JP2014199461A5 - - Google Patents

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Publication number
JP2014199461A5
JP2014199461A5 JP2014129379A JP2014129379A JP2014199461A5 JP 2014199461 A5 JP2014199461 A5 JP 2014199461A5 JP 2014129379 A JP2014129379 A JP 2014129379A JP 2014129379 A JP2014129379 A JP 2014129379A JP 2014199461 A5 JP2014199461 A5 JP 2014199461A5
Authority
JP
Japan
Prior art keywords
image
plane
objective
intermediate image
objective part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2014129379A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014199461A (ja
Filing date
Publication date
Priority claimed from US11/035,103 external-priority patent/US7385756B2/en
Application filed filed Critical
Publication of JP2014199461A publication Critical patent/JP2014199461A/ja
Publication of JP2014199461A5 publication Critical patent/JP2014199461A5/ja
Withdrawn legal-status Critical Current

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JP2014129379A 2004-07-14 2014-06-24 カタディオプトリック投影対物系 Withdrawn JP2014199461A (ja)

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US58750404P 2004-07-14 2004-07-14
US60/587,504 2004-07-14
US59177504P 2004-07-27 2004-07-27
US60/591,775 2004-07-27
US61282304P 2004-09-24 2004-09-24
US60/612,823 2004-09-24
US61767404P 2004-10-13 2004-10-13
US60/617,674 2004-10-13
US11/035,103 US7385756B2 (en) 2004-01-14 2005-01-14 Catadioptric projection objective
US11/035,103 2005-01-14
US65495005P 2005-02-23 2005-02-23
US60/654,950 2005-02-23

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012023476A Division JP5600128B2 (ja) 2004-07-14 2012-01-19 カタディオプトリック投影対物系

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2015028386A Division JP2015121815A (ja) 2004-07-14 2015-02-17 カタディオプトリック投影対物系
JP2015195718A Division JP2016021076A (ja) 2004-07-14 2015-10-01 カタディオプトリック投影対物系

Publications (2)

Publication Number Publication Date
JP2014199461A JP2014199461A (ja) 2014-10-23
JP2014199461A5 true JP2014199461A5 (enrdf_load_stackoverflow) 2014-12-18

Family

ID=46494126

Family Applications (6)

Application Number Title Priority Date Filing Date
JP2012023476A Expired - Fee Related JP5600128B2 (ja) 2004-07-14 2012-01-19 カタディオプトリック投影対物系
JP2013243793A Withdrawn JP2014059579A (ja) 2004-07-14 2013-11-26 カタディオプトリック投影対物系
JP2014129379A Withdrawn JP2014199461A (ja) 2004-07-14 2014-06-24 カタディオプトリック投影対物系
JP2015028386A Withdrawn JP2015121815A (ja) 2004-07-14 2015-02-17 カタディオプトリック投影対物系
JP2015195718A Withdrawn JP2016021076A (ja) 2004-07-14 2015-10-01 カタディオプトリック投影対物系
JP2016171601A Withdrawn JP2016224460A (ja) 2004-07-14 2016-09-02 カタディオプトリック投影対物系

Family Applications Before (2)

Application Number Title Priority Date Filing Date
JP2012023476A Expired - Fee Related JP5600128B2 (ja) 2004-07-14 2012-01-19 カタディオプトリック投影対物系
JP2013243793A Withdrawn JP2014059579A (ja) 2004-07-14 2013-11-26 カタディオプトリック投影対物系

Family Applications After (3)

Application Number Title Priority Date Filing Date
JP2015028386A Withdrawn JP2015121815A (ja) 2004-07-14 2015-02-17 カタディオプトリック投影対物系
JP2015195718A Withdrawn JP2016021076A (ja) 2004-07-14 2015-10-01 カタディオプトリック投影対物系
JP2016171601A Withdrawn JP2016224460A (ja) 2004-07-14 2016-09-02 カタディオプトリック投影対物系

Country Status (1)

Country Link
JP (6) JP5600128B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5600128B2 (ja) * 2004-07-14 2014-10-01 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系
EP3654083B1 (en) 2017-07-10 2024-10-09 Sony Group Corporation Image display device and projection optical system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000058436A (ja) * 1998-08-11 2000-02-25 Nikon Corp 投影露光装置及び露光方法
US6600608B1 (en) * 1999-11-05 2003-07-29 Carl-Zeiss-Stiftung Catadioptric objective comprising two intermediate images
JP2005233979A (ja) * 2000-02-09 2005-09-02 Nikon Corp 反射屈折光学系
JP4245286B2 (ja) * 2000-10-23 2009-03-25 株式会社ニコン 反射屈折光学系および該光学系を備えた露光装置
JP4292497B2 (ja) * 2002-04-17 2009-07-08 株式会社ニコン 投影光学系、露光装置および露光方法
US7362508B2 (en) * 2002-08-23 2008-04-22 Nikon Corporation Projection optical system and method for photolithography and exposure apparatus and method using same
KR101383984B1 (ko) * 2003-05-06 2014-04-10 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
JP5600128B2 (ja) * 2004-07-14 2014-10-01 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系

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