to face the fixed substrate, and a first portion that is provided on the fixed substrate and reflects a part of incident light and transmits a part thereof. A reflective film, a second reflective film provided on the movable portion, facing the first reflective film, reflecting a part of incident light and transmitting a part thereof, and a first conductor provided on the fixed substrate, A distance between the first reflective film and the second reflective film by energizing the second conductive line provided in the movable portion and located at a location facing the first conductive line, and the first conductive line and the second conductive line. An optical module having an interval control unit for controlling the optical module, and a control unit for controlling the optical module.

  According to this application example, the electronic apparatus includes the optical module and a control unit that controls the optical module. The optical module is a module that can separate light of a specific wavelength with high precision because the distance between the first reflective film and the second reflective film can be controlled with high precision. Therefore, the control unit can separate and utilize the light of the wavelength instructed to the optical module with high accuracy.

[Application Example 12]
The wavelength tunable interference filter according to this application example, wherein the fixed substrate, the movable unit disposed to face the fixed substrate, and a part of incident light provided on the fixed substrate are reflected and partially transmitted. A first reflective film; a second reflective film provided on the movable portion; facing the first reflective film; reflecting a part of incident light and transmitting a part thereof; and a first conductor provided on the fixed substrate And a second conducting wire provided in the movable portion and located at a location facing the first conducting wire, and energizing the first conducting wire and the second conducting wire to energize the first reflective film and the first conducting wire. The distance between the two reflective films is varied.

  According to this application example, the variable wavelength interference filter includes the fixed substrate and the movable portion. A first reflective film and a first conductor are installed on the fixed substrate. The movable part is provided with a second reflective film and a second conductor. The first reflective film and the second reflective film are arranged to face each other. The 1st conducting wire and the 2nd conducting wire are arranged facing. The distance between the first reflective film and the second reflective film can be changed, and the distance between the first conductive wire and the second conductive wire can also be changed. The first conducting wire and the second conducting wire are energized, and an ampere force acts on the first conducting wire and the second conducting wire. And the space | interval of a 1st reflective film and a 2nd reflective film is controlled.

  The first reflection film and the second reflection film reflect a part of incident light and transmit a part thereof. Multiple reflections occur between the first reflective film and the second reflective film, and the light in phase is transmitted and travels in the direction in which the incident light travels. By controlling the distance between the first reflective film and the second reflective film, the wavelength variable interference filter can transmit light having a predetermined wavelength. In the conventional method in which the first reflective film and the second reflective film are controlled using electrostatic force, a pair of electrodes interlocking with the first reflective film and the second reflective film are arranged, respectively, and a voltage is applied between the electrodes. Applied. At this time, the attractive force acting between the electrodes is inversely proportional to the square of the distance between the electrodes. Therefore, the attractive force changes greatly when the distance between the electrodes is changed. On the other hand, the ampere force of this application example is inversely proportional to the distance between the first conductor and the second conductor. Therefore, the change in attractive force when changing the distance between the first conductor and the second conductor can be made smaller than when using electrostatic force. Therefore, the wavelength variable interference filter can easily control the interval between the first reflective film and the second reflective film with high accuracy.

1 is a block diagram showing a schematic configuration of a spectroscopic measurement apparatus according to a first embodiment. (A) is a schematic top view which shows the structure of a wavelength variable interference filter, (b) And (c) is a schematic sectional side view which shows the structure of a wavelength variable interference filter. (A) is a schematic plan view which shows the structure of a fixed substrate, (b) is a schematic plan view which shows the structure of a movable substrate. (A) And (b) is a schematic diagram for demonstrating the force which acts on a 1st conducting wire and a 2nd conducting wire. (A) is a figure for demonstrating the inclination of a movable reflecting film, and the dispersion | variation in the wavelength of transmitted light, (b) shows the characteristic of the wavelength variable interference filter of the system using an electrostatic attraction, and the system using an ampere force. FIG. In connection with the second embodiment, (a) is a schematic plan view showing a structure of a first conductor, and (b) is a schematic plan view showing a structure of a second conductor. (A) is a schematic plan view which shows the structure of a 1st conducting wire, (b) is a schematic plan view which shows the structure of a 2nd conducting wire. (A) is a schematic plan view which shows the structure of a 1st conducting wire, (b) is a schematic plan view which shows the structure of a 2nd conducting wire. (A) is a schematic plan view which shows the structure of a 1st reflective film and a 1st conducting wire, (b) is a schematic plan view which shows the structure of a 2nd reflective film and a 2nd conducting wire. (A) And (b) is a schematic sectional side view which shows the structure of a wavelength variable interference filter in connection with 3rd Embodiment. In connection with the fourth embodiment, (a) is a control block diagram showing the configuration of the interval control unit, and (b) is a diagram for explaining a method for controlling the interval between the first reflection film and the second reflection film. Figure. Sectional drawing which shows schematic structure in connection with 5th Embodiment. FIG. 2 is a block diagram illustrating a configuration of a color measuring device. The model front view which shows the structure of a gas detection apparatus. The block diagram which shows the structure of the control system of a gas detection apparatus. The block diagram which shows the structure of a food analyzer. The schematic perspective view which shows the structure of a spectroscopic camera.

In the present embodiment, a characteristic wavelength variable interference filter and examples of various apparatuses using the wavelength variable interference filter will be described with reference to FIGS. Hereinafter, embodiments will be described with reference to the drawings. In addition, each member in each drawing is illustrated with a different scale for each member in order to make the size recognizable on each drawing.
(First embodiment)
The spectroscopic measurement apparatus according to the first embodiment will be described with reference to FIGS. FIG. 1 is a block diagram showing a schematic configuration of the spectroscopic measurement apparatus. The spectroscopic measurement apparatus 1 is an example of an electronic apparatus, and is an apparatus that analyzes a light intensity of each wavelength in measurement target light reflected by the measurement target 2 and measures a spectral spectrum. The spectroscopic measurement device 1 measures the measurement target light reflected by the measurement target 2. For example, in the case of a light emitter such as a liquid crystal panel, the light emitted from the measuring object 2 may be measured.

  As shown in FIG. 1, the spectroscopic measurement apparatus 1 includes an optical module 3 and a control unit 4 that processes a signal output from the optical module 3. The optical module 3 includes a variable wavelength interference filter 5, a detector 6, an IV converter 7, an amplifier 8, an A / D converter 9, and an interval control unit 10. The optical module 3 guides the measurement target light reflected by the measurement target 2 to the wavelength variable interference filter 5 through the incident optical system (not shown), and receives the light transmitted through the wavelength variable interference filter 5 by the detector 6. . The detection signal output from the detector 6 is output to the control unit 4 via the IV converter 7, the amplifier 8, and the A / D converter 9.

  The detector 6 receives (detects) the light transmitted through the wavelength tunable interference filter 5 and outputs a detection signal based on the received light amount to the IV converter 7. The IV converter 7 converts the detection signal input from the detector 6 into a voltage value and outputs the voltage value to the amplifier 8. The amplifier 8 amplifies a voltage (detection voltage) corresponding to the detection signal input from the IV converter 7. The A / D converter 9 converts the detection voltage (analog signal) input from the amplifier 8 into a digital signal and outputs it to the control unit 4.

  The interval control unit 10 includes a voltage control unit 10 a that controls a drive voltage applied to the wavelength variable interference filter 5. The voltage control unit 10 a is a part that applies a drive voltage to the wavelength variable interference filter 5 based on a control instruction signal from the control unit 4.

  The control unit 4 has a configuration in which, for example, a CPU and a memory are combined, and controls the overall operation of the spectroscopic measurement apparatus 1. The control unit 4 includes a wavelength setting unit 11, a light amount acquisition unit 12, and a spectroscopic measurement unit 13. The memory of the control unit 4 stores V-λ data indicating the relationship between the wavelength of light transmitted through the tunable interference filter 5 and the drive voltage applied to the tunable interference filter 5 corresponding to the wavelength. Yes.

  The wavelength setting unit 11 sets a target wavelength of light extracted by the wavelength variable interference filter 5. Based on the V-λ data, a command signal for applying a drive voltage corresponding to the set target wavelength to the wavelength variable interference filter 5 is output to the interval control unit 10. The light quantity acquisition unit 12 acquires the light quantity of the light having the target wavelength that has passed through the wavelength variable interference filter 5 based on the light quantity acquired by the detector 6. The spectroscopic measurement unit 13 measures the spectral characteristics of the light to be measured based on the light amount acquired by the light amount acquisition unit 12.

  Next, the wavelength variable interference filter 5 incorporated in the optical module 3 will be described. FIG. 2A is a schematic plan view showing the configuration of the wavelength variable interference filter. 2B and 2C are schematic side cross-sectional views showing the configuration of the wavelength tunable interference filter, and are cross-sectional views taken along the line A-A 'in FIG. 2B shows the tunable interference filter 5 in the initial state, and FIG. 2C shows the tunable interference filter 5 in the driven state. As shown in FIG. 2, the variable wavelength interference filter 5 includes a fixed substrate 14 and a movable substrate 15. Each of the fixed substrate 14 and the movable substrate 15 has a rectangular plate shape, and the movable substrate 15 is smaller than the fixed substrate 14 in a plan view as viewed from the thickness direction of the substrate. A movable substrate 15 is placed on the fixed substrate 14 in an overlapping manner. The fixed substrate 14 and the movable substrate 15 are each formed of, for example, various glasses such as soda glass, crystalline glass, quartz glass, lead glass, potassium glass, borosilicate glass, non-alkali glass, crystal, and the like. Then, the first bonding portion 14a of the fixed substrate 14 and the second bonding portion 15a of the movable substrate 15 are bonded together by a bonding film 16 made of, for example, a plasma polymerized film containing siloxane as a main component. It is configured.

  A concave portion 14 b is provided on the surface of the fixed substrate 14 facing the movable substrate 15. The recess 14b is located in the center of the fixed substrate 14 and has a cylindrical shape. A first reflective film 17 is provided at the center of the recess 14b. A second reflective film 18 is provided on the surface of the movable substrate 15 that faces the fixed substrate 14. The movable substrate 15 is provided with a cylindrical groove-shaped connecting portion 15b. The center of the movable substrate 15 is a movable portion 15c having the same thickness as the second bonding portion 15a. The connection part 15b connects the second joint part 15a and the movable part 15c. The connecting part 15b is thin and has elasticity. As the connecting portion 15b is bent, the movable portion 15c can be moved in the thickness direction of the movable substrate 15. As a result, the surface of the movable portion 15 c that faces the first reflective film 17 is a movable surface 15 d that moves in the thickness direction of the movable substrate 15. The first reflective film 17 and the second reflective film 18 are disposed to face each other with a gap 21 therebetween. A light interference region is configured by a region where the first reflective film 17 and the second reflective film 18 overlap in a plan view of the fixed substrate 14 and the movable substrate 15 as viewed from the thickness direction. The light incident on the light interference region is multiple-reflected between the first reflective film 17 and the second reflective film 18. The light in phase in the optical interference region is transmitted and travels in the direction in which the incident light travels.

  The variable wavelength interference filter 5 is provided with an actuator 22 that is used to adjust the gap size of the gap 21. The actuator 22 includes a first conductive wire 23, a second conductive wire 24, and the like. The first conducting wire 23 is installed on the fixed substrate 14, and the second conducting wire 24 is installed on the movable substrate 15. The bottom of the recess 14b is a first conductor installation surface 14c on which the first conductor 23 is installed. In addition to the first conductive wire 23, the first reflective film 17 is also provided on the first conductive wire installation surface 14c. The first conductive wire installation surface 14c is a flat surface, and the first conductive wire 23 and the first reflective film 17 are installed on the same surface. The second reflective film 18 and the second conducting wire 24 are installed on the movable surface 15d. The movable surface 15d is a flat surface, and the second reflective film 18 and the second conducting wire 24 are installed on the same surface.

  The first conductive wire 23 is connected to the first terminal 26 via the first wiring 25. The second conducting wire 24 is connected to the second terminal 28 via the second wiring 27. The first terminal 26 and the second terminal 28 are each connected to the interval control unit 10. Thereby, the space | interval control part 10 can energize the 1st conducting wire 23 and the 2nd conducting wire 24. FIG. The gap 21 when the first conducting wire 23 and the second conducting wire 24 are not energized is defined as an initial interval 21a.

  The first conducting wire 23 and the second conducting wire 24 are disposed to face each other with a gap 29 interposed therebetween. The size of the gap 29 is not particularly limited, but is set to about 0.1 μm in the present embodiment, for example. An ampere force acts between the first conductor 23 and the second conductor 24 by passing a predetermined current through the opposing first conductor 23 and second conductor 24. Ampere force refers to force when Lorentz force acts on a pair of conductors. When the currents flowing through the first conductor and the second conductor are in opposite directions, a repulsive force acts between the first conductor 23 and the second conductor 24 due to the force of the ampere. And the connection part 15b expand | extends and the 1st conducting wire 23 and the 2nd conducting wire 24 leave | separate. As a result, the gap 29 and the gap 21 can be enlarged as shown in FIG. The gap 21 when the first conducting wire 23 and the second conducting wire 24 are energized is defined as an operation interval 21b. The operation interval 21b is separated from the initial interval 21a. When the interval controller 10 stops energization of the first conductor 23 and the second conductor 24, the connecting portion 15b contracts and the first conductor and the second conductor approach each other. Therefore, the actuator 22 can be controlled by the interval control unit 10.

  The gap 21 and the gap 29 may be the same size, and one may be larger than the other. The gap 21 may be larger than the gap 29, and the gap 29 may be larger than the gap 21. An arrangement with good responsiveness may be selected.

  In the following description, the planar view seen from the substrate thickness direction of the fixed substrate 14 or the movable substrate 15, that is, the planar view seen from the lamination direction of the fixed substrate 14 and the movable substrate 15, This is referred to as a plan view. In the filter plan view, the center point of the first reflection film 17 and the center point of the second reflection film 18 coincide with each other, and the center point of these reflection films in the plan view is referred to as a filter center point 30. The straight line passing through is called the central axis.

  The space | interval control part 31 is installed between the 2nd conducting wire 24 and the connection part 15b by filter planar view. The space regulating portion 31 is a cylindrical column, and a place where the first wiring 25 and the first terminal 26 are installed is excluded. The space | interval control part 31 is installed in the 1st conducting wire installation surface 14c. The length of the space restricting portion 31 is set so that the Z-direction end of the space restricting portion 31 contacts the movable surface 15d when the first conducting wire 23 and the second conducting wire 24 are not energized. Thereby, even when the movable surface 15d vibrates, it is possible to prevent the first reflective film 17 and the second reflective film 18 from coming into contact with each other and the first reflective film 17 and the second reflective film 18 from being damaged. .

  FIG. 3A is a schematic plan view showing the structure of the fixed substrate. The fixed substrate 14 is formed to have a larger thickness than the movable substrate 15, and the fixed substrate 14 is caused by the force of the actuator 22 or the internal stress of the film member (for example, the first reflective film 17) formed on the fixed substrate 14. There is no 14 deflection. The fixed substrate 14 includes a concave portion 14b and an interval restricting portion 31 formed by, for example, etching.

  The recess 14b is formed in a circular shape centering on the filter center point 30 in the filter plan view. The spacing restricting portion 31 is formed so as to protrude from the first conductor installation surface 14c toward the movable substrate 15 in the filter plan view. The side surface of the recess 14b is set at the same location as the outer periphery of the connection portion 15b in the filter plan view. A slope 14 d extending from the recess 14 b toward the outer peripheral edge of the fixed substrate 14 is provided at a place where the first wiring 25 of the fixed substrate 14 is installed. The slope 14d is formed by adjusting the etching conditions. The first wiring 25 is formed on the inclined surface 14d, so that it can be manufactured without disconnection. A groove may be provided instead of the inclined surface 14d, and the first wiring 25 and the first terminal 26 may be provided in the groove. Thereby, the 1st conducting wire 23, the 1st wiring 25, and the 1st terminal 26 can be arranged on the same plane.

  A first conductor 23 constituting the actuator 22 is provided on the first conductor installation surface 14c. The first conducting wire 23 may be provided directly on the first conducting wire installation surface 14c, or another thin film (layer) may be provided on the first conducting wire installation surface 14c and installed thereon. Specifically, the first conducting wire 23 is formed in a C-shaped arc centered on the filter center point 30, and a C-shaped opening is provided in a part on the X direction side. A first wiring 25 is connected to the C-shaped opening of the first conductive wire 23, and the first wiring 25 is drawn out to the outer peripheral edge of the fixed substrate 14 along the slope 14 d. The first wiring 25 is provided from the first conducting wire 23 to the first terminal 26. The material for forming the first conductive wire 23 and the first wiring 25 may be any material having conductivity, and examples thereof include metals and ITO (Indium Tin Oxide). Further, an insulating film may be formed on the surface of the first conductive wire 23.

The first reflective film 17 and the first conductive wire 23 are installed on the first conductive wire installation surface 14c. The first reflective film 17 may be provided directly on the first conductor installation surface 14c, or another thin film (layer) may be provided on the first conductor installation surface 14c and installed thereon. As the first reflective film 17, for example, a metal film such as Ag or a conductive alloy film such as an Ag alloy can be used. When a metal film such as Ag is used, it is preferable to form a protective film in order to suppress deterioration of Ag. Further, for example, a dielectric multilayer film formed by alternately stacking a high refractive index layer and a low refractive index layer using TiO _{2 as} a high refractive index layer and SiO ₂ as a low refractive index layer may be used. A reflective film in which a multilayer film and a metal film are laminated, a reflective film in which a dielectric single layer film and an alloy film are laminated, or the like may be used.

  Furthermore, an antireflection film may be formed on the light incident surface of the fixed substrate 14 (the surface on which the first reflective film 17 is not provided) at a position facing the first reflective film 17. This antireflection film can be formed by alternately laminating a low refractive index film and a high refractive index film. The antireflection film decreases the reflectance of visible light on the surface of the fixed substrate 14 and increases the transmittance.

  FIG. 3B is a schematic plan view showing the structure of the movable substrate, and is a view of the movable substrate 15 as viewed from the fixed substrate 14 side. As shown in FIG. 3B, in the filter plan view, the movable substrate 15 has a circular movable portion 15c centered on the filter center point 30, and a connection portion 15b that is coaxial with the movable portion 15c and holds the movable portion 15c. And a second joint portion 15a provided outside the connection portion 15b.

  The movable part 15c is formed to have a thickness dimension larger than that of the connection part 15b, and is formed to have the same dimension as the thickness dimension of the movable substrate 15 (second bonding part 15a). The movable portion 15c is formed to have a diameter that is at least larger than the diameter of the outer peripheral edge of the interval restricting portion 31 in the filter plan view. The movable portion 15 c is provided with a second conductive wire 24 and a second reflective film 18 that constitute the actuator 22. The second conducting wire 24 and the second reflective film 18 may be provided directly on the movable surface 15d, or another thin film (layer) may be provided on the movable surface 15d and may be installed thereon. Similar to the fixed substrate 14, an antireflection film may be formed on the surface of the movable portion 15 c opposite to the fixed substrate 14.

  The second conductor 24 is formed in a C-shaped arc centered on the filter center point 30, and a C-shaped opening is provided in a part of the movable substrate 15 on the −X direction side. Further, a second terminal 28 is connected to the second conducting wire 24 via a second wiring 27. A first terminal 26 is provided on the X direction side of the movable surface 15d. The first terminal 26 is arranged so that the first terminal 26 overlaps a part of the first wiring 25 when the first bonding portion 14 a and the second bonding portion 15 a are combined. The material for forming the second conductive wire 24, the second wiring 27, the second terminal 28, and the first terminal 26 is not particularly limited as long as it has conductivity. For example, the material forming the second conductive wire 24, the second wiring 27, the second terminal 28, and the first terminal 26 may be metal, ITO, or the like. And the 1st terminal 26 and the 2nd terminal 28 are connected to the space | interval control part 10 by FPC, a lead wire, etc., for example. Further, an insulating film may be formed on the surface of the second conductive wire 24.

  The region where the first conductor 23 and the second conductor 24 overlap in the filter plan view is symmetric with respect to the X direction and the Y direction passing through the filter center point 30. Therefore, the first conducting wire 23 and the second conducting wire 24 can generate an ampere force in a region that is vertically symmetric in the drawing with the filter center point 30 as the center. For this reason, the movable portion 15c can be displaced with respect to the fixed substrate 14 in a well-balanced manner by suppressing the inclination of the movable portion 15c. The second reflective film 18 is provided at the center of the movable surface 15d of the movable part 15c so as to face the first reflective film 17 with a gap 21 therebetween. A reflective film having the same configuration as that of the first reflective film 17 is used for the second reflective film 18.

  The connection part 15b is a diaphragm surrounding the periphery of the movable part 15c, and is formed with a thickness dimension smaller than that of the movable part 15c. Such a connection portion 15b is more easily bent than the movable portion 15c. The movable portion 15 c can be displaced with respect to the fixed substrate 14 by the ampere force acting between the first conductive wire 23 and the second conductive wire 24. At this time, since the movable portion 15c has a thickness dimension larger than that of the connection portion 15b, the rigidity of the movable portion 15c is larger than that of the connection portion 15b. For this reason, also when the movable part 15c displaces with respect to the fixed board | substrate 14, the shape change of the movable part 15c can be suppressed. In addition, the shape of the connection part 15b is not limited to a diaphragm shape, For example, you may make it the structure provided with the beam-shaped holding | maintenance part arrange | positioned at equiangular intervals centering on the filter center point 30 of the movable part 15c.

  A first terminal 26 is installed in the X direction on the movable surface 15d, and a second terminal 28 is installed in the -X direction. In a state where the fixed substrate 14 and the movable substrate 15 are joined, the first terminal 26 is connected to the first wiring 25. And the 1st terminal 26 and the 2nd terminal 28 are connected to the space | interval control part 10 by FPC (Flexible Printed Circuit), a lead wire, etc., for example.

  FIG. 4A and FIG. 4B are schematic views for explaining the force acting on the first conductor 23 and the second conductor 24. The ampere force acting on the minute element dl of the conducting wire is F, the current through the first conducting wire 23 is I1, the current through the second conducting wire 24 is I2, the magnetic permeability in vacuum is μ0, and the first conducting wire 23 and the second conducting wire. The dimension of the gap 29 between 24 is r, the radius of curvature of the first conductor 23 is R1, and the radius of curvature of the second conductor 24 is R2. When the curvature radii R1, R2 >> gap size r, the ampere force F acting on the microelement dl can be regarded as the same as the ampere force acting between the two parallel currents. Actually, since the gap dimension r is about several hundred nm and the curvature radius is several mm, the relationship of the curvature radii R1, R2 >> gap dimension r is established. The ampere force acting between two parallel currents can be generally expressed by the following formula (1). That is, if a current in the same direction flows in each of the first conductive wire 23 and the second conductive wire 24, an attractive force acts, and if a current in the opposite direction flows, a repulsive force acts.

  F = (μ0 × I1 × I2 / 2πr) dl (1)

  As shown in Expression (1), when currents in opposite directions flow through the first conductive wire 23 and the second conductive wire 24, the gap dimension of the gap 29 between the first conductive wire 23 and the second conductive wire 24 becomes smaller. The repulsive force due to the Lorentz force increases. In FIG. 4A, the right gap 29 in the drawing is referred to as the proximity gap 29a, and the repulsive force 32 acting on the right second conductor 24 in the drawing is referred to as the proximity repulsive force 32a. The gap 29 on the left side in the figure is the separation side gap 29b, and the repulsive force 32 acting on the second conducting wire 24 on the left side in the figure is the separation side repulsive force 32b. When the movable portion 15c is inclined, the proximity gap 29a is smaller than the separation gap 29b, and the proximity repulsion 32a is larger than the separation repulsion 32b. The operation interval 21b is larger than the initial interval 21a, and the left side in the figure is longer than the right side. The force with which the connecting portion 15b presses the movable portion 15c toward the fixed substrate 14 is the same magnitude on both the left and right sides in the figure. Therefore, the second conducting wire 24 on the right side in the drawing can be separated from the first conducting wire 23 than the second conducting wire 24 on the left side in the drawing. The ampere force acts so that the gap dimensions of the gap 29 are uniform.

  As a result, as shown in FIG. 4B, the gap dimensions of the proximity gap 29a and the separation gap 29b become uniform. At this time, the proximity side gap 29a and the separation side gap 29b are equal, so the proximity side repulsive force 32a and the separation side repulsive force 32b are equal. And after the inclination of the movable part 15c disappears and the first reflective film 17 and the second reflective film 18 become parallel, a uniform repulsive force 32 acts on the second conductor 24. Accordingly, the wavelength variable interference filter 5 maintains the parallelism between the first reflective film 17 and the second reflective film 18. At this time, the variation in the operation interval 21b is smaller than when the movable portion 15c is inclined.

  FIG. 5A is a view for explaining the inclination of the movable reflective film and the variation in wavelength of transmitted light. In FIG. 5A, the horizontal axis indicates the wavelength of transmitted light, and the vertical axis indicates the transmittance of the wavelength variable interference filter 5. The first characteristic curve 33 shows the characteristic when the first reflective film 17 and the second reflective film 18 are parallel to each other. The first characteristic curve 33 shows a state where the variation in the operation interval 21b is small. The second characteristic curve 34 shows the characteristic when the second reflective film 18 is inclined with respect to the first reflective film 17. The second characteristic curve 34 shows a state in which the variation in the operation interval 21b is large. Compared to the first characteristic curve 33, the second characteristic curve 34 has a wider wavelength range of the passing light. When the second reflective film 18 is inclined with respect to the first reflective film 17, the width of the gap dimension of the gap 21 is wider than when the second reflective film 18 is parallel. Short wavelength light passes where the gap is small, and long wavelength light passes where the gap is large. By making the first reflective film 17 and the second reflective film 18 parallel, the width of the gap dimension of the gap 21 can be reduced. As shown by the first characteristic curve 33, the wavelength width of the light passing through the wavelength tunable interference filter 5 can be limited to a narrow width.

  FIG. 5B is a diagram illustrating the characteristics of a wavelength variable interference filter using a method using electrostatic attraction and a method using ampere force. In FIG.5 (b), the horizontal axis has shown the voltage applied between opposing electrodes or between conducting wires. In the conventional method using the electrostatic attraction force, electrodes are arranged at opposite positions, and a voltage is applied between the electrodes. In the system of the present embodiment, a voltage is applied between the first conductive wire 23 and the second conductive wire 24 and a current flows. The vertical axis represents the wavelength of light passing through the wavelength variable interference filter. A third characteristic curve 35 shows the characteristic of the wavelength variable interference filter 5 of the type using electrostatic attraction. As shown by the third characteristic curve 35, in the method using electrostatic attraction, when the voltage increases, the wavelength of the light passing through the electrode approaches and decreases. The third characteristic curve 35 is a curve, and the wavelength change rate increases as the voltage increases. Therefore, the shorter the wavelength of light to be transmitted, the more difficult it is to control the wavelength.

  The fourth characteristic curve 36 shows the characteristic of the wavelength variable interference filter 5 of the type that uses the force of Ampere. As shown by the fourth characteristic curve 36, in the method using the ampere force, the wavelength of the light passing through the wavelength tunable interference filter 5 becomes longer when the voltage increases as the first conducting wire 23 and the second conducting wire 24 are separated. In comparison with the third characteristic curve 35, the fourth characteristic curve 36 has a large curvature and is close to a straight line. Therefore, even if the wavelength of light passing therethrough is changed, the difficulty of controlling the wavelength does not change. In the method using electrostatic attraction, the force acting between the electrodes changes in inverse proportion to the square of the distance between the electrodes. On the other hand, in the method using the ampere force, the force acting between the electrodes changes in inverse proportion to the first power of the distance between the electrodes. Therefore, the change in the force acting between the electrodes can be made gentler in the ampere force than in the method using electrostatic attraction. Therefore, the method of using the ampere force by energizing the first conducting wire 23 and the second conducting wire 24 like the wavelength variable interference filter 5 easily controls the distance between the first reflecting film 17 and the second reflecting film 18. be able to.

As described above, this embodiment has the following effects.
(1) According to this embodiment, the first reflection film 17 and the second reflection film 18 reflect a part of incident light and transmit a part thereof. Multiple reflections occur between the first reflective film 17 and the second reflective film 18, and the light in phase is transmitted and travels in the direction in which the incident light travels. The optical module 3 can transmit light of a predetermined wavelength by the interval controller 10 controlling the interval between the first reflective film 17 and the second reflective film 18. In the case of a conventional method in which the distance between the first reflective film 17 and the second reflective film 18 is controlled using electrostatic attraction, the first reflective film 17 and the second reflective film 18 are respectively connected between a pair of electrodes that are interlocked with each other. A voltage is applied. At this time, the attractive force acting between the electrodes is inversely proportional to the square of the distance between the electrodes. Therefore, the attractive force changes greatly when the distance between the electrodes is changed. On the other hand, the variable wavelength interference filter 5 of the present embodiment controls the distance between the first reflective film 17 and the second reflective film 18 by using the force of the ampule. The ampere force is inversely proportional to the distance between the first conductor 23 and the second conductor 24. Therefore, the change in force when changing the distance between the first conductor 23 and the second conductor 24 can be made smaller than when using electrostatic attraction. As a result, the interval controller 10 can easily and accurately control the interval between the first reflective film 17 and the second reflective film 18.

  (2) According to the present embodiment, the operation interval 21b is separated from the initial interval 21a. The space | interval control part 10 controls the space | interval of the 1st reflective film 17 and the 2nd reflective film 18 in the direction which leaves | separates from the initial space | interval 21a. When the first reflective film 17 and the second reflective film 18 are inclined to each other, a place where the distance between the first reflective film 17 and the second reflective film 18 is close and a place where they are apart from each other are formed. A place where the distance is close is subjected to a greater repulsive force than a place where the distance is long. Accordingly, a force acts between the first conducting wire 23 and the second conducting wire 24 so that the first reflecting film 17 and the second reflecting film 18 approach parallel. As a result, it is possible to suppress the first reflective film 17 and the second reflective film 18 from being inclined with respect to each other.

  (3) According to the present embodiment, the gap regulating unit 31 regulates the gap 21. Accordingly, it is possible to prevent the first reflective film 17 and the second reflective film 18 from being damaged due to contact between the first reflective film 17 and the second reflective film 18.

  (4) According to the present embodiment, the first reflective film 17 and the first conductive wire 23 are installed on the same plane. Since the ampere force acts on the first conductor 23 and the second conductor 24, a force inversely proportional to the distance between the first conductor 23 and the second conductor 24 acts. Therefore, the distance between the first conductive wire 23 and the second conductive wire 24 does not need to be particularly close as compared with the distance between the first reflective film 17 and the second reflective film 18 and can be made substantially the same distance. Therefore, the fixed substrate 14 can be easily manufactured because it is not necessary to provide a step in the place where the first reflective film 17 and the first conductive wire 23 are disposed.

  (5) According to the present embodiment, the second reflective film 18 and the second conductor 24 are in the same plane. Since the ampere force acts on the first conductor 23 and the second conductor 24, a force inversely proportional to the distance between the first conductor 23 and the second conductor 24 acts. Therefore, the distance between the first conductive wire 23 and the second conductive wire 24 does not need to be particularly close as compared with the distance between the first reflective film 17 and the second reflective film 18 and can be made substantially the same distance. Therefore, since there is no need to provide a step at the place where the second reflective film 18 and the second conductor 24 are disposed, the movable substrate 15 can be easily manufactured.

(Second Embodiment)
Next, an embodiment of a conducting wire installed in the wavelength tunable interference filter will be described with reference to FIGS. This embodiment is different from the first embodiment in that the shapes of the first conducting wire 23 and the second conducting wire 24 are different. Note that description of the same points as in the first embodiment is omitted.

  FIG. 6A is a schematic plan view showing the structure of the first conducting wire, and FIG. 6B is a schematic plan view showing the structure of the second conducting wire. That is, in the present embodiment, as shown in FIG. 6A, the wavelength variable interference filter 39 has the first conductor 40 installed on the first conductor installation surface 14 c of the fixed substrate 14. The 1st conducting wire 40 consists of the 1st line part 40a, the 2nd line part 40b, and the 3rd line part 40c. Each line has a substantially C-shaped arc shape, and both ends are connected to the first wiring 25. Each line is arranged concentrically around the first reflective film 17. When the first wiring 25 is energized, current flows through the branch lines of the first line portion 40a, the second line portion 40b, and the third line portion 40c.

  As shown in FIG. 6B, the wavelength variable interference filter 39 has the second conductive wire 41 provided on the movable surface 15 d of the movable substrate 15. The 2nd conducting wire 41 consists of the 1st wire part 41a, the 2nd wire part 41b, and the 3rd wire part 41c. Each line has a substantially C-shaped arc shape, and both ends are connected to the second wiring 27. Each line is arranged concentrically around the second reflective film 18. When the second wiring 27 is energized, current flows through the branch lines of the first line portion 41a, the second line portion 41b, and the third line portion 41c.

  The first line portion 40a and the first line portion 41a are arranged to face each other, and a gap 29 is formed between the first line portion 40a and the first line portion 41a. Therefore, when the first wiring 25 and the second wiring 27 are energized, an ampere force acts on the first line portion 40a and the first line portion 41a. Similarly, the second line portion 40b and the second line portion 41b are arranged to face each other, and the gap between the second line portion 40b and the second line portion 41b is a gap 29. The third line portion 40c and the third line portion 41c are arranged to face each other, and the gap between the third line portion 40c and the third line portion 41c is a gap 29. Therefore, when the first wiring 25 and the second wiring 27 are energized, an ampere force acts on the second line part 40b and the second line part 41b, and an ampere acts on the third line part 40c and the third line part 41c. The force of acts. Therefore, the gap 29 can be controlled by energizing the first conductor 40 and the second conductor 41.

  FIG. 7A is a schematic plan view showing the structure of the first conducting wire, and FIG. 7B is a schematic plan view showing the structure of the second conducting wire. That is, in the present embodiment, as shown in FIG. 7A, the variable wavelength interference filter 42 has the first conductive wire 43 installed on the first conductive wire installation surface 14 c of the fixed substrate 14. The 1st conducting wire 43 consists of the 1st wire part 43a, the 2nd wire part 43b, and the 3rd wire part 43c. The shape of each line is a substantially C-shaped arc shape, and is arranged concentrically around the first reflective film 17. One end of the first line portion 43a is connected to the first wiring 25, and the other end is connected to the second line portion 43b at a first turning point 43d as a turning point. One end of the second line portion 43b is connected to the first line portion 43a, and the other end is connected to the third line portion 43c at a second turning point 43e as a turning point. One end of the third line portion 43 c is connected to the second line portion 43 b and the other end is connected to the first wiring 25. Therefore, the first conducting wire 43 is a continuous conducting wire having a first turning point 43d and a second turning point 43e. When the first wiring 25 is energized, current flows through the branch lines of the first line portion 43a, the second line portion 43b, and the third line portion 43c.

  As shown in FIG. 7B, the variable wavelength interference filter 42 has the second conductive wire 44 installed on the movable surface 15 d of the movable substrate 15. The second conducting wire 44 includes a first wire portion 44a, a second wire portion 44b, and a third wire portion 44c. The shape of each line is a substantially C-arc shape and is arranged concentrically around the second reflective film 18. One end of the first line portion 44a is connected to the second wiring 27, and the other end is connected to the second line portion 44b at a first turning point 44d as a turning point. One end of the second line portion 44b is connected to the first line portion 44a, and the other end is connected to the third line portion 44c at a second turning point 44e as a turning point. One end of the third line portion 44 c is connected to the second line portion 44 b and the other end is connected to the second wiring 27. Therefore, the second conducting wire 44 is a continuous conducting wire having a first turning point 44d and a second turning point 44e. When the second wiring 27 is energized, current flows through the branch lines of the first line portion 44a, the second line portion 44b, and the third line portion 44c.

  The first line portion 43a and the first line portion 44a are arranged to face each other, and the gap between the first line portion 43a and the first line portion 44a is a gap 29. Therefore, when the first wiring 25 and the second wiring 27 are energized, an ampere force acts on the first line portion 43a and the first line portion 44a. Similarly, the second line portion 43b and the second line portion 44b are disposed to face each other, and the gap between the second line portion 43b and the second line portion 44b is a gap 29. The third line portion 43c and the third line portion 44c are arranged to face each other, and the gap between the third line portion 43c and the third line portion 44c is a gap 29. Therefore, when the first wiring 25 and the second wiring 27 are energized, an ampere force acts on the second line part 43b and the second line part 44b, and an ampere acts on the third line part 43c and the third line part 44c. The force of acts. Since the ampere force is proportional to the length of the opposing conductors, the force acting between the first conductor and the second conductor can be increased. Therefore, the gap 29 can be controlled with good responsiveness by energizing the first conducting wire 43 and the second conducting wire 44.

  FIG. 8A is a schematic plan view showing the structure of the first conductor, and FIG. 8B is a schematic plan view showing the structure of the second conductor. That is, in the present embodiment, as shown in FIG. 8A, the variable wavelength interference filter 45 has the first conductor 46 installed on the first conductor installation surface 14 c of the fixed substrate 14. The first conductor 46 includes a first conductor portion 46a, a second conductor portion 46b, a third conductor portion 46c, and a fourth conductor portion 46d as a conductor portion. Each small conducting wire portion has an arc shape and is arranged along a concentric circle surrounding the first reflective film 17. Both ends of each small conductor portion are connected to the interval control unit 48 via the wiring 47. The interval controller 48 can energize each small conductor portion independently.

  As shown in FIG. 8B, the wavelength variable interference filter 45 has a second conductive wire 49 provided on the movable surface 15 d of the movable substrate 15. The second conducting wire 49 includes a first small conducting wire portion 49a, a second small conducting wire portion 49b, a third small conducting wire portion 49c, and a fourth small conducting wire portion 49d. Each small conducting wire portion has an arc shape and is disposed along a concentric circle surrounding the second reflective film 18. Both ends of each small conductor portion are connected to the interval control unit 48 via the wiring 47. The interval controller 48 can energize each small conductor portion independently.

  The first small conductor portion 46 a and the first small conductor portion 49 a are arranged to face each other, and the gap between the first small conductor portion 46 a and the first small conductor portion 49 a is a gap 29. Similarly, the second small conductor portion 46 b and the second small conductor portion 49 b are arranged to face each other, and the gap between the second small conductor portion 46 b and the second small conductor portion 49 b is a gap 29. The third small conductor portion 46 c and the third small conductor portion 49 c are arranged to face each other, and the gap between the third small conductor portion 46 c and the third small conductor portion 49 c is a gap 29. The fourth small conductor portion 46d and the fourth small conductor portion 49d are disposed to face each other, and the gap between the fourth small conductor portion 46d and the fourth small conductor portion 49d is a gap 29.

  Therefore, when the first small conductor portion 46a and the first small conductor portion 49a are energized, an ampere force acts on the first small conductor portion 46a and the first small conductor portion 49a. Similarly, when energizing the second small conductor portion 46b and the second small conductor portion 49b, an ampere force acts on the second small conductor portion 46b and the second small conductor portion 49b. When the third small conductor portion 46c and the third small conductor portion 49c are energized, an ampere force acts on the third small conductor portion 46c and the third small conductor portion 49c. When energizing the fourth small conductor portion 46d and the fourth small conductor portion 49d, an ampere force acts on the fourth small conductor portion 46d and the fourth small conductor portion 49d.

  That is, the wavelength variable interference filter 45 includes four pairs of small conductor portions arranged so that the small conductor portions face each other. Each pair of small conductor portions is arranged by dividing the perimeter surrounding the first reflective film 17 and the second reflective film 18 into four equal parts. The space | interval control part 48 can energize each pair of four small conducting wire parts independently, respectively, and can set an electric current amount for every small conducting wire part. Therefore, even when the first reflective film 17 and the second reflective film 18 are tilted with respect to each other, the repulsive force acting on the conductor where the gap 21 is large is weakened and the repulsive force acting on the conductor where the gap 21 is small is increased. The first reflection film and the second reflection film can be made parallel to each other. Therefore, the wavelength variation of the light passing between the first reflective film 17 and the second reflective film 18 can be reduced.

  FIG. 9A is a schematic plan view showing the structures of the first reflective film and the first conductive wire, and FIG. 9B is a schematic plan view showing the structures of the second reflective film and the second conductive wire. That is, in this embodiment, as shown in FIG. 9A, the wavelength variable interference filter 50 includes a fixed substrate 51, and the fixed substrate 51 is provided with a recess 51 b. And the square 1st reflecting film 52 is arranged and installed in the 1st conducting wire installation surface 51c which is the bottom of crevice 51b. The arrangement of the first reflective film 52 is not particularly limited, and in the present embodiment, it is, for example, 3 rows and 3 columns. The nine first reflective films 52 are connected in series by the first conductive wires 53. Therefore, the first reflective film 52 and the first conducting wire 53 are alternately arranged. First conductive wires 53 are disposed at both ends of the arrangement of the first reflective film 52 and the first conductive wires 53, and the first conductive wires 53 at both ends are connected to the interval control unit 10 by wiring 47. That is, the first reflective film 52 is a part of the first conducting wire 53.

  As shown in FIG. 9B, the variable wavelength interference filter 50 is provided with a square second reflection film 54 arranged on the movable surface 15 d of the movable substrate 15. The position of the second reflective film 54 is a position facing the first reflective film 52. The nine second reflective films 54 are connected in series by the second conducting wire 55. Therefore, the second reflective film 54 and the second conducting wire 55 are alternately arranged. Second conductive wires 55 are disposed at both ends of the arrangement of the second reflective film 54 and the second conductive wires 55, and the second conductive wires 55 at both ends are connected to the interval control unit 10 by wiring 47. That is, the second reflective film 54 is a part of the second conducting wire 55.

  The interval controller 10 energizes the first reflective film 52 and the first conducting wire 53 and energizes the second reflecting film 54 and the second conducting wire 55. As a result, an ampere force acts between the conductor made of the first reflective film 52 and the first conductive wire 53 and the conductor made of the second reflective film 54 and the second conductive wire 55. Therefore, the interval controller 10 can control the gap 21 between the first reflective film 52 and the second reflective film 54. The first reflective film 52 is connected to and integrated with the first conductive wire 53. Therefore, the area occupied by the first conductive wire 53 and the first reflective film 52 in the fixed substrate 51 can be made smaller than when the first conductive wire 53 is disposed separately from the first reflective film 52. Similarly, the second reflective film 54 is connected to and integrated with the second conducting wire 55. Therefore, the area occupied by the second reflective film 54 and the second conductive wire 55 in the movable substrate 15 can be made smaller than when the second reflective film 54 is disposed separately from the second conductive wire 55. As a result, the variable wavelength interference filter 50 can be reduced in size. Alternatively, since the force acting between the fixed substrate 51 and the movable substrate 15 can be increased, the responsiveness of the wavelength variable interference filter 50 can be improved. In addition, the difference in gap between the nine reflection films can be reduced. Since the repulsive force acts greatly on the reflective film having a small gap, the gap is increased. Further, since the repulsive force acts on the reflective film having a large gap, the gap is not changed. Therefore, light that interferes and passes between the reflective films has the same wavelength regardless of which reflective film is passed (wavelength variations can be reduced). When there is a detector for receiving light corresponding to each reflective film, a plurality of measurements can be made at one time without variation depending on the location.

(Third embodiment)
Next, an embodiment of the variable wavelength interference filter will be described with reference to FIG. The present embodiment is different from the first embodiment in that a protective film is disposed instead of the interval restricting portion 31. Note that description of the same points as in the first embodiment is omitted.

  FIG. 10A is a schematic side cross-sectional view showing the configuration of the wavelength variable interference filter. In other words, in the present embodiment, as shown in FIG. 10A, the wavelength regulation interference filter 58 omits the interval restricting unit 31. A first protective film 59 as a protective film is laminated on the first reflective film 17, and a second protective film 60 as a protective film is laminated on the second reflective film 18.

  Therefore, even if the first reflective film 17 and the second reflective film 18 approach each other, the first protective film 59 and the second protective film 60 come into contact with each other to protect the first reflective film 17 and the second reflective film 18. Accordingly, it is possible to prevent the first reflective film 17 and the second reflective film 18 from being damaged due to contact between the first reflective film 17 and the second reflective film 18.

  FIG. 10B is a schematic side sectional view showing the configuration of the wavelength variable interference filter. That is, in the present embodiment, as shown in FIG. 10B, the wavelength regulating interference filter 61 omits the interval restricting unit 31. A first protective film 62 is laminated on the first conductive wire 23, and a second protective film 63 is laminated on the second conductive wire 24. The distance between the first protective film 62 and the second protective film 63 is set to be narrower than the distance between the first reflective film 17 and the second reflective film 18.

  Therefore, even if the first reflective film 17 and the second reflective film 18 approach each other, the first protective film 62 and the second protective film 63 come into contact with each other to protect the first reflective film 17 and the second reflective film 18. Accordingly, it is possible to prevent the first reflective film 17 and the second reflective film 18 from being damaged due to contact between the first reflective film 17 and the second reflective film 18.

The first protective film 59, the second protective film 60, the first protective film 62, and the second protective film 63 are only required to be light transmissive and protect the covering reflective film and conductor. Examples of these protective films include IGO (gallium-doped indium oxide), ITO (tin-doped indium oxide), SiO ₂ , Al ₂ O ₃ , Si ₃ N _4, IWO (tungsten-doped indium oxide), ICO (indium cerium oxide). ), InTiO (titanium-added indium oxide), ZnO can be used. In particular, the IGO film is excellent in transparency, and does not significantly affect the optical characteristics of the mirror, and can improve the resistance of the reflective film. Further, since the IGO film is amorphous, it can be easily patterned. In the present embodiment, for example, IGO is used as the material of the first protective film 59, the second protective film 60, the first protective film 62, and the second protective film 63.

(Fourth embodiment)
Next, an embodiment of a variable wavelength interference filter will be described with reference to FIG. The present embodiment is different from the first embodiment in that the interval control unit 10 includes a switch that switches a direction of a current flowing through the first conductor 23 and the second conductor 24. Note that description of the same points as in the first embodiment is omitted.

  FIG. 11A is a control block diagram showing the configuration of the interval control unit. As shown in FIG. 11A, the interval control unit 67 of the wavelength tunable interference filter 66 includes a power supply unit 68. The negative pole of the power supply unit 68 is connected to the first switch 69 via the wiring 47, and the first switch 69 is connected to one end of the first conducting wire 23 via the wiring 47. The first switch 69 opens and closes conduction between the negative pole of the power supply unit 68 and one end of the first conductor 23. The positive pole of the power supply unit 68 is connected to the second switch 70 via the wiring 47, and the second switch 70 is connected to the other end of the first conducting wire 23 via the wiring 47. The second switch 70 opens and closes conduction between the positive pole of the power supply unit 68 and one end of the first conductive wire 23. The interval control unit 67 includes a switch control unit 71, and the first switch 69 and the second switch 70 are controlled by the switch control unit 71. The first switch 69 and the second switch 70 are two-terminal switches and can be switched between open and closed. When the first switch 69 and the second switch 70 are closed, a current flows through the first conductor 23 in a predetermined direction.

  Further, the interval control unit 67 includes a third switch 72 and a fourth switch 73, and the third switch 72 and the fourth switch 73 are controlled by the switch control unit 71. The third switch 72 and the fourth switch 73 are three-terminal switches. The negative and positive poles of the power supply unit 68 are connected to the terminals of the third switch 72 and the fourth switch 73 via the wiring 47. One end of the second conducting wire 24 is connected to the terminal of the third switch 72 via the wiring 47. The other end of the second conducting wire 24 is connected to a terminal of the fourth switch 73 via a wiring 47. The switch control unit 71 can switch between opening and closing and a terminal to be short-circuited. And the switch control part 71 can switch the flow direction of the electric current which flows into the 2nd conducting wire 24. FIG. Therefore, the switch control unit 71 can switch between repulsive force or attractive force between the first conductive wire 23 and the second conductive wire 24.

  FIG. 11B is a diagram for explaining a method for controlling the distance between the first reflective film and the second reflective film. In FIG. 11B, the vertical axis indicates the distance between the first reflective film 17 and the second reflective film 18. The horizontal axis shows the passage of time. The first transition line 74 shows the transition of the gap 21 when the switch control unit 71 controls the direction of the force. A second transition line 75 indicates the transition of the gap 21 when the switch control unit 71 does not control the direction of the force.

  As shown by the first transition line 74, first, the gap 21 between the first reflective film 17 and the second reflective film 18 is an initial interval 21a. In the acceleration step 76, the interval control unit 67 applies a repulsive force between the first conductive wire 23 and the second conductive wire 24. Thereby, the 2nd reflective film 18 is accelerated and the gap 21 becomes large. Next, in the deceleration step 77, the interval control unit 67 applies an attractive force between the first conductive wire 23 and the second conductive wire 24. As a result, the rate of change of the gap 21 decreases, and the gap 21 converges to the target interval 21c. Next, in the maintaining step 78, the interval control unit 67 maintains the repulsive force between the first conducting wire 23 and the second conducting wire 24. The gap 21 is maintained at the target interval 21c.

  As indicated by the second transition line 75, when the distance control unit 67 does not apply an attractive force between the first conductor 23 and the second conductor 24 in the deceleration step 77, the gap 21 exceeds the target interval 21c. And the spring force of the connection part 15b and the repulsive force which generate | occur | produces between the 1st conducting wire 23 and the 2nd conducting wire 24 act, and it carries out a damping vibration. Therefore, it takes time for the vibration to attenuate. On the other hand, when the interval control unit 67 performs control to switch between repulsive force and attractive force, the gap 21 can be set to the target interval 21c in a short time as indicated by the first transition line 74. Therefore, the variable wavelength interference filter 66 can be operated with good responsiveness.

(Fifth embodiment)
(Optical filter device)
Next, an embodiment of the optical filter device will be described. The optical filter device of this embodiment is equipped with the wavelength variable interference filter 5 described in the first embodiment. Note that description of the same points as in the first embodiment is omitted. FIG. 12 is a cross-sectional view showing a schematic configuration of the optical filter device.

  As shown in FIG. 12, the optical filter device 80 as an electronic apparatus includes a wavelength variable interference filter 5 and a casing 81 that houses the wavelength variable interference filter 5. In this embodiment, an example in which the wavelength variable interference filter 5 is mounted is shown as an example, but the wavelength variable interference filter 39, 42, 45, 50, 58, 61, 66 and the like may be used. . The casing 81 includes a base substrate 82, a lid 83, a base side glass substrate 84, and a lid side glass substrate 85.

  The base substrate 82 is composed of, for example, a single layer ceramic substrate. On the base substrate 82, the movable substrate 15 of the variable wavelength interference filter 5 is installed. As the installation of the movable substrate 15 on the base substrate 82, for example, the movable substrate 15 may be disposed through an adhesive layer or the like, and is disposed by being fitted to another fixing member or the like. Also good. In addition, a light passage hole 86 is formed in the base substrate 82 at a location facing a light interference region (a region where the first reflective film 17 and the second reflective film 18 face each other). And the base side glass substrate 84 is joined so that this light passage hole 86 may be covered. As a method for joining the base side glass substrate 84, for example, glass frit joining using a glass frit which is a piece of glass melted at a high temperature and rapidly cooled, adhesion with an epoxy resin, or the like can be used.

  Inner terminal portions 88 are provided on the base inner surface 87 located on the lid 83 side of the base substrate 82 so as to correspond to the first terminals 26 and the second terminals 28 of the wavelength variable interference filter 5. For example, FPC89 (Flexible Printed Circuit) can be used to connect each of the first terminal 26 and the second terminal 28 to the inner terminal portion 88. For example, Ag paste, ACF (Anisotropic Conductive Film), ACP (Anisotropic) can be used. It joins by Conductive Paste etc. In addition, when maintaining the internal space 90 in a vacuum state, it is preferable to use Ag paste with little outgas. Further, the connection is not limited to the FPC 89, and for example, wiring connection by wire bonding or the like may be performed. In addition, the base substrate 82 has through holes 91 corresponding to the positions where the inner terminal portions 88 are provided, and the inner terminal portions 88 are interposed via conductive members filled in the through holes 91. The base substrate 82 is connected to an outer terminal portion 93 provided on the base outer surface 92 opposite to the base inner surface 87. A base joint portion 94 to be joined to the lid 83 is provided on the outer peripheral portion of the base substrate 82.

  The lid 83 includes a lid joint portion 83 a that is joined to the base joint portion 94 of the base substrate 82, and a side wall portion 83 b that continues from the lid joint portion 83 a and rises in a direction away from the base substrate 82. Further, the lid 83 includes a top surface portion 83c that is continuous from the side wall portion 83b and covers the fixed substrate 14 side of the wavelength variable interference filter 5. The lid 83 can be formed of an alloy such as Kovar or a metal, for example. The lid 83 is tightly bonded to the base substrate 82 by bonding the lid bonding portion 83 a and the base bonding portion 94 of the base substrate 82. As this joining method, for example, in addition to laser welding, soldering using silver brazing, sealing using a eutectic alloy layer, welding using low melting glass, glass adhesion, glass frit bonding, epoxy resin Adhesion etc. are mentioned. These bonding methods can be appropriately selected depending on the materials of the base substrate 82 and the lid 83, the bonding environment, and the like.

  The top surface portion 83 c of the lid 83 is parallel to the base substrate 82. In the top surface 83c, a light passage hole 83d is formed in a region facing the optical interference region of the wavelength variable interference filter 5. The lid side glass substrate 85 is bonded so as to cover the light passage hole 83d. As a method for bonding the lid-side glass substrate 85, for example, glass frit bonding, adhesion with an epoxy resin, or the like can be used in the same manner as the bonding of the base-side glass substrate 84.

  In such an optical filter device 80, since the wavelength tunable interference filter 5 is protected by the casing 81, it is possible to prevent changes in the characteristics of the wavelength tunable interference filter 5 due to foreign substances, gases contained in the atmosphere, and the like, and externally. It is possible to prevent damage to the wavelength tunable interference filter 5 due to factors. In addition, since intrusion of charged particles can be prevented, charging of the first terminal 26 and the second terminal 28 can be prevented. Therefore, the generation of Coulomb force due to charging can be suppressed, and the parallelism of the first reflective film 17 and the second reflective film 18 can be more reliably maintained.

  Moreover, when transporting to the assembly line etc. which perform the operation | work which incorporates the wavelength variable interference filter 5 in the optical module 3 or an electronic device, the wavelength variable interference filter 5 protected by the optical filter device 80 can be safely transported. Further, since the optical filter device 80 is provided with the outer terminal portion 93 exposed on the outer peripheral surface of the housing 81, wiring can be easily performed even when the optical filter device 80 is incorporated into the optical module 3 or the electronic device. It becomes.

  The wavelength variable interference filter 5 can easily and accurately control the distance between the first reflective film 17 and the second reflective film 18. Therefore, the optical filter device 80 can disperse light with high accuracy.

  In addition to the spectroscopic measurement apparatus 1 as an electronic apparatus, the above-described wavelength variable interference filters 5, 39, 42, 45, 50, 58, 61, and 66 may be applied to optical modules and electronic apparatuses in various fields. it can. Next, an example in which the wavelength variable interference filter 5 is applied to a color measuring device for measuring color will be described.

(Color measuring device)
FIG. 13 is a block diagram illustrating a configuration of the color measurement device. As shown in FIG. 13, the color measurement device 97 as an electronic device controls the overall operation of the light source device 98 that emits light to the measurement object 2, the color measurement sensor 99 (optical module), and the color measurement device 97. And a control device 100. The color measuring device 97 reflects the light emitted from the light source device 98 by the measurement object 2. The colorimetric sensor 99 receives the reflected light to be inspected, and the colorimetric device 97 analyzes the chromaticity of the light to be inspected, that is, the color of the measurement object 2 based on the detection signal output from the colorimetric sensor 99. taking measurement.

  The light source device 98 includes a light source 101 and a plurality of lenses 102 (only one is shown in the figure), and emits, for example, reference light (for example, white light) to the measurement object 2. The plurality of lenses 102 may include a collimator lens. In this case, the collimator lens converts the reference light emitted from the light source 101 into parallel light, and the light source device 98 emits toward the measurement object 2 from a projection lens (not shown). In the present embodiment, the color measuring device 97 including the light source device 98 is illustrated. However, for example, when the measurement object 2 is a light emitting member such as a liquid crystal panel, the light source device 98 may not be provided.

  The colorimetric sensor 99 includes a wavelength tunable interference filter 5, a detector 6 that receives light transmitted through the wavelength tunable interference filter 5, and an interval control unit 10 that controls the wavelength of light transmitted through the wavelength tunable interference filter 5. Further, the colorimetric sensor 99 includes an incident optical lens (not shown) at a location facing the wavelength variable interference filter 5. The incident optical lens guides the reflected light (inspection target light) reflected by the measurement object 2 into the colorimetric sensor 99. In the colorimetric sensor 99, the wavelength variable interference filter 5 splits the light having a predetermined wavelength out of the inspection target light incident from the incident optical lens, and the detector 6 receives the split light. Instead of the wavelength tunable interference filter 5, the wavelength tunable interference filters 39, 42, 45, 50, 58, 61, 66 and the optical filter device 80 may be provided.

  The control device 100 controls the overall operation of the color measurement device 97. As the control device 100, for example, a computer for exclusive use of color measurement can be used in addition to a general-purpose personal computer or a portable information terminal. The control device 100 includes a light source control unit 103, a colorimetric sensor control unit 104, a colorimetric processing unit 105, and the like. The light source control unit 103 is connected to the light source device 98 and, for example, outputs a predetermined control signal to the light source device 98 based on a user's setting input to emit white light with a predetermined brightness. The colorimetric sensor control unit 104 is connected to the colorimetric sensor 99. For example, the colorimetric sensor control unit 104 sets the wavelength of light received by the colorimetric sensor 99 based on the user's setting input, and the control signal for detecting the amount of light received at the set wavelength is measured. The sensor control unit 104 outputs the colorimetric sensor 99. Accordingly, the interval control unit 10 applies a voltage to the actuator 22 based on the control signal, and drives the wavelength variable interference filter 5. The colorimetric processing unit 105 analyzes the chromaticity of the measurement object 2 from the amount of received light detected by the detector 6.

  The wavelength variable interference filter 5 can easily and accurately control the distance between the first reflective film 17 and the second reflective film 18. Therefore, the color measuring device 97 can accurately measure the color of the measuring object 2.

(Gas detection device)
Next, a light-based system for detecting the presence of a specific substance is introduced as an example of an electronic device. As such a system, for example, a gas detection such as an in-vehicle gas leak detector that detects a specific gas with high sensitivity by adopting a spectroscopic measurement method using an optical module, a photoacoustic rare gas detector for a breath test, etc. An apparatus can be illustrated. An example of such a gas detection device will be described below with reference to the drawings.

  FIG. 14 is a schematic front view showing the configuration of the gas detection device, and FIG. 15 is a block diagram showing the configuration of the control system of the gas detection device. As shown in FIG. 14, a gas detection device 108 as an electronic device includes a sensor chip 109, a suction port 110a, a suction channel 110b, a discharge channel 110c, and a channel 110 including a discharge port 110d and a main body 111. Configured.

  The main body 111 includes a sensor unit cover 112 having an opening through which the flow path 110 can be attached and detached, a discharge unit 113, and a housing 114. The main body 111 further includes a detection device (optical module) including an optical unit 115, a filter 116, a wavelength variable interference filter 5, a light receiving element 117 (detection unit), and the like. Furthermore, the main body 111 includes a control unit 118 (processing unit) that processes the detected signal and controls the detection unit, a power supply unit 119 that supplies power, and the like. Instead of the wavelength tunable interference filter 5, the wavelength tunable interference filters 39, 42, 45, 50, 58, 61, 66 and the optical filter device 80 may be provided. The optical unit 115 includes a light source 120 that emits light, a beam splitter 121, a lens 122, a lens 123, and a lens 124. The beam splitter 121 reflects light incident from the light source 120 to the sensor chip 109 side and transmits light incident from the sensor chip side to the light receiving element 117 side.

  As shown in FIG. 15, the gas detection device 108 is provided with an operation panel 125, a display unit 126, a connection unit 127 for interface with the outside, and a power supply unit 119. When the power supply unit 119 is a secondary battery, a connection unit 128 for charging may be provided. Further, the control unit 118 of the gas detection device 108 includes a signal processing unit 131 configured by a CPU or the like and a light source driver circuit 132 for controlling the light source 120. Further, the control unit 118 includes an interval control unit 10 for controlling the wavelength variable interference filter 5 and a light receiving circuit 133 that receives a signal from the light receiving element 117. The control unit 118 further includes a sensor chip detection circuit 135 that reads a code of the sensor chip 109 and receives a signal from a sensor chip detector 134 that detects the presence or absence of the sensor chip 109. Further, the control unit 118 includes a discharge driver circuit 136 that controls the discharge unit 113.

  Next, the operation of the gas detection device 108 as described above will be described below. A sensor chip detector 134 is provided inside the sensor unit cover 112 above the main body unit 111. The sensor chip detector 134 detects the presence or absence of the sensor chip 109. When the signal processing unit 131 detects the detection signal from the sensor chip detector 134, the signal processing unit 131 determines that the sensor chip 109 is attached. Then, the signal processing unit 131 outputs a display signal for displaying on the display unit 126 that the detection operation can be performed.

  Then, for example, the operation panel 125 is operated by the user, and an instruction signal for starting detection processing is output from the operation panel 125 to the signal processing unit 131. First, the signal processing unit 131 operates the light source 120 by outputting a light source driving instruction signal to the light source driver circuit 132. When the light source 120 is driven, a linearly polarized laser beam having a single wavelength is emitted from the light source 120. The light source 120 includes a temperature sensor and a light amount sensor, and sensor information is output to the signal processing unit 131. When the signal processing unit 131 determines that the light source 120 is stably operating based on the temperature and light quantity input from the light source 120, the signal processing unit 131 controls the discharge driver circuit 136 to operate the discharge unit 113. Thereby, the gas sample containing the target substance (gas molecule) to be detected is guided from the suction port 110a to the suction flow channel 110b, the sensor chip 109, the discharge flow channel 110c, and the discharge port 110d. The suction port 110a is provided with a dust removal filter 110e to remove relatively large dust, a part of water vapor, and the like.

  The sensor chip 109 is a sensor that incorporates a plurality of metal nanostructures and uses localized surface plasmon resonance. In such a sensor chip 109, an enhanced electric field is formed between the metal nanostructures by laser light. When gas molecules enter the enhanced electric field, Raman scattered light and Rayleigh scattered light including molecular vibration information are generated. These Rayleigh scattered light and Raman scattered light enter the filter 116 through the optical unit 115. The Rayleigh scattered light is separated by the filter 116, and the Raman scattered light enters the wavelength variable interference filter 5.

  Then, the signal processing unit 131 outputs a control signal to the interval control unit 10. Thereby, the interval control unit 10 drives the actuator 22 of the wavelength variable interference filter 5 to cause the wavelength variable interference filter 5 to split the Raman scattered light corresponding to the gas molecules to be detected. When the dispersed light is received by the light receiving element 117, a received light signal corresponding to the amount of received light is output to the signal processing unit 131 via the light receiving circuit 133.

  The wavelength variable interference filter 5 can easily and accurately control the distance between the first reflective film 17 and the second reflective film 18. Therefore, the wavelength variable interference filter 5 can accurately extract the target Raman scattered light. The signal processing unit 131 compares the obtained spectrum data of the Raman scattered light corresponding to the gas molecules to be detected with the data stored in the ROM. Then, it is determined whether the gas molecule to be detected is the target gas molecule, and the substance is specified. In addition, the signal processing unit 131 displays the result information on the display unit 126 and outputs the result information from the connection unit 127 to the outside.

  The gas detection device 108 that performs gas detection from the Raman scattered light obtained by separating the Raman scattered light by the wavelength variable interference filter 5 is illustrated. The gas detection device 108 may be used as a gas detection device that detects gas-specific absorbance and identifies the gas type. In this case, the optical module 3 is used as a gas sensor that allows gas to flow into the sensor and detects light absorbed by the gas in incident light. The gas detection device is an electronic device that analyzes and discriminates gas introduced into the sensor by the gas sensor. With this configuration, the gas detection device 108 can detect a gas component using a wavelength variable interference filter.

(Food analyzer)
Moreover, the system for detecting the presence of the specific substance is not limited to the detection of the gas as described above. Examples of the substance component analysis apparatus include a non-invasive measurement apparatus for saccharides by near infrared spectroscopy and a non-invasive measurement apparatus for information on food, living body, minerals, and the like. Hereinafter, a food analyzer will be described as an example of the substance component analyzer.

  FIG. 16 is a block diagram showing the configuration of the food analyzer. As shown in FIG. 16, the food analyzer 139 as an electronic apparatus includes a detector 140 (optical module), a control unit 141, and a display unit 142. The detector 140 includes a light source 145 that emits light, an imaging lens 146 into which light from a measurement object is introduced, and a variable wavelength interference filter 5 that splits the light introduced from the imaging lens 146. Furthermore, the detector 140 includes an imaging unit 147 (detection unit) that detects the dispersed light. Instead of the wavelength tunable interference filter 5, the wavelength tunable interference filters 39, 42, 45, 50, 58, 61, 66 and the optical filter device 80 may be provided. In addition, the control unit 141 includes a light source control unit 148 that performs lighting on / off control of the light source 145 and brightness control at the time of lighting, and an interval control unit 10 that controls the wavelength variable interference filter 5. Furthermore, the control unit 141 includes a detection control unit 149 that controls the imaging unit 147 to acquire a spectral image captured by the imaging unit 147, a signal processing unit 150, and a storage unit 151.

  When the food analyzer 139 is driven, the light source control unit 148 controls the light source 145 so that the measurement object 2 is irradiated with light from the light source 145. Then, the light reflected by the measurement object 2 enters the wavelength variable interference filter 5 through the imaging lens 146. The wavelength variable interference filter 5 is driven by the control of the interval control unit 10. Thereby, the light of the target wavelength can be extracted from the variable wavelength interference filter 5 with high accuracy. Then, the extracted light is imaged by an imaging unit 147 configured by, for example, a CCD camera. The captured light is accumulated in the storage unit 151 as a spectral image. In addition, the signal processing unit 150 controls the interval control unit 10 to change the voltage value applied to the wavelength variable interference filter 5 and acquires a spectral image for each wavelength.

  Then, the signal processing unit 150 performs arithmetic processing on the data of each pixel in each image accumulated in the storage unit 151 and obtains a spectrum at each pixel. In addition, the storage unit 151 stores information related to food components with respect to the spectrum. Based on the information about food stored in the storage unit 151, the signal processing unit 150 analyzes the obtained spectrum data. And the signal processing part 150 calculates | requires the food component contained in the measuring object 2, and each food component content. In addition, the signal processing unit 150 can also calculate food calories and freshness from the obtained food components and content. Furthermore, by analyzing the spectral distribution in the image, the signal processing unit 150 can also extract a portion of the food to be examined whose freshness is reduced. Furthermore, the signal processing unit 150 can also detect foreign matters contained in food. Then, the signal processing unit 150 performs processing for causing the display unit 142 to display information such as the component and content of the food to be examined, the calorie, and the freshness obtained as described above.

  The wavelength variable interference filter 5 can easily and accurately control the distance between the first reflective film 17 and the second reflective film 18. Therefore, the food analyzer 139 can measure the wavelength of the measuring object 2 with high accuracy.

  Further, in addition to the food analyzer 139, it can also be used as a non-invasive measuring device for other information as described above, with a substantially similar configuration. For example, it can be used as a biological analyzer for analyzing biological components such as measurement and analysis of body fluid components such as blood. As such a biological analyzer, for example, the food analyzer 139 can be used as a device for measuring a body fluid component such as blood. In addition, if it is set as the apparatus which detects ethyl alcohol, the food analyzer 139 can be used for the drunk driving prevention apparatus which detects a driver | operator's drinking state. Further, it can also be used as an electronic endoscope system provided with such a biological analyzer. Furthermore, it can also be used as a mineral analyzer for performing component analysis of minerals.

  Furthermore, the electronic apparatus using the optical module 3 can be applied to the following devices. For example, it is possible to transmit data using light of each wavelength by changing the intensity of light of each wavelength over time. In this case, a specific wavelength is provided by the wavelength variable interference filter 5 provided in the optical module 3. The data transmitted by the light of the specific wavelength can be extracted by separating the light of the light and receiving the light by the light receiving unit, and the electronic device including such an optical module for data extraction can extract the light of each wavelength. Optical communication can be performed by processing data.

(Spectral camera)
Moreover, as an electronic device, the optical module 3 can be applied to a spectroscopic camera, a spectroscopic analyzer, or the like that spectrally separates light by the optical module 3 and captures a spectral image. As an example of such a spectroscopic camera, an infrared camera having a built-in variable wavelength interference filter 5 can be cited. FIG. 17 is a schematic perspective view showing the configuration of the spectroscopic camera. As shown in FIG. 17, the spectroscopic camera 154 as an electronic device includes a camera body 155, an imaging lens unit 156, and an imaging unit 157. The camera body 155 is a part that is gripped and operated by a user.

  The imaging lens unit 156 is connected to the camera body 155 and guides incident image light to the imaging unit 157. The imaging lens unit 156 includes an objective lens 158, an imaging lens 159, and a wavelength variable interference filter 5 provided between these lenses. The imaging unit 157 includes a light receiving element, and images the image light guided by the imaging lens unit 156. In the spectroscopic camera 154, the wavelength variable interference filter 5 transmits light having a wavelength to be imaged, and the imaging unit 157 captures a spectral image of light having a desired wavelength. At this time, the wavelength variable interference filter 5 can easily and accurately control the distance between the first reflective film 17 and the second reflective film 18. Therefore, since the variable wavelength interference filter 5 spectrally separates each wavelength with high accuracy, the spectroscopic camera 154 can capture a spectral image of the target wavelength with high accuracy.

  Furthermore, the optical module 3 may be used as a bandpass filter. For example, only light in a narrow band centered on a predetermined wavelength out of light in a predetermined wavelength range emitted by the light emitting element is used by the variable wavelength interference filter 5. It can also be used as an optical laser device for spectroscopic transmission. Further, the optical module 3 may be used as a biometric authentication device. For example, the optical module 3 can be applied to authentication devices such as blood vessels, fingerprints, retinas, and irises using light in the near infrared region or visible region. Furthermore, the optical module 3 can be used for a concentration detection apparatus. In this case, the infrared energy (infrared light) emitted from the substance by the wavelength variable interference filter 5 is spectrally analyzed and the analyte concentration in the sample is measured.

  As described above, the optical module 3 can be applied to any device that splits predetermined light from incident light. And since the optical module 3 can disperse | distribute a some wavelength with the one optical module 3 as mentioned above, the measurement of the spectrum of a some wavelength and the detection with respect to a some component can be implemented accurately. Therefore, compared with the conventional apparatus which takes out a desired wavelength with several devices, size reduction of the optical module 3 and an electronic device can be accelerated | stimulated, for example, it can use suitably as a portable or vehicle-mounted optical device. Note that the present embodiment is not limited to the above-described embodiment, and various changes and improvements can be added by those having ordinary knowledge in the art within the technical idea of the present invention.

  DESCRIPTION OF SYMBOLS 3 ... Optical module 5, 39, 42, 45, 50, 58, 61, 66 ... Variable wavelength interference filter, 10 ... Space | interval control part, 14 ... Fixed board | substrate, 15c ... Movable part, 17 ... 1st reflection film, 18 ... 2nd reflective film, 21a ... Initial interval, 21b ... Operation interval, 23 ... 1st conducting wire, 24 ... 2nd conducting wire, 31 ... Space | interval regulation part, 43d, 44d ... 1st turning point as a turning point, 43e, 44e 2nd turning point as turning point, 46a ... 1st small conducting wire part as small conducting wire part, 46b ... 2nd small conducting wire part as small conducting wire part, 46c ... 3rd small conducting wire part as small conducting wire part, 46d ... 4th small conducting wire part as a small conducting wire part, 51 ... Fixed substrate as 1st board | substrate, 59 ... 1st protective film as a protective film, 60 ... 2nd protective film as a protective film, 80 ... As electronic equipment Optical filter device, 97 ... Colorimetry as electronic equipment Location, 108 ... gas detection device as an electronic device, 139 ... food analyzer as an electronic device, 154 ... spectroscopic camera as an electronic apparatus.

Claims (12)

A fixed substrate;
A movable part disposed to face the fixed substrate;
A first reflective film provided on the fixed substrate that reflects part of incident light and transmits part of the incident light;
A second reflective film provided in the movable part, facing the first reflective film, reflecting a part of incident light and transmitting a part thereof;
A first conductor provided on the fixed substrate;
A second conducting wire that is provided in the movable part and is located at a location facing the first conducting wire;
An interval controller that controls the interval between the first reflective film and the second reflective film by energizing the first conductive wire and the second conductive wire;
An optical module comprising: The optical module according to claim 1,
An interval between the first reflective film and the second reflective film when the first conductive wire and the second conductive wire are not energized is an initial interval,
When energizing the first conducting wire and the second conducting wire and setting the interval when the interval between the first reflecting film and the second reflecting film is stabilized as an operation interval,
The optical module is characterized in that the operation interval is an interval apart from the initial interval. The optical module according to claim 2,
The distance controller shifts the distance between the first reflective film and the second reflective film to the operation distance by switching and acting both repulsive force and attractive force between the first conductive wire and the second conductive wire. An optical module. The optical module according to any one of claims 1 to 3,
The optical module, wherein the first reflective film is a part of the first conductive wire, and the second reflective film is a part of the second conductive wire. It is an optical module as described in any one of Claims 1-4, Comprising:
The optical module, wherein the first conducting wire and the second conducting wire are arranged with turning points. An optical module according to any one of claims 1 to 5,
The optical module, wherein each of the first conductor and the second conductor has a plurality of small conductors connected to the spacing controller, and the spacing controller is energized for each of the small conductors. The optical module according to any one of claims 1 to 6,
An optical module, comprising: an interval restricting portion that is located between the fixed substrate and the movable portion and restricts an interval between the first reflecting film and the second reflecting film. The optical module according to any one of claims 1 to 6,
An optical module comprising a protective film for protecting the first reflective film and the second reflective film. The optical module according to any one of claims 1 to 8,
The optical module, wherein the first reflective film and the first conducting wire are installed on the same plane. The optical module according to any one of claims 1 to 9,
The optical module, wherein the second reflective film and the second conducting wire are installed on the same plane. A fixed substrate;
A movable part disposed to face the fixed substrate;
A first reflective film provided on the fixed substrate that reflects part of incident light and transmits part of the incident light;
A second reflective film provided in the movable part, facing the first reflective film, reflecting a part of incident light and transmitting a part thereof;
A first conductor provided on the fixed substrate;
A second conducting wire that is provided in the movable part and is located at a location facing the first conducting wire;
An interval controller that controls the interval between the first reflective film and the second reflective film by energizing the first conductive wire and the second conductive wire;
An optical module having
An electronic apparatus comprising: a control unit that controls the optical module. A fixed substrate;
A movable part disposed to face the fixed substrate;
A first reflective film provided on the fixed substrate that reflects part of incident light and transmits part of the incident light;
A second reflective film provided in the movable part, facing the first reflective film, reflecting a part of incident light and transmitting a part thereof;
A first conductor provided on the fixed substrate;
A second conducting wire provided in the movable part and located at a location facing the first conducting wire,
The wavelength tunable interference filter according to claim 1, wherein an interval between the first reflective film and the second reflective film is changed by energizing the first conductive wire and the second conductive wire.

Images