JP2014235169A - 拡張レンジ閉ループ加速度計 - Google Patents

拡張レンジ閉ループ加速度計 Download PDF

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Publication number
JP2014235169A
JP2014235169A JP2014112347A JP2014112347A JP2014235169A JP 2014235169 A JP2014235169 A JP 2014235169A JP 2014112347 A JP2014112347 A JP 2014112347A JP 2014112347 A JP2014112347 A JP 2014112347A JP 2014235169 A JP2014235169 A JP 2014235169A
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Japan
Prior art keywords
proof mass
acceleration value
feedback signal
determined
closed loop
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Ceased
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JP2014112347A
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English (en)
Japanese (ja)
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JP2014235169A5 (enExample
Inventor
ジェンス・ヘンドリクソン
Henrickson Jens
ドニー・ロジョ
Donny Rojo
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Honeywell International Inc
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Honeywell International Inc
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Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2014235169A publication Critical patent/JP2014235169A/ja
Publication of JP2014235169A5 publication Critical patent/JP2014235169A5/ja
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
JP2014112347A 2013-05-31 2014-05-30 拡張レンジ閉ループ加速度計 Ceased JP2014235169A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/907,042 US9383384B2 (en) 2013-05-31 2013-05-31 Extended-range closed-loop accelerometer
US13/907,042 2013-05-31

Publications (2)

Publication Number Publication Date
JP2014235169A true JP2014235169A (ja) 2014-12-15
JP2014235169A5 JP2014235169A5 (enExample) 2017-07-13

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Family Applications (1)

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JP2014112347A Ceased JP2014235169A (ja) 2013-05-31 2014-05-30 拡張レンジ閉ループ加速度計

Country Status (3)

Country Link
US (1) US9383384B2 (enExample)
EP (1) EP2808684B1 (enExample)
JP (1) JP2014235169A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017110272A1 (ja) * 2015-12-25 2017-06-29 株式会社日立製作所 加速度センサ、受振器および地震探査システム
JP2018087829A (ja) * 2018-03-01 2018-06-07 株式会社日立製作所 加速度センサ

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6358913B2 (ja) * 2014-09-30 2018-07-18 株式会社日立製作所 加速度センサ
US20170364131A1 (en) * 2016-06-20 2017-12-21 Telefonaktiebolaget Lm Ericsson (Publ) System and method to enhance a feedback loop of a power converter
US10816568B2 (en) 2017-12-26 2020-10-27 Physical Logic Ltd. Closed loop accelerometer

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US20090282916A1 (en) * 2008-05-16 2009-11-19 Rosemount Aerospace Inc. System and Method for Providing High-Range Capability with Closed-Loop Inertial Sensors
JP2010517014A (ja) * 2007-01-18 2010-05-20 フリースケール セミコンダクター インコーポレイテッド 差動容量型センサとその製造方法
JP2010536036A (ja) * 2007-08-03 2010-11-25 フリースケール セミコンダクター インコーポレイテッド 対称型差分容量センサおよびその製造方法

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FR2789172B1 (fr) * 1999-02-02 2001-04-13 Sextant Avionique Appareil a gyrometres et accelerometres pour la determination des attitudes d'un aerodyne
JP4327395B2 (ja) * 1999-08-31 2009-09-09 アナログ デバイセス インコーポレーテッド センサおよび微細加工された装置
US6595056B2 (en) * 2001-02-07 2003-07-22 Litton Systems, Inc Micromachined silicon gyro using tuned accelerometer
JP3591497B2 (ja) * 2001-08-16 2004-11-17 ソニー株式会社 強誘電体型不揮発性半導体メモリ
US20030150268A1 (en) * 2002-02-08 2003-08-14 Ball Semiconductor, Inc. System and method for reducing electric discharge breakdown in electrostatically levitated MEMS devices
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US7146856B2 (en) * 2004-06-07 2006-12-12 Honeywell International, Inc. Dynamically balanced capacitive pick-off accelerometer
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JP2010536036A (ja) * 2007-08-03 2010-11-25 フリースケール セミコンダクター インコーポレイテッド 対称型差分容量センサおよびその製造方法
US20090282916A1 (en) * 2008-05-16 2009-11-19 Rosemount Aerospace Inc. System and Method for Providing High-Range Capability with Closed-Loop Inertial Sensors

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017110272A1 (ja) * 2015-12-25 2017-06-29 株式会社日立製作所 加速度センサ、受振器および地震探査システム
JP2017116474A (ja) * 2015-12-25 2017-06-29 株式会社日立製作所 加速度センサ、受振器および地震探査システム
US10989733B2 (en) 2015-12-25 2021-04-27 Hitachi, Ltd. Acceleration sensor, geophone, and seismic prospecting system
JP2018087829A (ja) * 2018-03-01 2018-06-07 株式会社日立製作所 加速度センサ

Also Published As

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EP2808684B1 (en) 2015-07-15
US9383384B2 (en) 2016-07-05
EP2808684A1 (en) 2014-12-03
US20140352434A1 (en) 2014-12-04

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