JP2015031310A - Inter-motion member structure and work-piece transport device having this structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inter-motion member structure that is suitable for recovering lubricant evaporated under vacuum environment.SOLUTION: An inter-motion member structure B1 of this invention comprises a first member 4; a second member 5 that can be moved relatively in respect to the first member 4; a relative motion mechanism 6 installed between the first member 4 and the second member 5 so as to perform a relative motion of the second member 5 in respect to the first member 4 in a prescribed direction under presence of lubricant 64; seal means 7 arranged at either one of the first member 4 or the second member 5 so as to form a closed space S among the first member 4, the second member 5 and the relative motion mechanism 6; and cooling means 8 arranged in at least one of the first member 4 and the second member 5 so as to cool the lubricant 64 vaporized within the closed space S. With such a configuration as above, it is possible to prevent vaporized lubricant from dispersing into external part and at the same time to elongate a life of the relative motion mechanism by returning vaporized lubricant to the relative motion mechanism.

Description

  The present invention relates to a structure between relative movement members configured to relatively move members in the presence of a lubricant, and a workpiece transfer apparatus including the structure.

  For example, a bearing is interposed between members that move relative to each other such as rotating and reciprocating in order to reduce energy loss due to friction and prevent seizure of the members. In a bearing, a lubricant such as grease is generally used for the purpose of reducing friction and improving durability.

  In the case of lubrication with grease, lubrication is usually performed only with the grease applied at the time of assembly of the bearing. In this case, the grease may evaporate depending on the use condition of the bearing, and if such grease evaporates, there is a risk of causing inconvenience such as seizure in the bearing. For example, in a rolling bearing having an inner ring, an outer ring, and a plurality of rolling elements interposed between the inner ring and the outer ring, lubrication is completed using an air flow generated by rotation of the inner ring. A method has been proposed in which the grease is misted, recovered and reused (see, for example, Patent Document 1).

  On the other hand, as a device having a mechanical structure using a bearing or the like, there is a workpiece transfer device for transferring a workpiece (see, for example, Patent Document 2). The workpiece transfer device is used for transferring a workpiece such as a thin wafer or a glass substrate in the fields of semiconductor manufacturing and liquid crystal substrate manufacturing, for example.

  The workpiece transfer apparatus is installed in, for example, a transfer chamber, and a process chamber for performing a predetermined process on the workpiece is disposed adjacent to the transfer chamber. The transfer chamber and the process chamber are set in, for example, a clean environment or a vacuum environment according to the processing on the workpiece. When the workpiece transfer device is installed in a vacuum environment, since the vapor pressure is low in the vacuum environment, vacuum grease (vacuum lubricant) that is difficult to vaporize is applied to the bearings and the like of the workpiece transfer device. .

  However, in a vacuum environment, evaporation cannot be avoided even with vacuum grease. Under the atmospheric environment, as described above with reference to Patent Document 1, a method has been proposed in which the grease that has been lubricated in the bearing is misted using an air flow and recovered and reused. However, since no air flow is generated in a vacuum environment, the vaporized grease cannot be recovered by the technique disclosed in Patent Document 1, and there is no effective means for returning the vaporized grease.

JP 2006-258157 A JP 2003-188231 A

  The present invention has been conceived under such circumstances, and includes a structure between relative moving members suitable for recovering a vaporized lubricant in a vacuum environment, and such a structure. It is an object to provide a workpiece transfer device.

  In order to solve the above problems, the present invention employs the following technical means.

  The structure between the relative members provided by the first aspect of the present invention includes a first member, a second member movable relative to the first member, and between the first member and the second member. And a relative movement mechanism for moving the second member relative to the first member in a predetermined direction in the presence of a lubricant, and provided in one of the first member and the second member. A sealing means for forming a closed space between the first member, the second member and the relative movement mechanism, and at least one of the first member and the second member; And a cooling means for cooling the lubricant vaporized inside the space.

  In a preferred embodiment, the cooling means includes a Peltier element having a heat absorbing portion that absorbs heat by passing an electric current and a heat generating portion that generates heat.

  In a preferred embodiment, the first member includes a cylindrical portion having an upper end opened and extending in the vertical direction, and the relative motion mechanism includes a plurality of first rolling elements between the outer ring and the inner ring. The second member includes a rotating shaft that is fitted in the inner ring, and the Peltier element has a held configuration, the outer ring includes a rolling bearing that is fitted in the cylindrical portion, , Provided above the relative movement mechanism.

  In a preferred embodiment, the second member is connected to the upper end of the rotating shaft and is positioned higher than the first member, and extends radially outward to a position overlapping at least the outer ring in the vertical direction. The Peltier element is attached to the disk part so that the heat absorption part is exposed downward in the closed space.

  In a preferred embodiment, the Peltier element is disposed so as to surround the rotating shaft.

  In another preferred embodiment, the first member includes a linear rail, the second member includes a slider fitted to the rail so as to be relatively movable, and the relative movement mechanism includes the rail. And a plurality of second rolling elements which are interposed between the sliders and can be brought into sliding contact with each other.

  In a preferred embodiment, the rail extends in a horizontal direction, the slider can reciprocate on the rail, and the Peltier element moves the slider in the closed space. It is attached above the second rolling element on the facing surface.

  In a preferred embodiment, the heat absorbing portion of the Peltier element covers a surface facing the traveling direction.

  The workpiece conveyance device provided by the second aspect of the present invention includes the above-described hand configured to include a structure for holding a workpiece and a relative movement member according to the second aspect of the present invention. And a hand operating means for operating.

  According to such a configuration, the vaporized lubricant can be prevented from diffusing to the outside, and the life of the relative motion mechanism can be extended by returning the vaporized lubricant to the relative motion mechanism.

  Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the accompanying drawings.

It is a side view which shows an example of the workpiece conveyance apparatus provided with the structure between the relative members which concerns on this invention. It is a top view of the workpiece conveyance apparatus shown in FIG. It is a longitudinal cross-sectional view which shows an example of the structure between the relative movement members which concern on this invention. It is principal part sectional drawing in alignment with the IV-IV line of FIG. It is a principal part expanded sectional view for demonstrating the effect | action of the structure between the relative motion members shown in FIG. It is a perspective view which shows the other example of the workpiece conveyance apparatus provided with the structure between the relative members based on this invention. It is a top view of the workpiece conveyance apparatus shown in FIG. It is a side view of the workpiece conveyance apparatus shown in FIG. FIG. 8 is a cross-sectional view of a main part taken along line IX-IX in FIG. 7, showing another example of a structure between relative movement members according to the present invention. It is principal part sectional drawing which follows the XX line of FIG.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

  1 and 2 show an example of a workpiece transfer device having a structure between relative members according to the present invention. The workpiece transfer apparatus A1 of this embodiment includes a cylindrical fixed base 1 whose central axis extends in the vertical direction, an elevating base 2, a lower arm 3 and an upper arm 4 that are horizontally long, and a thin plate shape such as a wafer. And a hand 5 that can place and hold the workpiece W, and is configured to carry a thin plate-like workpiece W such as a wafer.

  The lift base 2 is supported by the fixed base 1 and can be lifted by a lift mechanism (not shown). The lower arm 3 has a pivot shaft supported at the base end so as to be rotatable about the vertical axis O1 with respect to the elevating base 2, and is rotated by a lower arm driving mechanism (not shown). The upper arm 4 is supported by a pivot shaft at the base end so as to be rotatable about the vertical axis O2 with respect to the distal end of the lower arm 3, and is rotated by an upper arm drive mechanism (not shown).

  The hand 5 has a rotation shaft at the base end supported so as to be rotatable about the vertical axis O3 with respect to the tip of the upper arm 4, and is rotated around the vertical axis O3 by a hand drive mechanism (not shown). It is done. At the tip of the hand 5, a work holding portion 51 having a bifurcated fork shape is provided.

  The lower arm driving mechanism, the upper arm driving mechanism, and the hand driving mechanism are, for example, a driving force transmission mechanism using a motor or a belt that is linked to the rotating shafts of the lower arm 3, the upper arm 4, and the hand 5. It is constituted by. The lower arm drive mechanism, the upper arm drive mechanism, and the hand drive mechanism are not illustrated in detail, but may be realized by a structure similar to that described in Japanese Patent Application Laid-Open No. 2003-188231, for example. Can do.

  Although detailed illustration is omitted, the workpiece transfer apparatus A1 is used to transfer the workpiece W between, for example, a load port in which a wafer is accommodated and a process chamber. The workpiece transfer apparatus A1 is disposed in a transport chamber adjacent to both the load port and the process chamber, and the inside of the transport chamber is, for example, a vacuum environment.

  In the workpiece transfer apparatus A1 configured as described above, by appropriately controlling the operations of the lower arm driving mechanism, the upper arm driving mechanism, and the hand driving mechanism, the workpiece W held by the hand 5 is controlled with respect to the load port and the process chamber. Carrying in and out is possible. The lower arm driving mechanism, the upper arm driving mechanism, and the hand driving mechanism constitute hand operating means for operating the hand 5 as desired.

  The structure between the relative movement members according to the present invention can be employed in, for example, a connecting portion between the lower arm 3 and the upper arm 4 and a connecting portion between the upper arm 4 and the hand 5 in the workpiece transfer device A1.

  FIG. 3 shows a schematic configuration in the case where the structure between the relative movement members according to the present invention is employed in the connecting portion between the upper arm 4 and the hand 5.

  The structure B1 between the relative movement members of the present embodiment includes an upper arm 4 (first member), a hand 5 (second member) that is rotatable (relatively movable) with respect to the tip of the upper arm 4, and an upper stage. It comprises a rolling bearing 6 interposed between the arm 4 and the hand 5, a lip seal 7, and a Peltier element 8.

  More specifically, a cylindrical housing 41 (cylindrical portion) having an upper end opened is provided at the tip of the upper arm 4. The housing 41 is a portion into which the rolling bearing 6 and a later-described rotating shaft 52 are inserted. The lower end portion of the housing 41 is sealed by joining the lid 42 and interposing the O-ring 43. The rolling bearing 6 includes an inner ring 61, an outer ring 62, and a plurality of rolling elements 63 held therebetween via a retainer (not shown), and the outer ring 62 is fitted into the housing 41. In the present embodiment, two rolling bearings 6 are attached side by side in the axial direction.

  At the base end of the hand 5, a rotation shaft 52 and a disk portion 53 connected to the upper end of the rotation shaft 52 are provided. The rotating shaft 52 is fitted in the inner ring 61 of the rolling bearing 6. The outer diameter of the rotating shaft 52 is, for example, about 40 to 50 mm in diameter. The disc portion 53 is positioned higher than the upper arm 4 and extends radially outward to a position overlapping the outer ring 62 of the rolling bearing 6 in the vertical direction. Thus, the rolling bearing 6 is interposed between the housing 41 (upper arm 4) and the rotation shaft 52 (hand 5), so that the hand 5 is centered on the vertical axis O3 with respect to the upper arm 4. As shown in FIG.

  Inside the rolling bearing 6, vacuum grease 64 as a lubricant is applied. The vacuum grease 64 is obtained by blending a thickener or an additive with base oil, and one having a low vapor pressure is selectively used.

  The lip seal 7 has an annular shape as a whole, and has a fitting portion 71 and a lip portion 72. The fitting portion 71 is fitted in a mounting groove 531 formed in the disc portion 53. Thereby, the lip seal 7 is fixed to the disc part 53. The lip portion 72 extends substantially downward and is inclined so as to be displaced radially outward as it goes downward. The tip of the lip 72 is in contact with the outer ring 62 of the rolling bearing 6 or the inner peripheral wall of the housing 41. With such a configuration, the lip seal 7 forms an annular closed space S surrounded by the housing 41 (upper arm 4), the disk portion 53 (hand 5), and the rolling bearing 6. Yes.

  The Peltier element 8 is for cooling the vacuum grease vaporized in the closed space S, liquefying it, and returning it to the rolling bearing 6 (relative motion mechanism). The Peltier element 8 is a plate-like semiconductor element that utilizes the Peltier effect that heat is transferred from one metal to the other when a current is passed through a joint between two types of metal, and a heat generating portion that generates heat when the current is passed. 81 and an endothermic part 82 that absorbs heat. The Peltier element 8 is provided above the rolling bearing 6 and is attached to the disk portion 53 on the hand 5 side in this embodiment. More specifically, the heat generating part 81 is attached to the disk part 53 so as to cover the lower surface of the disk part 53, and the heat absorbing part 82 is exposed downward in the closed space S. .

  The Peltier element 8 is arranged in a substantially annular shape so as to surround the rotation shaft 52. Specific arrangement modes of the Peltier elements 8 include a mode in which a plurality of small Peltier elements 8 each having a side of about 10 mm are arranged (see FIG. 4), a mode in which a dedicated Peltier element 8 having an annular shape is used, and the like. .

  A wiring 83 for supplying power is connected to the Peltier element 8. The wiring 83 is connected from the fixed base 1 to the hand 5 via the elevating base 2, the lower arm 3, and the upper arm 4. Although schematically shown in the drawings, the wiring 83 is connected between the fixed base 1 and the lift base 2, between the lift base 2 and the lower arm 3, between the lower arm 3 and the upper arm 4, and the upper arm 4 and For example, a multi-core cable such as a curled cord or a flat cable is formed between the hands 5 so as to correspond to a change in relative position. For example, when the workpiece transfer device A1 is in operation, electric power is always supplied to the Peltier element 8, and the temperature of the heat absorbing portion 82 drops to about 0 ° C.

  Next, the operation of the workpiece transfer device A1 (structure B1 between relative movement members) according to the above-described embodiment will be described.

  When the workpiece transfer apparatus A1 configured as described above operates in a vacuum environment, the periphery of the upper arm 4 and the hand 5 shown in FIG. 3 is also in a vacuum environment. Here, the vacuum grease 64 (oil seal) in the rolling bearing 6 gradually evaporates, but the closed space S is formed by providing the lip seal 7 in an appropriate position, and the vaporized vacuum grease 64 (base oil) is formed. Is prevented from leaking outside. As a result, contamination of the vacuum environment due to diffusion of the evaporated vacuum grease 64 (base oil) can be prevented.

  A Peltier element 8 is provided in the closed space S. For this reason, the vaporized vacuum grease 64 (base oil) is cooled by the Peltier element 8 (heat-absorbing part 82), and aggregates to become liquid again.

  The Peltier element 8 is provided above the rolling bearing 6. For this reason, the vacuum grease 64 (base oil) that has become a liquid by agglomeration flows down into the rolling bearing 6 through the rotating shaft 52 and the surface of the lip seal 7 by its own weight, as shown in FIG. Therefore, the vacuum grease 64 (base oil) once evaporated in a vacuum environment is recovered as a liquid and reused to lubricate the rolling bearing 6 (rolling element 63). As a result, the life of the rolling bearing 6 can be extended.

  The heat absorbing portion 82 of the Peltier element 8 is exposed downward in the closed space S. As a result, the vaporized vacuum grease 64 (base oil) is directly cooled by the heat absorbing portion 82, so that the vacuum grease 64 (base oil) can be efficiently aggregated. Further, since the heat generating portion 81 of the Peltier element 8 is attached so as to cover the lower surface of the disc portion 53, the heat generated in the heat generating portion 81 is efficiently transmitted to the outside via the disc portion 53 (hand 5). Released.

  Since the Peltier element 8 is arranged in a substantially annular shape so as to surround the rotation shaft 52, the entire closed space S can be cooled uniformly. This is suitable for efficiently agglomerating the vaporized vacuum grease 64 (base oil).

  6 to 8 show other examples of the workpiece transfer apparatus having the structure between the relative members according to the present invention. In FIG. 6 and subsequent figures, the same or similar elements as those in the above embodiment are denoted by the same reference numerals as those in the above embodiment, and description thereof will be omitted as appropriate.

  The workpiece transfer device A2 according to the present embodiment includes a fixed base 1, a turning base 20 supported by the fixed base 1, a guide body 30 supported by the turning base 20, and an illustration accommodated in the guide body 30. A belt drive device that is not used, and two hands 5A and 5B that are individually supported by the guide body 30. The hands 5A and 5B are for holding a thin plate-like workpiece W such as a substrate for a liquid crystal display panel in a horizontal posture, and the workpiece transfer device A2 is configured to transfer the thin plate-like workpiece W. It has been done.

  The swivel base 20 can be moved up and down with respect to the fixed base 1 and is supported so as to be rotatable around a vertical swivel axis Os. Inside the fixed base 1, a lifting motor and a turning motor (not shown) are provided, and the turning base 20 is moved up and down or turned by driving these motors. The guide body 30 has a long rectangular box shape in plan view. Inside the guide body 30, rails for supporting the hands 5A and 5B separately are provided. The hands 5A and 5B are slidable along the horizontal linear movement stroke GL without being interfered with each other while being supported by the rail.

  As shown in FIGS. 6 to 8, the hands 5 </ b> A and 5 </ b> B are integrally formed with a plurality of hawk-shaped workpiece holding portions 51 a and 51 b extending in the longitudinal direction of the guide body 30. The thin plate-like workpiece W is placed and held on 51a and 51b. In FIG. 8, unlike FIGS. 6 and 7, both hands 5 </ b> A and 5 </ b> B are shown above the fixed base 1.

  The belt driving device is for sliding the hands 5A and 5B on the rail, and is provided in pairs corresponding to the hands 5A and 5B. Inside the fixed base 1, there are provided hand motors (not shown) for driving the hands 5 </ b> A and 5 </ b> B, respectively, so as to straddle the fixed base 1, the turning base 20, and the guide body 30. A driving force transmission mechanism for transmitting the driving force of the hand motor to the belt driving device is provided. Although detailed illustration and explanation of the support structure of the turning base 20, the support structure of the hands 5A and 5B, and the driving force transmission mechanism to the belt driving device is omitted, for example, the structure described in Japanese Patent Application Laid-Open No. 2008-272847. It can be realized by the same structure as.

  Although a detailed illustration is omitted, the workpiece transfer device A2 is used, for example, to transfer the workpiece W between the load port and the process chamber. The workpiece transfer device A2 is disposed in a transport chamber adjacent to both the load port and the process chamber, and the inside of the transport chamber is, for example, a vacuum environment.

  The structure between the relative members according to the present invention can be employed, for example, in the support structure of the hand 5A (5B) in the workpiece transfer device A2.

  FIG. 9 and FIG. 10 show a schematic configuration when the structure between the relative movement members according to the present invention is adopted for the support structure of the hand 5A (5B) by the rail.

  The structure B2 between the relative moving members of the present embodiment includes a linear rail 400 (first member), a slider 500 (second member), and a plurality of rolling elements interposed between the rail 400 and the slider 500. 600 (represented by a dotted line in FIG. 10), a cover 700 (represented by a two-dot chain line in FIGS. 9 and 10), and a Peltier element 8.

  The rail 400 is supported by the guide body 30 and extends horizontally along the longitudinal direction of the guide body 30. The slider 500 is fitted to the rail 400 so as to be relatively movable. The rail 400 and the slider 500 each have a rolling groove (not shown) that faces each other and forms a passage for the plurality of rolling elements 600 to circulate. A vacuum grease (not shown) as a lubricant is applied to the rolling element 600 or its passage. The rail 400, the slider 500, and the plurality of rolling elements 600 are configured as so-called linear guides. The slider 500 can reciprocate linearly on the rail 400, and when the slider 500 moves along the rail 400, the plurality of rolling elements 600 can come into sliding contact with the rail 400 and the slider 500.

  Although not shown in the drawings, the slider 500 is connected to a support arm for supporting the hand 5A (5B). Each hand 5A (5B) is supported by a pair of linear guides (rail 400 and slider 500) that are spaced apart from each other in the short direction of the guide body 30, and can slide along a horizontal linear movement stroke GL. It has become.

  The cover 700 is attached to the slider 500 and covers a part of the slider 500 and the rail 400. The cover 700 has a bellows shape that can expand and contract in the moving direction of the slider 500, and moves together with the slider 500. The cover 700 forms a closed space S surrounded by the rail 400, the slider 500, and the plurality of rolling elements 600.

  As clearly shown in FIG. 9, in this embodiment, the Peltier element 8 is attached to the surfaces 501 and 502 facing the traveling direction of the slider 500. The Peltier element 8 is attached above the rolling element 600. In the present embodiment, the Peltier element 8 is provided at two locations corresponding to the arrangement of the rolling elements 600 on each of the two surfaces 501 and 502 facing the traveling direction of the slider 500. The Peltier element 8 is also attached so that the heat absorbing portion 82 covers the surfaces 501 and 502 facing the traveling direction of the slider 500. The wiring 83 for supplying electric power to the Peltier element 8 is configured by, for example, a cable bear (registered trademark) so as to correspond to a change in the relative position between the rail 400 and the slider 500.

  When the workpiece transfer apparatus A2 configured as described above operates in a vacuum environment, the periphery of the rail 400 and the slider 500 shown in FIGS. 9 and 10 is also in a vacuum environment. Here, although the vacuum grease (oil seal) applied to the rolling element 600 gradually evaporates, a closed space S is formed by providing the cover 700 in an appropriate position, and the vaporized vacuum grease (base oil) is generated. Leakage to the outside is prevented. As a result, it is possible to prevent contamination of the vacuum environment due to diffusion of the evaporated vacuum grease (base oil).

  A Peltier element 8 is provided in the closed space S. For this reason, the vaporized vacuum grease (base oil) is cooled by the Peltier element 8 (heat-absorbing part 82), aggregates and becomes liquid again.

  The Peltier element 8 is provided above the rolling element 600. For this reason, the vacuum grease (base oil) that has become a liquid by agglomeration returns to the periphery of the rolling element 600 through the surface 501 (502) facing the traveling direction of the slider 500 due to its own weight. Therefore, the vacuum grease (base oil) once evaporated in a vacuum environment is recovered as a liquid and reused to lubricate the rolling element 600. As a result, the life of the linear guide including the rolling element 600 can be extended.

  In the present embodiment, the Peltier element 8 is attached so that the heat absorbing portion 82 covers the surfaces 501 and 502 facing the traveling direction of the slider 500. According to such a configuration, on the surfaces 501 and 502, a relatively wide range around the mounting location of the Peltier element 8 is cooled. When the slider 500 moves along the rail 400, the vaporized vacuum grease (base oil) collides with the surface 501 (502) facing the traveling direction, and the vacuum grease (base oil) is cooled. Such a configuration is suitable for efficiently aggregating the vaporized vacuum grease (base oil).

  Although the embodiment of the present invention has been described above, the technical scope of the present invention is not limited to the above-described embodiment. Various changes can be made to the structure between the relative movement members according to the present invention and the specific configuration of each part of the work conveying apparatus having the structure without departing from the spirit of the invention.

  In the above embodiment, the case where the Peltier element 8 (cooling means) is provided in the closed space S has been described as an example. However, the cooling means is not necessarily provided in the closed space S. For example, in the structure B2 (see FIGS. 9 and 10) between the relative moving members of the above embodiment, the Peltier element 8 is attached to the slider 500 side, but instead, the Peltier element 8 is connected to the rail 400 side. You may attach to.

A1, A2 Work conveying devices B1, B2 Structure S between relative moving members W Closed space W Work 1 Fixed base 2 Lifting base 20 Swing base 3 Lower arm 30 Guide body 4 Upper arm (first member)
41 Housing (cylindrical part)
42 Lid 43 O-ring 400 Rail (first member)
5 Hand (second member)
5A, 5B Hand 51, 51a, 51b Work holding part 52 Rotating shaft 53 Disk part 500 Slider (second member)
6 Rolling bearing (relative motion mechanism)
61 Inner ring 62 Outer ring 63 Rolling element (first rolling element)
64 Vacuum grease (lubricant)
600 Rolling elements (second rolling elements)
7 Lip seal (sealing means)
71 Fitting part 72 Lip part 8 Peltier element (cooling means)
81 Heat generation part 82 Heat absorption part 83 Wiring

Claims (8)

A first member;
A second member movable relative to the first member;
A relative movement mechanism interposed between the first member and the second member for moving the second member relative to the first member in a predetermined direction in the presence of a lubricant;
Sealing means provided on one of the first member and the second member, and for forming a closed space between the first member, the second member, and the relative movement mechanism;
A cooling means provided on at least one of the first member and the second member for cooling the lubricant vaporized in the closed space. Construction.   The structure between the relative movement members according to claim 1, wherein the cooling means includes a Peltier element having a heat absorption part that absorbs heat by flowing current and a heat generation part that generates heat. The first member includes a cylindrical portion having an upper end opened and extending in the vertical direction,
The relative movement mechanism has a configuration in which a plurality of first rolling elements are held between an outer ring and an inner ring, and includes a rolling bearing in which the outer ring is fitted into the cylindrical portion,
The second member includes a rotation shaft fitted into the inner ring,
The structure between relative movement members according to claim 2, wherein the Peltier element is provided above the relative movement mechanism. The second member is connected to the upper end of the rotation shaft, and is positioned higher than the first member, and has a disc portion extending radially outward to a position overlapping at least the outer ring in the vertical direction,
The structure between the relative movement members according to claim 3, wherein the Peltier element is attached to the disk portion so that the heat absorbing portion is exposed downwardly in the closed space.   The structure between the relative motion members according to claim 3 or 4, wherein the Peltier element is disposed so as to surround the rotation shaft. The first member includes a linear rail,
The second member includes a slider fitted to the rail so as to be relatively movable,
The structure between the relative motion members according to claim 2, wherein the relative motion mechanism includes a plurality of second rolling elements that are interposed between the rail and the slider and each of which can be slidably contacted. The rail extends in the horizontal direction,
The slider can reciprocate on the rail,
The structure between the relative motion members according to claim 6, wherein the Peltier element is attached higher than the second rolling element on a surface facing the moving direction of the slider in the closed space.   A hand for holding a workpiece, and a hand operating means for operating the hand, comprising the structure between the relative movement members according to any one of claims 1 to 7. A workpiece transfer device.

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