JP2015026688A5 - - Google Patents

Download PDF

Info

Publication number
JP2015026688A5
JP2015026688A5 JP2013154703A JP2013154703A JP2015026688A5 JP 2015026688 A5 JP2015026688 A5 JP 2015026688A5 JP 2013154703 A JP2013154703 A JP 2013154703A JP 2013154703 A JP2013154703 A JP 2013154703A JP 2015026688 A5 JP2015026688 A5 JP 2015026688A5
Authority
JP
Japan
Prior art keywords
plate
holding pin
wafer
rotating plate
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013154703A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015026688A (ja
JP6090035B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013154703A priority Critical patent/JP6090035B2/ja
Priority claimed from JP2013154703A external-priority patent/JP6090035B2/ja
Publication of JP2015026688A publication Critical patent/JP2015026688A/ja
Publication of JP2015026688A5 publication Critical patent/JP2015026688A5/ja
Application granted granted Critical
Publication of JP6090035B2 publication Critical patent/JP6090035B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013154703A 2013-07-25 2013-07-25 液処理装置 Active JP6090035B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013154703A JP6090035B2 (ja) 2013-07-25 2013-07-25 液処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013154703A JP6090035B2 (ja) 2013-07-25 2013-07-25 液処理装置

Publications (3)

Publication Number Publication Date
JP2015026688A JP2015026688A (ja) 2015-02-05
JP2015026688A5 true JP2015026688A5 (de) 2015-12-24
JP6090035B2 JP6090035B2 (ja) 2017-03-08

Family

ID=52491127

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013154703A Active JP6090035B2 (ja) 2013-07-25 2013-07-25 液処理装置

Country Status (1)

Country Link
JP (1) JP6090035B2 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7021877B2 (ja) * 2017-08-08 2022-02-17 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置、位置合わせ装置および位置合わせ方法
JP6908474B2 (ja) * 2017-09-06 2021-07-28 株式会社ディスコ ウエーハ洗浄装置
KR102685189B1 (ko) * 2022-08-23 2024-07-16 엘에스이 주식회사 기판 세정 장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3544747B2 (ja) * 1995-05-15 2004-07-21 大日本スクリーン製造株式会社 回転式基板処理装置
US5853483A (en) * 1995-05-02 1998-12-29 Dainippon Screen Mfg. Co., Ltd. Substrate spin treating method and apparatus
JP3640373B2 (ja) * 1999-08-27 2005-04-20 大日本スクリーン製造株式会社 基板載置台
JP2002319563A (ja) * 2001-04-20 2002-10-31 Tokyo Electron Ltd 基板処理装置及び基板処理方法
JP4439464B2 (ja) * 2005-12-06 2010-03-24 東京エレクトロン株式会社 基板搬送方法及び基板搬送装置
JP2009200063A (ja) * 2006-05-22 2009-09-03 Tokyo Electron Ltd 基板の変形検出機構，処理システム，基板の変形検出方法及び記録媒体
JP5009254B2 (ja) * 2008-08-14 2012-08-22 株式会社ディスコ 樹脂被覆装置
US9082802B2 (en) * 2011-11-28 2015-07-14 Macronix International Co., Ltd. Wafer centering hardware design and process

Similar Documents

Publication Publication Date Title
JP2014053333A5 (de)
JP2016036005A5 (de)
JP2016520438A5 (de)
MY176791A (en) Cleaning device and roll cleaning member
JP2012522385A5 (de)
JP2015084093A5 (ja) 表示装置
JP2014237545A5 (de)
JP2013118279A5 (ja) スピン処理装置
JP2014212686A5 (de)
JP2017177238A5 (de)
JP2016220548A5 (de)
JP2015073016A5 (de)
JP2015184005A5 (de)
JP2015026688A5 (de)
TWD159673S (zh) 基板處理裝置用廻轉器
EP2979822A3 (de) Roboter
JP2016144999A5 (de)
JP2015018795A5 (de)
JP2012256419A5 (de)
JP2015014597A5 (de)
JP2016051567A5 (de)
JP2015063856A5 (de)
TW201614762A (en) Rotation-restricting device and substrate-transferring device comprising the same
JP2011029241A5 (ja) 反転装置および基板貼り合わせ装置
JP2013008068A5 (de)