JP2015020323A5 - - Google Patents

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Publication number
JP2015020323A5
JP2015020323A5 JP2013149342A JP2013149342A JP2015020323A5 JP 2015020323 A5 JP2015020323 A5 JP 2015020323A5 JP 2013149342 A JP2013149342 A JP 2013149342A JP 2013149342 A JP2013149342 A JP 2013149342A JP 2015020323 A5 JP2015020323 A5 JP 2015020323A5
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JP
Japan
Prior art keywords
recording head
cleaning
rotation center
spinner table
held
Prior art date
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Granted
Application number
JP2013149342A
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English (en)
Japanese (ja)
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JP2015020323A (ja
JP6129005B2 (ja
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Priority to JP2013149342A priority Critical patent/JP6129005B2/ja
Priority claimed from JP2013149342A external-priority patent/JP6129005B2/ja
Publication of JP2015020323A publication Critical patent/JP2015020323A/ja
Publication of JP2015020323A5 publication Critical patent/JP2015020323A5/ja
Application granted granted Critical
Publication of JP6129005B2 publication Critical patent/JP6129005B2/ja
Active legal-status Critical Current
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JP2013149342A 2013-07-18 2013-07-18 記録ヘッド用基板の洗浄方法 Active JP6129005B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2013149342A JP6129005B2 (ja) 2013-07-18 2013-07-18 記録ヘッド用基板の洗浄方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013149342A JP6129005B2 (ja) 2013-07-18 2013-07-18 記録ヘッド用基板の洗浄方法

Publications (3)

Publication Number Publication Date
JP2015020323A JP2015020323A (ja) 2015-02-02
JP2015020323A5 true JP2015020323A5 (https=) 2016-07-28
JP6129005B2 JP6129005B2 (ja) 2017-05-17

Family

ID=52485232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013149342A Active JP6129005B2 (ja) 2013-07-18 2013-07-18 記録ヘッド用基板の洗浄方法

Country Status (1)

Country Link
JP (1) JP6129005B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7146572B2 (ja) * 2018-02-23 2022-10-04 キヤノン株式会社 基板の成膜方法、及び液体吐出ヘッドの製造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10308374A (ja) * 1997-03-06 1998-11-17 Ebara Corp 洗浄方法及び洗浄装置
JPH11233473A (ja) * 1998-02-09 1999-08-27 Hitachi Ltd 半導体洗浄装置及び方法
JP2003031536A (ja) * 2001-07-12 2003-01-31 Nec Corp ウエハの洗浄方法

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