JP5600128B2 - カタディオプトリック投影対物系 - Google Patents

カタディオプトリック投影対物系 Download PDF

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Publication number
JP5600128B2
JP5600128B2 JP2012023476A JP2012023476A JP5600128B2 JP 5600128 B2 JP5600128 B2 JP 5600128B2 JP 2012023476 A JP2012023476 A JP 2012023476A JP 2012023476 A JP2012023476 A JP 2012023476A JP 5600128 B2 JP5600128 B2 JP 5600128B2
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JP
Japan
Prior art keywords
objective
image
intermediate image
plane
objective part
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP2012023476A
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English (en)
Japanese (ja)
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JP2012108540A (ja
Inventor
シェイファー デイヴィッド
ウルリッヒ ヴィルヘルム
ドドック アウレリアン
フォン・ビュナウ ルドルフ
マン ハンス・ユルゲン
エップル アレキサンダー
ベーデル スザンネ
ズィンガー ヴォルフガング
Original Assignee
カール・ツァイス・エスエムティー・ゲーエムベーハー
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Priority claimed from US11/035,103 external-priority patent/US7385756B2/en
Application filed by カール・ツァイス・エスエムティー・ゲーエムベーハー filed Critical カール・ツァイス・エスエムティー・ゲーエムベーハー
Publication of JP2012108540A publication Critical patent/JP2012108540A/ja
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Publication of JP5600128B2 publication Critical patent/JP5600128B2/ja
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  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2012023476A 2004-07-14 2012-01-19 カタディオプトリック投影対物系 Expired - Fee Related JP5600128B2 (ja)

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US58750404P 2004-07-14 2004-07-14
US60/587,504 2004-07-14
US59177504P 2004-07-27 2004-07-27
US60/591,775 2004-07-27
US61282304P 2004-09-24 2004-09-24
US60/612,823 2004-09-24
US61767404P 2004-10-13 2004-10-13
US60/617,674 2004-10-13
US11/035,103 US7385756B2 (en) 2004-01-14 2005-01-14 Catadioptric projection objective
US11/035,103 2005-01-14
US65495005P 2005-02-23 2005-02-23
US60/654,950 2005-02-23

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007520725A Division JP4954067B2 (ja) 2004-07-14 2005-07-08 カタディオプトリック投影対物レンズ

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2013243793A Division JP2014059579A (ja) 2004-07-14 2013-11-26 カタディオプトリック投影対物系
JP2014129379A Division JP2014199461A (ja) 2004-07-14 2014-06-24 カタディオプトリック投影対物系

Publications (2)

Publication Number Publication Date
JP2012108540A JP2012108540A (ja) 2012-06-07
JP5600128B2 true JP5600128B2 (ja) 2014-10-01

Family

ID=46494126

Family Applications (6)

Application Number Title Priority Date Filing Date
JP2012023476A Expired - Fee Related JP5600128B2 (ja) 2004-07-14 2012-01-19 カタディオプトリック投影対物系
JP2013243793A Withdrawn JP2014059579A (ja) 2004-07-14 2013-11-26 カタディオプトリック投影対物系
JP2014129379A Withdrawn JP2014199461A (ja) 2004-07-14 2014-06-24 カタディオプトリック投影対物系
JP2015028386A Withdrawn JP2015121815A (ja) 2004-07-14 2015-02-17 カタディオプトリック投影対物系
JP2015195718A Withdrawn JP2016021076A (ja) 2004-07-14 2015-10-01 カタディオプトリック投影対物系
JP2016171601A Withdrawn JP2016224460A (ja) 2004-07-14 2016-09-02 カタディオプトリック投影対物系

Family Applications After (5)

Application Number Title Priority Date Filing Date
JP2013243793A Withdrawn JP2014059579A (ja) 2004-07-14 2013-11-26 カタディオプトリック投影対物系
JP2014129379A Withdrawn JP2014199461A (ja) 2004-07-14 2014-06-24 カタディオプトリック投影対物系
JP2015028386A Withdrawn JP2015121815A (ja) 2004-07-14 2015-02-17 カタディオプトリック投影対物系
JP2015195718A Withdrawn JP2016021076A (ja) 2004-07-14 2015-10-01 カタディオプトリック投影対物系
JP2016171601A Withdrawn JP2016224460A (ja) 2004-07-14 2016-09-02 カタディオプトリック投影対物系

Country Status (1)

Country Link
JP (6) JP5600128B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014199461A (ja) * 2004-07-14 2014-10-23 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3654083B1 (en) 2017-07-10 2024-10-09 Sony Group Corporation Image display device and projection optical system

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000058436A (ja) * 1998-08-11 2000-02-25 Nikon Corp 投影露光装置及び露光方法
US6600608B1 (en) * 1999-11-05 2003-07-29 Carl-Zeiss-Stiftung Catadioptric objective comprising two intermediate images
JP2005233979A (ja) * 2000-02-09 2005-09-02 Nikon Corp 反射屈折光学系
JP4245286B2 (ja) * 2000-10-23 2009-03-25 株式会社ニコン 反射屈折光学系および該光学系を備えた露光装置
JP4292497B2 (ja) * 2002-04-17 2009-07-08 株式会社ニコン 投影光学系、露光装置および露光方法
US7362508B2 (en) * 2002-08-23 2008-04-22 Nikon Corporation Projection optical system and method for photolithography and exposure apparatus and method using same
KR101383984B1 (ko) * 2003-05-06 2014-04-10 가부시키가이샤 니콘 투영 광학계, 노광 장치 및 노광 방법
JP5600128B2 (ja) * 2004-07-14 2014-10-01 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014199461A (ja) * 2004-07-14 2014-10-23 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系
JP2015121815A (ja) * 2004-07-14 2015-07-02 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系
JP2016021076A (ja) * 2004-07-14 2016-02-04 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系
JP2016224460A (ja) * 2004-07-14 2016-12-28 カール・ツァイス・エスエムティー・ゲーエムベーハー カタディオプトリック投影対物系

Also Published As

Publication number Publication date
JP2016021076A (ja) 2016-02-04
JP2012108540A (ja) 2012-06-07
JP2016224460A (ja) 2016-12-28
JP2015121815A (ja) 2015-07-02
JP2014059579A (ja) 2014-04-03
JP2014199461A (ja) 2014-10-23

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